FR1476514A - Source d'ions - Google Patents
Source d'ionsInfo
- Publication number
- FR1476514A FR1476514A FR991423A FR991423A FR1476514A FR 1476514 A FR1476514 A FR 1476514A FR 991423 A FR991423 A FR 991423A FR 991423 A FR991423 A FR 991423A FR 1476514 A FR1476514 A FR 1476514A
- Authority
- FR
- France
- Prior art keywords
- ion source
- ion
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/022—Details
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Plasma Technology (AREA)
- Particle Accelerators (AREA)
- Catalysts (AREA)
- Electrostatic Spraying Apparatus (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (10)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR991423A FR1476514A (fr) | 1964-10-14 | 1964-10-14 | Source d'ions |
| US491699A US3376469A (en) | 1964-10-14 | 1965-09-30 | Positive ion-source having electron retaining means |
| BE670351D BE670351A (fr) | 1964-10-14 | 1965-09-30 | |
| DE19651489777 DE1489777B1 (de) | 1964-10-14 | 1965-10-01 | Vorrichtung zur Erzeugung eines Strahlenbuendels positiv geladener Ionen hoher Energie |
| IL24399A IL24399A (en) | 1964-10-14 | 1965-10-03 | A positively charged particle source |
| CH1366065A CH444829A (fr) | 1964-10-14 | 1965-10-04 | Source de particules électrisées positivement |
| GB42034/65A GB1063199A (en) | 1964-10-14 | 1965-10-04 | A source of positively-charged particles |
| NL6512861A NL6512861A (fr) | 1964-10-14 | 1965-10-04 | |
| LU49581A LU49581A1 (fr) | 1964-10-14 | 1965-10-05 | |
| ES0318459A ES318459A1 (es) | 1964-10-14 | 1965-10-14 | Dispositivo emisor de particulas electrizadas positivamente. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR991423A FR1476514A (fr) | 1964-10-14 | 1964-10-14 | Source d'ions |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR1476514A true FR1476514A (fr) | 1967-04-14 |
Family
ID=8840338
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR991423A Expired FR1476514A (fr) | 1964-10-14 | 1964-10-14 | Source d'ions |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US3376469A (fr) |
| BE (1) | BE670351A (fr) |
| CH (1) | CH444829A (fr) |
| DE (1) | DE1489777B1 (fr) |
| ES (1) | ES318459A1 (fr) |
| FR (1) | FR1476514A (fr) |
| GB (1) | GB1063199A (fr) |
| IL (1) | IL24399A (fr) |
| LU (1) | LU49581A1 (fr) |
| NL (1) | NL6512861A (fr) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2950330C2 (de) * | 1979-12-14 | 1983-06-01 | Leybold-Heraeus GmbH, 5000 Köln | Vorrichtung zur chemischen Analyse von Proben |
| US4453086A (en) * | 1981-12-31 | 1984-06-05 | International Business Machines Corporation | Electron beam system with reduced charge buildup |
| US4471224A (en) * | 1982-03-08 | 1984-09-11 | International Business Machines Corporation | Apparatus and method for generating high current negative ions |
| JPS59113175A (ja) * | 1982-12-20 | 1984-06-29 | Nisshin Haiboruteeji Kk | 負イオン源 |
| US4472174A (en) * | 1983-04-25 | 1984-09-18 | Raymond L. Chuan | Method and apparatus for providing and using RF generated plasma for particle charging in electrostatic precipitation |
| US6515426B1 (en) * | 1998-12-15 | 2003-02-04 | Hitachi, Ltd. | Ion beam processing apparatus and method of operating ion source therefor |
| US6441382B1 (en) | 1999-05-21 | 2002-08-27 | Axcelis Technologies, Inc. | Deceleration electrode configuration for ultra-low energy ion implanter |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3082326A (en) * | 1954-03-08 | 1963-03-19 | Schlumberger Well Surv Corp | Neutron generating apparatus |
| GB816681A (en) * | 1955-01-07 | 1959-07-15 | Licentia Gmbh | Ion source |
| DE1021963B (de) * | 1955-04-01 | 1958-01-02 | Messen Jaschin G A | Einrichtung zur elektrischen Beladung von in einem Luftstrom suspendierter Materie mittels radioaktiver Praeparate |
| US2934665A (en) * | 1956-09-12 | 1960-04-26 | Siemens Ag | Ion source |
| US3279176A (en) * | 1959-07-31 | 1966-10-18 | North American Aviation Inc | Ion rocket engine |
| US3287582A (en) * | 1963-01-04 | 1966-11-22 | Lionel V Baldwin | Apparatus for increasing ion engine beam density |
-
1964
- 1964-10-14 FR FR991423A patent/FR1476514A/fr not_active Expired
-
1965
- 1965-09-30 BE BE670351D patent/BE670351A/xx unknown
- 1965-09-30 US US491699A patent/US3376469A/en not_active Expired - Lifetime
- 1965-10-01 DE DE19651489777 patent/DE1489777B1/de not_active Withdrawn
- 1965-10-03 IL IL24399A patent/IL24399A/en unknown
- 1965-10-04 CH CH1366065A patent/CH444829A/fr unknown
- 1965-10-04 NL NL6512861A patent/NL6512861A/xx unknown
- 1965-10-04 GB GB42034/65A patent/GB1063199A/en not_active Expired
- 1965-10-05 LU LU49581A patent/LU49581A1/xx unknown
- 1965-10-14 ES ES0318459A patent/ES318459A1/es not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CH444829A (fr) | 1967-10-15 |
| NL6512861A (fr) | 1966-04-15 |
| DE1489777B1 (de) | 1970-01-15 |
| GB1063199A (en) | 1967-03-30 |
| BE670351A (fr) | 1966-01-17 |
| LU49581A1 (fr) | 1965-12-06 |
| ES318459A1 (es) | 1967-05-16 |
| IL24399A (en) | 1969-05-28 |
| US3376469A (en) | 1968-04-02 |
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