US3376469A - Positive ion-source having electron retaining means - Google Patents

Positive ion-source having electron retaining means Download PDF

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Publication number
US3376469A
US3376469A US491699A US49169965A US3376469A US 3376469 A US3376469 A US 3376469A US 491699 A US491699 A US 491699A US 49169965 A US49169965 A US 49169965A US 3376469 A US3376469 A US 3376469A
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United States
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jet
source
ions
plates
electron
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US491699A
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English (en)
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Consoli Terenzio
Geller Richard
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Commissariat a lEnergie Atomique CEA
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details

Definitions

  • ABSTRACT OF THE DISCLOSURE An accelerated jet of positively and negatively charged particles is passed through a coil generating a magnetic field parallel to the long axis of the jet and having its intensity decreasing in the direction of flow to diverge negatively charged particles. The jet then passes through spaced parallel plates having openings in the crosssection of the jet with the upstream plate positively charged and the downstream plate negatively charged so that the upstream plate captures negatively charged particles.
  • the present invention relates to a source of positively charged particles, and in particular a source of positive ions adapted to generate a very high-energy ion beam.
  • the known high energy ion sources usually comprises an enclosure provided with a small opening and containing a mixture of neutral gases and an ionized gas, the pressure of said neutral gases being of from 10* to atmosphere.
  • One or several electrodes mounted in register with said opening and raised to negative potentials with respect to said enclosure permit to extract the ions contained in the latter and to accelerate them.
  • the ionized gas is homogeneously and isotropically distributed in said enclosure, i.e. the velocities of the particles (in particular of the ions) are randomly orientated.
  • the intensity of the ion beam obtained is limited to about 1 ma.cm. for an extraction voltage of up to 1000 volts.
  • the energy of the ions forming such a beam is rather low and can be increased only by carrying out acceleration methods which require voltage sources of several hundred thousand volts.
  • the present invention which is free of the above drawbacks, relates to a source of positively charged particles, and in particular a source of positive ions adapted to generate a very high energy ion beam, said source comprising means for generating an accelerated jet of positively charged particles and of negatively charged particles which is altogether electrically neutral and possessed of a very high energy, at least two electrically conductive parallel plates at right angles to the longitudinal axis of said jet, said plates being provided with openings coaxial to said jet and the areas of which are of the order of that of the cross-section of said jet, and a source of 3,376,469 Patented Apr.
  • said jet of particles is constituted by a plasma emitted by an electro-magnetic accelerator.
  • Said source of positively charged particles can comprise means located between said means for generating an accelerated jet and said two plates, and adapted to generate a magnetic field which is parallel to the longitudinal axis of said jet and the intensity of which decreases in the direction of flow of said jet, said magnetic field causing the major portion of the negatively charged particles to diverge and thus to hit said upstream plate instead of passing through the opening of said upstream plate.
  • an accelerator of ionized gas or plasma is diagrammatically shown at 1.
  • This accelerator emits a jet of plasma 2 possessed of a very high energy, which is altogether electrically neutral and composed of positive ions and of electrons, the velocity of the positive ions being substantially equal to the component of the electron velocity along the axis XX of the jet.
  • the electrons of jet 2 follow helical paths whereas the ions, driven by the electronic space charge, move in the direction of axis XX.
  • the energy of the flux of particles forming jet 2 is proportional to the electro-magnetic power of accelerator 1, which is for instance of 300 W., the ion energy being then of the order of 10 ev. and the total number of particles emitted per second of the order of 10
  • a coil 3 co-axial to the plasma jet 2 generates a static magnetic field which is parallel to the longitudinal axis of said jet, and the intensity of which decreases in the direction of flow of said jet.
  • Two circular openings 4 and 5 co-axial to the plasma jet 2 and the areas of which are of the order of that of the cross-section of said jet, are provided in two parallel conductive plates, 6 and 7 respectively, connected to the terminals of a direct current source 8, plate 6 located between coil 3 and plate 7 being connected to the positive terminal of said source 8.
  • any electron contained in plasma jet 2 undergoes, when passing through coil 3, the action of the magnetic field generated by said coil, and if this magnetic field, which is co-axial to jet 2, is gradually decreasing, it causes an increase of the radius of the helical path followed by said electron. Therefore the major portion of the electrons which pass through said coil diverge from jet 2 and hit plate 6 instead of passing through opening 4.
  • the ions move in the direction of axis XX and therefore in the direction of the magnetic field. Accordingly, the magnetic field exerts no action upon them and they are not deviated and all of the ions pass through opening 4.
  • the ions are not deviated by the magnetic field, since their velocities are parallel to said field, and therefore they all pass through opening 4.
  • a first sorting of the ions contained in plasma jet 2 is therefore achieved through the medium of said static magnetic field.
  • a second sorting is thus carried out, and beam 9 circulating between plates 6 and 7 no longer contains electrons and is exclusively constituted by ions.
  • This ion beam is accelerated by the electric field between plates 6 and 7, and thus the energy the ions of jet 2 had on leaving the accelerator is still increased.
  • the electrons captured by plate 6 are driven by conduction to source 8.
  • Accelerator 1 and plates 6 and 7 are located in a tight enclosure (not shown), inside which the air pressure is maintained at about 10" atmosphere in order to minimize the probability of collisions between neutral gas and positive ions.
  • the intensity of the ion beam delivered by the source according to the present invention is, for instance, of the order of 30 ma./cm. the diameter of openings 4 and 5 being 1 cm. and the voltage delivered by source 8 being of 500 v.
  • thermonuclear fusion Such a source can be used whenever a very high-energy accelerated ion beam is needed, and it is of special interest for thermonuclear fusion.
  • a device for separating electrons and positive ions from an accelerated jet of positively charged particles and negatively charged particles which is altogether electrically neutral and possessed of a very high energy including a source for said jet, at least two electrically conductive parallel plates at right angles to the longitudinal axis of said jet, said plates being provided with openings co-axial to said jet and the areas of which are of the order of that of the cross-section of said jet, a source of direct current adapted to establish an electric field between said plates and so mounted that its positive terminal is connected to that of said plates which is the more upstream of said jet, and a coil located entirely between said means for generating an accelerated jet and said two plates and generating a magnetic field which is parallel to the longitudinal axis of said jet and the intensity of said magnetic field decreases continuously in the direction of flow of said jet, whereby the major portion of said negatively charged particles is caused to diverge from said longitudinal axis and to hit said upstream plate, and, once said jet has passed through said opening of said upstream plate, the remaining negatively-charged particles of
  • a source of ions adapted to generate a very high energy ion beam comprising an electromagnetic accelerator adapted to emit a jet of plasma possessed of a very high energy, at least two electrically conductive parallel plates at right angles to the longitudinal axis of said jet, said plates being provided with openings co-axial to said jet and the areas of which are of the order of that of the cross-section of said jet, a source of direct current adapted to establish an electric field between said plates and so mounted that its positive terminal is connected to that of said plates which is the more upstream of said jet, and a coil located entirely between said means for generating an accelerated jet and said two plates and generating a magnetic field which is parallel to the longitudinal axis of said jet and the intensity of said magnetic field decreases continuously in the direction of flow of said jet, whereby the major portion of the electrons of said plasma is caused to diverge from said longitudinal axis and to hit said upstream plate, and, once said jet has passed through said opening of said upstream plate, the remaining electrons of said jet, due to

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Particle Accelerators (AREA)
  • Plasma Technology (AREA)
  • Catalysts (AREA)
  • Electrostatic Spraying Apparatus (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
US491699A 1964-10-14 1965-09-30 Positive ion-source having electron retaining means Expired - Lifetime US3376469A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR991423A FR1476514A (fr) 1964-10-14 1964-10-14 Source d'ions

Publications (1)

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US3376469A true US3376469A (en) 1968-04-02

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US491699A Expired - Lifetime US3376469A (en) 1964-10-14 1965-09-30 Positive ion-source having electron retaining means

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US (1) US3376469A (fr)
BE (1) BE670351A (fr)
CH (1) CH444829A (fr)
DE (1) DE1489777B1 (fr)
ES (1) ES318459A1 (fr)
FR (1) FR1476514A (fr)
GB (1) GB1063199A (fr)
IL (1) IL24399A (fr)
LU (1) LU49581A1 (fr)
NL (1) NL6512861A (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4447724A (en) * 1979-12-14 1984-05-08 Leybold Heraeus Gmbh Apparatus for the chemical analysis of samples
US4453086A (en) * 1981-12-31 1984-06-05 International Business Machines Corporation Electron beam system with reduced charge buildup
US4471224A (en) * 1982-03-08 1984-09-11 International Business Machines Corporation Apparatus and method for generating high current negative ions
US4472174A (en) * 1983-04-25 1984-09-18 Raymond L. Chuan Method and apparatus for providing and using RF generated plasma for particle charging in electrostatic precipitation
US6441382B1 (en) 1999-05-21 2002-08-27 Axcelis Technologies, Inc. Deceleration electrode configuration for ultra-low energy ion implanter

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59113175A (ja) * 1982-12-20 1984-06-29 Nisshin Haiboruteeji Kk 負イオン源
US6515426B1 (en) 1998-12-15 2003-02-04 Hitachi, Ltd. Ion beam processing apparatus and method of operating ion source therefor

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2934665A (en) * 1956-09-12 1960-04-26 Siemens Ag Ion source
US3082326A (en) * 1954-03-08 1963-03-19 Schlumberger Well Surv Corp Neutron generating apparatus
US3279176A (en) * 1959-07-31 1966-10-18 North American Aviation Inc Ion rocket engine
US3287582A (en) * 1963-01-04 1966-11-22 Lionel V Baldwin Apparatus for increasing ion engine beam density

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1140034A (fr) * 1955-01-07 1957-07-09 Licentia Gmbh Source d'ions
DE1021963B (de) * 1955-04-01 1958-01-02 Messen Jaschin G A Einrichtung zur elektrischen Beladung von in einem Luftstrom suspendierter Materie mittels radioaktiver Praeparate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3082326A (en) * 1954-03-08 1963-03-19 Schlumberger Well Surv Corp Neutron generating apparatus
US2934665A (en) * 1956-09-12 1960-04-26 Siemens Ag Ion source
US3279176A (en) * 1959-07-31 1966-10-18 North American Aviation Inc Ion rocket engine
US3287582A (en) * 1963-01-04 1966-11-22 Lionel V Baldwin Apparatus for increasing ion engine beam density

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4447724A (en) * 1979-12-14 1984-05-08 Leybold Heraeus Gmbh Apparatus for the chemical analysis of samples
US4453086A (en) * 1981-12-31 1984-06-05 International Business Machines Corporation Electron beam system with reduced charge buildup
US4471224A (en) * 1982-03-08 1984-09-11 International Business Machines Corporation Apparatus and method for generating high current negative ions
US4472174A (en) * 1983-04-25 1984-09-18 Raymond L. Chuan Method and apparatus for providing and using RF generated plasma for particle charging in electrostatic precipitation
US6441382B1 (en) 1999-05-21 2002-08-27 Axcelis Technologies, Inc. Deceleration electrode configuration for ultra-low energy ion implanter

Also Published As

Publication number Publication date
ES318459A1 (es) 1967-05-16
CH444829A (fr) 1967-10-15
IL24399A (en) 1969-05-28
FR1476514A (fr) 1967-04-14
GB1063199A (en) 1967-03-30
NL6512861A (fr) 1966-04-15
DE1489777B1 (de) 1970-01-15
LU49581A1 (fr) 1965-12-06
BE670351A (fr) 1966-01-17

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