FR1485970A - Procédé de fabrication de couches à croissance épitaxiale en composés semiconducteurs binaires - Google Patents

Procédé de fabrication de couches à croissance épitaxiale en composés semiconducteurs binaires

Info

Publication number
FR1485970A
FR1485970A FR68011A FR68011A FR1485970A FR 1485970 A FR1485970 A FR 1485970A FR 68011 A FR68011 A FR 68011A FR 68011 A FR68011 A FR 68011A FR 1485970 A FR1485970 A FR 1485970A
Authority
FR
France
Prior art keywords
manufacturing
epitaxially grown
semiconductor compounds
grown layers
binary semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR68011A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens and Halske AG
Siemens Corp
Original Assignee
Siemens and Halske AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens and Halske AG, Siemens Corp filed Critical Siemens and Halske AG
Priority to FR68011A priority Critical patent/FR1485970A/fr
Application granted granted Critical
Publication of FR1485970A publication Critical patent/FR1485970A/fr
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/29Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
    • H10P14/2901Materials
    • H10P14/2907Materials being Group IIIA-VA materials
    • H10P14/2911Arsenides
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B25/00Phosphorus; Compounds thereof
    • C01B25/06Hydrogen phosphides
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C1/00Making non-ferrous alloys
    • C22C1/007Preparing arsenides or antimonides, especially of the III-VI-compound type, e.g. aluminium or gallium arsenide
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/24Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using chemical vapour deposition [CVD]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34Deposited materials, e.g. layers
    • H10P14/3402Deposited materials, e.g. layers characterised by the chemical composition
    • H10P14/3414Deposited materials, e.g. layers characterised by the chemical composition being group IIIA-VIA materials
    • H10P14/3418Phosphides
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34Deposited materials, e.g. layers
    • H10P14/3402Deposited materials, e.g. layers characterised by the chemical composition
    • H10P14/3414Deposited materials, e.g. layers characterised by the chemical composition being group IIIA-VIA materials
    • H10P14/3421Arsenides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
FR68011A 1965-07-05 1966-07-04 Procédé de fabrication de couches à croissance épitaxiale en composés semiconducteurs binaires Expired FR1485970A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR68011A FR1485970A (fr) 1965-07-05 1966-07-04 Procédé de fabrication de couches à croissance épitaxiale en composés semiconducteurs binaires

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DES0097994 1965-07-05
FR68011A FR1485970A (fr) 1965-07-05 1966-07-04 Procédé de fabrication de couches à croissance épitaxiale en composés semiconducteurs binaires

Publications (1)

Publication Number Publication Date
FR1485970A true FR1485970A (fr) 1967-06-23

Family

ID=25998158

Family Applications (1)

Application Number Title Priority Date Filing Date
FR68011A Expired FR1485970A (fr) 1965-07-05 1966-07-04 Procédé de fabrication de couches à croissance épitaxiale en composés semiconducteurs binaires

Country Status (1)

Country Link
FR (1) FR1485970A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2021226A1 (fr) * 1968-10-22 1970-07-17 Siemens Ag
FR2378873A1 (fr) * 1977-02-01 1978-08-25 G Pi Procede et dispositif de depot sur un recepteur d'une couche semi-conductrice

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2021226A1 (fr) * 1968-10-22 1970-07-17 Siemens Ag
FR2378873A1 (fr) * 1977-02-01 1978-08-25 G Pi Procede et dispositif de depot sur un recepteur d'une couche semi-conductrice

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