FR1505687A - Appareil de mesure de flux de particules sous vide - Google Patents

Appareil de mesure de flux de particules sous vide

Info

Publication number
FR1505687A
FR1505687A FR87356A FR87356A FR1505687A FR 1505687 A FR1505687 A FR 1505687A FR 87356 A FR87356 A FR 87356A FR 87356 A FR87356 A FR 87356A FR 1505687 A FR1505687 A FR 1505687A
Authority
FR
France
Prior art keywords
flow meter
particle flow
vacuum particle
vacuum
meter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR87356A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Dynamics Corp
Original Assignee
General Dynamics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Dynamics Corp filed Critical General Dynamics Corp
Application granted granted Critical
Publication of FR1505687A publication Critical patent/FR1505687A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/544—Controlling the film thickness or evaporation rate using measurement in the gas phase
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • G21K1/04—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using variable diaphragms, shutters, choppers
    • G21K1/043—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using variable diaphragms, shutters, choppers changing time structure of beams by mechanical means, e.g. choppers, spinning filter wheels
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/21—Elements
    • Y10T74/2101—Cams
    • Y10T74/2102—Adjustable

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR87356A 1965-12-15 1966-12-14 Appareil de mesure de flux de particules sous vide Expired FR1505687A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US513935A US3419718A (en) 1965-12-15 1965-12-15 Apparatus for measuring the flow of electrically neutral particles

Publications (1)

Publication Number Publication Date
FR1505687A true FR1505687A (fr) 1967-12-15

Family

ID=24045167

Family Applications (1)

Application Number Title Priority Date Filing Date
FR87356A Expired FR1505687A (fr) 1965-12-15 1966-12-14 Appareil de mesure de flux de particules sous vide

Country Status (5)

Country Link
US (1) US3419718A (fr)
CH (1) CH468478A (fr)
DE (2) DE1548978B2 (fr)
FR (1) FR1505687A (fr)
GB (1) GB1146762A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0160479A3 (en) * 1984-04-24 1988-03-30 Hitachi, Ltd. Method and apparatus for forming a thin film

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5183473A (en) * 1975-01-20 1976-07-22 Hitachi Ltd Fujunbutsuno doopinguhoho
US4068122A (en) * 1976-08-09 1978-01-10 Phillips Petroleum Company Isotope analysis
US4762993A (en) * 1987-01-09 1988-08-09 Moses Kenneth G Directional sensor for neutral particle beams
US4878014A (en) * 1988-06-07 1989-10-31 Oak Ridge Associated Universities Ion beam profile scanner having symmetric detector surface to minimize capacitance noise
KR100614101B1 (ko) * 2005-09-15 2006-08-22 한국과학기술연구원 입자 계수기
JP2011067771A (ja) * 2009-09-25 2011-04-07 Panasonic Electric Works Co Ltd 放電装置
CN107085934B (zh) * 2017-04-10 2020-09-11 中国电力科学研究院 一种用电信息采集设备性能检测方法及系统

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL238481A (fr) * 1955-04-12
US3136908A (en) * 1960-07-28 1964-06-09 Weinman James Adolf Plurally charged ion beam generation method
US3211908A (en) * 1961-07-19 1965-10-12 Michael R Liebowitz Spectrum discriminating radiation detector
US3168418A (en) * 1962-03-27 1965-02-02 Alloyd Electronics Device for monitoring and controlling evaporation rate in vacuum deposition

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0160479A3 (en) * 1984-04-24 1988-03-30 Hitachi, Ltd. Method and apparatus for forming a thin film

Also Published As

Publication number Publication date
CH468478A (de) 1969-02-15
US3419718A (en) 1968-12-31
DE1548978B2 (de) 1976-12-30
DE1548978A1 (de) 1970-04-23
GB1146762A (en) 1969-03-26
DE1789186A1 (de) 1976-12-30

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