FR1534681A - Procédé de métallisation au zinc en continu d'une bande en matière diélectrique - Google Patents

Procédé de métallisation au zinc en continu d'une bande en matière diélectrique

Info

Publication number
FR1534681A
FR1534681A FR65643A FR65643A FR1534681A FR 1534681 A FR1534681 A FR 1534681A FR 65643 A FR65643 A FR 65643A FR 65643 A FR65643 A FR 65643A FR 1534681 A FR1534681 A FR 1534681A
Authority
FR
France
Prior art keywords
strip
dielectric material
metallization process
continuous zinc
zinc metallization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR65643A
Other languages
English (en)
Inventor
Michel A Braguier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR65643A priority Critical patent/FR1534681A/fr
Priority to BE705239A priority patent/BE705239A/fr
Priority to NL6715095A priority patent/NL6715095A/nl
Priority to US690272A priority patent/US3498259A/en
Application granted granted Critical
Publication of FR1534681A publication Critical patent/FR1534681A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
    • H01G13/06—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00 with provision for removing metal surfaces

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physical Vapour Deposition (AREA)
FR65643A 1966-06-15 1966-06-15 Procédé de métallisation au zinc en continu d'une bande en matière diélectrique Expired FR1534681A (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR65643A FR1534681A (fr) 1966-06-15 1966-06-15 Procédé de métallisation au zinc en continu d'une bande en matière diélectrique
BE705239A BE705239A (fr) 1966-06-15 1967-10-17 Appareil à métalliser en continu des bandes isolantes
NL6715095A NL6715095A (nl) 1966-06-15 1967-11-07 Bandmetalliseringsinrichting
US690272A US3498259A (en) 1966-06-15 1967-12-13 Apparatus for continuous metallization of dielectric strips

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR65643A FR1534681A (fr) 1966-06-15 1966-06-15 Procédé de métallisation au zinc en continu d'une bande en matière diélectrique
NL6715095A NL6715095A (nl) 1966-06-15 1967-11-07 Bandmetalliseringsinrichting
US690272A US3498259A (en) 1966-06-15 1967-12-13 Apparatus for continuous metallization of dielectric strips

Publications (1)

Publication Number Publication Date
FR1534681A true FR1534681A (fr) 1968-08-02

Family

ID=33458078

Family Applications (1)

Application Number Title Priority Date Filing Date
FR65643A Expired FR1534681A (fr) 1966-06-15 1966-06-15 Procédé de métallisation au zinc en continu d'une bande en matière diélectrique

Country Status (4)

Country Link
US (1) US3498259A (fr)
BE (1) BE705239A (fr)
FR (1) FR1534681A (fr)
NL (1) NL6715095A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988000984A1 (fr) * 1986-08-01 1988-02-11 Metalvuoto Films S.P.A. Procede et appareil pour fabriquer des films metallises destines a des condensateurs electriques, et produits ainsi obtenus
WO1990012485A3 (fr) * 1989-04-21 1990-11-29 Secr Defence Brit Fabrication d'alliages par evaporation a partir de sources de vapeur multiples

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3866565A (en) * 1973-12-21 1975-02-18 David E U Ridout Vapor deposition apparatus with rotating drum mask
US4296153A (en) * 1978-05-15 1981-10-20 Cha Industries Vacuum chamber door assembly and method
US4403002A (en) * 1979-12-10 1983-09-06 Fuji Photo Film Co., Ltd. Vacuum evaporating apparatus
US4682565A (en) * 1984-11-19 1987-07-28 Sfe Technologies Vapor nozzle with gas barrier bars
US4844009A (en) * 1987-11-28 1989-07-04 Leybold Aktiengesellschaft Apparatus for coating webs of material having an open structure in depth
KR20090101738A (ko) * 2008-03-24 2009-09-29 삼성전기주식회사 진공증착장치 및 그 제어방법
US20110065282A1 (en) * 2009-09-11 2011-03-17 General Electric Company Apparatus and methods to form a patterned coating on an oled substrate
JP2015021172A (ja) * 2013-07-19 2015-02-02 日東電工株式会社 スパッタ装置
JP6772663B2 (ja) * 2016-08-23 2020-10-21 住友金属鉱山株式会社 ロールツーロール方式による長尺基材の処理装置及びこれを用いた成膜装置
EP3929324A1 (fr) * 2020-06-26 2021-12-29 Bühler Alzenau GmbH Procédé et dispositif de revêtement
US20220356028A1 (en) * 2021-05-04 2022-11-10 Applied Materials, Inc. Roller for transporting a flexible substrate, vacuum processing apparatus, and methods therefor

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1708935A (en) * 1927-08-09 1929-04-16 Bell Telephone Labor Inc Coil and transformer
GB350471A (en) * 1929-03-04 1931-06-04 Edison Swan Electric Co Ltd Improvements in and relating to electric discharge tubes
US2877140A (en) * 1953-10-12 1959-03-10 Waxide Paper Company Method for cooling and setting wax coatings on paper
US2975753A (en) * 1958-11-18 1961-03-21 Nat Res Corp Vacuum coating apparatus
US3044438A (en) * 1959-11-06 1962-07-17 Highland Supply Corp Means and methods for metalizing films and sheet materials
US3018397A (en) * 1959-11-09 1962-01-23 Charles J Bronco Demountable photomultiplier refrigerator
US3241519A (en) * 1962-04-05 1966-03-22 Western Electric Co Tensioned and cooled mask
NL293028A (fr) * 1962-06-05
US3397672A (en) * 1965-11-10 1968-08-20 United States Steel Corp Control system for vapor-deposition coating apparatus
US3381660A (en) * 1967-06-09 1968-05-07 Nat Res Corp Vapor deposition apparatus including pivoted shutters

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988000984A1 (fr) * 1986-08-01 1988-02-11 Metalvuoto Films S.P.A. Procede et appareil pour fabriquer des films metallises destines a des condensateurs electriques, et produits ainsi obtenus
US4903165A (en) * 1986-08-01 1990-02-20 Metalvuoto Films S.P.A. Process and apparatus for manufacturing metallized films for electric capacitors and products thus obtained
WO1990012485A3 (fr) * 1989-04-21 1990-11-29 Secr Defence Brit Fabrication d'alliages par evaporation a partir de sources de vapeur multiples
GB2248457A (en) * 1989-04-21 1992-04-08 Secr Defence Multiple source evaporation for alloy production
GB2248457B (en) * 1989-04-21 1993-05-05 Secr Defence Multiple source evaporation for bulk alloy production

Also Published As

Publication number Publication date
NL6715095A (nl) 1969-05-09
BE705239A (fr) 1968-03-01
US3498259A (en) 1970-03-03

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