US3498259A - Apparatus for continuous metallization of dielectric strips - Google Patents

Apparatus for continuous metallization of dielectric strips Download PDF

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Publication number
US3498259A
US3498259A US690272A US69027267A US3498259A US 3498259 A US3498259 A US 3498259A US 690272 A US690272 A US 690272A US 69027267 A US69027267 A US 69027267A US 3498259 A US3498259 A US 3498259A
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US
United States
Prior art keywords
cylinder
strip
casing
roller
rollers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US690272A
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English (en)
Inventor
Michel A Braguier
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Individual
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Individual
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Filing date
Publication date
Priority to FR65643A priority Critical patent/FR1534681A/fr
Priority to BE705239A priority patent/BE705239A/fr
Priority to NL6715095A priority patent/NL6715095A/nl
Application filed by Individual filed Critical Individual
Priority to US690272A priority patent/US3498259A/en
Application granted granted Critical
Publication of US3498259A publication Critical patent/US3498259A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
    • H01G13/06—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00 with provision for removing metal surfaces

Definitions

  • This invention relates to apparatuses for continuous vacuum metallization of one or both surfaces of dielectric strips, more particularly to apparatuses of the kind specified wherein special cooling rollers are used.
  • Some known apparatuses for continuous vacuum metallization of insulating strips comprise cooling rollers over which the strip passes between its take-off in untreated form and its take-up in treated form and which make the strip temperature low enough for the strip to be metallized without being damaged.
  • cooling rollers are rotating rollers which are flowed through by a cooling fluid and which have a rotating seal which allows a cooling fluid to flow inside the roller but keeps out unwanted an.
  • the rollers of the metallization apparatus mainly comprise: (a) a hollow rotating cylinder made of thin metal which is a good heat conductor, the cylinder outer surface being polished and the cylinder inside surface being oxidized; (b) inside the cylinder, a non-rotating stationary casing made of a thin metal which is a good heat conductor, the easing outer surface being oxidized, the casing being flowed through by a fluid coolant; (c) in the casing, a stationary cylinder formed with the required ducts for supplying and removing the fluid coolant, the rotatable cylinder being adapted to rotate freely around the last-mentioned stationary cylinder.
  • the unreflected fraction of the incident heat due to metallization can be transmitted integrally and rapidly from the cylinder to the casing by radiation between two surfaces which can be likened to black bodies, and so the temperature of the outer cylinder of the roller can be controlled very simply just by acting on the inlet temperature of the fluid coolant.
  • Another aim of the invention is to bind the edges of the or each metallized strip.
  • FIGURE 1 is a perspective view, seen from the front, of the metallizing apparatus according to the invention.
  • FIGS. 2 and 3 are diagrammatic views, for both-surface and single-surface metallization of the strip respectively showing the path of the strip in the apparatus;
  • FIG. 4 is a view in axial section of a cooling roller of the apparatus
  • FIG. 5 is a perspective view of the mask associated with the cooling roller
  • FIG. 6 shows a pattern of strip metallized by the apparatus according to the invention.
  • a continuous metallizing apparatus is received in a circular box 1 whose front surface 2 forms a cover and which can be closed in vacuumtight manner thanks to the presence of an appropriate plastics head 3.
  • the box 1 can be exhausted by means which are not shown.
  • a crucible 4 can be electrically heated by a winding 5 of resistive wire.
  • An aluminum wire 6 wound on a reel 7- is directed towards the crucible 4 through the agency of a guide tube 8 and a drive facility 9 comprising a drive shaft 10.
  • the wire 6 melts and drops into crucible 4 in which it is vaporized.
  • a deflector 11 cooled by a flowing fluid coolant (the flow tubes are not shown) directs the aluminum vapor towards the cooling rollers 12, 13.
  • rollers not all the rollers have references, since some of them are merely deflecting idler rollers or serve merely to turn round the surface to be metallized.
  • Springs 20, 21 bias respective rollers 16, 18 disposed at the ends of respective arms 17, 19 against the take-off winding 14 and take up winding 15 respectively to obviate creasing during the unwinding and winding-on of the strip.
  • Rollers 22, 23 measure the resistance of the metallized layer on the surface 31, and rollers 24, 25 measure the resistance of the metallized layer on surface 32, of strip 30.
  • Rollers 26, 27 are drive rollers.
  • a rubber roller 28 is connected to a tachymeter dynamo for controlling the drive speed.
  • the apparatus can be used to metallize either both the surfaces of the strip or one surface thereof.
  • Two stationary screens 29, 29' provide protection against the metal vapor for all rollers other than the cooling rollers and for the strip too except at the place where the same' goes over the cooling rollers.
  • each cooling roller takes the form of a thin hollow aluminum cylinder 33 which is polished on its outside surface and oxidized on its inside 3 surface.
  • the cylinder 33 is formed at both ends with cylindrical recesses 34 receiving two identical aluminumoxide end plates 35, 36 formed coaxially with cylindrical recesses 37 receiving antifriction bearings 38, 39 mounted on a steel cylinder 40 kept horizontal by base 48 of box 1.
  • the bearings 38, 39 are lubricated with Teflon grease.
  • a stationary cylindrical casing 41 of reduced thickness is secured coaxially to the cylinder 40, e.g., by grazing, and takes up almost all the free space in the cylinder 33 between the end plates 35, 36; the casing 41 is made of copper with the outer surface oxidized.
  • the casing 41 is filled with a moving fluid refrigerant 42, for instance,
  • the fluid 42 flows through passages contrived in the cylinder 40, namely a cold fluid supply passage 43, whose exit orifice is flush with the surface of the cylinder 40, and a hot fluid removal passage 44, which continues radially in the form of a tube 45 to near the cylindrical wall of the casing 41.
  • the hottest part of the apparatus hereinbefore described is the system formed by the cylinder 33 and end plates 35, 36.
  • This system absorbs only a fraction of the incident heat due to the metallization, since the cylinder 33 has a polished outer surface and extends completely around the coldest parti.e., the casing 41 which the continuously flowing fluid coolant 42 maintains at a predetermined temperature.
  • the inner surface of the cylinder 33 and the outer surface of the casing 41 can be likened substantially to two black bodies.
  • the metals-aluminum and copper-used for the cylinder 33 and casing 41, respectively are good heat conductors and of reduced thickness and therefore have a low heat imepdance.
  • the medium between the cylinder 33 and the casing 41 is substantially nonabsorbent. Consequently, the cylinder 33 rapidly transfers all the heat which it absorbs to the casing 41 by radiation; this transfer is governed by Stefans law, which simplifies for the case of two black bodies at very similar temperatures and can be represented by the relationship:
  • a roller according to the invention was constructed as follows:
  • the bottom generatrix of the roller was mm. vertically above the level of the exposed surface of a melted aluminum bath at I400 C., with a radiating area of 5 cm.
  • the plastic strip .of Polycarbonate 6n thick rested on the roller and moved at a constant speed of 0.5 m./sec.; it was coated with a uniform layer of aluminum having a square resistance of 3 ohms.
  • the heat transmitted to the roller was approximately 120 watts and the temperature difference between the roller and the casing stabilized at 15 C., corresponding to 1 C. per 8 watts of incident heat.
  • the cooling water entered the roller at 10 C.
  • a removable mask 49 for instance of the kind shown in FIG. 5, can be placed around each cooling roller 12, 13.
  • the mask 49 resembles a cylindrical sector or a half-cylinder and comprises a frame formed by two semicircular rods 50, 51 and by two straight rods 52, 53 which itnerconnect the ends of the semicircular rods 50, 51.
  • the ends of the semicircular rods 50, 51 are pierced with apertures 54 so that the mask 49' can be threaded on rods 68 which are perpendicular to and secured to the base 48 of the box 1.
  • Each of the straight rods 52, 53 is formed with a longitudinal slot 55 in which slide blocks 56 terminating in semicircular rods 57, 57 can move.
  • the slide blocks 56 can be located and locked by screws 58.
  • Plates 60, 60 which in shape resemble a sector of cylindrical surface and which are of predetermined width are secured laterally to semicircular rods, as 50, 51, by screws 59.
  • FIG. 6 shows the form of metallized layer produced on the strop 30 in the case in which the mask 49 is devised as shown in FIG. 5.
  • the eges 64, 67 are due to the plates 60, 60.
  • the width of the metallized strips and the spacings therebetween are the result of appropriate positioning of the rods 57, 57' and of the width chosen for the plates 60, 60'.
  • the metal of the drum and easing must be selected so as to take by metallization a mat black surface and the operation of the drum depends to a fairly large extent on the colors of the opposed surfaces.
  • Copper oxide is capable of providing an intensely black nonreflecting surface.
  • the inner surface of the drum must be treated so as to obtain a mat black surface (for instance by anodic oxidation) and not a white mat surface.
  • An apparatus for continuous vacuum metallization of a strip of insulating material comprising means for vaporizing a metal, a take-off reel and a take-up reel, and at least one cooling roller over which the strip passes, including; (a) a hollow rotating cylinder made of thin metal which is a good heat conductor, the cylinder outer surface being polished and the cylinder inside surface being oxidized to effect a black-body type surface; (b) inside the cylinder, a nonrotating stationary casing made of a thin metal which is a good heat conductor, the casing outer surface being oxidized to effect a black-body type rotatable cylinder being adapted to rotate freely around the last-mentioned stationary cylinder, and means for directing the vapor flow towards selected parts of said cooling roller.
  • the means for directing the vapor flow towards selected parts of the cooling roller comprise a frame having the form of a cylindrical sector coaxial to the cooling roller and comprising two terminal bars in the form of a circle sector and two straight bars interconnecting the ends of the circlesector bars in pairs, slots forming slideways in said straight bars, intermediate circle-sector rods terminating in slide blocks sliding in the slideway slots, and plates in the form of a cylindrical sector connected laterally to the intermediate rods.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physical Vapour Deposition (AREA)
US690272A 1966-06-15 1967-12-13 Apparatus for continuous metallization of dielectric strips Expired - Lifetime US3498259A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR65643A FR1534681A (fr) 1966-06-15 1966-06-15 Procédé de métallisation au zinc en continu d'une bande en matière diélectrique
BE705239A BE705239A (fr) 1966-06-15 1967-10-17 Appareil à métalliser en continu des bandes isolantes
NL6715095A NL6715095A (nl) 1966-06-15 1967-11-07 Bandmetalliseringsinrichting
US690272A US3498259A (en) 1966-06-15 1967-12-13 Apparatus for continuous metallization of dielectric strips

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR65643A FR1534681A (fr) 1966-06-15 1966-06-15 Procédé de métallisation au zinc en continu d'une bande en matière diélectrique
NL6715095A NL6715095A (nl) 1966-06-15 1967-11-07 Bandmetalliseringsinrichting
US690272A US3498259A (en) 1966-06-15 1967-12-13 Apparatus for continuous metallization of dielectric strips

Publications (1)

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US3498259A true US3498259A (en) 1970-03-03

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US690272A Expired - Lifetime US3498259A (en) 1966-06-15 1967-12-13 Apparatus for continuous metallization of dielectric strips

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US (1) US3498259A (fr)
BE (1) BE705239A (fr)
FR (1) FR1534681A (fr)
NL (1) NL6715095A (fr)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3866565A (en) * 1973-12-21 1975-02-18 David E U Ridout Vapor deposition apparatus with rotating drum mask
US4296153A (en) * 1978-05-15 1981-10-20 Cha Industries Vacuum chamber door assembly and method
US4454836A (en) * 1979-12-10 1984-06-19 Fuji Photo Film Co., Ltd. Vacuum evaporating apparatus utilizing multiple rotatable cans
US4682565A (en) * 1984-11-19 1987-07-28 Sfe Technologies Vapor nozzle with gas barrier bars
US4844009A (en) * 1987-11-28 1989-07-04 Leybold Aktiengesellschaft Apparatus for coating webs of material having an open structure in depth
US20090238951A1 (en) * 2008-03-24 2009-09-24 Samsung Electro-Mechanics Co., Ltd. Vacuum deposition apparatus and control method thereof
US20110065282A1 (en) * 2009-09-11 2011-03-17 General Electric Company Apparatus and methods to form a patterned coating on an oled substrate
US20150021177A1 (en) * 2013-07-19 2015-01-22 Nitto Denko Corporation Sputtering device
EP3287543A1 (fr) * 2016-08-23 2018-02-28 Sumitomo Metal Mining Co., Ltd. Appareil de traitement du type rouleau à rouleau pour matériau de base long et appareil de dépôt l'utilisant
EP3929324A1 (fr) * 2020-06-26 2021-12-29 Bühler Alzenau GmbH Procédé et dispositif de revêtement
US20220356028A1 (en) * 2021-05-04 2022-11-10 Applied Materials, Inc. Roller for transporting a flexible substrate, vacuum processing apparatus, and methods therefor

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1197806B (it) * 1986-08-01 1988-12-06 Metalvuoto Films Spa Procedimento ed apparecchiatura per la realizzazione di pellicole metallizzate per condesatori elettrici e prodotti cosi' ottenuti
GB2230792A (en) * 1989-04-21 1990-10-31 Secr Defence Multiple source physical vapour deposition.

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US1708935A (en) * 1927-08-09 1929-04-16 Bell Telephone Labor Inc Coil and transformer
GB350471A (en) * 1929-03-04 1931-06-04 Edison Swan Electric Co Ltd Improvements in and relating to electric discharge tubes
US2877140A (en) * 1953-10-12 1959-03-10 Waxide Paper Company Method for cooling and setting wax coatings on paper
US2975753A (en) * 1958-11-18 1961-03-21 Nat Res Corp Vacuum coating apparatus
US3018397A (en) * 1959-11-09 1962-01-23 Charles J Bronco Demountable photomultiplier refrigerator
US3044438A (en) * 1959-11-06 1962-07-17 Highland Supply Corp Means and methods for metalizing films and sheet materials
US3183563A (en) * 1962-06-05 1965-05-18 Temescal Metallurgical Corp Apparatus for continuous foil production by vapor deposition
US3241519A (en) * 1962-04-05 1966-03-22 Western Electric Co Tensioned and cooled mask
US3381660A (en) * 1967-06-09 1968-05-07 Nat Res Corp Vapor deposition apparatus including pivoted shutters
US3397672A (en) * 1965-11-10 1968-08-20 United States Steel Corp Control system for vapor-deposition coating apparatus

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1708935A (en) * 1927-08-09 1929-04-16 Bell Telephone Labor Inc Coil and transformer
GB350471A (en) * 1929-03-04 1931-06-04 Edison Swan Electric Co Ltd Improvements in and relating to electric discharge tubes
US2877140A (en) * 1953-10-12 1959-03-10 Waxide Paper Company Method for cooling and setting wax coatings on paper
US2975753A (en) * 1958-11-18 1961-03-21 Nat Res Corp Vacuum coating apparatus
US3044438A (en) * 1959-11-06 1962-07-17 Highland Supply Corp Means and methods for metalizing films and sheet materials
US3018397A (en) * 1959-11-09 1962-01-23 Charles J Bronco Demountable photomultiplier refrigerator
US3241519A (en) * 1962-04-05 1966-03-22 Western Electric Co Tensioned and cooled mask
US3183563A (en) * 1962-06-05 1965-05-18 Temescal Metallurgical Corp Apparatus for continuous foil production by vapor deposition
US3397672A (en) * 1965-11-10 1968-08-20 United States Steel Corp Control system for vapor-deposition coating apparatus
US3381660A (en) * 1967-06-09 1968-05-07 Nat Res Corp Vapor deposition apparatus including pivoted shutters

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3866565A (en) * 1973-12-21 1975-02-18 David E U Ridout Vapor deposition apparatus with rotating drum mask
US4296153A (en) * 1978-05-15 1981-10-20 Cha Industries Vacuum chamber door assembly and method
US4454836A (en) * 1979-12-10 1984-06-19 Fuji Photo Film Co., Ltd. Vacuum evaporating apparatus utilizing multiple rotatable cans
US4682565A (en) * 1984-11-19 1987-07-28 Sfe Technologies Vapor nozzle with gas barrier bars
US4844009A (en) * 1987-11-28 1989-07-04 Leybold Aktiengesellschaft Apparatus for coating webs of material having an open structure in depth
US20090238951A1 (en) * 2008-03-24 2009-09-24 Samsung Electro-Mechanics Co., Ltd. Vacuum deposition apparatus and control method thereof
CN105369196A (zh) * 2009-09-11 2016-03-02 通用电气公司 在oled基底上形成图案化涂层的装置和方法
US20110065282A1 (en) * 2009-09-11 2011-03-17 General Electric Company Apparatus and methods to form a patterned coating on an oled substrate
WO2011031407A1 (fr) * 2009-09-11 2011-03-17 General Electric Company Appareil et procédés pour former un revêtement à motif sur un substrat de diodes électroluminescentes organiques
CN102625860A (zh) * 2009-09-11 2012-08-01 通用电气公司 在oled基底上形成图案化涂层的装置和方法
JP2013504693A (ja) * 2009-09-11 2013-02-07 ゼネラル・エレクトリック・カンパニイ Ｏｌｅｄ基材上にパターン形成コーティングを形成するための装置および方法
US20150021177A1 (en) * 2013-07-19 2015-01-22 Nitto Denko Corporation Sputtering device
KR102062944B1 (ko) * 2013-07-19 2020-01-06 닛토덴코 가부시키가이샤 스퍼터 장치
EP3287543A1 (fr) * 2016-08-23 2018-02-28 Sumitomo Metal Mining Co., Ltd. Appareil de traitement du type rouleau à rouleau pour matériau de base long et appareil de dépôt l'utilisant
JP2018031038A (ja) * 2016-08-23 2018-03-01 住友金属鉱山株式会社 ロールツーロール方式による長尺基材の処理装置及びこれを用いた成膜装置
US11352697B2 (en) 2016-08-23 2022-06-07 Sumitomo Metal Mining Co., Ltd. Apparatus for processing long base material by roll-to-roll method and film forming apparatus using the same
EP3929324A1 (fr) * 2020-06-26 2021-12-29 Bühler Alzenau GmbH Procédé et dispositif de revêtement
WO2021259521A1 (fr) * 2020-06-26 2021-12-30 Bühler Alzenau Gmbh Procédé et dispositif de revêtement
CN115698367A (zh) * 2020-06-26 2023-02-03 布勒阿尔策瑙股份有限公司 涂层方法及装置
US12618137B2 (en) 2020-06-26 2026-05-05 Bühler Alzenau Gmbh Coating method and device
US20220356028A1 (en) * 2021-05-04 2022-11-10 Applied Materials, Inc. Roller for transporting a flexible substrate, vacuum processing apparatus, and methods therefor

Also Published As

Publication number Publication date
FR1534681A (fr) 1968-08-02
BE705239A (fr) 1968-03-01
NL6715095A (nl) 1969-05-09

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