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Publication of FR2072063B1publicationCriticalpatent/FR2072063B1/fr
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/32—Gas-filled discharge tubes
H01J37/32431—Constructional details of the reactor
H01J37/32623—Mechanical discharge control means
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/32—Gas-filled discharge tubes
H—ELECTRICITY
H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
H05H1/00—Generating plasma; Handling plasma
H05H1/24—Generating plasma
H05H1/26—Plasma torches
H05H1/32—Plasma torches using an arc
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Physics & Mathematics
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Engineering & Computer Science
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Plasma & Fusion
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Chemical & Material Sciences
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Analytical Chemistry
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Spectroscopy & Molecular Physics
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Physical Or Chemical Processes And Apparatus
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FR7046724A1969-12-241970-12-24Excitation of a fluid medium
GrantedFR2072063A1
(en)
Procédé pour augmenter la vitesse d'écoulement d'un liquide par exemple une solution aqueuse, agissant sur des surfaces métalliques sans occasionner de corrosion érosive
Effect of the interaction of dissipating and isentropic currents on the flow at the base region of bodies moving with hypersonic velocity(Effect of interaction of dissipating and isentropic currents on flow at base region of bodies moving with hypersonic velocity)
Thermal motion of particles is considered in an analysis of the equilibrium stability of a nonuniform rarefied magneto-active plasma in a gravitational field
Approximate solution of the two-dimensional problem of the vertical velocity distribution in an open nonuniform flow in the case of laminar motion(Approximate solution of two-dimensional problem of vertical velocity distribution in open nonuniform flow in case of laminar motion)
Effect of properties of solar corpuscular flows on rate of electron formation in the lower ionosphere(Ionization in lower ionosphere by intrusion of solar corpuscular flow)
Calculation of the motion of a shock wave and flow parameters in a shock tube with a noninstantaneously opening diaphragm(Shock wave velocity and gas flow parameters in shock tube with noninstantaneously opening diaphragm calculated by method of characteristics)
Effect of friction forces on the stability of a pipe containing a moving fluid(Clamping conditions effect on critical flow rate of fluid moving through pipe, taking into account direction and friction forces on stability)
The establishment of a relationship between the intensity value and the dissipation of energy of turbulence(Flow velocity fluctuation intensity relationship to turbulent energy dissipation based on Kolmogoroff similarity hypothesis)