FR2372499A2 - Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenues - Google Patents
Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenuesInfo
- Publication number
- FR2372499A2 FR2372499A2 FR7636052A FR7636052A FR2372499A2 FR 2372499 A2 FR2372499 A2 FR 2372499A2 FR 7636052 A FR7636052 A FR 7636052A FR 7636052 A FR7636052 A FR 7636052A FR 2372499 A2 FR2372499 A2 FR 2372499A2
- Authority
- FR
- France
- Prior art keywords
- mask
- foil
- metal
- engraved
- foils
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011888 foil Substances 0.000 title abstract 8
- 239000002184 metal Substances 0.000 title abstract 4
- 238000010884 ion-beam technique Methods 0.000 title abstract 2
- 230000003628 erosive effect Effects 0.000 title 1
- 229910001092 metal group alloy Inorganic materials 0.000 abstract 4
- 150000002500 ions Chemical class 0.000 abstract 3
- 238000000034 method Methods 0.000 abstract 2
- 229910045601 alloy Inorganic materials 0.000 abstract 1
- 239000000956 alloy Substances 0.000 abstract 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 1
- 229910052786 argon Inorganic materials 0.000 abstract 1
- -1 argon ions Chemical class 0.000 abstract 1
- 239000006185 dispersion Substances 0.000 abstract 1
- 230000008030 elimination Effects 0.000 abstract 1
- 238000003379 elimination reaction Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
- H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
- H01C17/2404—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by charged particle impact, e.g. by electron or ion beam milling, sputtering, plasma etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C3/00—Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids
- H01C3/10—Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids the resistive element having zig-zag or sinusoidal configuration
- H01C3/12—Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids the resistive element having zig-zag or sinusoidal configuration lying in one plane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/22—Elongated resistive element being bent or curved, e.g. sinusoidal, helical
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Plasma & Fusion (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Abstract
On utilise une feuille métallique fixée sur un support isolant 21, on applique sur la feuille un masque comportant des sillons correspondant au contour du circuit électrique 20 à graver sur la feuille et on grave ce circuit 20 par bombardement ionique. Le procédé est appliqué à la réalisation de jauges de contrainte et de sondes thermométriques. Application notamment à la réalisation de jauges de contrainte et de sondes thermométriques planes de très faibles dimensions et de hautes performances.
Priority Applications (16)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7636052A FR2372499A2 (fr) | 1976-11-30 | 1976-11-30 | Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenues |
| BE178024A BE855171A (fr) | 1976-06-08 | 1977-05-27 | Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenues |
| GB22833/77A GB1578830A (en) | 1976-06-08 | 1977-05-30 | Method of manufacturing electric resistors from metal sheets or films and the resistors obtained thereby |
| AT386477A AT353893B (de) | 1976-06-08 | 1977-06-01 | Verfahren zur herstellung eines elektrischen schichtwiderstandes |
| SE7706399A SE414557B (sv) | 1976-06-08 | 1977-06-01 | Sett for tillverkning av elektriska motstand av en tunn folie av metallegering |
| NO771916A NO146586C (no) | 1976-06-08 | 1977-06-01 | Fremgangsmaate ved fremstilling av elektriske motstander |
| DE2724679A DE2724679B2 (de) | 1976-06-08 | 1977-06-01 | Verfahren zur Herstellung von elektrischen Widerstandselementen, beispielsweise für Wärmesonden und Dehnungsmeßstreifen |
| IT49714/77A IT1078455B (it) | 1976-06-08 | 1977-06-03 | Procedimento per la fabbricazione di resistenze elettriche da fogli o pellicole metalliche e prodotto ottenuto |
| IL52246A IL52246A0 (en) | 1976-06-08 | 1977-06-03 | Process of manufacture of electrical resistors from sheet material |
| DD77199348A DD134469A5 (de) | 1976-06-08 | 1977-06-07 | Verfahren zur herstellung von elektrischen widerstaenden |
| CA279,987A CA1085062A (fr) | 1976-06-08 | 1977-06-07 | Methode de fabrication de resistances electriques a partir de feuilles de metal, et les resistances ainsi fabriquees |
| CH701677A CH620545A5 (en) | 1976-06-08 | 1977-06-07 | Method of manufacturing electrical resistors from a metal foil or film, application to obtaining thermoelectrical probes or strain gauges |
| DK250577A DK144348C (da) | 1976-06-08 | 1977-06-07 | Fremgangsmaade til fremstilling af elektriske modstande ud fraen folie af metallegering |
| ES459573A ES459573A1 (es) | 1976-06-08 | 1977-06-07 | Procedimiento para la fabricacion de resistencias electri- cas. |
| NL7706265A NL168075C (nl) | 1976-06-08 | 1977-06-07 | Werkwijze voor het vervaardigen van elektrische weerstanden, uitgaande van bladen of films van metaal of metaallegering. |
| JP6633977A JPS5314400A (en) | 1976-06-08 | 1977-06-07 | Method of manufacturing electric resistor from metaliiccor alloyythinnplate or film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7636052A FR2372499A2 (fr) | 1976-11-30 | 1976-11-30 | Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenues |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2372499A2 true FR2372499A2 (fr) | 1978-06-23 |
| FR2372499B2 FR2372499B2 (fr) | 1981-12-18 |
Family
ID=9180470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7636052A Granted FR2372499A2 (fr) | 1976-06-08 | 1976-11-30 | Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenues |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2372499A2 (fr) |
-
1976
- 1976-11-30 FR FR7636052A patent/FR2372499A2/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| FR2372499B2 (fr) | 1981-12-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| CD | Change of name or company name |