FR2377841A1 - Appareil et cartouche pour la croissance de cristaux a partir d'un bain de fusion - Google Patents

Appareil et cartouche pour la croissance de cristaux a partir d'un bain de fusion

Info

Publication number
FR2377841A1
FR2377841A1 FR7716200A FR7716200A FR2377841A1 FR 2377841 A1 FR2377841 A1 FR 2377841A1 FR 7716200 A FR7716200 A FR 7716200A FR 7716200 A FR7716200 A FR 7716200A FR 2377841 A1 FR2377841 A1 FR 2377841A1
Authority
FR
France
Prior art keywords
cartridge
crystals
growth
bath
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7716200A
Other languages
English (en)
Other versions
FR2377841B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schott Solar CSP Inc
Original Assignee
Mobil Tyco Solar Energy Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mobil Tyco Solar Energy Corp filed Critical Mobil Tyco Solar Energy Corp
Publication of FR2377841A1 publication Critical patent/FR2377841A1/fr
Application granted granted Critical
Publication of FR2377841B1 publication Critical patent/FR2377841B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/002—Continuous growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/005—Simultaneous pulling of more than one crystal
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/24—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using mechanical means, e.g. shaping guides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/34—Edge-defined film-fed crystal-growth using dies or slits
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1036—Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die]
    • Y10T117/1044—Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die] including means forming a flat shape [e.g., ribbon]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

L'appareil comprend un four 2 dans lequel se trouve un creuset 48 contenant la masse en fusion de laquelle le cristal doit être tiré, au moins une cartouche 52 comprenant une filière capillaire 58, des moyens conducteurs de la chaleur pour le contrôle du gradient thermique du cristal qui croît à partir du bain de fusion 50, un mécanisme 54 de tirage de cristal à partir du bain 50.
FR7716200A 1977-01-24 1977-05-26 Appareil et cartouche pour la croissance de cristaux a partir d'un bain de fusion Granted FR2377841A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/761,941 US4118197A (en) 1977-01-24 1977-01-24 Cartridge and furnace for crystal growth

Publications (2)

Publication Number Publication Date
FR2377841A1 true FR2377841A1 (fr) 1978-08-18
FR2377841B1 FR2377841B1 (fr) 1983-12-16

Family

ID=25063674

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7716200A Granted FR2377841A1 (fr) 1977-01-24 1977-05-26 Appareil et cartouche pour la croissance de cristaux a partir d'un bain de fusion

Country Status (10)

Country Link
US (1) US4118197A (fr)
JP (1) JPS597676B2 (fr)
AU (1) AU509354B2 (fr)
CA (1) CA1087073A (fr)
DE (1) DE2730161A1 (fr)
FR (1) FR2377841A1 (fr)
GB (2) GB1539126A (fr)
IL (1) IL51999A (fr)
IN (1) IN147431B (fr)
NL (1) NL7705395A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2502650A1 (fr) * 1981-03-30 1982-10-01 Mobil Tyco Solar Energy Corp Appareil et procede pour faire croitre des corps cristallins en forme de ruban

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4335081A (en) * 1979-01-15 1982-06-15 Mobil Tyco Solar Energy Corporation Crystal growth furnace with trap doors
US4271129A (en) 1979-03-06 1981-06-02 Rca Corporation Heat radiation deflectors within an EFG crucible
US4415401A (en) * 1980-03-10 1983-11-15 Mobil Solar Energy Corporation Control of atmosphere surrounding crystal growth zone
US4267010A (en) * 1980-06-16 1981-05-12 Mobil Tyco Solar Energy Corporation Guidance mechanism
US4443411A (en) * 1980-12-15 1984-04-17 Mobil Solar Energy Corporation Apparatus for controlling the atmosphere surrounding a crystal growth zone
US4410494A (en) * 1981-04-13 1983-10-18 Siltec Corporation Apparatus for controlling flow of molten material between crystal growth furnaces and a replenishment crucible
US4937053A (en) * 1987-03-27 1990-06-26 Mobil Solar Energy Corporation Crystal growing apparatus
KR890700543A (ko) * 1987-03-27 1989-04-25 버나드 엠. 길스피 결정성장 장치
DE69017642T2 (de) * 1989-12-22 1995-07-06 Shinetsu Handotai Kk Vorrichtung zur Herstellung von Einkristallen nach dem Czochralski-Verfahren.
US5037622A (en) * 1990-07-13 1991-08-06 Mobil Solar Energy Corporation Wet-tip die for EFG crystal growth apparatus
US6537372B1 (en) * 1999-06-29 2003-03-25 American Crystal Technologies, Inc. Heater arrangement for crystal growth furnace
US6602345B1 (en) 1999-06-29 2003-08-05 American Crystal Technologies, Inc., Heater arrangement for crystal growth furnace
DE602004030828D1 (de) * 2004-04-15 2011-02-10 Faculdade De Ciencias Da Universidade De Lisboa Verfahren und vorrichtung zum ziehen von halbleiter-, insbesondere silicium-, bändern
US7959732B1 (en) * 2005-06-17 2011-06-14 Saint-Gobain Ceramics & Plastics, Inc. Apparatus and method for monitoring and controlling crystal growth
KR20100021630A (ko) * 2007-06-14 2010-02-25 에버그린 솔라, 인크. 리본 결정 풀링 노에 대한 제거 가능한 열 제어
US20100314804A1 (en) * 2007-08-31 2010-12-16 Antonio Vallera Method for the production of semiconductor ribbons from a gaseous feedstock
ES2425885T3 (es) 2008-08-18 2013-10-17 Max Era, Inc. Procedimiento y aparato para el desarrollo de una cinta cristalina mientras se controla el transporte de contaminantes en suspensión en un gas a través de una superficie de cinta
US8263914B2 (en) * 2008-08-27 2012-09-11 AMG IdealCast Corporation Cartridge heater and method of use
US9206525B2 (en) 2011-11-30 2015-12-08 General Electric Company Method for configuring a system to grow a crystal by coupling a heat transfer device comprising at least one elongate member beneath a crucible
EP3233744B1 (fr) * 2014-12-15 2019-05-29 Corning Incorporated Procédé et appareil pour positioner une préforme sur un moule

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3453352A (en) * 1964-12-14 1969-07-01 Texas Instruments Inc Method and apparatus for producing crystalline semiconductor ribbon
US3471266A (en) * 1967-05-29 1969-10-07 Tyco Laboratories Inc Growth of inorganic filaments
US3591348A (en) * 1968-01-24 1971-07-06 Tyco Laboratories Inc Method of growing crystalline materials
US3650703A (en) * 1967-09-08 1972-03-21 Tyco Laboratories Inc Method and apparatus for growing inorganic filaments, ribbon from the melt
DE2557186A1 (de) * 1975-12-18 1977-06-23 Siemens Ag Verfahren und vorrichtung zum herstellen von halbleitermaterialstaeben, insbesondere von siliciumstaeben mit grossen durchmessern, durch tiegelfreies zonenschmelzen

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2927008A (en) * 1956-10-29 1960-03-01 Shockley Transistor Corp Crystal growing apparatus
DE1090868B (de) * 1958-10-15 1960-10-13 Siemens Ag Verfahren zum Ziehen von einkristallinen Halbleiterstaeben aus Schmelzen
US3124489A (en) * 1960-05-02 1964-03-10 Method of continuously growing thin strip crystals
DE1193475B (de) * 1962-08-23 1965-05-26 Westinghouse Electric Corp Vorrichtung zum Drehen, Heben und Senken des Tiegels beim Ziehen von dendritischen Einkristallen
US3291571A (en) * 1963-12-23 1966-12-13 Gen Motors Corp Crystal growth
US3265469A (en) * 1964-09-21 1966-08-09 Gen Electric Crystal growing apparatus
US3701636A (en) * 1970-09-23 1972-10-31 Tyco Laboratories Inc Crystal growing apparatus
BE811057A (fr) * 1974-02-15 1974-08-16 Elphiac Sa Machine universelle pour l'elaboration de monocristaux de materiaux semiconducteurs ou autres suivant les methodes classiques.
US3961905A (en) * 1974-02-25 1976-06-08 Corning Glass Works Crucible and heater assembly for crystal growth from a melt

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3453352A (en) * 1964-12-14 1969-07-01 Texas Instruments Inc Method and apparatus for producing crystalline semiconductor ribbon
US3471266A (en) * 1967-05-29 1969-10-07 Tyco Laboratories Inc Growth of inorganic filaments
US3650703A (en) * 1967-09-08 1972-03-21 Tyco Laboratories Inc Method and apparatus for growing inorganic filaments, ribbon from the melt
US3591348A (en) * 1968-01-24 1971-07-06 Tyco Laboratories Inc Method of growing crystalline materials
DE2557186A1 (de) * 1975-12-18 1977-06-23 Siemens Ag Verfahren und vorrichtung zum herstellen von halbleitermaterialstaeben, insbesondere von siliciumstaeben mit grossen durchmessern, durch tiegelfreies zonenschmelzen

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2502650A1 (fr) * 1981-03-30 1982-10-01 Mobil Tyco Solar Energy Corp Appareil et procede pour faire croitre des corps cristallins en forme de ruban

Also Published As

Publication number Publication date
IL51999A (en) 1980-07-31
JPS5393183A (en) 1978-08-15
US4118197A (en) 1978-10-03
AU509354B2 (en) 1980-05-08
GB1539126A (en) 1979-01-24
GB1539125A (en) 1979-01-24
AU2484077A (en) 1978-11-09
CA1087073A (fr) 1980-10-07
DE2730161A1 (de) 1978-07-27
IN147431B (fr) 1980-02-23
NL7705395A (nl) 1978-07-26
DE2730161C2 (fr) 1991-02-21
IL51999A0 (en) 1977-07-31
JPS597676B2 (ja) 1984-02-20
FR2377841B1 (fr) 1983-12-16

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Legal Events

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CD Change of name or company name
ST Notification of lapse