FR2414367A1 - Procede d'epitaxie par faisceau moleculaire avec pre-melange - Google Patents

Procede d'epitaxie par faisceau moleculaire avec pre-melange

Info

Publication number
FR2414367A1
FR2414367A1 FR7900889A FR7900889A FR2414367A1 FR 2414367 A1 FR2414367 A1 FR 2414367A1 FR 7900889 A FR7900889 A FR 7900889A FR 7900889 A FR7900889 A FR 7900889A FR 2414367 A1 FR2414367 A1 FR 2414367A1
Authority
FR
France
Prior art keywords
furnace
alloying elements
mix
molecular beam
beam epitaxy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7900889A
Other languages
English (en)
Other versions
FR2414367B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of FR2414367A1 publication Critical patent/FR2414367A1/fr
Application granted granted Critical
Publication of FR2414367B1 publication Critical patent/FR2414367B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/002—Controlling or regulating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/006—Apparatus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/169—Vacuum deposition, e.g. including molecular beam epitaxy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/961—Ion beam source and generation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

L'invention concerne la fabrication des dispositifs à semi-conducteurs. Pour réaliser des couches épitaxiales de composés ternaires et quaternaires, en définissant avec précision le rapport de concentration de deux éléments d'alliage dans le composé final, on charge des quantités prédéterminées des éléments d'alliage dans un même four, par exemple le four 5, et on chauffe ce four à une température telle que le faisceau atomique issu du four contienne les deux éléments d'alliage dans un rapport de flux prédéterminé. Application à la fabrication des diodes laser.
FR7900889A 1978-01-16 1979-01-15 Procede d'epitaxie par faisceau moleculaire avec pre-melange Granted FR2414367A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/869,779 US4159919A (en) 1978-01-16 1978-01-16 Molecular beam epitaxy using premixing

Publications (2)

Publication Number Publication Date
FR2414367A1 true FR2414367A1 (fr) 1979-08-10
FR2414367B1 FR2414367B1 (fr) 1982-10-22

Family

ID=25354256

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7900889A Granted FR2414367A1 (fr) 1978-01-16 1979-01-15 Procede d'epitaxie par faisceau moleculaire avec pre-melange

Country Status (9)

Country Link
US (1) US4159919A (fr)
JP (1) JPS54101779A (fr)
BE (1) BE873472A (fr)
DE (1) DE2901439A1 (fr)
FR (1) FR2414367A1 (fr)
GB (1) GB2012818B (fr)
IT (1) IT1110988B (fr)
NL (1) NL7900308A (fr)
SE (1) SE432032B (fr)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0031180A3 (fr) * 1979-12-19 1983-07-20 Philips Electronics Uk Limited Procédé de croissance d'une couche d'un composé III-V dopé par épitaxie par faisceau moléculaire et dispositif semiconducteur comportant un substrat semiconducteur muni d'une couche épitaxiale d'un composé III-V dopé déposé par ce procédé
JPS5711899A (en) * 1980-06-24 1982-01-21 Fujitsu Ltd Molecular beam epitaxial growth
US4392453A (en) * 1981-08-26 1983-07-12 Varian Associates, Inc. Molecular beam converters for vacuum coating systems
US4426237A (en) 1981-10-13 1984-01-17 International Business Machines Corporation Volatile metal oxide suppression in molecular beam epitaxy systems
US4550411A (en) * 1983-03-30 1985-10-29 Vg Instruments Group Limited Sources used in molecular beam epitaxy
JPS6051696A (ja) * 1983-08-30 1985-03-23 Rohm Co Ltd 分子線エピタキシャル装置のウエハ装着構造
US4504329A (en) * 1983-10-06 1985-03-12 The United States Of America As Represented By The Secretary Of The Air Force Process for the epitaxial deposition of III-V compounds utilizing a binary alloy as the metallic source
JPS60117468U (ja) * 1984-01-17 1985-08-08 土田　静夫 ろうそく用火消具
GB2158843A (en) * 1984-05-14 1985-11-20 Philips Electronic Associated Method of manufacturing a semiconductor device by molecular beam epitaxy
GB2162207B (en) * 1984-07-26 1989-05-10 Japan Res Dev Corp Semiconductor crystal growth apparatus
JPH0669025B2 (ja) * 1984-12-07 1994-08-31 シャープ株式会社 半導体結晶成長装置
US5047111A (en) * 1985-03-16 1991-09-10 Director-General Of The Agency Of Industrial Science And Technology Method of forming a metal silicide film
US5250148A (en) * 1985-05-15 1993-10-05 Research Development Corporation Process for growing GaAs monocrystal film
JPS63502542A (ja) * 1985-08-07 1988-09-22 オ−ストラリア国 成長する合金薄膜の均一性の制御
KR900002687B1 (ko) * 1985-12-16 1990-04-23 후지쓰가부시끼가이샤 Mbe법에 의한 기판에 격자 정합시키는 4원 또는 5원 흔정 반도체의 성장방법
US4786616A (en) * 1987-06-12 1988-11-22 American Telephone And Telegraph Company Method for heteroepitaxial growth using multiple MBE chambers
EP0307096A3 (fr) * 1987-09-08 1990-12-05 Varian Associates, Inc. Dispositif pour la mesure de la vitesse de croissance dans le procédé d'épitaxie par jets moléculaires
JPH0647515B2 (ja) * 1988-12-08 1994-06-22 シャープ株式会社 化合物半導体エピタキシャル成長法
US5028561A (en) * 1989-06-15 1991-07-02 Hughes Aircraft Company Method of growing p-type group II-VI material
JP2559492B2 (ja) * 1989-07-05 1996-12-04 シャープ株式会社 化合物半導体発光素子の製造方法
JPH0751478B2 (ja) * 1989-11-24 1995-06-05 新技術事業団 化合物結晶のエピタキシャル成長方法
JPH07115990B2 (ja) * 1990-06-11 1995-12-13 松下電器産業株式会社 結晶表面検査方法および結晶成長装置
US5171399A (en) * 1990-08-15 1992-12-15 The United States Of America As Represented By The United States Department Of Energy Reflection mass spectrometry technique for monitoring and controlling composition during molecular beam epitaxy
JP2987379B2 (ja) * 1991-11-30 1999-12-06 科学技術振興事業団 半導体結晶のエピタキシャル成長方法
US5364492A (en) * 1992-09-17 1994-11-15 Varian Associates, Inc. Method of deposing by molecular beam epitaxy
RU2132583C1 (ru) * 1998-03-03 1999-06-27 Санкт-Петербургский государственный электротехнический университет Способ управления процессом получения эпитаксиальной полупроводниковой структуры
US6214712B1 (en) * 1999-09-16 2001-04-10 Ut-Battelle, Llc Method of physical vapor deposition of metal oxides on semiconductors
JP3964367B2 (ja) * 2003-08-25 2007-08-22 シャープ株式会社 分子線エピタキシャル成長装置及びその制御方法
JP2006176831A (ja) * 2004-12-22 2006-07-06 Tokyo Electron Ltd 蒸着装置
WO2011082179A1 (fr) * 2009-12-28 2011-07-07 Global Solar Energy, Inc. Appareil et procédés de mélange et de déposition de compositions photovoltaïques en film mince

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3634143A (en) * 1969-05-08 1972-01-11 Avco Corp Preparation of iii{14 v alloys for infrared detectors
US3672992A (en) * 1969-07-30 1972-06-27 Gen Electric Method of forming group iii-v compound photoemitters having a high quantum efficiency and long wavelength response
US3839084A (en) * 1972-11-29 1974-10-01 Bell Telephone Labor Inc Molecular beam epitaxy method for fabricating magnesium doped thin films of group iii(a)-v(a) compounds

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3716424A (en) * 1970-04-02 1973-02-13 Us Navy Method of preparation of lead sulfide pn junction diodes
US3793070A (en) * 1971-06-01 1974-02-19 Us Navy Method of varying the carrier concentration of lead-tin sulfide epitaxial films
JPS4874484A (fr) * 1972-01-12 1973-10-06
US3915765A (en) * 1973-06-25 1975-10-28 Bell Telephone Labor Inc MBE technique for fabricating semiconductor devices having low series resistance
IN145018B (fr) * 1974-08-22 1978-08-12 Westinghouse Electric Corp

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3634143A (en) * 1969-05-08 1972-01-11 Avco Corp Preparation of iii{14 v alloys for infrared detectors
US3672992A (en) * 1969-07-30 1972-06-27 Gen Electric Method of forming group iii-v compound photoemitters having a high quantum efficiency and long wavelength response
US3839084A (en) * 1972-11-29 1974-10-01 Bell Telephone Labor Inc Molecular beam epitaxy method for fabricating magnesium doped thin films of group iii(a)-v(a) compounds

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
EXBK/78 *

Also Published As

Publication number Publication date
SE7900143L (sv) 1979-07-17
BE873472A (fr) 1979-05-02
IT7919291A0 (it) 1979-01-15
DE2901439A1 (de) 1979-07-19
US4159919A (en) 1979-07-03
FR2414367B1 (fr) 1982-10-22
SE432032B (sv) 1984-03-12
JPS5745715B2 (fr) 1982-09-29
GB2012818A (en) 1979-08-01
JPS54101779A (en) 1979-08-10
GB2012818B (en) 1982-07-14
IT1110988B (it) 1986-01-13
NL7900308A (nl) 1979-07-18

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