FR2472619B1 - - Google Patents

Info

Publication number
FR2472619B1
FR2472619B1 FR7932152A FR7932152A FR2472619B1 FR 2472619 B1 FR2472619 B1 FR 2472619B1 FR 7932152 A FR7932152 A FR 7932152A FR 7932152 A FR7932152 A FR 7932152A FR 2472619 B1 FR2472619 B1 FR 2472619B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7932152A
Other languages
French (fr)
Other versions
FR2472619A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to DE19792950997 priority Critical patent/DE2950997C2/de
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to CH1147879A priority patent/CH643303A5/de
Priority to FR7932152A priority patent/FR2472619A1/fr
Publication of FR2472619A1 publication Critical patent/FR2472619A1/fr
Application granted granted Critical
Publication of FR2472619B1 publication Critical patent/FR2472619B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7932152A 1979-12-18 1979-12-27 Appareil de revetement par pulverisation sous vide Granted FR2472619A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE19792950997 DE2950997C2 (de) 1979-12-18 1979-12-18 Vorrichtung zum Beschichten
CH1147879A CH643303A5 (en) 1979-12-18 1979-12-27 Appliance for coating surfaces by means of cathode sputtering
FR7932152A FR2472619A1 (fr) 1979-12-18 1979-12-27 Appareil de revetement par pulverisation sous vide

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19792950997 DE2950997C2 (de) 1979-12-18 1979-12-18 Vorrichtung zum Beschichten
CH1147879A CH643303A5 (en) 1979-12-18 1979-12-27 Appliance for coating surfaces by means of cathode sputtering
FR7932152A FR2472619A1 (fr) 1979-12-18 1979-12-27 Appareil de revetement par pulverisation sous vide

Publications (2)

Publication Number Publication Date
FR2472619A1 FR2472619A1 (fr) 1981-07-03
FR2472619B1 true FR2472619B1 (cs) 1984-11-02

Family

ID=27176630

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7932152A Granted FR2472619A1 (fr) 1979-12-18 1979-12-27 Appareil de revetement par pulverisation sous vide

Country Status (3)

Country Link
CH (1) CH643303A5 (cs)
DE (1) DE2950997C2 (cs)
FR (1) FR2472619A1 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4423701A (en) * 1982-03-29 1984-01-03 Energy Conversion Devices, Inc. Glow discharge deposition apparatus including a non-horizontally disposed cathode

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1419289A1 (de) * 1961-01-26 1968-12-12 Siemens Ag Verfahren zum Herstellen dotierter Halbleiterkoerper
FR1483391A (fr) * 1966-06-15 1967-06-02 Ion Physics Corp Procédé et appareil pour former des dépôts sous vide poussé
US3437888A (en) * 1966-07-01 1969-04-08 Union Carbide Corp Method of providing electrical contacts by sputtering a film of gold on a layer of sputtered molybdenum
US3507248A (en) * 1967-06-15 1970-04-21 Ibm Vacuum evaporation coating apparatus including means for precleaning substrates by ion bombardment
CA928249A (en) * 1969-04-21 1973-06-12 Eastman Kodak Company Triode sputtering apparatus
GB1365492A (en) * 1971-02-05 1974-09-04 Triplex Safety Glass Co Metal oxide films
CH542772A (de) * 1971-09-21 1973-10-15 Balzers Patent Beteilig Ag Einrichtung zum Transportieren von zu beschichtenden Substraten durch eine Vakuumanlage
DE2253769C3 (de) * 1972-11-02 1979-07-12 Siemens Ag, 1000 Berlin Und 8000 Muenchen Kathodenzerstäubungsanlage mit kontinuierlichem Substratdurchlauf
DE2522352A1 (de) * 1975-05-20 1976-12-02 Siemens Ag Kathodenzerstaeubungsanlage
DE2651382A1 (de) * 1976-11-11 1978-05-18 Philips Patentverwaltung Verfahren zur kathodenzerstaeubung
JPS556434A (en) * 1978-06-28 1980-01-17 Ulvac Corp Sputtering apparatus

Also Published As

Publication number Publication date
DE2950997A1 (de) 1981-06-25
DE2950997C2 (de) 1986-10-09
FR2472619A1 (fr) 1981-07-03
CH643303A5 (en) 1984-05-30

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Legal Events

Date Code Title Description
ST Notification of lapse