FR2496111B1 - Composition polymere sensible a la lumiere ou aux radiations, son utilisation pour former des dessins en relief, et composes entrant dans cette composition - Google Patents

Composition polymere sensible a la lumiere ou aux radiations, son utilisation pour former des dessins en relief, et composes entrant dans cette composition

Info

Publication number
FR2496111B1
FR2496111B1 FR8123637A FR8123637A FR2496111B1 FR 2496111 B1 FR2496111 B1 FR 2496111B1 FR 8123637 A FR8123637 A FR 8123637A FR 8123637 A FR8123637 A FR 8123637A FR 2496111 B1 FR2496111 B1 FR 2496111B1
Authority
FR
France
Prior art keywords
composition
radiation
light
compounds including
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8123637A
Other languages
English (en)
Other versions
FR2496111A1 (fr
Inventor
Fumio Kataoka
Fusaji Shoji
Isao Obara
Hitoshi Yokono
Tokio Isogai
Mitumasa Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP17720080A external-priority patent/JPS57102926A/ja
Priority claimed from JP9649481A external-priority patent/JPS57212433A/ja
Priority claimed from JP9649381A external-priority patent/JPS57212432A/ja
Priority claimed from JP9648981A external-priority patent/JPS57212151A/ja
Priority claimed from JP16580681A external-priority patent/JPS5867724A/ja
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of FR2496111A1 publication Critical patent/FR2496111A1/fr
Application granted granted Critical
Publication of FR2496111B1 publication Critical patent/FR2496111B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0387—Polyamides or polyimides
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00—Use of organic ingredients
    • C08K5/0008—Organic ingredients according to more than one of the "one dot" groups of C08K5/01 - C08K5/59
    • C08K5/0041—Optical brightening agents, organic pigments
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L79/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
    • C08L79/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08L79/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/008—Azides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/12—Nitrogen compound containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/12—Nitrogen compound containing
    • Y10S430/121—Nitrogen in heterocyclic ring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S522/00—Synthetic resins or natural rubbers -- part of the class 520 series
    • Y10S522/904—Monomer or polymer contains initiating group

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
FR8123637A 1980-12-17 1981-12-17 Composition polymere sensible a la lumiere ou aux radiations, son utilisation pour former des dessins en relief, et composes entrant dans cette composition Expired FR2496111B1 (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP17720080A JPS57102926A (en) 1980-12-17 1980-12-17 Light- or radiation-sensitive polymer composition
JP9649481A JPS57212433A (en) 1981-06-24 1981-06-24 Photosensitive polymer composition
JP9649381A JPS57212432A (en) 1981-06-24 1981-06-24 Photosensitive polymer composition
JP9648981A JPS57212151A (en) 1981-06-24 1981-06-24 Photosensitive substance
JP16580681A JPS5867724A (ja) 1981-10-19 1981-10-19 感光性重合体組成物

Publications (2)

Publication Number Publication Date
FR2496111A1 FR2496111A1 (fr) 1982-06-18
FR2496111B1 true FR2496111B1 (fr) 1987-05-07

Family

ID=27525793

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8123637A Expired FR2496111B1 (fr) 1980-12-17 1981-12-17 Composition polymere sensible a la lumiere ou aux radiations, son utilisation pour former des dessins en relief, et composes entrant dans cette composition

Country Status (4)

Country Link
US (1) US4451551A (fr)
DE (1) DE3150054C2 (fr)
FR (1) FR2496111B1 (fr)
GB (1) GB2092164B (fr)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57168942A (en) * 1981-04-13 1982-10-18 Hitachi Ltd Photosensitive polymer composition
US4554237A (en) * 1981-12-25 1985-11-19 Hitach, Ltd. Photosensitive resin composition and method for forming fine patterns with said composition
JPS58223149A (ja) * 1982-06-22 1983-12-24 Toray Ind Inc 感光性ポリイミド用現像液
US4556625A (en) * 1982-07-09 1985-12-03 Armstrong World Industries, Inc. Development of a colored image on a cellulosic material with monosulfonyl azides
US4579809A (en) * 1982-10-22 1986-04-01 Ciba-Geigy Corporation Positive image formation
EP0119719B1 (fr) * 1983-03-03 1987-05-06 Toray Industries, Inc. Composition de polymère sensible au rayonnement
JPS59160139A (ja) * 1983-03-04 1984-09-10 Hitachi Ltd 感光性重合体組成物
US4657832A (en) * 1983-05-18 1987-04-14 Ciba-Geigy Corporation Photosensitive polymers as coating materials
JPS6026033A (ja) * 1983-07-01 1985-02-08 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン 感光性ポリアミド酸誘導体およびこれを用いて基体上にポリイミドパタ−ンを形成する方法
JPS6042425A (ja) * 1983-08-17 1985-03-06 Toray Ind Inc 化学線感応性重合体組成物
US4656116A (en) * 1983-10-12 1987-04-07 Ciba-Geigy Corporation Radiation-sensitive coating composition
US4640885A (en) * 1983-11-25 1987-02-03 Armstrong World Industries, Inc. Mono-sulfonyl azide composition used to photolytically develop a colored image on a cellulosic material
US4786569A (en) * 1985-09-04 1988-11-22 Ciba-Geigy Corporation Adhesively bonded photostructurable polyimide film
EP0224680B1 (fr) * 1985-12-05 1992-01-15 International Business Machines Corporation Compositions photoréserves à base de quinonediazides sensibilisées par des acides polyamides ayant un taux de dissolution réduit dans les révélateurs basiques
US4942108A (en) * 1985-12-05 1990-07-17 International Business Machines Corporation Process of making diazoquinone sensitized polyamic acid based photoresist compositions having reduced dissolution rates in alkaline developers
US4830953A (en) * 1986-08-18 1989-05-16 Ciba-Geigy Corporation Radiation-sensitive coating composition with polyazide and polyimide and process of photo-crosslinking the coating
EP0452986A3 (en) * 1986-09-04 1991-12-18 Kanegafuchi Kagaku Kogyo Kabushiki Kaisha Photosensitive amphiphilic high molecular weight polymers and process for their production
US4792506A (en) * 1986-09-19 1988-12-20 Minnesota Mining And Manufacturing Company Polymerizable compositions containing iodonium photoinitiators and photosensitizers therefor
US5019482A (en) * 1987-08-12 1991-05-28 Asahi Kasei Kogyo Kabushiki Kaisha Polymer/oxime ester/coumarin compound photosensitive composition
US4791045A (en) * 1988-01-25 1988-12-13 Minnesota Mining And Manufacturing Company Photosensitizers and polymerizable compositions with mannich bases and iodonium salts
US4908096A (en) * 1988-06-24 1990-03-13 Allied-Signal Inc. Photodefinable interlevel dielectrics
DE3837612A1 (de) * 1988-11-05 1990-05-23 Ciba Geigy Ag Positiv-fotoresists von polyimid-typ
AU5433890A (en) * 1989-03-30 1990-11-05 Brewer Science, Inc. Base-soluble polyimide release layers for use in microlithographic processing
US5057399A (en) * 1989-03-31 1991-10-15 Tony Flaim Method for making polyimide microlithographic compositions soluble in alkaline media
EP0430221B1 (fr) * 1989-11-30 1997-04-16 Sumitomo Bakelite Company Limited Composition résineuse photosensible
US5177181A (en) * 1991-06-06 1993-01-05 Occidental Chemical Corporation Diamines and photosensitive polyimides made therefrom
US5206117A (en) * 1991-08-14 1993-04-27 Labadie Jeffrey W Photosensitive polyamic alkyl ester composition and process for its use
US5310862A (en) * 1991-08-20 1994-05-10 Toray Industries, Inc. Photosensitive polyimide precursor compositions and process for preparing same
US5472823A (en) * 1992-01-20 1995-12-05 Hitachi Chemical Co., Ltd. Photosensitive resin composition
JP2635901B2 (ja) * 1992-03-13 1997-07-30 インターナショナル・ビジネス・マシーンズ・コーポレイション ポリイミドのネガティブ像形成方法
WO1994018607A1 (fr) * 1993-02-03 1994-08-18 Toray Industries, Inc. Procede de formation d'un motif en polyimide positif
JP3687988B2 (ja) 1993-09-03 2005-08-24 日立化成工業株式会社 ｉ線ステッパ用感光性樹脂組成物
US5446074A (en) * 1993-12-17 1995-08-29 International Business Machines Corporation Photosensitive polyimide precursors
JP2974279B2 (ja) * 1995-07-06 1999-11-10 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー ポリアミド酸を含有するホトレジスト層を有するインクジェットヘッド
US6001517A (en) * 1996-10-31 1999-12-14 Kabushiki Kaisha Toshiba Positive photosensitive polymer composition, method of forming a pattern and electronic parts
JP3477077B2 (ja) * 1997-07-01 2003-12-10 株式会社東芝 ネガ型感光性樹脂組成物、これを用いたパターン形成方法、および電子部品
US20030083753A1 (en) * 2001-10-22 2003-05-01 Rajdeep Kalgutkar Photocuring system database
KR101060829B1 (ko) * 2003-08-08 2011-08-30 코닌클리즈케 필립스 일렉트로닉스 엔.브이. 액정 분자를 정렬하기 위해 반응성 메소젠을 갖는 정렬층
US7358223B2 (en) * 2004-10-04 2008-04-15 Nitto Denko Corporation Biodegradable cationic polymers
CN103554494A (zh) * 2013-10-24 2014-02-05 倚顿新材料（苏州）有限公司 一种离子型负性光敏聚酰亚胺材料的制备方法
TWI887304B (zh) 2019-11-26 2025-06-21 德商馬克專利公司 非硫醇類基於氮之疏水性高分子刷材料及其用於基板表面修飾之用途

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3179614A (en) * 1961-03-13 1965-04-20 Du Pont Polyamide-acids, compositions thereof, and process for their preparation
DE1572070C3 (de) * 1966-03-12 1979-03-22 Hoechst Ag, 6000 Frankfurt Lichtempfindliches Kopiermaterial
DE1597614B2 (de) * 1967-07-07 1977-06-23 Hoechst Ag, 6000 Frankfurt Lichtempfindliche kopiermasse
US3984250A (en) * 1970-02-12 1976-10-05 Eastman Kodak Company Light-sensitive diazoketone and azide compositions and photographic elements
US3740305A (en) * 1971-10-01 1973-06-19 Gen Electric Composite materials bonded with siloxane containing polyimides
JPS516562B2 (fr) * 1971-12-15 1976-02-28
JPS49127708A (fr) * 1973-04-16 1974-12-06
US3923522A (en) * 1973-07-18 1975-12-02 Oji Paper Co Photosensitive composition
US4197133A (en) * 1977-10-14 1980-04-08 Ciba-Geigy Corporation Photo-curable compositions of matter containing bis-azidophthalimidyl derivatives
AU534941B2 (en) * 1979-05-11 1984-02-23 Minnesota Mining And Manufacturing Company Curing polyamic acid
US4242437A (en) * 1979-05-11 1980-12-30 Minnesota Mining And Manufacturing Company Photosensitized polyamic acids curable by exposure to actinic radiation

Also Published As

Publication number Publication date
US4451551A (en) 1984-05-29
GB2092164B (en) 1984-12-05
DE3150054A1 (de) 1982-07-22
DE3150054C2 (de) 1985-10-31
GB2092164A (en) 1982-08-11
FR2496111A1 (fr) 1982-06-18

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