FR2622352B3 - Procede et dispositif pour l'enlevement d'un revetement photosensible - Google Patents

Procede et dispositif pour l'enlevement d'un revetement photosensible

Info

Publication number
FR2622352B3
FR2622352B3 FR888813794A FR8813794A FR2622352B3 FR 2622352 B3 FR2622352 B3 FR 2622352B3 FR 888813794 A FR888813794 A FR 888813794A FR 8813794 A FR8813794 A FR 8813794A FR 2622352 B3 FR2622352 B3 FR 2622352B3
Authority
FR
France
Prior art keywords
photosensitive coating
photosensitive
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR888813794A
Other languages
English (en)
Other versions
FR2622352A1 (fr
Inventor
Yehuda Nachshon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GALRAM Tech IND Ltd
Original Assignee
GALRAM Tech IND Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GALRAM Tech IND Ltd filed Critical GALRAM Tech IND Ltd
Publication of FR2622352A1 publication Critical patent/FR2622352A1/fr
Application granted granted Critical
Publication of FR2622352B3 publication Critical patent/FR2622352B3/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/003—Cyclically moving conveyors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/04—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of grippers
    • B23Q7/041—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of grippers step by step
    • B23Q7/042—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of grippers step by step for the axial transport of long workpieces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/005—Feeding or manipulating devices specially adapted to grinding machines
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
    • H10P50/286—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of organic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
    • H10P50/286—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of organic materials
    • H10P50/287—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of organic materials by chemical means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/146—Laser beam

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Drying Of Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
FR888813794A 1987-10-23 1988-10-21 Procede et dispositif pour l'enlevement d'un revetement photosensible Expired - Lifetime FR2622352B3 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL84255A IL84255A (en) 1987-10-23 1987-10-23 Process for removal of post- baked photoresist layer

Publications (2)

Publication Number Publication Date
FR2622352A1 FR2622352A1 (fr) 1989-04-28
FR2622352B3 true FR2622352B3 (fr) 1990-02-02

Family

ID=11058263

Family Applications (2)

Application Number Title Priority Date Filing Date
FR888813794A Expired - Lifetime FR2622352B3 (fr) 1987-10-23 1988-10-21 Procede et dispositif pour l'enlevement d'un revetement photosensible
FR8813936A Expired - Lifetime FR2622134B1 (fr) 1987-10-23 1988-10-25 Ensemble de machine d'usinage et de transporteur de pieces a usiner

Family Applications After (1)

Application Number Title Priority Date Filing Date
FR8813936A Expired - Lifetime FR2622134B1 (fr) 1987-10-23 1988-10-25 Ensemble de machine d'usinage et de transporteur de pieces a usiner

Country Status (6)

Country Link
US (1) US5114834A (fr)
DE (1) DE3835636A1 (fr)
FR (2) FR2622352B3 (fr)
GB (1) GB2211629B (fr)
IL (1) IL84255A (fr)
NL (1) NL194997C (fr)

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Also Published As

Publication number Publication date
NL194997C (nl) 2003-04-24
DE3835636A1 (de) 1989-05-03
FR2622134A1 (fr) 1989-04-28
FR2622352A1 (fr) 1989-04-28
IL84255A (en) 1993-02-21
NL8802587A (nl) 1989-05-16
FR2622134B1 (fr) 1994-04-08
GB2211629A (en) 1989-07-05
GB2211629B (en) 1992-02-19
GB8824547D0 (en) 1988-11-23
US5114834A (en) 1992-05-19
IL84255A0 (en) 1988-03-31

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