FR2674372B1 - Structure d'interconnexion dans un dispositif a semiconducteurs et son procede de fabrication. - Google Patents

Structure d'interconnexion dans un dispositif a semiconducteurs et son procede de fabrication.

Info

Publication number
FR2674372B1
FR2674372B1 FR9109992A FR9109992A FR2674372B1 FR 2674372 B1 FR2674372 B1 FR 2674372B1 FR 9109992 A FR9109992 A FR 9109992A FR 9109992 A FR9109992 A FR 9109992A FR 2674372 B1 FR2674372 B1 FR 2674372B1
Authority
FR
France
Prior art keywords
manufacturing
semiconductor device
interconnection structure
interconnection
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9109992A
Other languages
English (en)
Other versions
FR2674372A1 (fr
Inventor
Dong-Joo Bae
Sung-Nam Chang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of FR2674372A1 publication Critical patent/FR2674372A1/fr
Application granted granted Critical
Publication of FR2674372B1 publication Critical patent/FR2674372B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/056—Manufacture or treatment of conductive parts of the interconnections by filling conductive material into holes, grooves or trenches
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/42—Vias, e.g. via plugs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/44—Conductive materials thereof
    • H10W20/4451—Semiconductor materials, e.g. polysilicon
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
    • Y10S257/923—Active solid-state devices, e.g. transistors, solid-state diodes with means to optimize electrical conductor current carrying capacity, e.g. particular conductor aspect ratio
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/978—Semiconductor device manufacturing: process forming tapered edges on substrate or adjacent layers
FR9109992A 1991-03-20 1991-08-06 Structure d'interconnexion dans un dispositif a semiconducteurs et son procede de fabrication. Expired - Lifetime FR2674372B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019910004393A KR940000504B1 (ko) 1991-03-20 1991-03-20 반도체장치의 층간콘택구조 및 그 제조방법

Publications (2)

Publication Number Publication Date
FR2674372A1 FR2674372A1 (fr) 1992-09-25
FR2674372B1 true FR2674372B1 (fr) 1994-04-15

Family

ID=19312268

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9109992A Expired - Lifetime FR2674372B1 (fr) 1991-03-20 1991-08-06 Structure d'interconnexion dans un dispositif a semiconducteurs et son procede de fabrication.

Country Status (8)

Country Link
US (2) US5285110A (fr)
JP (1) JPH0831523B2 (fr)
KR (1) KR940000504B1 (fr)
DE (1) DE4126775C2 (fr)
FR (1) FR2674372B1 (fr)
GB (1) GB2253938B (fr)
IT (1) IT1251005B (fr)
TW (1) TW297908B (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE36475E (en) * 1993-09-15 1999-12-28 Hyundai Electronics Industries Co., Ltd. Method of forming a via plug in a semiconductor device
CN1049070C (zh) * 1994-06-08 2000-02-02 现代电子产业株式会社 半导体器件及其制造方法
US5627103A (en) * 1995-03-02 1997-05-06 Sony Corporation Method of thin film transistor formation with split polysilicon deposition
KR100338480B1 (ko) * 1995-08-19 2003-01-24 엘지.필립스 엘시디 주식회사 액정표시장치및그제조방법
GB2333393B (en) * 1995-08-19 2000-03-29 Lg Electronics Inc Wiring structure for a liquid crystal display device and a method of manufacturing the same.
JP2005150339A (ja) * 2003-11-14 2005-06-09 Matsushita Electric Ind Co Ltd 電極形成方法、容量素子及びその製造方法
US11929280B2 (en) 2020-09-22 2024-03-12 Changxin Memory Technologies, Inc. Contact window structure and method for forming contact window structure
EP4002437B1 (fr) 2020-09-22 2023-08-02 Changxin Memory Technologies, Inc. Procédé de formation d'une fenêtre de contact
CN114256135A (zh) 2020-09-22 2022-03-29 长鑫存储技术有限公司 开口结构及其形成方法、接触插塞及其形成方法
CN114256417A (zh) 2020-09-22 2022-03-29 长鑫存储技术有限公司 电容结构及其形成方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3518506A (en) * 1967-12-06 1970-06-30 Ibm Semiconductor device with contact metallurgy thereon,and method for making same
JPS6276653A (ja) * 1985-09-30 1987-04-08 Toshiba Corp 半導体集積回路
JPH0815152B2 (ja) * 1986-01-27 1996-02-14 三菱電機株式会社 半導体装置及びその製造方法
JPS63268258A (ja) * 1987-04-24 1988-11-04 Nec Corp 半導体装置
JPH0680733B2 (ja) * 1987-11-12 1994-10-12 株式会社東芝 半導体装置の配線接続部
DE69031543T2 (de) * 1989-02-17 1998-04-09 Matsushita Electronics Corp Verfahren zum Herstellen einer Halbleitervorrichtung
JP3199717B2 (ja) * 1989-09-08 2001-08-20 株式会社東芝 半導体装置およびその製造方法

Also Published As

Publication number Publication date
GB2253938A (en) 1992-09-23
TW297908B (fr) 1997-02-11
GB9117285D0 (en) 1991-09-25
DE4126775C2 (de) 1994-07-28
IT1251005B (it) 1995-04-28
FR2674372A1 (fr) 1992-09-25
US5320980A (en) 1994-06-14
JPH04320051A (ja) 1992-11-10
JPH0831523B2 (ja) 1996-03-27
KR940000504B1 (ko) 1994-01-21
US5285110A (en) 1994-02-08
ITMI912236A0 (it) 1991-08-09
KR920018889A (ko) 1992-10-22
ITMI912236A1 (it) 1993-02-09
DE4126775A1 (de) 1992-09-24
GB2253938B (en) 1995-03-01

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