FR2857751B1 - Procede de mesure de parametres physiques d'au moins une couche d'un materiau aux dimensions micrometriques - Google Patents

Procede de mesure de parametres physiques d'au moins une couche d'un materiau aux dimensions micrometriques

Info

Publication number
FR2857751B1
FR2857751B1 FR0308782A FR0308782A FR2857751B1 FR 2857751 B1 FR2857751 B1 FR 2857751B1 FR 0308782 A FR0308782 A FR 0308782A FR 0308782 A FR0308782 A FR 0308782A FR 2857751 B1 FR2857751 B1 FR 2857751B1
Authority
FR
France
Prior art keywords
layer
physical parameters
measuring physical
micrometer dimensions
micrometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0308782A
Other languages
English (en)
Other versions
FR2857751A1 (fr
Inventor
Jean Luc Rouviere
Laurent Clement
Roland Pantel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0308782A priority Critical patent/FR2857751B1/fr
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to PCT/FR2004/001877 priority patent/WO2005010479A2/fr
Priority to US10/565,034 priority patent/US20060288797A1/en
Priority to EP04767701A priority patent/EP1649269A2/fr
Priority to CA002532471A priority patent/CA2532471A1/fr
Priority to JP2006519968A priority patent/JP2007528998A/ja
Priority to KR1020067001205A priority patent/KR20060059963A/ko
Priority to CNA2004800207266A priority patent/CN1826523A/zh
Publication of FR2857751A1 publication Critical patent/FR2857751A1/fr
Application granted granted Critical
Publication of FR2857751B1 publication Critical patent/FR2857751B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes
    • H01J37/2955—Electron or ion diffraction tubes using scanning ray
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Fluid Mechanics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
  • Recrystallisation Techniques (AREA)
FR0308782A 2003-07-18 2003-07-18 Procede de mesure de parametres physiques d'au moins une couche d'un materiau aux dimensions micrometriques Expired - Fee Related FR2857751B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR0308782A FR2857751B1 (fr) 2003-07-18 2003-07-18 Procede de mesure de parametres physiques d'au moins une couche d'un materiau aux dimensions micrometriques
US10/565,034 US20060288797A1 (en) 2003-07-18 2004-07-16 Method for measuring physical parameters of at least one micrometric or nanometric dimensional phase in a composite system
EP04767701A EP1649269A2 (fr) 2003-07-18 2004-07-16 Procede de mesure de parametres physiques d au moins une phase aux dimensions micrometriques ou nanometriques dans un systeme composite.
CA002532471A CA2532471A1 (fr) 2003-07-18 2004-07-16 Procede de mesure de parametres physiques d'au moins une phase aux dimensions micrometriques ou nanometriques dans un systeme composite
PCT/FR2004/001877 WO2005010479A2 (fr) 2003-07-18 2004-07-16 Procede de mesure de parametres physiques d'au moins une phase aux dimensions micrometriques ou nanometriques dans un systeme composite.
JP2006519968A JP2007528998A (ja) 2003-07-18 2004-07-16 複合系における少なくとも一つのマイクロメートル又はナノメートル寸法の相の物理パラメータを計測する方法
KR1020067001205A KR20060059963A (ko) 2003-07-18 2004-07-16 복합재료계에서의 적어도 하나의 마이크로계측 또는나노계측 치수 상의 물리적 파라미터의 측정방법
CNA2004800207266A CN1826523A (zh) 2003-07-18 2004-07-16 测量复合材料体系中至少一个微米或纳米尺寸相的物理参数的方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0308782A FR2857751B1 (fr) 2003-07-18 2003-07-18 Procede de mesure de parametres physiques d'au moins une couche d'un materiau aux dimensions micrometriques

Publications (2)

Publication Number Publication Date
FR2857751A1 FR2857751A1 (fr) 2005-01-21
FR2857751B1 true FR2857751B1 (fr) 2005-12-30

Family

ID=33548242

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0308782A Expired - Fee Related FR2857751B1 (fr) 2003-07-18 2003-07-18 Procede de mesure de parametres physiques d'au moins une couche d'un materiau aux dimensions micrometriques

Country Status (8)

Country Link
US (1) US20060288797A1 (fr)
EP (1) EP1649269A2 (fr)
JP (1) JP2007528998A (fr)
KR (1) KR20060059963A (fr)
CN (1) CN1826523A (fr)
CA (1) CA2532471A1 (fr)
FR (1) FR2857751B1 (fr)
WO (1) WO2005010479A2 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4640811B2 (ja) * 2005-09-28 2011-03-02 富士通株式会社 応力測定方法及び装置
JPWO2011108468A1 (ja) * 2010-03-02 2013-06-27 日本電気株式会社 材料定数推定システム及び材料定数推定方法
US9625823B1 (en) * 2010-06-17 2017-04-18 Kla-Tencor Corporation Calculation method for local film stress measurements using local film thickness values
ITRM20120017A1 (it) * 2012-01-18 2013-07-19 Univ Degli Studi Roma Tre Metodo per la misura del rapporto di poisson e dello stress residuo
CN104833574B (zh) * 2015-05-14 2017-08-25 云南师范大学 一种单缝衍射实验测量装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5221367A (en) * 1988-08-03 1993-06-22 International Business Machines, Corp. Strained defect-free epitaxial mismatched heterostructures and method of fabrication
US7430920B2 (en) * 2005-12-16 2008-10-07 Hitachi, Ltd. Apparatus for measuring a mechanical quantity

Also Published As

Publication number Publication date
WO2005010479A2 (fr) 2005-02-03
CA2532471A1 (fr) 2005-02-03
WO2005010479A3 (fr) 2005-06-09
CN1826523A (zh) 2006-08-30
EP1649269A2 (fr) 2006-04-26
FR2857751A1 (fr) 2005-01-21
JP2007528998A (ja) 2007-10-18
KR20060059963A (ko) 2006-06-02
US20060288797A1 (en) 2006-12-28

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Effective date: 20120330