FR2913265B1 - Dispositif pour la mesure optique d'un objet. - Google Patents

Dispositif pour la mesure optique d'un objet.

Info

Publication number
FR2913265B1
FR2913265B1 FR0851351A FR0851351A FR2913265B1 FR 2913265 B1 FR2913265 B1 FR 2913265B1 FR 0851351 A FR0851351 A FR 0851351A FR 0851351 A FR0851351 A FR 0851351A FR 2913265 B1 FR2913265 B1 FR 2913265B1
Authority
FR
France
Prior art keywords
optically measuring
optically
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0851351A
Other languages
English (en)
Other versions
FR2913265A1 (fr
Inventor
Christian Dr Rembe
Alexander Dr Drabenstedt
Georg Dr Siegmund
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Polytec GmbH
Original Assignee
Polytec GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Polytec GmbH filed Critical Polytec GmbH
Publication of FR2913265A1 publication Critical patent/FR2913265A1/fr
Application granted granted Critical
Publication of FR2913265B1 publication Critical patent/FR2913265B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02042—Confocal imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02045—Interferometers characterised by particular imaging or detection techniques using the Doppler effect
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR0851351A 2007-03-03 2008-02-29 Dispositif pour la mesure optique d'un objet. Active FR2913265B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102007010389A DE102007010389B4 (de) 2007-03-03 2007-03-03 Vorrichtung zur optischen Vermessung eines Objekts

Publications (2)

Publication Number Publication Date
FR2913265A1 FR2913265A1 (fr) 2008-09-05
FR2913265B1 true FR2913265B1 (fr) 2012-03-23

Family

ID=39670108

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0851351A Active FR2913265B1 (fr) 2007-03-03 2008-02-29 Dispositif pour la mesure optique d'un objet.

Country Status (4)

Country Link
US (1) US7852487B2 (fr)
JP (1) JP5536983B2 (fr)
DE (1) DE102007010389B4 (fr)
FR (1) FR2913265B1 (fr)

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DE102008017119A1 (de) * 2008-04-02 2009-10-08 Polytec Gmbh Vibrometer und Verfahren zur optischen Vermessung eines Objekts
FR2943145A1 (fr) * 2009-03-11 2010-09-17 Lltech Man Appareil de tomographie optique coherente plein champ en lumiere incoherente a spectre large avec optique adaptative.
JP5550258B2 (ja) * 2009-05-08 2014-07-16 キヤノン株式会社 光干渉断層撮像装置
DE102009049932B4 (de) * 2009-10-19 2016-04-07 Polytec Gmbh Vorrichtung und Verfahren zur interferometrischen Schwingungsmessung an einem Objekt
CN101907485B (zh) * 2010-08-25 2012-07-25 福州大学 非接触结构微振动监测装置
JP5743697B2 (ja) * 2011-05-06 2015-07-01 キヤノン株式会社 計測装置
US8740177B2 (en) 2011-07-05 2014-06-03 Rain Bird Corporation Eccentric diaphragm valve
US8767217B2 (en) * 2011-07-29 2014-07-01 Tornado Spectral Systems, Inc. Time domain-frequency domain optical coherence tomography apparatus and methods for use
JP2013033014A (ja) * 2011-08-03 2013-02-14 Nikon Corp ドップラー振動計測装置及びドップラー振動計測方法
DE102011085599B3 (de) * 2011-11-02 2012-12-13 Polytec Gmbh Vorrichtung und Verfahren zur interferometrischen Vermessung eines Objekts
DE102012211549B3 (de) * 2012-07-03 2013-07-04 Polytec Gmbh Vorrichtung und Verfahren zur interferometrischen Vermessung eines Objekts
CN102798360B (zh) * 2012-07-26 2014-12-10 成都工具研究所有限公司 激光准直系统中光束漂移补偿装置
DE102013209833B4 (de) * 2013-05-27 2024-09-26 Polytec Gmbh Vibrometer mit einem optischen Interferometer
KR102381930B1 (ko) * 2014-03-13 2022-04-04 내셔널 유니버시티 오브 싱가포르 광학 간섭 장치
US10634538B2 (en) 2016-07-13 2020-04-28 Rain Bird Corporation Flow sensor
US10473494B2 (en) 2017-10-24 2019-11-12 Rain Bird Corporation Flow sensor
US10386171B1 (en) * 2018-04-04 2019-08-20 United States Of America, As Represented By The Secretary Of The Army Apparatus for a dynamic multi-axis heterodyne interferometric vibrometer
DE102018114479B3 (de) 2018-06-15 2019-11-14 Polytec Gmbh Verfahren zur Bestimmung des Strahlverlaufs eines Messstrahls einer Interferometrischen Messvorrichtung und Messvorrichtung zur interferometrischen Vermessung eines Messobjekts
US11662242B2 (en) 2018-12-31 2023-05-30 Rain Bird Corporation Flow sensor gauge
CN112857206B (zh) * 2019-11-28 2023-04-07 余姚舜宇智能光学技术有限公司 激光干涉仪及其光学系统、检测方法以及弯沉检测设备
JP7841214B2 (ja) * 2021-05-28 2026-04-07 セイコーエプソン株式会社 レーザー干渉計およびレーザー干渉計の制御方法
WO2022265551A1 (fr) * 2021-06-18 2022-12-22 Hjn Sverige Ab Système de modélisation multimodale
CN115876129B (zh) * 2022-12-14 2025-11-11 中建八局发展建设有限公司 一种狭小空间三维扫描装置
US12443208B2 (en) 2023-02-08 2025-10-14 Rain Bird Corporation Control zone devices, systems and methods
WO2025017831A1 (fr) * 2023-07-18 2025-01-23 株式会社日立ハイテク Dispositif d'inspection
US12498049B2 (en) 2024-03-29 2025-12-16 Rain Bird Corporation Zone control devices, systems and methods

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US4818110A (en) * 1986-05-06 1989-04-04 Kla Instruments Corporation Method and apparatus of using a two beam interference microscope for inspection of integrated circuits and the like
US4892406A (en) * 1988-01-11 1990-01-09 United Technologies Corporation Method of and arrangement for measuring vibrations
JP2691781B2 (ja) * 1989-10-18 1997-12-17 株式会社小野測器 ビーム分岐光学系を用いたレーザドップラ振動計
DE4108944A1 (de) * 1991-03-19 1992-09-24 Haeusler Gerd Verfahren und einrichtung zur beruehrungslosen erfassung der oberflaechengestalt von diffus streuenden objekten
JPH0797016B2 (ja) * 1993-02-09 1995-10-18 日本電気株式会社 磁気ディスクとスライダ間の浮上量変動測定装置としてのレーザドップラー振動計用位相シフタ
JPH07120304A (ja) * 1993-10-21 1995-05-12 Mitsubishi Electric Corp レーザドップラ振動計
DE4404154C2 (de) * 1994-02-10 1997-12-18 Fraunhofer Ges Forschung Verfahren und Vorrichtung zum optischen Untersuchen einer Oberfläche
DE4429578A1 (de) * 1994-08-19 1996-06-05 Haeusler Gerd Verfahren zur berührungslosen, schnellen und genauen Erfassungs der Oberflächengestalt von Objekten
US6172752B1 (en) * 1996-08-04 2001-01-09 Matsushita Electric Industrial Co., Ltd. Method and apparatus for simultaneously interferometrically measuring optical characteristics in a noncontact manner
DE19721883C2 (de) * 1997-05-26 1999-04-15 Bosch Gmbh Robert Interferometrische Meßvorrichtung
DE19740678A1 (de) * 1997-09-16 1999-03-18 Polytec Gmbh Vorrichtung zur berührungslosen Schwingungsmessung
US6195168B1 (en) * 1999-07-22 2001-02-27 Zygo Corporation Infrared scanning interferometry apparatus and method
DE10047495B4 (de) * 1999-10-09 2005-06-09 Robert Bosch Gmbh Interferometrische Messvorrichtung zur Formvermessung
JP2003516531A (ja) * 1999-12-09 2003-05-13 オーティーアイ オフサルミック テクノロジーズ インク 可変奥行き解像力を有する光学マッピング装置
DE10131779B4 (de) * 2000-07-07 2006-05-11 Robert Bosch Gmbh Interferometrische Messvorrichtung
DE10057540A1 (de) * 2000-11-20 2002-06-06 Bosch Gmbh Robert Interferometrische Messvorrichtung
JP4076792B2 (ja) * 2001-06-19 2008-04-16 独立行政法人科学技術振興機構 カンチレバーアレイ、その製造方法及びその装置
US6906806B2 (en) * 2003-01-31 2005-06-14 Michael Mermelstein Method and apparatus for measuring motion
JP2004354317A (ja) * 2003-05-30 2004-12-16 Olympus Corp 波面収差測定用干渉計
JP2006242570A (ja) * 2005-02-28 2006-09-14 Fuji Xerox Co Ltd 表面形状測定装置
DE102005023212B4 (de) * 2005-05-16 2007-07-12 Häusler, Gerd, Prof. Dr. Verfahren und Vorrichtung zur schnellen und genauen Weisslichtinterferometrie
DE102007010387B4 (de) * 2007-03-03 2013-02-21 Polytec Gmbh Interferometer zur optischen Vermessung eines Objekts

Also Published As

Publication number Publication date
DE102007010389B4 (de) 2011-03-10
DE102007010389A1 (de) 2008-09-04
US7852487B2 (en) 2010-12-14
FR2913265A1 (fr) 2008-09-05
US20080285049A1 (en) 2008-11-20
JP5536983B2 (ja) 2014-07-02
JP2008216251A (ja) 2008-09-18

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