FR2914992B1 - Interferometre pour la mesure d'un objet. - Google Patents

Interferometre pour la mesure d'un objet.

Info

Publication number
FR2914992B1
FR2914992B1 FR0801143A FR0801143A FR2914992B1 FR 2914992 B1 FR2914992 B1 FR 2914992B1 FR 0801143 A FR0801143 A FR 0801143A FR 0801143 A FR0801143 A FR 0801143A FR 2914992 B1 FR2914992 B1 FR 2914992B1
Authority
FR
France
Prior art keywords
interferometer
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0801143A
Other languages
English (en)
Other versions
FR2914992A1 (fr
Inventor
Christian Dr Rembe
Tobias Haist
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Polytec GmbH
Original Assignee
Polytec GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Polytec GmbH filed Critical Polytec GmbH
Publication of FR2914992A1 publication Critical patent/FR2914992A1/fr
Application granted granted Critical
Publication of FR2914992B1 publication Critical patent/FR2914992B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/32—Holograms used as optical elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
FR0801143A 2007-03-03 2008-02-29 Interferometre pour la mesure d'un objet. Expired - Fee Related FR2914992B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102007010387A DE102007010387B4 (de) 2007-03-03 2007-03-03 Interferometer zur optischen Vermessung eines Objekts

Publications (2)

Publication Number Publication Date
FR2914992A1 FR2914992A1 (fr) 2008-10-17
FR2914992B1 true FR2914992B1 (fr) 2012-03-16

Family

ID=39670106

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0801143A Expired - Fee Related FR2914992B1 (fr) 2007-03-03 2008-02-29 Interferometre pour la mesure d'un objet.

Country Status (3)

Country Link
US (2) US7808646B2 (fr)
DE (1) DE102007010387B4 (fr)
FR (1) FR2914992B1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007010389B4 (de) * 2007-03-03 2011-03-10 Polytec Gmbh Vorrichtung zur optischen Vermessung eines Objekts
DE102008017119A1 (de) * 2008-04-02 2009-10-08 Polytec Gmbh Vibrometer und Verfahren zur optischen Vermessung eines Objekts
KR101235384B1 (ko) 2009-02-02 2013-02-20 가부시키가이샤 고베 세이코쇼 형상 측정 장치
TWI431243B (zh) * 2009-06-19 2014-03-21 Zygo Corp 使用於干涉儀中的光學總成、干涉系統及干涉方法
DE102011085599B3 (de) * 2011-11-02 2012-12-13 Polytec Gmbh Vorrichtung und Verfahren zur interferometrischen Vermessung eines Objekts
DE102014201274A1 (de) 2014-01-24 2015-07-30 Polytec Gmbh Vorrichtung und Verfahren zur interferometrischen Vermessung eines Objekts
EP3242107B1 (fr) 2016-05-04 2020-04-08 VOCO GmbH Dispositif optique interférométrique de mesure d'une structure 3d d'un objet
US10323935B1 (en) 2018-06-29 2019-06-18 Eagle Technology, Llc System and method for optics testing using a plano holographic null incorporating alignment features
US12053240B2 (en) 2020-05-20 2024-08-06 Arizona Optical Metrology Llc Systems and methods for measurement of optical wavefronts
KR102531619B1 (ko) * 2021-03-16 2023-05-12 국방과학연구소 위상 안정화 시스템 및 이를 이용한 위상 안정화 방법

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3631713A (en) * 1968-08-02 1972-01-04 Bendix Corp Early detection of metal fatigue with a coherent optical cross-correlation process
FR2494866A1 (fr) * 1980-11-25 1982-05-28 Thomson Csf Dispositif d'interferometrie pour la visualisation en temps reel des deformations de structures vibrantes
US5737079A (en) * 1994-11-07 1998-04-07 Rayleigh Optical Corporation System and method for interferometric measurement of aspheric surfaces utilizing test plate provided with computer-generated hologram
DE19511926A1 (de) * 1995-03-31 1996-10-02 Johannes Prof Dr Schwider Verfahren zur Prüfung technischer Oberflächen mit Hilfe von computererzeugten Hologrammen
JP2004151058A (ja) * 2002-11-01 2004-05-27 Mitsubishi Heavy Ind Ltd レーザ干渉計
US7027161B2 (en) * 2002-12-26 2006-04-11 Hrl Laboratories, Llc Adaptive optical system with self-referencing contrast control
JP2005156434A (ja) * 2003-11-27 2005-06-16 Fujinon Corp 計算機ホログラムを用いた光波干渉測定方法およびこれを用いた干渉計装置
EP1816949A1 (fr) * 2004-11-29 2007-08-15 The General Hospital Corporation Ensembles, dispositifs, endoscopes, catheters et methodes d'imagerie optique permettant d'eclairer et de detecter simultanement plusieurs points sur un echantillon
US7460248B2 (en) * 2006-05-15 2008-12-02 Carestream Health, Inc. Tissue imaging system

Also Published As

Publication number Publication date
US7808646B2 (en) 2010-10-05
US20100201990A1 (en) 2010-08-12
US8115933B2 (en) 2012-02-14
US20080304075A1 (en) 2008-12-11
DE102007010387B4 (de) 2013-02-21
FR2914992A1 (fr) 2008-10-17
DE102007010387A1 (de) 2008-09-04

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