FR2967149B1 - Micro-actionneur et procédé de fabrication associe - Google Patents

Micro-actionneur et procédé de fabrication associe

Info

Publication number: FR2967149B1
Authority: FR; France
Prior art keywords: actuator; micro; nano; electrodes; oxide
Prior art date: 2010-11-04
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

FR1059087A

Other languages

English (en)

Other versions

FR2967149A1 (fr

Inventor

Benoit Guiffard

Daniel Guyomar

Laurence Seveyrat

Philippe Miele

Arnaud Brioude

Anne-Laure Deman

Jean Francois Chateaux

Christophe Malhaire

Mickael Roussel

Jean Yves Cavaille

Van De Moortele Agnes Bogner

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

INST NAT SCIENCES APPLIQ

Centre National de la Recherche Scientifique CNRS

Institut National des Sciences Appliquees de Lyon

Universite Claude Bernard Lyon 1

Original Assignee

INST NAT SCIENCES APPLIQ

Centre National de la Recherche Scientifique CNRS

Institut National des Sciences Appliquees de Lyon

Universite Claude Bernard Lyon 1

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2010-11-04

Filing date

2010-11-04

Publication date

2013-10-25

2010-11-04 Application filed by INST NAT SCIENCES APPLIQ, Centre National de la Recherche Scientifique CNRS, Institut National des Sciences Appliquees de Lyon, Universite Claude Bernard Lyon 1 filed Critical INST NAT SCIENCES APPLIQ

2010-11-04 Priority to FR1059087A priority Critical patent/FR2967149B1/fr

2012-05-11 Publication of FR2967149A1 publication Critical patent/FR2967149A1/fr

2013-10-25 Application granted granted Critical

2013-10-25 Publication of FR2967149B1 publication Critical patent/FR2967149B1/fr

Status Expired - Fee Related legal-status Critical Current

2030-11-04 Anticipated expiration legal-status Critical

Links

238000004519 manufacturing process Methods 0.000 title 1
239000012528 membrane Substances 0.000 abstract 4
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 2
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract 2
PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract 2
XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 abstract 2
229910052802 copper Inorganic materials 0.000 abstract 2
239000010949 copper Substances 0.000 abstract 2
239000000463 material Substances 0.000 abstract 2
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 abstract 1
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract 1
GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract 1
229910052782 aluminium Inorganic materials 0.000 abstract 1
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 abstract 1
229910002113 barium titanate Inorganic materials 0.000 abstract 1
239000006229 carbon black Substances 0.000 abstract 1
229910021393 carbon nanotube Inorganic materials 0.000 abstract 1
239000002041 carbon nanotube Substances 0.000 abstract 1
239000002322 conducting polymer Substances 0.000 abstract 1
229920001940 conductive polymer Polymers 0.000 abstract 1
239000004020 conductor Substances 0.000 abstract 1
229910052742 iron Inorganic materials 0.000 abstract 1
239000000203 mixture Substances 0.000 abstract 1
239000002070 nanowire Substances 0.000 abstract 1
229910052759 nickel Inorganic materials 0.000 abstract 1
229920000642 polymer Polymers 0.000 abstract 1
239000004065 semiconductor Substances 0.000 abstract 1
229910052710 silicon Inorganic materials 0.000 abstract 1
239000010703 silicon Substances 0.000 abstract 1
HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract 1
229910010271 silicon carbide Inorganic materials 0.000 abstract 1
229910052814 silicon oxide Inorganic materials 0.000 abstract 1
229910052709 silver Inorganic materials 0.000 abstract 1
239000004332 silver Substances 0.000 abstract 1
239000000758 substrate Substances 0.000 abstract 1
OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 abstract 1
239000011787 zinc oxide Substances 0.000 abstract 1

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/852—Composite materials, e.g. having 1-3 or 2-2 type connectivity

Landscapes

Engineering & Computer Science (AREA)
Chemical & Material Sciences (AREA)
Composite Materials (AREA)
Materials Engineering (AREA)
Manufacturing & Machinery (AREA)
Analytical Chemistry (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Micromachines (AREA)
General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

FR1059087A 2010-11-04 2010-11-04 Micro-actionneur et procédé de fabrication associe Expired - Fee Related FR2967149B1 (fr)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
FR1059087A FR2967149B1 (fr)	2010-11-04	2010-11-04	Micro-actionneur et procédé de fabrication associe

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
FR1059087A FR2967149B1 (fr)	2010-11-04	2010-11-04	Micro-actionneur et procédé de fabrication associe

Publications (2)

Publication Number	Publication Date
FR2967149A1 FR2967149A1 (fr)	2012-05-11
FR2967149B1 true FR2967149B1 (fr)	2013-10-25

Family

ID=44547736

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FR1059087A Expired - Fee Related FR2967149B1 (fr)	2010-11-04	2010-11-04	Micro-actionneur et procédé de fabrication associe

Country Status (1)

Country	Link
FR (1)	FR2967149B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US12419196B2 (en)	2019-06-18	2025-09-16	Sabic Global Technologies B.V.	Piezoelectric composition and films with high D33 values and improved adhesion and flexibility

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6518690B2 (en) *	2000-04-19	2003-02-11	Ngk Insulators, Ltd.	Piezoelectric/electrostrictive film type elements and process for producing the same
US7369396B2 (en) *	2005-07-07	2008-05-06	Lucent Technologies Inc.	Composite electroactive material for electromechanical actuators

2010
- 2010-11-04 FR FR1059087A patent/FR2967149B1/fr not_active Expired - Fee Related

Also Published As

Publication number	Publication date
FR2967149A1 (fr)	2012-05-11

Legal Events

Date	Code	Title	Description
2015-10-23	PLFP	Fee payment	Year of fee payment: 6
2017-08-25	ST	Notification of lapse	Effective date: 20170731

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