FR3103188B1 - Elément électriquement conducteur - Google Patents

Elément électriquement conducteur Download PDF

Info

Publication number
FR3103188B1
FR3103188B1 FR1912695A FR1912695A FR3103188B1 FR 3103188 B1 FR3103188 B1 FR 3103188B1 FR 1912695 A FR1912695 A FR 1912695A FR 1912695 A FR1912695 A FR 1912695A FR 3103188 B1 FR3103188 B1 FR 3103188B1
Authority
FR
France
Prior art keywords
electrically conductive
conductive element
layer
support
wsiy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1912695A
Other languages
English (en)
Other versions
FR3103188A1 (fr
Inventor
Guillaume Rodriguez
Christophe Dubarry
Aomar Halimaoui
Magali Tessaire
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1912695A priority Critical patent/FR3103188B1/fr
Priority to EP20207316.9A priority patent/EP3823060A1/fr
Priority to CN202011260635.7A priority patent/CN112803065A/zh
Priority to US17/097,730 priority patent/US11749807B2/en
Priority to JP2020189513A priority patent/JP7781516B2/ja
Publication of FR3103188A1 publication Critical patent/FR3103188A1/fr
Application granted granted Critical
Publication of FR3103188B1 publication Critical patent/FR3103188B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0471—Processes of manufacture in general involving thermal treatment, e.g. firing, sintering, backing particulate active material, thermal decomposition, pyrolysis
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/054—Accumulators with insertion or intercalation of metals other than lithium, e.g. with magnesium or aluminium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/058—Construction or manufacture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/058—Construction or manufacture
    • H01M10/0585—Construction or manufacture of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H01M4/0421—Methods of deposition of the material involving vapour deposition
    • H01M4/0423—Physical vapour deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139—Processes of manufacture
    • H01M4/1391—Processes of manufacture of electrodes based on mixed oxides or hydroxides, or on mixtures of oxides or hydroxides, e.g. LiCoOx
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/48—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides
    • H01M4/52—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides of nickel, cobalt or iron
    • H01M4/525—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides of nickel, cobalt or iron of mixed oxides or hydroxides containing iron, cobalt or nickel for inserting or intercalating light metals, e.g. LiNiO2, LiCoO2 or LiCoOxFy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/62—Selection of inactive substances as ingredients for active masses, e.g. binders, fillers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/64—Carriers or collectors
    • H01M4/66—Selection of materials
    • H01M4/661—Metal or alloys, e.g. alloy coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/64—Carriers or collectors
    • H01M4/66—Selection of materials
    • H01M4/664—Ceramic materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/64—Carriers or collectors
    • H01M4/66—Selection of materials
    • H01M4/665—Composites
    • H01M4/667—Composites in the form of layers, e.g. coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/056—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes
    • H01M10/0561—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes the electrolyte being constituted of inorganic materials only
    • H01M10/0562—Solid materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Composite Materials (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Cell Electrode Carriers And Collectors (AREA)
  • Secondary Cells (AREA)
  • Battery Electrode And Active Subsutance (AREA)
  • Non-Insulated Conductors (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

Titre : Elément électriquement conducteur L’invention concerne un dispositif microélectronique comprenant un support (1) et un élément électriquement conducteur comprenant en empilement et successivement au-dessus d’une première face du support (1), une première couche à base d’un métal et une deuxième couche, au contact de la première couche, à base d’un matériau choisi parmi le MoSix et le WSiy. Figure pour l’abrégé : Fig. 2A
FR1912695A 2019-11-14 2019-11-14 Elément électriquement conducteur Active FR3103188B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR1912695A FR3103188B1 (fr) 2019-11-14 2019-11-14 Elément électriquement conducteur
EP20207316.9A EP3823060A1 (fr) 2019-11-14 2020-11-12 Elément électriquement conducteur
CN202011260635.7A CN112803065A (zh) 2019-11-14 2020-11-12 导电元件
US17/097,730 US11749807B2 (en) 2019-11-14 2020-11-13 Electrically conductive element
JP2020189513A JP7781516B2 (ja) 2019-11-14 2020-11-13 導電性要素

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1912695A FR3103188B1 (fr) 2019-11-14 2019-11-14 Elément électriquement conducteur
FR1912695 2019-11-14

Publications (2)

Publication Number Publication Date
FR3103188A1 FR3103188A1 (fr) 2021-05-21
FR3103188B1 true FR3103188B1 (fr) 2024-12-13

Family

ID=69743373

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1912695A Active FR3103188B1 (fr) 2019-11-14 2019-11-14 Elément électriquement conducteur

Country Status (5)

Country Link
US (1) US11749807B2 (fr)
EP (1) EP3823060A1 (fr)
JP (1) JP7781516B2 (fr)
CN (1) CN112803065A (fr)
FR (1) FR3103188B1 (fr)

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01192140A (ja) * 1988-01-27 1989-08-02 Nec Corp 半導体集積回路装置
JPH11195753A (ja) 1997-10-27 1999-07-21 Seiko Epson Corp 半導体装置およびその製造方法
US6117689A (en) * 1997-12-24 2000-09-12 Texas Instruments Incorporated Stable high-dielectric-constant material electrode and method
JP3059161B1 (ja) 1999-05-10 2000-07-04 株式会社ジャパンエナジー 耐脆化性能に優れたＭｏＳｉ２を主成分とする高温耐酸化材料及び発熱材料
DE19958200B4 (de) * 1999-12-02 2006-07-06 Infineon Technologies Ag Mikroelektronische Struktur und Verfahren zu deren Herstellung
US20080003496A1 (en) * 2002-08-09 2008-01-03 Neudecker Bernd J Electrochemical apparatus with barrier layer protected substrate
FR2862436B1 (fr) * 2003-11-14 2006-02-10 Commissariat Energie Atomique Micro-batterie au lithium munie d'une enveloppe de protection et procede de fabrication d'une telle micro-batterie
KR101102905B1 (ko) * 2006-04-14 2012-01-11 어플라이드 머티어리얼스, 인코포레이티드 신뢰할 수 있는 연료 전지 전극 설계
CN102290605A (zh) 2006-07-18 2011-12-21 西姆贝特公司 用于固态微电池光刻制造、切单和钝化的方法和设备
JP2013054878A (ja) * 2011-09-02 2013-03-21 Semiconductor Energy Lab Co Ltd 電極の作製方法および蓄電装置
CA2873873A1 (fr) * 2012-05-21 2014-02-13 Blacklight Power, Inc. Systeme electrique base sur la ciht
CN102760776A (zh) * 2012-07-30 2012-10-31 江苏天孚太阳能有限公司 一种柔性衬底硅化铁(βFeSi2)薄膜太阳电池及其制备方法
FR3002695B1 (fr) * 2013-02-28 2021-04-02 I Ten Procede de fabrication d'une batterie monolithique entierement solide
US20170149093A1 (en) * 2015-09-21 2017-05-25 Applied Materials, Inc. Configurations of solid state thin film batteries
JP7065451B2 (ja) * 2017-05-30 2022-05-12 パナソニックＩｐマネジメント株式会社 二次電池用正極、及び二次電池
CN108777307A (zh) * 2017-12-29 2018-11-09 上海其鸿新材料科技有限公司 一种锂电池集流体导电涂层
KR102579828B1 (ko) * 2018-01-11 2023-09-18 삼성전자주식회사 전기화학 디바이스

Also Published As

Publication number Publication date
FR3103188A1 (fr) 2021-05-21
US11749807B2 (en) 2023-09-05
CN112803065A (zh) 2021-05-14
EP3823060A1 (fr) 2021-05-19
JP2021103680A (ja) 2021-07-15
JP7781516B2 (ja) 2025-12-08
US20210257623A1 (en) 2021-08-19

Similar Documents

Publication Publication Date Title
FR3090120B1 (fr) Capteur de courant à conducteur de courant intégré
CN103063883A (zh) 探针卡用接触端子和探针卡
EP2028699A3 (fr) Dispositif électroluminescent à semi-conducteur
US11467186B2 (en) Inspection jig, inspection device, and contact terminal
EP1313142A3 (fr) Procédé de fabrication d'une couche d'interconnexion sur un dispositif à semiconducteur et dispositif correspondant
JP2021071472A (ja) プローブカード装置
US20240371706A1 (en) Methods and systems for measuring semiconductor devices
TW200612519A (en) Redistribution layer structure of a wafer and the fabrication method thereof
TWI325960B (fr)
US10068865B1 (en) Combing bump structure and manufacturing method thereof
EP1734579A3 (fr) Dispositif semiconducteur et son procédé de fabrication
FR3148095B1 (fr) Dispositif de transduction ultrasonore à adressage ligne-colonne
CN100474577C (zh) 基板及其电测方法
FR3143846B1 (fr) Équipement électrique
TWI583962B (zh) Space conversion module and its manufacturing method
CN101515573B (zh) 用于一半导体集成电路的导电结构
FR3103060B1 (fr) Dispositif électromécanique à base de polymères ferroélectriques et procédés de fabrication d’un tel dispositif
EP1724823A3 (fr) Procédé de connexion d'une microplaquette de semi-conducteur sur un support d'interconnexion
CN108962868B (zh) 封装结构及其制法
TW200402136A (en) Semiconductor device having pad electrode connected to wire
JPH0778828A (ja) 半導体装置
EP1626449A3 (fr) Structure de contact pour un matériau semiconduteur et méthode de fabrication d'une telle structure
CN110148570B (zh) 显示面板及显示面板的制作方法
US11049831B2 (en) Circuit substrate
TW513380B (en) Method and application for making 3-D macro elastic probe devices by MEMS technique

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 2

PLSC Publication of the preliminary search report

Effective date: 20210521

PLFP Fee payment

Year of fee payment: 3

PLFP Fee payment

Year of fee payment: 4

PLFP Fee payment

Year of fee payment: 5

PLFP Fee payment

Year of fee payment: 6

PLFP Fee payment

Year of fee payment: 7