FR3139905B1 - Station de mesure d’une contamination moléculaire véhiculée par l’air - Google Patents

Station de mesure d’une contamination moléculaire véhiculée par l’air Download PDF

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Publication number
FR3139905B1
FR3139905B1 FR2209475A FR2209475A FR3139905B1 FR 3139905 B1 FR3139905 B1 FR 3139905B1 FR 2209475 A FR2209475 A FR 2209475A FR 2209475 A FR2209475 A FR 2209475A FR 3139905 B1 FR3139905 B1 FR 3139905B1
Authority
FR
France
Prior art keywords
measuring station
molecular contamination
airborne molecular
gas analyzer
sampling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2209475A
Other languages
English (en)
Other versions
FR3139905A1 (fr
Inventor
Barillec Olivier Le
Julien Bounouar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to FR2209475A priority Critical patent/FR3139905B1/fr
Priority to PCT/EP2023/075262 priority patent/WO2024061725A1/fr
Priority to US19/103,052 priority patent/US20260043717A1/en
Priority to KR1020257010764A priority patent/KR20250069570A/ko
Priority to TW112135614A priority patent/TW202430855A/zh
Publication of FR3139905A1 publication Critical patent/FR3139905A1/fr
Application granted granted Critical
Publication of FR3139905B1 publication Critical patent/FR3139905B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/24—Suction devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2226—Sampling from a closed space, e.g. food package, head space
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0011—Sample conditioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/10—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
    • G01N35/1095—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices for supplying the samples to flow-through analysers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0042—Investigating dispersion of solids
    • G01N2015/0046—Investigating dispersion of solids in gas, e.g. smoke

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

Station de mesure d’une contamination moléculaire véhiculée par l’air L’invention concerne une station de mesure (1) d’une contamination moléculaire véhiculée par l’air comportant au moins un analyseur de gaz (3) et au moins une ligne de prélèvement (L1, Ln) raccordée fluidiquement à une entrée de l’au moins un analyseur de gaz (3). Selon l’invention ladite station (1) comporte au moins une pompe (5) de prélèvement agencée en amont de l’au moins un analyseur de gaz (3) selon le sens d’écoulement d’un flux gazeux à pomper, et la pompe (5) de prélèvement présente une aspiration raccordée fluidiquement à l’au moins une ligne de prélèvement (L1, Ln) et un refoulement raccordé fluidiquement à l’entrée de l’au moins un analyseur de gaz (3), la pompe (5) de prélèvement étant configurée pour aspirer un flux gazeux sur la ligne de prélèvement, et pour refouler le flux gazeux à la pression atmosphérique +/-50hPa, de préférence +/-30hPa. Figure pour l’abrégé : Fig. 1
FR2209475A 2022-09-20 2022-09-20 Station de mesure d’une contamination moléculaire véhiculée par l’air Active FR3139905B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR2209475A FR3139905B1 (fr) 2022-09-20 2022-09-20 Station de mesure d’une contamination moléculaire véhiculée par l’air
PCT/EP2023/075262 WO2024061725A1 (fr) 2022-09-20 2023-09-14 Station de mesure d'une contamination moléculaire véhiculée par l'air
US19/103,052 US20260043717A1 (en) 2022-09-20 2023-09-14 Station for measuring airborne molecular contamination
KR1020257010764A KR20250069570A (ko) 2022-09-20 2023-09-14 공기중 분자 오염 측정 스테이션
TW112135614A TW202430855A (zh) 2022-09-20 2023-09-19 用來測量空浮分子汙染物的站

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2209475 2022-09-20
FR2209475A FR3139905B1 (fr) 2022-09-20 2022-09-20 Station de mesure d’une contamination moléculaire véhiculée par l’air

Publications (2)

Publication Number Publication Date
FR3139905A1 FR3139905A1 (fr) 2024-03-22
FR3139905B1 true FR3139905B1 (fr) 2024-11-15

Family

ID=84568927

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2209475A Active FR3139905B1 (fr) 2022-09-20 2022-09-20 Station de mesure d’une contamination moléculaire véhiculée par l’air

Country Status (5)

Country Link
US (1) US20260043717A1 (fr)
KR (1) KR20250069570A (fr)
FR (1) FR3139905B1 (fr)
TW (1) TW202430855A (fr)
WO (1) WO2024061725A1 (fr)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01291142A (ja) * 1988-05-18 1989-11-22 Hitachi Plant Eng & Constr Co Ltd クリーンルームの汚染監視装置
JP2002277361A (ja) * 2001-03-19 2002-09-25 Horiba Ltd 半導体プロセス排ガスの分析方法および半導体プロセス排ガスの分析システム
JP2005331309A (ja) * 2004-05-19 2005-12-02 Taiyo Nippon Sanso Corp 排気ガス測定装置
JP4925489B1 (ja) * 2011-08-02 2012-04-25 株式会社ベスト測器 ガス分析装置
CN103998914B (zh) * 2011-09-06 2016-04-06 Atonarp株式会社 气体采集装置以及检查装置
FR3040528B1 (fr) * 2015-09-02 2017-09-15 Pfeiffer Vacuum Sas Procede et station de mesure de la contamination d'une boite de transport pour le convoyage et le stockage atmospherique de substrats
KR101782915B1 (ko) * 2017-03-08 2017-09-29 주식회사 위드텍 개선된 샘플링 유로를 갖는 가스 모니터링 시스템
FR3108981B1 (fr) * 2020-04-01 2022-04-01 Pfeiffer Vacuum Technology AG Station et procédé de mesure de la contamination moléculaire véhiculée par l’air
CN114264522B (zh) * 2020-09-16 2024-08-09 长鑫存储技术有限公司 环境监测系统

Also Published As

Publication number Publication date
US20260043717A1 (en) 2026-02-12
FR3139905A1 (fr) 2024-03-22
KR20250069570A (ko) 2025-05-19
WO2024061725A1 (fr) 2024-03-28
TW202430855A (zh) 2024-08-01

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