FR3145571B1 - Procédé de revêtement d’un substrat par de l’oxyde d’aluminium - Google Patents

Procédé de revêtement d’un substrat par de l’oxyde d’aluminium

Info

Publication number
FR3145571B1
FR3145571B1 FR2301091A FR2301091A FR3145571B1 FR 3145571 B1 FR3145571 B1 FR 3145571B1 FR 2301091 A FR2301091 A FR 2301091A FR 2301091 A FR2301091 A FR 2301091A FR 3145571 B1 FR3145571 B1 FR 3145571B1
Authority
FR
France
Prior art keywords
coating
substrate
aluminum oxide
polarization
potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2301091A
Other languages
English (en)
Other versions
FR3145571A1 (fr
Inventor
Marjorie Christine Cavarroc
Erwan Peigney
Angélique Nadine Jeanne Poulon
Dominique Paul Abel Michau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Safran SA
Universite de Bordeaux
Institut Polytechnique de Bordeaux
Original Assignee
Centre National de la Recherche Scientifique CNRS
Safran SA
Universite de Bordeaux
Institut Polytechnique de Bordeaux
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Safran SA, Universite de Bordeaux, Institut Polytechnique de Bordeaux filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR2301091A priority Critical patent/FR3145571B1/fr
Publication of FR3145571A1 publication Critical patent/FR3145571A1/fr
Application granted granted Critical
Publication of FR3145571B1 publication Critical patent/FR3145571B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3485—Sputtering using pulsed power to the target
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3464—Operating strategies
    • H01J37/3467—Pulsed operation, e.g. HIPIMS

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Procédé de revêtement d’un substrat par de l’oxyde d’aluminium La présente invention concerne un procédé de revêtement d’un substrat (12) par de l’oxyde d’aluminium alpha par la technique de pulvérisation cathodique magnétron pulsé à haute puissance, dans lequel on utilise une cible (11) d’aluminium et dans lequel le revêtement du substrat est effectué sous atmosphère contenant un mélange d’argon et d’oxygène, à une pression inférieure ou égale à 10 Pa, la polarisation de la cible étant contrôlée durant le revêtement en imposant à celle-ci la superposition d’une polarisation continue à un potentiel (Vc) compris entre -300 V et 0 V et d’une polarisation pulsée dont les pulses ont un potentiel (Vp) compris entre -1200 V et -400 V et une fréquence comprise entre 50 Hz et 5000 Hz. Figure pour l’abrégé : Fig. 2.
FR2301091A 2023-02-06 2023-02-06 Procédé de revêtement d’un substrat par de l’oxyde d’aluminium Active FR3145571B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR2301091A FR3145571B1 (fr) 2023-02-06 2023-02-06 Procédé de revêtement d’un substrat par de l’oxyde d’aluminium

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2301091 2023-02-06
FR2301091A FR3145571B1 (fr) 2023-02-06 2023-02-06 Procédé de revêtement d’un substrat par de l’oxyde d’aluminium

Publications (2)

Publication Number Publication Date
FR3145571A1 FR3145571A1 (fr) 2024-08-09
FR3145571B1 true FR3145571B1 (fr) 2026-01-02

Family

ID=86604645

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2301091A Active FR3145571B1 (fr) 2023-02-06 2023-02-06 Procédé de revêtement d’un substrat par de l’oxyde d’aluminium

Country Status (1)

Country Link
FR (1) FR3145571B1 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE533395C2 (sv) * 2007-06-08 2010-09-14 Sandvik Intellectual Property Sätt att göra PVD-beläggningar
JP2010065240A (ja) * 2008-09-08 2010-03-25 Kobe Steel Ltd スパッタ装置
CA3043564C (fr) 2019-05-15 2026-02-10 Safran Procede de formation d'une couche d'alumine a la surface d'un substrat metallique
FR3097237B1 (fr) * 2019-06-11 2021-05-28 Safran Procédé de revêtement d'un substrat par du nitrure de tantale

Also Published As

Publication number Publication date
FR3145571A1 (fr) 2024-08-09

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