FR3147862B1 - Spectromètre optique et microscope Raman comprenant un tel spectromètre - Google Patents

Spectromètre optique et microscope Raman comprenant un tel spectromètre

Info

Publication number
FR3147862B1
FR3147862B1 FR2303766A FR2303766A FR3147862B1 FR 3147862 B1 FR3147862 B1 FR 3147862B1 FR 2303766 A FR2303766 A FR 2303766A FR 2303766 A FR2303766 A FR 2303766A FR 3147862 B1 FR3147862 B1 FR 3147862B1
Authority
FR
France
Prior art keywords
light beam
spectrometer
receive
optical
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2303766A
Other languages
English (en)
Other versions
FR3147862A1 (fr
Inventor
Brice Villier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba France SAS
Original Assignee
Horiba France SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba France SAS filed Critical Horiba France SAS
Priority to FR2303766A priority Critical patent/FR3147862B1/fr
Priority to CN202480033438.1A priority patent/CN121219556A/zh
Priority to KR1020257034264A priority patent/KR20250174609A/ko
Priority to EP24716342.1A priority patent/EP4695587A1/fr
Priority to PCT/EP2024/058622 priority patent/WO2024213410A1/fr
Priority to JP2025559311A priority patent/JP2026512090A/ja
Publication of FR3147862A1 publication Critical patent/FR3147862A1/fr
Application granted granted Critical
Publication of FR3147862B1 publication Critical patent/FR3147862B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/44Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0224Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using polarising or depolarising elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0294Multi-channel spectroscopy
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2803Investigating the spectrum using photoelectric array detector
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052Optical details of the image generation
    • G02B21/0064Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/16Microscopes adapted for ultraviolet illumination ; Fluorescence microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

L’invention concerne un spectromètre optique (10) comprenant : une ouverture (13) configurée pour recevoir un faisceau lumineux source, un premier système optique étant configuré pour recevoir le faisceau lumineux source et former un faisceau lumineux collimaté dirigé vers un réseau de diffraction, le réseau de diffraction étant configuré pour recevoir le faisceau lumineux collimaté et pour former un faisceau lumineux diffracté, un second système optique étant configuré pour former une image du faisceau lumineux diffracté sur un capteur d’image. Selon l’invention, le capteur d’image est un capteur CMOS comportant des pixels (34) agencés en N lignes orientées dans une direction inclinée à un angle alpha de la direction de diffraction spectrale de l’image du faisceau lumineux diffracté, où alpha est inférieur à 10 degrés, N est supérieur ou égal à 3, chaque pixel a une hauteur et une largeur définissant un rapport d’aspect du pixel supérieur à deux. Figure pour l’abrégé : Fig.1
FR2303766A 2023-04-14 2023-04-14 Spectromètre optique et microscope Raman comprenant un tel spectromètre Active FR3147862B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR2303766A FR3147862B1 (fr) 2023-04-14 2023-04-14 Spectromètre optique et microscope Raman comprenant un tel spectromètre
CN202480033438.1A CN121219556A (zh) 2023-04-14 2024-03-28 光谱仪以及包括此类光谱仪的拉曼显微镜
KR1020257034264A KR20250174609A (ko) 2023-04-14 2024-03-28 광학 분광계 및 이 분광계를 포함하는 라만 현미경
EP24716342.1A EP4695587A1 (fr) 2023-04-14 2024-03-28 Spectrometre optique et microscope raman comprenant un tel spectrometre
PCT/EP2024/058622 WO2024213410A1 (fr) 2023-04-14 2024-03-28 Spectrometre optique et microscope raman comprenant un tel spectrometre
JP2025559311A JP2026512090A (ja) 2023-04-14 2024-03-28 光学分光計及びこのような分光計を含むラマン顕微鏡

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2303766 2023-04-14
FR2303766A FR3147862B1 (fr) 2023-04-14 2023-04-14 Spectromètre optique et microscope Raman comprenant un tel spectromètre

Publications (2)

Publication Number Publication Date
FR3147862A1 FR3147862A1 (fr) 2024-10-18
FR3147862B1 true FR3147862B1 (fr) 2025-07-18

Family

ID=87555123

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2303766A Active FR3147862B1 (fr) 2023-04-14 2023-04-14 Spectromètre optique et microscope Raman comprenant un tel spectromètre

Country Status (6)

Country Link
EP (1) EP4695587A1 (fr)
JP (1) JP2026512090A (fr)
KR (1) KR20250174609A (fr)
CN (1) CN121219556A (fr)
FR (1) FR3147862B1 (fr)
WO (1) WO2024213410A1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8922768B2 (en) * 2010-10-04 2014-12-30 Wasatch Photonics, Inc. Multi-path spectrometer
JP6091100B2 (ja) * 2012-07-10 2017-03-08 日本分光株式会社 共焦点顕微装置
FR3053529B1 (fr) * 2016-06-30 2022-11-04 E2V Semiconductors Capteur lineaire pour appareil d'imagerie de tomographie par coherence optique a spectrometre

Also Published As

Publication number Publication date
KR20250174609A (ko) 2025-12-12
JP2026512090A (ja) 2026-04-14
FR3147862A1 (fr) 2024-10-18
WO2024213410A1 (fr) 2024-10-17
CN121219556A (zh) 2025-12-26
EP4695587A1 (fr) 2026-02-18

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