FR94385E - Source pour évaporation sous vide. - Google Patents

Source pour évaporation sous vide.

Info

Publication number
FR94385E
FR94385E FR139874A FR139874A FR94385E FR 94385 E FR94385 E FR 94385E FR 139874 A FR139874 A FR 139874A FR 139874 A FR139874 A FR 139874A FR 94385 E FR94385 E FR 94385E
Authority
FR
France
Prior art keywords
source
vacuum evaporation
evaporation
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR139874A
Other languages
English (en)
Inventor
Georges Gallet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Compagnie Generale dElectricite SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compagnie Generale dElectricite SA filed Critical Compagnie Generale dElectricite SA
Priority to FR139874A priority Critical patent/FR94385E/fr
Priority to GB48427/68A priority patent/GB1220110A/en
Priority to BE722796D priority patent/BE722796A/xx
Priority to DE19681805246 priority patent/DE1805246C3/de
Priority to US772281A priority patent/US3541301A/en
Priority to NL6815791A priority patent/NL6815791A/xx
Application granted granted Critical
Publication of FR94385E publication Critical patent/FR94385E/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture Of Alloys Or Alloy Compounds (AREA)
FR139874A 1967-11-06 1968-02-14 Source pour évaporation sous vide. Expired FR94385E (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR139874A FR94385E (fr) 1967-11-06 1968-02-14 Source pour évaporation sous vide.
GB48427/68A GB1220110A (en) 1967-11-06 1968-10-11 Apparatus for producing a metallic vapour
BE722796D BE722796A (fr) 1967-11-06 1968-10-24
DE19681805246 DE1805246C3 (de) 1967-11-06 1968-10-25 Vorrichtung zum Aufdampfen von Metallen unter Vakuum
US772281A US3541301A (en) 1967-11-06 1968-10-31 Source for evaporation in a vacuum
NL6815791A NL6815791A (fr) 1967-11-06 1968-11-06

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR127093 1967-11-06
FR139874A FR94385E (fr) 1967-11-06 1968-02-14 Source pour évaporation sous vide.

Publications (1)

Publication Number Publication Date
FR94385E true FR94385E (fr) 1969-08-08

Family

ID=26180552

Family Applications (1)

Application Number Title Priority Date Filing Date
FR139874A Expired FR94385E (fr) 1967-11-06 1968-02-14 Source pour évaporation sous vide.

Country Status (5)

Country Link
US (1) US3541301A (fr)
BE (1) BE722796A (fr)
FR (1) FR94385E (fr)
GB (1) GB1220110A (fr)
NL (1) NL6815791A (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4264803A (en) * 1978-01-10 1981-04-28 Union Carbide Corporation Resistance-heated pyrolytic boron nitride coated graphite boat for metal vaporization
US5182567A (en) * 1990-10-12 1993-01-26 Custom Metallizing Services, Inc. Retrofittable vapor source for vacuum metallizing utilizing spatter reduction means
US5383969A (en) * 1993-04-05 1995-01-24 Cvd, Inc. Process and apparatus for supplying zinc vapor continuously to a chemical vapor deposition process from a continuous supply of solid zinc
US6229956B1 (en) * 2000-03-22 2001-05-08 Advanced Ceramics Corporation Flash evaporator vessel
CN1332061C (zh) * 2000-12-14 2007-08-15 通用电气公司 闪蒸器皿

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2664853A (en) * 1952-05-12 1954-01-05 Nat Res Corp Apparatus for vapor coating
US3036549A (en) * 1957-05-08 1962-05-29 Sumitomo Electric Industries Apparatus for vacuum evaporation of metals
GB900205A (en) * 1957-07-15 1962-07-04 Richard John Fletcher Improvements in and relating to sources for the evaporation of metals and other materials under vacuum

Also Published As

Publication number Publication date
NL6815791A (fr) 1969-05-08
BE722796A (fr) 1969-04-24
US3541301A (en) 1970-11-17
GB1220110A (en) 1971-01-20
DE1805246A1 (de) 1969-06-19
DE1805246B2 (de) 1977-02-03

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