HU0700366D0 - Imaging optical checking device with pinhole camera (reflectometer, polarimeter, ellipsicmeter) - Google Patents

Imaging optical checking device with pinhole camera (reflectometer, polarimeter, ellipsicmeter)

Info

Publication number
HU0700366D0
HU0700366D0 HU0700366A HUP0700366A HU0700366D0 HU 0700366 D0 HU0700366 D0 HU 0700366D0 HU 0700366 A HU0700366 A HU 0700366A HU P0700366 A HUP0700366 A HU P0700366A HU 0700366 D0 HU0700366 D0 HU 0700366D0
Authority
HU
Hungary
Prior art keywords
ellipsicmeter
polarimeter
reflectometer
imaging optical
checking device
Prior art date
Application number
HU0700366A
Other languages
English (en)
Original Assignee
Mta Mueszaki Fiz Es Anyagtudom
Mta Szilardtestfizikai Es Opti
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mta Mueszaki Fiz Es Anyagtudom, Mta Szilardtestfizikai Es Opti filed Critical Mta Mueszaki Fiz Es Anyagtudom
Priority to HU0700366A priority Critical patent/HU229699B1/hu
Publication of HU0700366D0 publication Critical patent/HU0700366D0/hu
Priority to EP08762661.0A priority patent/EP2160591B1/en
Priority to US12/601,410 priority patent/US8437002B2/en
Priority to JP2010508914A priority patent/JP5472096B2/ja
Priority to PCT/HU2008/000058 priority patent/WO2008142468A1/en
Publication of HUP0700366A2 publication Critical patent/HUP0700366A2/hu
Publication of HU229699B1 publication Critical patent/HU229699B1/hu

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Mathematical Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
HU0700366A 2007-05-23 2007-05-23 Pinhole kamerát alkalmazó, leképzõ optikai vizsgálóberendezés (reflektométer, polariméter, ellipszométer) HU229699B1 (hu)

Priority Applications (5)

Application Number Priority Date Filing Date Title
HU0700366A HU229699B1 (hu) 2007-05-23 2007-05-23 Pinhole kamerát alkalmazó, leképzõ optikai vizsgálóberendezés (reflektométer, polariméter, ellipszométer)
EP08762661.0A EP2160591B1 (en) 2007-05-23 2008-05-23 Imaging optical inspection device with a pinhole camera
US12/601,410 US8437002B2 (en) 2007-05-23 2008-05-23 Imaging optical inspection device with a pinhole camera
JP2010508914A JP5472096B2 (ja) 2007-05-23 2008-05-23 サンプルの平面の反射表面を検査する撮像光学検査装置及び方法
PCT/HU2008/000058 WO2008142468A1 (en) 2007-05-23 2008-05-23 Imaging optical inspection device with a pinhole camera

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
HU0700366A HU229699B1 (hu) 2007-05-23 2007-05-23 Pinhole kamerát alkalmazó, leképzõ optikai vizsgálóberendezés (reflektométer, polariméter, ellipszométer)

Publications (3)

Publication Number Publication Date
HU0700366D0 true HU0700366D0 (en) 2007-07-30
HUP0700366A2 HUP0700366A2 (en) 2008-12-29
HU229699B1 HU229699B1 (hu) 2014-05-28

Family

ID=89987538

Family Applications (1)

Application Number Title Priority Date Filing Date
HU0700366A HU229699B1 (hu) 2007-05-23 2007-05-23 Pinhole kamerát alkalmazó, leképzõ optikai vizsgálóberendezés (reflektométer, polariméter, ellipszométer)

Country Status (5)

Country Link
US (1) US8437002B2 (hu)
EP (1) EP2160591B1 (hu)
JP (1) JP5472096B2 (hu)
HU (1) HU229699B1 (hu)
WO (1) WO2008142468A1 (hu)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201120431A (en) * 2009-12-04 2011-06-16 Hong Hocheng Monitoring apparatus and method for uniformity and residual thickness of nano-transfer printing process
TW201122456A (en) * 2009-12-30 2011-07-01 Hong Hocheng Monitoring apparatus and method of nano-transfer printing process
AU2011375401B2 (en) * 2011-08-19 2015-12-24 Industries Machinex Inc. Apparatus and method for inspecting matter and use thereof for sorting recyclable matter
NL2009853A (en) 2011-12-23 2013-06-26 Asml Netherlands Bv Methods and apparatus for measuring a property of a substrate.
JP2014044157A (ja) * 2012-08-28 2014-03-13 Ricoh Co Ltd 光学センサ及び画像形成装置
US9970863B2 (en) * 2015-02-22 2018-05-15 Kla-Tencor Corporation Optical metrology with reduced focus error sensitivity
JP6502282B2 (ja) * 2015-04-24 2019-04-17 富士フイルム株式会社 検知方法および検知システム
WO2017010261A1 (ja) * 2015-07-10 2017-01-19 ソニー株式会社 検査装置、検査方法、及び、プログラム
KR102618813B1 (ko) * 2016-01-27 2023-12-27 삼성전자주식회사 공정 챔버 모니터링 장치
JP6834174B2 (ja) 2016-05-13 2021-02-24 株式会社ジェイテクト 外観検査方法および外観検査装置
JP6859627B2 (ja) * 2016-08-09 2021-04-14 株式会社ジェイテクト 外観検査装置
JP7288271B2 (ja) * 2018-11-29 2023-06-07 国立大学法人埼玉大学 膜厚分布測定装置
FR3107854B1 (fr) 2020-03-04 2023-05-26 Safran Installation pour localiser un traceur d’une preforme tissee
JP7614937B2 (ja) * 2021-05-10 2025-01-16 東洋鋼鈑株式会社 ピンホール検出装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60200112A (ja) * 1984-03-23 1985-10-09 Osaka Seimitsu Kikai Kk 光学的形状誤差検出法
US4770530A (en) * 1986-04-23 1988-09-13 Kollmorgen Corporation Remote spectrophotometer
JPH066379B2 (ja) * 1987-11-30 1994-01-26 日本電気株式会社 微少穴挿入用位置決め装置
US5672875A (en) * 1992-07-15 1997-09-30 Optix Lp Methods of minimizing scattering and improving tissue sampling in non-invasive testing and imaging
DE69321316T2 (de) 1992-07-31 1999-02-25 Fuji Photo Film Co., Ltd., Minami-Ashigara, Kanagawa Verfahren und Gerät zum Erhalten drei-dimensionaler Information von Proben
JP3218727B2 (ja) * 1992-09-09 2001-10-15 株式会社ニコン 異物検査装置
DK0775023T3 (da) 1993-05-25 1999-06-23 Verbena Corp N V Sprøjtedyser til regulering af gennemstrømningsmængden pr. tidsenhed
IL110466A (en) * 1994-07-26 1998-07-15 C I Systems Israel Ltd Film thickness mapping using interferometric spectral imaging
CA2175348A1 (en) * 1993-10-29 1995-05-04 Arjun G. Yodh Object imaging using diffuse light
DE4342526A1 (de) * 1993-12-15 1995-06-22 Forschungszentrum Juelich Gmbh Durchstrahlung diffuser Streuer mit hoher Ortsauflösung
US6310689B1 (en) * 1996-08-23 2001-10-30 Asahi Kogaku Kogyo Kabushiki Kaisha Pattern reading apparatus
JPH10300447A (ja) * 1997-04-23 1998-11-13 K L Ee Akurotetsuku:Kk 表面パターンむら検出方法及び装置
JP3405279B2 (ja) * 1999-08-23 2003-05-12 日本電気株式会社 接写用固体撮像装置
WO2002082064A1 (en) * 2001-04-06 2002-10-17 Kla-Tencor Corporation Improved defect detection system
US7145654B2 (en) * 2003-10-01 2006-12-05 Tokyo Electron Limited Method and apparatus to reduce spotsize in an optical metrology instrument
JP4323991B2 (ja) * 2004-03-19 2009-09-02 大日本スクリーン製造株式会社 分光反射率測定装置、膜厚測定装置および分光反射率測定方法
US7349091B2 (en) * 2004-06-04 2008-03-25 Sharp Kabushiki Kaisha Optical object discriminating device
DE102005002934A1 (de) * 2005-01-21 2006-07-27 Roche Diagnostics Gmbh System und Verfahren zur optischen Abbildung von Objekten auf eine Detektionsvorrichtung mittels einer Lochblende

Also Published As

Publication number Publication date
EP2160591B1 (en) 2020-11-04
JP2010528281A (ja) 2010-08-19
HUP0700366A2 (en) 2008-12-29
HU229699B1 (hu) 2014-05-28
EP2160591A1 (en) 2010-03-10
WO2008142468A1 (en) 2008-11-27
US20100296096A1 (en) 2010-11-25
US8437002B2 (en) 2013-05-07
JP5472096B2 (ja) 2014-04-16

Similar Documents

Publication Publication Date Title
HU0700366D0 (en) Imaging optical checking device with pinhole camera (reflectometer, polarimeter, ellipsicmeter)
EP2180362A4 (en) LIGHT RECEIVING DEVICE, FOCUS DETECTION DEVICE AND IMAGING APPARATUS
EP2299306A4 (en) OPTICAL WIDE ANGLE SYSTEM AND IMAGING DEVICE
SG10201708650WA (en) Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
EP2331999A4 (en) WIDE WINE LINE AND PICTURE DEVICE FOR THIS
EP2172149A4 (en) INSTRUMENT FOR MEASURING AN OPTICAL IMAGE
GB0802290D0 (en) Camera adapter based optical imaging apparatus
EP2214044A4 (en) WIDE ANGLE OPTICAL SYSTEM, IMAGING LENS DEVICE, MONITOR CAMERA, AND DIGITAL APPARATUS
SG10201602750RA (en) Illumination Optical System, Exposure Apparatus, And Device Manufacturing Method
EP2275843A4 (en) OPTICAL DEVICE AND ANTIREFLECTION FILM
EP2053855A4 (en) CAMERA, PICTURE DISPLAY ARRANGEMENT AND PICTURE MEMORY ARRANGEMENT
EP2130367A4 (en) IMAGE CAPTURE APPARATUS EQUIPPED WITH AN OPTICAL VIEWFINDER
EP2243055A4 (en) OPTICAL DEVICE AND IMAGE RECORDING DEVICE WITH OPTICAL DEVICE
EP2239552A4 (en) IMAGE CAPTURE DEVICE FOR LENS
TWI319097B (en) Optical focusing device
IL194698A0 (en) An optical focus sensor, an inspection apparatus and a lithographic apparatus
EP2233959A4 (en) OKULAR SYSTEM AND OPTICAL ARRANGEMENT
TWM372473U (en) Lens assembly and photographic device
EP2141702A4 (en) FOCUSING LENS FOR OPTICAL CAPTURE DEVICE AND OPTICAL CAPTURE DEVICE
EP2203772A4 (en) LENS APPARATUS AND IMAGING APPARATUS
EP2138266A4 (en) TOGGLE CLAMP DEVICE
EP2367002A4 (en) TEST TOOL AND OPTICAL MEASURING DEVICE
IL180217A0 (en) In-vivo imaging optical device
EP2033034A4 (en) LENS CONTROL UNIT AND ILLUMINATING DEVICE WITH LENS SCREENING DEVICE
GB2442576B (en) Optical imaging device

Legal Events

Date Code Title Description
HC9A Change of name, address

Owner name: MTA TERMESZETTUDOMANYI KUTATOKOEZPONT (MTA TTK, HU

Free format text: FORMER OWNER(S): MTA MUESZAKI FIZIKAI ES ANYAGTUDOMANYI KUTATOINTEZET, HU

Owner name: MTA SZILARDTESTFIZIKAI ES OPTIKAI KUTATOINTEZE, HU

Free format text: FORMER OWNER(S): MTA MUESZAKI FIZIKAI ES ANYAGTUDOMANYI KUTATOINTEZET, HU

FH91 Appointment of a representative

Free format text: FORMER REPRESENTATIVE(S): HONTY LASZLO, HU

Representative=s name: CSALOTZKYNE BOLGAR ANDREA MTA TTK MUESZAKI FIZ, HU

FH92 Termination of representative

Representative=s name: HONTY LASZLO, HU

HC9A Change of name, address

Owner name: MTA TERMESZETTUDOMANYI KUTATOKOEZPONT (MTA TTK, HU

Free format text: FORMER OWNER(S): MTA MUESZAKI FIZIKAI ES ANYAGTUDOMANYI KUTATOINTEZET, HU; MTA SZILARDTESTFIZIKAI ES OPTIKAI KUTATOINTEZET, HU

Owner name: MTA WIGNER FIZIKAI KUTATOKOEZPONT, HU

Free format text: FORMER OWNER(S): MTA MUESZAKI FIZIKAI ES ANYAGTUDOMANYI KUTATOINTEZET, HU; MTA SZILARDTESTFIZIKAI ES OPTIKAI KUTATOINTEZET, HU

HC9A Change of name, address

Owner name: MTA TERMESZETTUDOMANYI KUTATOKOEZPONT (MTA TTK, HU

Free format text: FORMER OWNER(S): MTA MUESZAKI FIZIKAI ES ANYAGTUDOMANYI KUTATOINTEZET, HU; MTA SZILARDTESTFIZIKAI ES OPTIKAI KUTATOINTEZET, HU; MTA TERMESZETTUDOMANYI KUTATOKOEZPONT (MTA TTK), HU

Owner name: MTA WIGNER FIZIKAI KUTATOKOEZPONT, HU

Free format text: FORMER OWNER(S): MTA MUESZAKI FIZIKAI ES ANYAGTUDOMANYI KUTATOINTEZET, HU; MTA SZILARDTESTFIZIKAI ES OPTIKAI KUTATOINTEZET, HU; MTA TERMESZETTUDOMANYI KUTATOKOEZPONT (MTA TTK), HU

GB9A Succession in title

Owner name: MTA WIGNER FIZIKAI KUTATOKOEZPONT, HU

Free format text: FORMER OWNER(S): MTA MUESZAKI FIZIKAI ES ANYAGTUDOMANYI KUTATOINTEZET, HU; MTA SZILARDTESTFIZIKAI ES OPTIKAI KUTATOINTEZET, HU; MTA TERMESZETTUDOMANYI KUTATOKOEZPONT (MTA TTK), HU; MTA TERMESZETTUDOMANYI KUTATOKOEZPONT (MTA TTK), HU

Owner name: MTA ENERGIATUDOMANYI KUTATOKOEZPONT, HU

Free format text: FORMER OWNER(S): MTA MUESZAKI FIZIKAI ES ANYAGTUDOMANYI KUTATOINTEZET, HU; MTA SZILARDTESTFIZIKAI ES OPTIKAI KUTATOINTEZET, HU; MTA TERMESZETTUDOMANYI KUTATOKOEZPONT (MTA TTK), HU; MTA TERMESZETTUDOMANYI KUTATOKOEZPONT (MTA TTK), HU

HC9A Change of name, address

Owner name: ENERGIATUDOMANYI KUTATOKOEZPONT, HU

Free format text: FORMER OWNER(S): MTA MUESZAKI FIZIKAI ES ANYAGTUDOMANYI KUTATOINTEZET, HU; MTA SZILARDTESTFIZIKAI ES OPTIKAI KUTATOINTEZET, HU; MTA ENERGIATUDOMANYI KUTATOKOEZPONT, HU; MTA TERMESZETTUDOMANYI KUTATOKOEZPONT (MTA TTK), HU; MTA TERMESZETTUDOMANYI KUTATOKOEZPONT (MTA TTK), HU; MTA WIGNER FIZIKAI KUTATOKOEZPONT, HU

Owner name: WIGNER FIZIKAI KUTATOKOEZPONT, HU

Free format text: FORMER OWNER(S): MTA MUESZAKI FIZIKAI ES ANYAGTUDOMANYI KUTATOINTEZET, HU; MTA SZILARDTESTFIZIKAI ES OPTIKAI KUTATOINTEZET, HU; MTA ENERGIATUDOMANYI KUTATOKOEZPONT, HU; MTA TERMESZETTUDOMANYI KUTATOKOEZPONT (MTA TTK), HU; MTA TERMESZETTUDOMANYI KUTATOKOEZPONT (MTA TTK), HU; MTA WIGNER FIZIKAI KUTATOKOEZPONT, HU

MM4A Lapse of definitive patent protection due to non-payment of fees