IL130992A - Method for reducing measurement errors made by a machine using a probe and a machine using said method - Google Patents

Method for reducing measurement errors made by a machine using a probe and a machine using said method

Info

Publication number
IL130992A
IL130992A IL13099299A IL13099299A IL130992A IL 130992 A IL130992 A IL 130992A IL 13099299 A IL13099299 A IL 13099299A IL 13099299 A IL13099299 A IL 13099299A IL 130992 A IL130992 A IL 130992A
Authority
IL
Israel
Prior art keywords
machine
probe
measurement errors
errors made
reducing measurement
Prior art date
Application number
IL13099299A
Other languages
English (en)
Other versions
IL130992A0 (en
Original Assignee
Renishaw Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw Plc filed Critical Renishaw Plc
Publication of IL130992A0 publication Critical patent/IL130992A0/xx
Publication of IL130992A publication Critical patent/IL130992A/xx

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form
    • G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37432—Detected by accelerometer, piezo electric
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41128—Compensate vibration beam, gantry, feedback of speed of non driven end
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/42—Servomotor, servo controller kind till VSS
    • G05B2219/42077—Position, speed or current, combined with vibration feedback

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
IL13099299A 1998-07-22 1999-07-20 Method for reducing measurement errors made by a machine using a probe and a machine using said method IL130992A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9815830.6A GB9815830D0 (en) 1998-07-22 1998-07-22 Method of and apparatus for reducing vibrations on probes carried by coordinate measuring machines

Publications (2)

Publication Number Publication Date
IL130992A0 IL130992A0 (en) 2001-01-28
IL130992A true IL130992A (en) 2003-02-12

Family

ID=10835878

Family Applications (1)

Application Number Title Priority Date Filing Date
IL13099299A IL130992A (en) 1998-07-22 1999-07-20 Method for reducing measurement errors made by a machine using a probe and a machine using said method

Country Status (5)

Country Link
US (2) US6412329B1 (fr)
EP (1) EP0974882A3 (fr)
JP (1) JP4478248B2 (fr)
GB (1) GB9815830D0 (fr)
IL (1) IL130992A (fr)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6810597B2 (en) * 1999-04-08 2004-11-02 Renishaw Plc Use of surface measuring probes
GB0016533D0 (en) * 2000-07-06 2000-08-23 Renishaw Plc Method of and apparatus for correction of coordinate measurement errors due to vibrations in coordinate measuring machines (cmms)
DE10257856A1 (de) * 2002-12-11 2004-07-08 Leitz Messtechnik Gmbh Verfahren zur Schwingungsdämpfung eines Koordinatenmessgerätes sowie Koordinatenmessgerät
GB0326532D0 (en) * 2003-11-13 2003-12-17 Renishaw Plc Method of error compensation
DE102004038416B4 (de) * 2004-07-30 2014-02-06 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zum Bestimmen von Raumkoordinaten eines Messpunktes an einem Messobjekt sowie entsprechendes Koordinatenmessgerät
JP4335123B2 (ja) * 2004-11-26 2009-09-30 ファナック株式会社 制御装置
JP2006159345A (ja) * 2004-12-07 2006-06-22 Fanuc Ltd 制御装置
JP4478584B2 (ja) * 2005-01-17 2010-06-09 株式会社ミツトヨ 位置制御装置、測定装置および加工装置
GB2425840A (en) * 2005-04-13 2006-11-08 Renishaw Plc Error correction of workpiece measurements
WO2006114603A2 (fr) 2005-04-26 2006-11-02 Renishaw Plc Etalonnage d'une sonde
DE102005032749A1 (de) * 2005-07-13 2007-01-18 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zum Antasten eines Werkstücks mit einem Koordinatenmessgerät und Koordinatenmessgeräte
US20070168085A1 (en) * 2005-11-18 2007-07-19 Guilford John H Systems and method for adaptively adjusting a control loop
DE102006009181A1 (de) 2006-02-24 2007-09-06 Carl Zeiss Industrielle Messtechnik Gmbh Sichere Überwachung der Geschwindigkeit bei Koordinatenmessgeräten
JP4851819B2 (ja) * 2006-03-16 2012-01-11 株式会社ミツトヨ 測定制御回路の制御ゲイン調整方法および測定制御回路
GB0611109D0 (en) * 2006-06-06 2006-07-19 Renishaw Plc A method for measuring workpieces
DE102006055005A1 (de) * 2006-11-17 2008-05-29 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren und Vorrichtung zum Bestimmen von Raumkoordinaten an einer Vielzahl von Messpunkten
EP1983297B1 (fr) * 2007-04-18 2010-04-07 Hexagon Metrology AB Sonde de lecture à vitesse de balayage constante
US9381296B2 (en) * 2007-12-18 2016-07-05 Hospira, Inc. Infusion pump with configurable screen settings
JP5424581B2 (ja) * 2008-06-06 2014-02-26 キヤノン株式会社 部分測定を合成する形状測定方法
US8197473B2 (en) 2009-02-20 2012-06-12 Vivant Medical, Inc. Leaky-wave antennas for medical applications
JP5438995B2 (ja) * 2009-03-10 2014-03-12 株式会社ミツトヨ 形状測定機および倣いプローブ装置
AU2010273749B2 (en) 2009-06-30 2015-04-02 Hexagon Metrology Ab Coordinate measurement machine with vibration detection
DE102009049534A1 (de) * 2009-10-06 2011-04-07 Carl Zeiss Industrielle Messtechnik Gmbh Koordinatenmessgerät mit Lageänderungssensoren
US8619361B2 (en) * 2010-03-31 2013-12-31 Nikon Corporation Direct derivative feedforward vibration compensation system
DE102010015780A1 (de) 2010-04-20 2011-10-20 Carl Zeiss Industrielle Messtechnik Gmbh Betrieb einer Koordinatenmessmaschine oder einer Werkzeugmaschine
DE102010052503B4 (de) 2010-11-26 2012-06-21 Wenzel Scantec Gmbh Verfahren zur Steuerung eines Koordinatenmessgeräts sowie Koordinatenmessgerät
EP2826606A4 (fr) * 2012-03-15 2015-12-02 Olympus Corp Dispositif de manipulation
WO2013159803A1 (fr) 2012-04-23 2013-10-31 Carl Zeiss Industrielle Messtechnik Gmbh Commande du moteur d'entraînement d'appareils comportant une partie mobile entrainée par ledit moteur
DE102012207110A1 (de) * 2012-04-27 2013-10-31 Homag Holzbearbeitungssysteme Ag Schwingungsdämpfungssystem
US9568075B2 (en) * 2013-10-28 2017-02-14 Seiko Epson Corporation Robot, robot control device, and robot system
WO2015139505A1 (fr) * 2014-03-20 2015-09-24 Harbin Institute Of Technology Procédé et équipement basés sur la détection de la propriété de polarisation d'une sonde à fibre de maintien de polarisation pour mesurer des structures d'une micro-pièce
WO2016173625A1 (fr) 2015-04-28 2016-11-03 Hexagon Technology Center Gmbh Amortissement actif de dispositif de mesure
DE102016112011A1 (de) * 2016-04-14 2017-10-19 Jenoptik Industrial Metrology Germany Gmbh Verfahren zum Betreiben einer Messvorrichtung
DE102017103938A1 (de) * 2017-02-24 2018-08-30 Carl Zeiss Industrielle Messtechnik Gmbh Vorrichtung zum Messen der Rauheit einer Werkstückoberfläche
US9835433B1 (en) * 2017-05-09 2017-12-05 Tesa Sa Touch trigger probe
GB201721309D0 (en) 2017-12-19 2018-01-31 Renishaw Plc Production and measurement of workpieces
CN108015627B (zh) * 2017-12-25 2023-11-10 东莞捷荣技术股份有限公司 一种用于cnc机台探头的检测控制装置及其控制方法
CN111294014B (zh) * 2018-12-10 2023-10-27 广州汽车集团股份有限公司 一种信号积分去偏差方法及其系统、电子设备
DE102021212817B4 (de) 2021-11-15 2023-12-21 Carl Zeiss Industrielle Messtechnik Gmbh Wiederholte Positionsbestimmung eines beweglichen Teils eines Koordinatenmessgerätes

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2914763A (en) * 1953-11-05 1959-11-24 Gen Precision Lab Inc Doppler-inertial navigation data system
US3301508A (en) * 1961-06-07 1967-01-31 United Aircraft Corp Guidance system with stellar correction
US3288160A (en) * 1964-04-01 1966-11-29 Gen Electric Acceleration limiting long range speed control
US3405599A (en) * 1964-12-02 1968-10-15 Cadillac Gage Co Weapon stabilization system
US3568029A (en) * 1969-01-24 1971-03-02 Smith Corp A O Constant velocity drive control for machine tools and the like
US3836835A (en) * 1971-04-19 1974-09-17 B Sawyer Multi axes linear movement positioning system
US4143311A (en) * 1976-09-30 1979-03-06 Xerox Corporation Hysteresis synchronous motor rate servo system
US4345154A (en) 1979-01-12 1982-08-17 The United States Of America As Represented By The Secretary Of The Army Bias-compensated, ionization sensor for gaseous media and method for attaining proper bias for same
GB2045437B (en) * 1979-03-30 1984-02-08 Renishaw Electrical Ltd Coordinate measuring machine
US4345194A (en) * 1980-12-01 1982-08-17 The United States Of America As Represented By The United States Department Of Energy Control system to reduce the effects of friction in drive trains of continuous-path-positioning systems
JPS57208891A (en) * 1981-06-17 1982-12-22 Yaskawa Electric Mfg Co Ltd Control system of motor driven machine
JPS6020214A (ja) * 1983-07-15 1985-02-01 Hitachi Ltd ロボツトのサ−ボ装置
JPS6224991A (ja) * 1985-07-26 1987-02-02 松下電器産業株式会社 産業用ロボツト
US4841184A (en) * 1987-06-23 1989-06-20 Mechanical Technology Incorporated Velocity and imbalance observer control circuit for active magnetic bearing or damper
US4925312A (en) * 1988-03-21 1990-05-15 Staubli International Ag Robot control system having adaptive feedforward torque control for improved accuracy
US4992716A (en) * 1989-08-02 1991-02-12 Kollmorgen Corp. Motor control with digital feedback
JP2707149B2 (ja) * 1990-04-28 1998-01-28 日本電気株式会社 速度、位置のロバスト的制御装置
US5049797A (en) * 1990-07-02 1991-09-17 Utah State University Foundation Device and method for control of flexible link robot manipulators
US5459383A (en) * 1991-02-07 1995-10-17 Quantum Corporation Robust active damping control system
JPH05134758A (ja) * 1991-05-17 1993-06-01 Fanuc Ltd サーボモータの制御方式
JP2833730B2 (ja) * 1993-03-10 1998-12-09 三菱電機株式会社 位置制御装置
US5432423A (en) * 1993-04-29 1995-07-11 Universal Instruments Corporation Electronic damping system
DE4342312A1 (de) * 1993-12-11 1995-06-14 Zeiss Carl Fa Verfahren zur Korrektur von schwingungsbedingten Meßfehlern bei Koordinatenmeßgeräten
GB9401692D0 (en) * 1994-01-28 1994-03-23 Renishaw Plc Performing measurement or calibration on positioning machines
DE4436507A1 (de) 1994-10-13 1996-04-18 Zeiss Carl Fa Verfahren zur Koordinatenmessung an Werkstücken
US5834623A (en) * 1995-03-03 1998-11-10 Ignagni; Mario B. Apparatus and method to provide high accuracy calibration of machine tools
DE19637554B4 (de) * 1995-09-19 2004-01-08 Deutsches Zentrum für Luft- und Raumfahrt e.V. Verfahren und Vorrichtung zum Meßfehlerausgleich bei Meßrobotern
US5714831A (en) * 1995-11-13 1998-02-03 Wisconsin Alumni Research Foundation Method and apparatus for improved control of piezoelectric positioners
DE19614883C2 (de) * 1996-04-16 2003-08-21 Leitz Brown & Sharpe Mestechni Verfahren zur Antastung und zum Scannen bei Koordinatenmeßgeräten
JP3526385B2 (ja) * 1997-03-11 2004-05-10 株式会社東芝 パターン形成装置
SG99277A1 (en) * 1998-02-05 2003-10-27 Texas Instr Singapore Pte Ltd Partial semionductor wafer processing with multiple cuts of random sizes
US6156625A (en) * 1998-03-07 2000-12-05 Texas Instruments Incorporated Partial semiconductor wafer processing using wafermap display

Also Published As

Publication number Publication date
US6412329B1 (en) 2002-07-02
US6568242B2 (en) 2003-05-27
EP0974882A2 (fr) 2000-01-26
EP0974882A3 (fr) 2006-11-08
JP4478248B2 (ja) 2010-06-09
JP2000046541A (ja) 2000-02-18
IL130992A0 (en) 2001-01-28
US20020095975A1 (en) 2002-07-25
GB9815830D0 (en) 1998-09-16

Similar Documents

Publication Publication Date Title
IL130992A (en) Method for reducing measurement errors made by a machine using a probe and a machine using said method
GB2368130B (en) Method and apparatus for testing a well
GB2340586B (en) A coordinate measurement machine
GB9401692D0 (en) Performing measurement or calibration on positioning machines
AU3084400A (en) Method for operating a measuring instrument
AU1208900A (en) Component position verification using a probe apparatus
AU6274999A (en) Method for forming a critical dimension test structure and its use
EP1443854A4 (fr) Systeme et procede pour l'evaluation des reflexes
GB9805861D0 (en) A method and an apparatus for inspecting articles
GB9803364D0 (en) Improvements in or relating to a method of an apparatus for registering a robot
EP0693669A3 (fr) Tête de mesure pour machines de mesure de coördonnées
AU4287599A (en) Computerized tomography for non-destructive testing
AU2896902A (en) A method and an apparatus for a waveform quality measurement
AU6028799A (en) Apparatus and method for making nuclear magnetic measurements in a borehole
AU5468899A (en) Apparatus and method for measuring a garment
IL113471A (en) Method for determining particular faults in a machine
GB9901373D0 (en) Method for detecting track measuring values
PT1230816E (pt) Método e aparelho para planear medidas de posição
EP1167920A4 (fr) Appareil et procede de mesure de deplacement
AU1736700A (en) Inspection apparatus for evaluating a partially completed weld
GB9928770D0 (en) A measurement method
GB2348698B (en) Electro-optic sampling probe and a method for adjusting the same
GB9621238D0 (en) A test probe
GB9511856D0 (en) Probe arm for machine tool
DE59903828D1 (de) Verfahren zum betrieb eines positionsmesssystems und geeignetes positionsmesssystem hierzu

Legal Events

Date Code Title Description
FF Patent granted
KB Patent renewed
MM9K Patent not in force due to non-payment of renewal fees