Classifications

• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
  • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
  • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
  • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
  • H10P72/3202—Mechanical details, e.g. rollers or belts
• • G—PHYSICS
  • G11—INFORMATION STORAGE
  • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
  • G11B23/00—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
  • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
  • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
  • H10P72/3206—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
• • G—PHYSICS
  • G11—INFORMATION STORAGE
  • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
  • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
  • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
  • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers

Landscapes

• Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
• Structure Of Belt Conveyors (AREA)
• Cleaning Or Drying Semiconductors (AREA)
• Threshing Machine Elements (AREA)
• Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
• Manufacturing Optical Record Carriers (AREA)
• Belt Conveyors (AREA)
• Manufacturing Of Printed Wiring (AREA)
• Delivering By Means Of Belts And Rollers (AREA)
• Removal Of Insulation Or Armoring From Wires Or Cables (AREA)
• Supply And Installment Of Electrical Components (AREA)
• Drying Of Solid Materials (AREA)
• Attitude Control For Articles On Conveyors (AREA)

Applications Claiming Priority (2)

Publications (1)

Family

ID=7826830

Family Applications (1)

Country Status (13)

Families Citing this family (9)

Family Cites Families (8)

• 1997
  • 1997-04-17 DE DE19716123A patent/DE19716123C2/de not_active Expired - Lifetime
• 1998
  • 1998-04-09 JP JP54493698A patent/JP3155015B2/ja not_active Expired - Fee Related
  • 1998-04-09 DK DK98921450T patent/DK0976146T3/da active
  • 1998-04-09 EP EP98921450A patent/EP0976146B1/de not_active Expired - Lifetime
  • 1998-04-09 CA CA002285393A patent/CA2285393C/en not_active Expired - Fee Related
  • 1998-04-09 ES ES98921450T patent/ES2180168T3/es not_active Expired - Lifetime
  • 1998-04-09 IL IL13189398A patent/IL131893A0/xx not_active IP Right Cessation
  • 1998-04-09 AT AT98921450T patent/ATE220476T1/de not_active IP Right Cessation
  • 1998-04-09 US US09/403,330 patent/US6241079B1/en not_active Expired - Fee Related
  • 1998-04-09 WO PCT/EP1998/002083 patent/WO1998048450A1/de not_active Ceased
  • 1998-04-09 KR KR1019997009000A patent/KR100347199B1/ko not_active Expired - Fee Related
  • 1998-04-09 CN CN98804234A patent/CN1111898C/zh not_active Expired - Fee Related
  • 1998-04-09 DE DE59804726T patent/DE59804726D1/de not_active Expired - Lifetime
  • 1998-04-13 TW TW087105544A patent/TW442435B/zh active

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