IL24630A - Annular hollow cathode discharge apparatus - Google Patents

Annular hollow cathode discharge apparatus

Info

Publication number: IL24630A
Authority: IL; Israel
Prior art keywords: cathode; cathode structure; hollow; aperture; enclosure
Prior art date: 1964-12-10

Application number

IL24630A

Other languages

English (en)

Original Assignee

United Aircraft Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1964-12-10

Filing date

1965-11-16

Publication date

1969-11-30

1965-11-16 Application filed by United Aircraft Corp filed Critical United Aircraft Corp

1969-11-30 Publication of IL24630A publication Critical patent/IL24630A/en

Links

238000010894 electron beam technology Methods 0.000 claims description 18
229910052751 metal Inorganic materials 0.000 claims description 7
230000002159 abnormal effect Effects 0.000 claims description 3
239000012212 insulator Substances 0.000 claims description 3
230000002093 peripheral effect Effects 0.000 claims 2
208000028659 discharge Diseases 0.000 description 25
239000007789 gas Substances 0.000 description 16
150000002500 ions Chemical class 0.000 description 8
239000007787 solid Substances 0.000 description 8
230000001788 irregular Effects 0.000 description 6
230000005684 electric field Effects 0.000 description 5
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
238000009826 distribution Methods 0.000 description 4
239000000463 material Substances 0.000 description 4
239000011148 porous material Substances 0.000 description 4
230000007704 transition Effects 0.000 description 4
238000003466 welding Methods 0.000 description 4
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
230000008901 benefit Effects 0.000 description 3
238000005219 brazing Methods 0.000 description 3
230000000694 effects Effects 0.000 description 3
239000002184 metal Substances 0.000 description 3
238000012986 modification Methods 0.000 description 3
230000004048 modification Effects 0.000 description 3
239000000615 nonconductor Substances 0.000 description 3
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
229910052786 argon Inorganic materials 0.000 description 2
239000000835 fiber Substances 0.000 description 2
238000004519 manufacturing process Methods 0.000 description 2
229910001220 stainless steel Inorganic materials 0.000 description 2
239000010935 stainless steel Substances 0.000 description 2
238000007740 vapor deposition Methods 0.000 description 2
238000004857 zone melting Methods 0.000 description 2
RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
101100516913 Mus musculus Npat gene Proteins 0.000 description 1
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
101100516914 Xenopus laevis npat gene Proteins 0.000 description 1
239000004411 aluminium Substances 0.000 description 1
229910052782 aluminium Inorganic materials 0.000 description 1
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
239000010406 cathode material Substances 0.000 description 1
239000000919 ceramic Substances 0.000 description 1
238000005229 chemical vapour deposition Methods 0.000 description 1
239000004020 conductor Substances 0.000 description 1
238000007796 conventional method Methods 0.000 description 1
239000013078 crystal Substances 0.000 description 1
230000007423 decrease Effects 0.000 description 1
230000001419 dependent effect Effects 0.000 description 1
238000009792 diffusion process Methods 0.000 description 1
238000010893 electron trap Methods 0.000 description 1
238000002474 experimental method Methods 0.000 description 1
239000004744 fabric Substances 0.000 description 1
239000005350 fused silica glass Substances 0.000 description 1
239000011521 glass Substances 0.000 description 1
238000010438 heat treatment Methods 0.000 description 1
239000001307 helium Substances 0.000 description 1
229910052734 helium Inorganic materials 0.000 description 1
SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
239000001257 hydrogen Substances 0.000 description 1
229910052739 hydrogen Inorganic materials 0.000 description 1
125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
239000011261 inert gas Substances 0.000 description 1
229910000833 kovar Inorganic materials 0.000 description 1
230000007246 mechanism Effects 0.000 description 1
QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
229910052753 mercury Inorganic materials 0.000 description 1
150000002739 metals Chemical class 0.000 description 1
238000000034 method Methods 0.000 description 1
230000007935 neutral effect Effects 0.000 description 1
229910052757 nitrogen Inorganic materials 0.000 description 1
230000000149 penetrating effect Effects 0.000 description 1
230000008569 process Effects 0.000 description 1
239000005297 pyrex Substances 0.000 description 1
238000007670 refining Methods 0.000 description 1
239000003870 refractory metal Substances 0.000 description 1
238000007789 sealing Methods 0.000 description 1
239000000377 silicon dioxide Substances 0.000 description 1
238000003892 spreading Methods 0.000 description 1
230000007480 spreading Effects 0.000 description 1
238000004544 sputter deposition Methods 0.000 description 1
239000000126 substance Substances 0.000 description 1
239000000758 substrate Substances 0.000 description 1
230000002459 sustained effect Effects 0.000 description 1
238000012360 testing method Methods 0.000 description 1
239000010936 titanium Substances 0.000 description 1
229910052719 titanium Inorganic materials 0.000 description 1
WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
229910052721 tungsten Inorganic materials 0.000 description 1
239000010937 tungsten Substances 0.000 description 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J17/00—Gas-filled discharge tubes with solid cathode
- H01J17/02—Details
- H01J17/04—Electrodes; Screens
- H01J17/06—Cathodes
- H01J17/066—Cold cathodes
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2893/00—Discharge tubes and lamps
- H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
- H01J2893/0065—Electrode systems
- H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Electron Sources, Ion Sources (AREA)
Plasma Technology (AREA)
Arc Welding In General (AREA)
Welding Or Cutting Using Electron Beams (AREA)

IL24630A 1964-12-10 1965-11-16 Annular hollow cathode discharge apparatus IL24630A (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US417399A US3381157A (en)	1964-12-10	1964-12-10	Annular hollow cathode discharge apparatus

Publications (1)

Publication Number	Publication Date
IL24630A true IL24630A (en)	1969-11-30

Family

ID=23653867

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IL24630A IL24630A (en)	1964-12-10	1965-11-16	Annular hollow cathode discharge apparatus

Country Status (9)

Country	Link
US (1)	US3381157A (de)
BE (1)	BE673420A (de)
CH (1)	CH457631A (de)
DE (1)	DE1514990A1 (de)
ES (1)	ES320887A1 (de)
FR (1)	FR1455620A (de)
GB (1)	GB1121115A (de)
IL (1)	IL24630A (de)
NL (1)	NL6516051A (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5552675A (en) *	1959-04-08	1996-09-03	Lemelson; Jerome H.	High temperature reaction apparatus
US3452179A (en) *	1967-04-12	1969-06-24	Us Air Force	Electron optical system
US3466487A (en) *	1967-06-16	1969-09-09	United Aircraft Corp	Device for moving a beam of charged particles
US3492525A (en) *	1968-03-11	1970-01-27	United Aircraft Corp	Sectional hollow cathode discharge apparatus
GB1275261A (en) *	1968-06-04	1972-05-24	Atomic Energy Authority Uk	Improvements in or relating to non thermionic cathode slow discharge devices
US3769008A (en) *	1971-05-19	1973-10-30	B Borok	Method for sintering workpieces of pressed powdered refractory metal or alloy and vacuum furnace for performing the same
JPS547321B2 (de) *	1973-11-21	1979-04-05
US4377773A (en) *	1980-12-12	1983-03-22	The United States Of America As Represented By The Department Of Energy	Negative ion source with hollow cathode discharge plasma
GB8601421D0 (en) *	1986-01-21	1986-02-26	Welding Inst	Charged particle beam generator
GB2194673B (en) *	1986-08-30	1990-10-24	English Electric Valve Co Ltd	Apparatus for forming an electron beam sheet
FR2618602B1 (fr) *	1987-07-22	1990-01-05	Centre Nat Rech Scient	Source d'electrons
EA020763B9 (ru)	2008-08-04	2015-05-29	Эй-Джи-Си Флет Гласс Норт Эмерике, Инк.	Источник плазмы и способы нанесения тонкопленочных покрытий с использованием плазменно-химического осаждения из газовой фазы
EP2401232B1 (de) *	2009-02-24	2016-01-06	University Of Virginia Patent Foundation	Koaxiale hohlkathodenplasma unterstützte gerichtete aufdampfung und zugehöriges verfahren
US10586685B2 (en)	2014-12-05	2020-03-10	Agc Glass Europe	Hollow cathode plasma source
EA201791237A1 (ru)	2014-12-05	2017-11-30	Эй-Джи-Си Флет Гласс Норт Эмерике, Инк.	Плазменный источник с применением уменьшающего образование макрочастиц покрытия и способ использования плазменного источника с применением уменьшающего образование макрочастиц покрытия для осаждения тонкопленочных покрытий и модификации поверхностей
US9721765B2 (en)	2015-11-16	2017-08-01	Agc Flat Glass North America, Inc.	Plasma device driven by multiple-phase alternating or pulsed electrical current
US9721764B2 (en)	2015-11-16	2017-08-01	Agc Flat Glass North America, Inc.	Method of producing plasma by multiple-phase alternating or pulsed electrical current
US10242846B2 (en)	2015-12-18	2019-03-26	Agc Flat Glass North America, Inc.	Hollow cathode ion source
US10573499B2 (en)	2015-12-18	2020-02-25	Agc Flat Glass North America, Inc.	Method of extracting and accelerating ions

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2084172A (en) *	1930-12-13	1937-06-15	Rca Corp	Electron tube
GB888609A (en) *	1957-07-31	1962-01-31	Cie Francaise Thomsom Houston	Improvements in and relating to electron emitting devices
US3262013A (en) *	1962-02-02	1966-07-19	Martin Marietta Corp	Perforated hollow cathode discharge device
US3210518A (en) *	1962-12-21	1965-10-05	Alloyd Electronics Corp	Hollow cathode device
US3218431A (en) *	1962-12-27	1965-11-16	Gen Electric	Self-focusing electron beam apparatus

1964
- 1964-12-10 US US417399A patent/US3381157A/en not_active Expired - Lifetime
1965
- 1965-11-16 IL IL24630A patent/IL24630A/en unknown
- 1965-11-19 GB GB49176/65A patent/GB1121115A/en not_active Expired
- 1965-11-23 DE DE19651514990 patent/DE1514990A1/de active Pending
- 1965-11-25 FR FR39701A patent/FR1455620A/fr not_active Expired
- 1965-12-03 CH CH1673865A patent/CH457631A/de unknown
- 1965-12-08 BE BE673420D patent/BE673420A/xx unknown
- 1965-12-09 NL NL6516051A patent/NL6516051A/xx unknown
- 1965-12-10 ES ES0320887A patent/ES320887A1/es not_active Expired

Also Published As

Publication number	Publication date
NL6516051A (de)	1966-06-13
ES320887A1 (es)	1966-09-01
US3381157A (en)	1968-04-30
DE1514990A1 (de)	1970-07-23
BE673420A (de)	1966-04-01
CH457631A (de)	1968-06-15
FR1455620A (fr)	1966-10-14
GB1121115A (en)	1968-07-24

Publication	Publication Date	Title
IL24630A (en)	1969-11-30	Annular hollow cathode discharge apparatus
KR100586050B1 (ko)	2006-06-07	하전입자빔과 관련한 개선된 장치
US4335465A (en)	1982-06-15	Method of producing an accellerating electrons and ions under application of voltage and arrangements connected therewith
US3831052A (en)	1974-08-20	Hollow cathode gas discharge device
US4714860A (en)	1987-12-22	Ion beam generating apparatus
JP5872541B2 (ja)	2016-03-01	改良型イオン源
US5215703A (en)	1993-06-01	High-flux neutron generator tube
US3374386A (en)	1968-03-19	Field emission cathode having tungsten miller indices 100 plane coated with zirconium, hafnium or magnesium on oxygen binder
US3411035A (en)	1968-11-12	Multi-chamber hollow cathode low voltage electron beam apparatus
EP0261198B1 (de)	1992-11-25	Elektronenkanone mit plasmaanode
US3486064A (en)	1969-12-23	Hollow cathode,nonthermionic electron beam source with replaceable liner
US3414702A (en)	1968-12-03	Nonthermionic electron beam apparatus
US5008585A (en)	1991-04-16	Vacuum arc sources of ions
US3846668A (en)	1974-11-05	Plasma generating device
US3182175A (en)	1965-05-04	Electron beam heating device
US3262003A (en)	1966-07-19	Perforated hollow cathode discharge device
US7550741B2 (en)	2009-06-23	Inertial electrostatic confinement fusion
US4218633A (en)	1980-08-19	Hydrogen hollow cathode ion source
US3497743A (en)	1970-02-24	Annular multiple beam contoured cathode device
US10468220B1 (en)	2019-11-05	Indirectly heated cathode ion source assembly
US3286187A (en)	1966-11-15	Ion source utilizing a spherically converging electric field
US3448315A (en)	1969-06-03	Ion gun improvements for operation in the micron pressure range and utilizing a diffuse discharge
US4004172A (en)	1977-10-18	Gas discharge electron gun for generating an electron beam by means of a glow discharge
US10217600B1 (en)	2019-02-26	Indirectly heated cathode ion source assembly
US3185882A (en)	1965-05-25	Electron discharge device including cathode-focus electrode assemblies therefor