IL91169A - Broadband microstrip to coplanar waveguide transition by anisotropic etching of gallium arsenide - Google Patents
Broadband microstrip to coplanar waveguide transition by anisotropic etching of gallium arsenideInfo
- Publication number
- IL91169A IL91169A IL9116989A IL9116989A IL91169A IL 91169 A IL91169 A IL 91169A IL 9116989 A IL9116989 A IL 9116989A IL 9116989 A IL9116989 A IL 9116989A IL 91169 A IL91169 A IL 91169A
- Authority
- IL
- Israel
- Prior art keywords
- coplanar waveguide
- microstrip
- sloping
- pair
- top surface
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P11/00—Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P5/00—Coupling devices of the waveguide type
- H01P5/08—Coupling devices of the waveguide type for linking dissimilar lines or devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Waveguides (AREA)
- Drying Of Semiconductors (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US07/241,638 US4906953A (en) | 1988-09-08 | 1988-09-08 | Broadband microstrip to coplanar waveguide transition by anisotropic etching of gallium arsenide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| IL91169A0 IL91169A0 (en) | 1990-03-19 |
| IL91169A true IL91169A (en) | 1994-06-24 |
Family
ID=22911538
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL9116989A IL91169A (en) | 1988-09-08 | 1989-08-01 | Broadband microstrip to coplanar waveguide transition by anisotropic etching of gallium arsenide |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4906953A (fr) |
| EP (1) | EP0358497A3 (fr) |
| JP (1) | JPH02113703A (fr) |
| CA (1) | CA1323913C (fr) |
| IL (1) | IL91169A (fr) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5142351A (en) * | 1989-08-31 | 1992-08-25 | Hewlett-Packard Company | Via-less two-metal tape-automated bonding system |
| US5213876A (en) * | 1990-01-11 | 1993-05-25 | Hewlett-Packard Company | Flexible circuit card with laser-contoured VIAs and machined capacitors |
| JP3058898B2 (ja) * | 1990-09-03 | 2000-07-04 | 三菱電機株式会社 | 半導体装置及びその評価方法 |
| DE4128334A1 (de) * | 1991-08-27 | 1993-03-04 | Ant Nachrichtentech | Planare mikrowellenschaltung |
| US5194833A (en) * | 1991-11-15 | 1993-03-16 | Motorola, Inc. | Airbridge compensated microwave conductors |
| US5334306A (en) * | 1991-12-11 | 1994-08-02 | At&T Bell Laboratories | Metallized paths on diamond surfaces |
| US5225797A (en) * | 1992-04-27 | 1993-07-06 | Cornell Research Foundation, Inc. | Dielectric waveguide-to-coplanar transmission line transitions |
| US5239517A (en) * | 1992-08-28 | 1993-08-24 | The United States Of America As Represented By The Secretary Of The Army | Saw transducer with coplanar waveguide transition |
| US5309122A (en) * | 1992-10-28 | 1994-05-03 | Ball Corporation | Multiple-layer microstrip assembly with inter-layer connections |
| US5978666A (en) * | 1994-09-26 | 1999-11-02 | Endgate Corporation | Slotline-mounted flip chip structures |
| US6265937B1 (en) | 1994-09-26 | 2001-07-24 | Endgate Corporation | Push-pull amplifier with dual coplanar transmission line |
| US5983089A (en) * | 1994-09-26 | 1999-11-09 | Endgate Corporation | Slotline-mounted flip chip |
| US6094114A (en) * | 1994-09-26 | 2000-07-25 | Endgate Corporation | Slotline-to-slotline mounted flip chip |
| US5631446A (en) * | 1995-06-07 | 1997-05-20 | Hughes Electronics | Microstrip flexible printed wiring board interconnect line |
| US5550518A (en) * | 1995-06-12 | 1996-08-27 | Endgate Corporation | Miniature active conversion between microstrip and coplanar wave guide |
| US5821815A (en) * | 1996-09-25 | 1998-10-13 | Endgate Corporation | Miniature active conversion between slotline and coplanar waveguide |
| US6441697B1 (en) * | 1999-01-27 | 2002-08-27 | Kyocera America, Inc. | Ultra-low-loss feedthrough for microwave circuit package |
| FR2789232A1 (fr) * | 1999-01-28 | 2000-08-04 | Cit Alcatel | Module de circuit hyperfrequence et son dispositif de connexion a un autre module |
| JP3334680B2 (ja) * | 1999-06-03 | 2002-10-15 | 株式会社村田製作所 | 高周波回路装置および通信装置 |
| DE60035553T2 (de) * | 1999-08-11 | 2008-04-17 | Kyocera Corp. | Hochfrequenzschaltungsplatte und seine Verbindungsstruktur |
| EP1291953A4 (fr) * | 2000-03-06 | 2003-05-14 | Fujitsu Ltd | Module a ondes millimetriques comportant une structure de point de test et systeme a ondes millimetriques comprenant des modules a ondes millimetriques |
| GB2381668A (en) * | 2001-11-01 | 2003-05-07 | Marconi Optical Components Ltd | Microstrip to coplanar waveguide transition |
| JP3936858B2 (ja) * | 2001-11-01 | 2007-06-27 | 日本オプネクスト株式会社 | 光変調装置 |
| US6734755B2 (en) * | 2002-05-16 | 2004-05-11 | Corning Incorporated | Broadband uniplanar coplanar transition |
| JP4004048B2 (ja) * | 2003-04-11 | 2007-11-07 | Tdk株式会社 | 高周波伝送線路 |
| US7498523B2 (en) * | 2006-02-06 | 2009-03-03 | Efficere Inc. | Direct wire attach |
| JP4629013B2 (ja) * | 2006-09-28 | 2011-02-09 | 株式会社豊田中央研究所 | 高周波回路基板 |
| CN102306862A (zh) * | 2011-05-19 | 2012-01-04 | 南京邮电大学 | 一种宽带共面波导-双面平行双线转换接头 |
| JP2015052574A (ja) * | 2013-09-09 | 2015-03-19 | 株式会社東芝 | 高周波特性測定治具装置 |
| US10033080B2 (en) | 2014-05-07 | 2018-07-24 | Alcatel Lucent | Electrochromic cell for radio-frequency applications |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2449977A1 (fr) * | 1979-02-20 | 1980-09-19 | Thomson Csf | Dispositif de transition entre une ligne coplanaire et une ligne a rubans paralleles, et circuit hyperfrequence comportant une telle transition |
| US4543544A (en) * | 1984-01-04 | 1985-09-24 | Motorola, Inc. | LCC co-planar lead frame semiconductor IC package |
| US4600907A (en) * | 1985-03-07 | 1986-07-15 | Tektronix, Inc. | Coplanar microstrap waveguide interconnector and method of interconnection |
| US4806892A (en) * | 1987-11-09 | 1989-02-21 | Trw Inc. | Inclined RF connecting strip |
-
1988
- 1988-09-08 US US07/241,638 patent/US4906953A/en not_active Expired - Fee Related
-
1989
- 1989-08-01 IL IL9116989A patent/IL91169A/en not_active IP Right Cessation
- 1989-09-07 CA CA000610589A patent/CA1323913C/fr not_active Expired - Fee Related
- 1989-09-07 EP EP19890309055 patent/EP0358497A3/fr not_active Ceased
- 1989-09-08 JP JP1231819A patent/JPH02113703A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US4906953A (en) | 1990-03-06 |
| EP0358497A3 (fr) | 1991-01-16 |
| CA1323913C (fr) | 1993-11-02 |
| IL91169A0 (en) | 1990-03-19 |
| EP0358497A2 (fr) | 1990-03-14 |
| JPH02113703A (ja) | 1990-04-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4906953A (en) | Broadband microstrip to coplanar waveguide transition by anisotropic etching of gallium arsenide | |
| Beuerle et al. | A very low loss 220–325 GHz silicon micromachined waveguide technology | |
| Ponchak et al. | Low-loss CPW on low-resistivity Si substrates with a micromachined polyimide interface layer for RFIC interconnects | |
| US5063177A (en) | Method of packaging microwave semiconductor components and integrated circuits | |
| US6953996B2 (en) | Low-loss coplanar waveguides and method of fabrication | |
| JP3218996B2 (ja) | ミリ波導波路 | |
| JP3241139B2 (ja) | フィルムキャリア信号伝送線路 | |
| US5049978A (en) | Conductively enclosed hybrid integrated circuit assembly using a silicon substrate | |
| Herrick et al. | Microtechnology in the development of three-dimensional circuits | |
| US6362706B1 (en) | Cavity resonator for reducing phase noise of voltage controlled oscillator | |
| US5583468A (en) | High frequency transition from a microstrip transmission line to an MMIC coplanar waveguide | |
| EP1077502A2 (fr) | Transition RF de MMIC à guide d'ondes et méthode associée | |
| US4833521A (en) | Means for reducing signal propagation losses in very large scale integrated circuits | |
| Meier | Two new integrated-circuit media with special advantages at millimeter wavelengths | |
| Brown et al. | Microwave and millimeter‐wave high‐Q micromachined resonators | |
| US6667549B2 (en) | Micro circuits with a sculpted ground plane | |
| Dehe et al. | Membrane-supported coplanar waveguides for MMIC and sensor application | |
| US3530407A (en) | Broadband microstrip hybrid tee | |
| CN117080703A (zh) | 一种微带线的垂直过渡结构和制造方法 | |
| US4381341A (en) | Two stage etching process for through the substrate contacts | |
| US6411182B1 (en) | Cavity resonator for reducing phase noise of voltage controlled oscillator and method for fabricating the same | |
| US8426290B1 (en) | Suspended-membrane/suspended-substrate monolithic microwave integrated circuit modules | |
| Jeong et al. | Monolithic implementation of air-filled rectangular coaxial line | |
| Lucyszyn et al. | Terahertz multi-chip module (T-MCM) technology for the 21st Century? | |
| US3519962A (en) | Microwave transmission line |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RH | Patent void |