IL94353A - Novolak-containing photoresist composition - Google Patents

Novolak-containing photoresist composition

Info

Publication number
IL94353A
IL94353A IL9435390A IL9435390A IL94353A IL 94353 A IL94353 A IL 94353A IL 9435390 A IL9435390 A IL 9435390A IL 9435390 A IL9435390 A IL 9435390A IL 94353 A IL94353 A IL 94353A
Authority
IL
Israel
Prior art keywords
novolak
photoresist composition
resin
highly branched
photoresist
Prior art date
Application number
IL9435390A
Other languages
English (en)
Other versions
IL94353A0 (en
Original Assignee
Rohm & Haas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm & Haas filed Critical Rohm & Haas
Publication of IL94353A0 publication Critical patent/IL94353A0/xx
Publication of IL94353A publication Critical patent/IL94353A/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Phenolic Resins Or Amino Resins (AREA)
  • Materials For Photolithography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
IL9435390A 1989-05-12 1990-05-10 Novolak-containing photoresist composition IL94353A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US35115389A 1989-05-12 1989-05-12

Publications (2)

Publication Number Publication Date
IL94353A0 IL94353A0 (en) 1991-03-10
IL94353A true IL94353A (en) 1994-02-27

Family

ID=23379794

Family Applications (1)

Application Number Title Priority Date Filing Date
IL9435390A IL94353A (en) 1989-05-12 1990-05-10 Novolak-containing photoresist composition

Country Status (11)

Country Link
EP (1) EP0397460A3 (de)
JP (1) JPH0379619A (de)
KR (1) KR900018186A (de)
CN (1) CN1047398A (de)
AU (1) AU635928B2 (de)
BR (1) BR9002205A (de)
CA (1) CA2015721A1 (de)
FI (1) FI902375A7 (de)
IL (1) IL94353A (de)
NO (1) NO902061L (de)
ZA (1) ZA903560B (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4939229A (en) * 1989-05-12 1990-07-03 Rohm And Haas Company Method for preparing lithographically sensitive branched novolaks using a mannich base intermediate
US5667934A (en) * 1990-10-09 1997-09-16 International Business Machines Corporation Thermally stable photoimaging composition
TW207009B (de) * 1991-01-31 1993-06-01 Sumitomo Chemical Co
TWI263861B (en) * 1999-03-26 2006-10-11 Shinetsu Chemical Co Resist material and pattern forming method
JP2002203869A (ja) 2000-10-30 2002-07-19 Seiko Epson Corp バンプの形成方法、半導体装置及びその製造方法、回路基板並びに電子機器
US6828383B2 (en) * 2002-12-13 2004-12-07 Occidental Petroleum Phenolic modified resorcinolic resins for rubber compounding
WO2022076984A1 (en) * 2020-10-05 2022-04-14 Advanced Polymer Coatings, Inc. Process for preparing branched phenolic novolak

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS505084B1 (de) * 1970-09-16 1975-02-28
US4624909A (en) * 1984-04-27 1986-11-25 Nec Corporation Silicon-containing novolak resin and resist material and pattern forming method using same
CA1307695C (en) * 1986-01-13 1992-09-22 Wayne Edmund Feely Photosensitive compounds and thermally stable and aqueous developablenegative images
DE3810247A1 (de) * 1987-03-26 1988-10-06 Toshiba Kawasaki Kk Lichtempfindliche beschichtungsmasse
US4939229A (en) * 1989-05-12 1990-07-03 Rohm And Haas Company Method for preparing lithographically sensitive branched novolaks using a mannich base intermediate

Also Published As

Publication number Publication date
FI902375A7 (fi) 1990-11-13
KR900018186A (ko) 1990-12-20
CA2015721A1 (en) 1990-11-12
NO902061L (no) 1990-11-13
CN1047398A (zh) 1990-11-28
NO902061D0 (no) 1990-05-10
EP0397460A2 (de) 1990-11-14
ZA903560B (en) 1991-01-30
JPH0379619A (ja) 1991-04-04
AU5488290A (en) 1990-11-15
BR9002205A (pt) 1991-08-13
IL94353A0 (en) 1991-03-10
FI902375A0 (fi) 1990-05-11
EP0397460A3 (de) 1992-02-26
AU635928B2 (en) 1993-04-08

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Legal Events

Date Code Title Description
RH Patent void