IN2012DN06594A - - Google Patents
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- Publication number
- IN2012DN06594A IN2012DN06594A IN6594DEN2012A IN2012DN06594A IN 2012DN06594 A IN2012DN06594 A IN 2012DN06594A IN 6594DEN2012 A IN6594DEN2012 A IN 6594DEN2012A IN 2012DN06594 A IN2012DN06594 A IN 2012DN06594A
- Authority
- IN
- India
- Prior art keywords
- axis
- correction
- mass system
- electrodes
- correction electrodes
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/5755—Structural details or topology the devices having a single sensing mass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Manufacturing & Machinery (AREA)
- Gyroscopes (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102010006584A DE102010006584B4 (de) | 2010-02-02 | 2010-02-02 | Corioliskreisel mit Korrektureinheiten und Verfahren zur Reduktion des Quadraturbias |
| PCT/EP2011/000444 WO2011095317A2 (fr) | 2010-02-02 | 2011-02-01 | Gyroscope à effet coriolis muni d'unités de correction et procédé de réduction de la polarisation en quadrature |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IN2012DN06594A true IN2012DN06594A (fr) | 2015-10-23 |
Family
ID=44279187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IN6594DEN2012 IN2012DN06594A (fr) | 2010-02-02 | 2011-02-01 |
Country Status (14)
| Country | Link |
|---|---|
| US (1) | US9052196B2 (fr) |
| EP (1) | EP2531813B1 (fr) |
| JP (1) | JP5615383B2 (fr) |
| KR (1) | KR101518405B1 (fr) |
| CN (1) | CN102812330B (fr) |
| AU (1) | AU2011212653B2 (fr) |
| BR (1) | BR112012018666A2 (fr) |
| CA (1) | CA2787212C (fr) |
| DE (1) | DE102010006584B4 (fr) |
| IL (1) | IL221060A (fr) |
| IN (1) | IN2012DN06594A (fr) |
| RU (1) | RU2554312C2 (fr) |
| WO (1) | WO2011095317A2 (fr) |
| ZA (1) | ZA201205119B (fr) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9097524B2 (en) * | 2009-09-11 | 2015-08-04 | Invensense, Inc. | MEMS device with improved spring system |
| JP5773844B2 (ja) * | 2011-10-31 | 2015-09-02 | 三菱プレシジョン株式会社 | 出力安定性に優れた振動型ジャイロ |
| CN103115618B (zh) * | 2011-11-17 | 2015-07-08 | 西安邮电学院 | 一种基于振动式微机械陀螺的正交误差和寄生科氏力的分离测试方法 |
| DE102014003640B4 (de) * | 2014-03-14 | 2025-05-28 | Northrop Grumman Litef Gmbh | Verfahren zum Optimieren der Einschaltzeit eines Corioliskreisels sowie dafür geeigneter Corioliskreisel |
| DE102014010056B4 (de) * | 2014-07-07 | 2016-02-25 | Northrop Grumman Litef Gmbh | Steuervorrichtung und Verfahren zur Minimierung von Skalenfaktorfehlern eines Drehratensensors |
| US9726491B2 (en) | 2014-07-25 | 2017-08-08 | Northrop Grumman Systems Corporation | Vibrating-mass gyroscope systems and method |
| WO2016097127A1 (fr) * | 2014-12-18 | 2016-06-23 | Acreo Swedish Ict Ab | Procédé de compensation de quadrature pour des gyroscopes mems et capteur gyroscopique |
| US9534897B2 (en) * | 2015-01-12 | 2017-01-03 | The Boeing Company | High bandwidth Coriolis vibratory gyroscope (CVG) with in-situ bias self-calibration |
| DE102015201544A1 (de) * | 2015-01-29 | 2016-08-04 | Robert Bosch Gmbh | Drehratensensor und Verfahren zum Betrieb eines Drehratensensors |
| US9810535B2 (en) * | 2015-02-10 | 2017-11-07 | Northrop Grumman Systems Corporation | Vibrating-mass gyroscope systems and method |
| US10359284B2 (en) * | 2015-12-10 | 2019-07-23 | Invensense, Inc. | Yaw rate gyroscope robust to linear and angular acceleration |
| RU173867U1 (ru) * | 2016-12-15 | 2017-09-15 | федеральное государственное автономное образовательное учреждение высшего образования "Санкт-Петербургский политехнический университет Петра Великого" (ФГАОУ ВО "СПбПУ") | Вибрационный гироскоп LL-типа |
| US10466067B2 (en) * | 2017-01-19 | 2019-11-05 | The Boeing Company | System and method for gyro rate computation for a Coriolis Vibrating Gyroscope |
| US20180252526A1 (en) * | 2017-03-06 | 2018-09-06 | Nxp Usa, Inc. | Mems device with in-plane quadrature compensation |
| DE102017213815A1 (de) * | 2017-08-08 | 2019-02-14 | Robert Bosch Gmbh | Drehratensensor mit einem Substrat, Herstellungsverfahren für einen Drehratensensor |
| DE102017213802A1 (de) * | 2017-08-08 | 2019-02-14 | Robert Bosch Gmbh | Drehratensensor, Verfahren zur Herstellung eines Drehratensensors |
| EP3665436B1 (fr) * | 2017-08-11 | 2025-01-15 | HRL Laboratories, LLC | Gyroscopes vibratoires de coriolis multi-mode au silicium possédant une structure mécanique symétrique en rotation d'ordre élevé et 32 électrodes |
| JP7167425B2 (ja) * | 2017-10-20 | 2022-11-09 | セイコーエプソン株式会社 | 物理量センサー、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器、および移動体 |
| JP7310988B2 (ja) * | 2017-10-20 | 2023-07-19 | セイコーエプソン株式会社 | 物理量センサー、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器、および移動体 |
| CN109931959B (zh) * | 2019-03-27 | 2023-03-31 | 河海大学常州校区 | 硅微陀螺仪正交误差校正方法 |
| JP7204576B2 (ja) * | 2019-05-15 | 2023-01-16 | 株式会社東芝 | センサ |
| EP3960309A1 (fr) * | 2020-08-31 | 2022-03-02 | Siemens Aktiengesellschaft | Procédé de résonance pour un système de vibrations, convertisseur, unité d'excitation et système de vibrations |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5530342A (en) * | 1994-09-30 | 1996-06-25 | Rockwell International Corporation | Micromachined rate sensor comb drive device and method |
| DE19503236B4 (de) * | 1995-02-02 | 2006-05-24 | Robert Bosch Gmbh | Sensor aus einem mehrschichtigen Substrat |
| US6250156B1 (en) * | 1996-05-31 | 2001-06-26 | The Regents Of The University Of California | Dual-mass micromachined vibratory rate gyroscope |
| US5992233A (en) | 1996-05-31 | 1999-11-30 | The Regents Of The University Of California | Micromachined Z-axis vibratory rate gyroscope |
| US5945599A (en) * | 1996-12-13 | 1999-08-31 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Resonance type angular velocity sensor |
| US6122961A (en) * | 1997-09-02 | 2000-09-26 | Analog Devices, Inc. | Micromachined gyros |
| JP3489487B2 (ja) * | 1998-10-23 | 2004-01-19 | トヨタ自動車株式会社 | 角速度検出装置 |
| US7051590B1 (en) * | 1999-06-15 | 2006-05-30 | Analog Devices Imi, Inc. | Structure for attenuation or cancellation of quadrature error |
| JP3659160B2 (ja) * | 2000-02-18 | 2005-06-15 | 株式会社デンソー | 角速度センサ |
| JP3525862B2 (ja) * | 2000-05-22 | 2004-05-10 | トヨタ自動車株式会社 | センサ素子及びセンサ装置 |
| DE10237410A1 (de) | 2002-01-12 | 2003-08-28 | Bosch Gmbh Robert | Drehratensensor |
| WO2003058167A1 (fr) * | 2002-01-12 | 2003-07-17 | Robert Bosch Gmbh | Capteur de vitesse de rotation |
| WO2003058166A1 (fr) * | 2002-01-12 | 2003-07-17 | Robert Bosch Gmbh | Capteur de vitesse de rotation |
| JP2004170145A (ja) * | 2002-11-18 | 2004-06-17 | Denso Corp | 容量式力学量センサ |
| DE10360962B4 (de) * | 2003-12-23 | 2007-05-31 | Litef Gmbh | Verfahren zur Quadraturbias-Kompensation in einem Corioliskreisel sowie dafür geeigneter Corioliskreisel |
| US6964195B2 (en) * | 2004-01-30 | 2005-11-15 | Bei Technologies, Inc. | Micromachined vibratory gyroscope and method with electronic coupling |
| FR2894661B1 (fr) * | 2005-12-13 | 2008-01-18 | Thales Sa | Gyrometre vibrant equilibre par un dispositif electrostatique |
| US7703324B2 (en) * | 2007-05-11 | 2010-04-27 | Honeywell International Inc. | MEMS tuning fork gyro sensitive to rate of rotation about two axes |
| DE102007030120B4 (de) | 2007-06-29 | 2010-04-08 | Litef Gmbh | Drehratensensor |
| RU2347191C1 (ru) * | 2007-11-08 | 2009-02-20 | Федеральное государственное унитарное предприятие "Центральный научно-исследовательский институт "Электроприбор" | Способ подстройки резонансной частоты подвеса подвижной массы микромеханического гироскопа по оси вторичных колебаний и микромеханический гироскоп |
| JP5228675B2 (ja) * | 2008-07-29 | 2013-07-03 | 富士通株式会社 | 角速度センサおよび電子装置 |
-
2010
- 2010-02-02 DE DE102010006584A patent/DE102010006584B4/de active Active
-
2011
- 2011-02-01 AU AU2011212653A patent/AU2011212653B2/en active Active
- 2011-02-01 US US13/261,385 patent/US9052196B2/en active Active
- 2011-02-01 WO PCT/EP2011/000444 patent/WO2011095317A2/fr not_active Ceased
- 2011-02-01 CN CN201180007362.8A patent/CN102812330B/zh active Active
- 2011-02-01 RU RU2012129948/28A patent/RU2554312C2/ru active
- 2011-02-01 EP EP11702152.7A patent/EP2531813B1/fr active Active
- 2011-02-01 JP JP2012550376A patent/JP5615383B2/ja active Active
- 2011-02-01 BR BR112012018666A patent/BR112012018666A2/pt not_active IP Right Cessation
- 2011-02-01 KR KR1020127019821A patent/KR101518405B1/ko active Active
- 2011-02-01 CA CA2787212A patent/CA2787212C/fr active Active
- 2011-02-01 IN IN6594DEN2012 patent/IN2012DN06594A/en unknown
-
2012
- 2012-07-10 ZA ZA2012/05119A patent/ZA201205119B/en unknown
- 2012-07-22 IL IL221060A patent/IL221060A/en active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| EP2531813B1 (fr) | 2015-05-27 |
| JP2013519071A (ja) | 2013-05-23 |
| DE102010006584A1 (de) | 2011-10-06 |
| KR20120105042A (ko) | 2012-09-24 |
| ZA201205119B (en) | 2013-03-27 |
| US20130055787A1 (en) | 2013-03-07 |
| IL221060A0 (en) | 2012-09-24 |
| EP2531813A2 (fr) | 2012-12-12 |
| WO2011095317A3 (fr) | 2011-10-27 |
| CA2787212A1 (fr) | 2011-08-11 |
| CN102812330A (zh) | 2012-12-05 |
| BR112012018666A2 (pt) | 2016-04-05 |
| RU2554312C2 (ru) | 2015-06-27 |
| DE102010006584B4 (de) | 2012-09-27 |
| KR101518405B1 (ko) | 2015-05-07 |
| US9052196B2 (en) | 2015-06-09 |
| RU2012129948A (ru) | 2014-03-10 |
| JP5615383B2 (ja) | 2014-10-29 |
| AU2011212653B2 (en) | 2014-01-09 |
| IL221060A (en) | 2017-06-29 |
| CA2787212C (fr) | 2016-05-03 |
| WO2011095317A2 (fr) | 2011-08-11 |
| AU2011212653A1 (en) | 2012-08-16 |
| CN102812330B (zh) | 2016-01-06 |
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