IN2012DN06594A - - Google Patents

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Publication number
IN2012DN06594A
IN2012DN06594A IN6594DEN2012A IN2012DN06594A IN 2012DN06594 A IN2012DN06594 A IN 2012DN06594A IN 6594DEN2012 A IN6594DEN2012 A IN 6594DEN2012A IN 2012DN06594 A IN2012DN06594 A IN 2012DN06594A
Authority
IN
India
Prior art keywords
axis
correction
mass system
electrodes
correction electrodes
Prior art date
Application number
Other languages
English (en)
Inventor
Geiger Wolfram
Leinfelder Peter
Original Assignee
Northrop Grumman Litef Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northrop Grumman Litef Gmbh filed Critical Northrop Grumman Litef Gmbh
Publication of IN2012DN06594A publication Critical patent/IN2012DN06594A/en

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733Structural details or topology
    • G01C19/5755Structural details or topology the devices having a single sensing mass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C25/00Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Manufacturing & Machinery (AREA)
  • Gyroscopes (AREA)
IN6594DEN2012 2010-02-02 2011-02-01 IN2012DN06594A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010006584A DE102010006584B4 (de) 2010-02-02 2010-02-02 Corioliskreisel mit Korrektureinheiten und Verfahren zur Reduktion des Quadraturbias
PCT/EP2011/000444 WO2011095317A2 (fr) 2010-02-02 2011-02-01 Gyroscope à effet coriolis muni d'unités de correction et procédé de réduction de la polarisation en quadrature

Publications (1)

Publication Number Publication Date
IN2012DN06594A true IN2012DN06594A (fr) 2015-10-23

Family

ID=44279187

Family Applications (1)

Application Number Title Priority Date Filing Date
IN6594DEN2012 IN2012DN06594A (fr) 2010-02-02 2011-02-01

Country Status (14)

Country Link
US (1) US9052196B2 (fr)
EP (1) EP2531813B1 (fr)
JP (1) JP5615383B2 (fr)
KR (1) KR101518405B1 (fr)
CN (1) CN102812330B (fr)
AU (1) AU2011212653B2 (fr)
BR (1) BR112012018666A2 (fr)
CA (1) CA2787212C (fr)
DE (1) DE102010006584B4 (fr)
IL (1) IL221060A (fr)
IN (1) IN2012DN06594A (fr)
RU (1) RU2554312C2 (fr)
WO (1) WO2011095317A2 (fr)
ZA (1) ZA201205119B (fr)

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US9097524B2 (en) 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
JP5773844B2 (ja) * 2011-10-31 2015-09-02 三菱プレシジョン株式会社 出力安定性に優れた振動型ジャイロ
CN103115618B (zh) * 2011-11-17 2015-07-08 西安邮电学院 一种基于振动式微机械陀螺的正交误差和寄生科氏力的分离测试方法
DE102014003640B4 (de) * 2014-03-14 2025-05-28 Northrop Grumman Litef Gmbh Verfahren zum Optimieren der Einschaltzeit eines Corioliskreisels sowie dafür geeigneter Corioliskreisel
DE102014010056B4 (de) * 2014-07-07 2016-02-25 Northrop Grumman Litef Gmbh Steuervorrichtung und Verfahren zur Minimierung von Skalenfaktorfehlern eines Drehratensensors
US9726491B2 (en) 2014-07-25 2017-08-08 Northrop Grumman Systems Corporation Vibrating-mass gyroscope systems and method
EP3234503B1 (fr) * 2014-12-18 2020-12-02 RISE Research Institutes of Sweden AB Procédé de compensation de quadrature pour gyroscopes mems et un détecteur gyroscopique
US9534897B2 (en) * 2015-01-12 2017-01-03 The Boeing Company High bandwidth Coriolis vibratory gyroscope (CVG) with in-situ bias self-calibration
DE102015201544A1 (de) * 2015-01-29 2016-08-04 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
US9810535B2 (en) 2015-02-10 2017-11-07 Northrop Grumman Systems Corporation Vibrating-mass gyroscope systems and method
US10359284B2 (en) 2015-12-10 2019-07-23 Invensense, Inc. Yaw rate gyroscope robust to linear and angular acceleration
RU173867U1 (ru) * 2016-12-15 2017-09-15 федеральное государственное автономное образовательное учреждение высшего образования "Санкт-Петербургский политехнический университет Петра Великого" (ФГАОУ ВО "СПбПУ") Вибрационный гироскоп LL-типа
US10466067B2 (en) * 2017-01-19 2019-11-05 The Boeing Company System and method for gyro rate computation for a Coriolis Vibrating Gyroscope
US20180252526A1 (en) * 2017-03-06 2018-09-06 Nxp Usa, Inc. Mems device with in-plane quadrature compensation
DE102017213815A1 (de) * 2017-08-08 2019-02-14 Robert Bosch Gmbh Drehratensensor mit einem Substrat, Herstellungsverfahren für einen Drehratensensor
DE102017213802A1 (de) * 2017-08-08 2019-02-14 Robert Bosch Gmbh Drehratensensor, Verfahren zur Herstellung eines Drehratensensors
WO2019032179A1 (fr) * 2017-08-11 2019-02-14 Hrl Laboratories, Llc Gyroscopes vibratoires de coriolis multi-mode au silicium possédant une structure mécanique symétrique en rotation d'ordre élevé et 32 électrodes
JP7310988B2 (ja) * 2017-10-20 2023-07-19 セイコーエプソン株式会社 物理量センサー、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器、および移動体
JP7167425B2 (ja) * 2017-10-20 2022-11-09 セイコーエプソン株式会社 物理量センサー、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器、および移動体
CN109931959B (zh) * 2019-03-27 2023-03-31 河海大学常州校区 硅微陀螺仪正交误差校正方法
JP7204576B2 (ja) * 2019-05-15 2023-01-16 株式会社東芝 センサ
EP3960309A1 (fr) * 2020-08-31 2022-03-02 Siemens Aktiengesellschaft Procédé de résonance pour un système de vibrations, convertisseur, unité d'excitation et système de vibrations

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US5530342A (en) * 1994-09-30 1996-06-25 Rockwell International Corporation Micromachined rate sensor comb drive device and method
DE19503236B4 (de) * 1995-02-02 2006-05-24 Robert Bosch Gmbh Sensor aus einem mehrschichtigen Substrat
US6250156B1 (en) * 1996-05-31 2001-06-26 The Regents Of The University Of California Dual-mass micromachined vibratory rate gyroscope
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
US5945599A (en) * 1996-12-13 1999-08-31 Kabushiki Kaisha Toyota Chuo Kenkyusho Resonance type angular velocity sensor
US6122961A (en) * 1997-09-02 2000-09-26 Analog Devices, Inc. Micromachined gyros
JP3489487B2 (ja) * 1998-10-23 2004-01-19 トヨタ自動車株式会社 角速度検出装置
US7051590B1 (en) * 1999-06-15 2006-05-30 Analog Devices Imi, Inc. Structure for attenuation or cancellation of quadrature error
JP3659160B2 (ja) * 2000-02-18 2005-06-15 株式会社デンソー 角速度センサ
JP3525862B2 (ja) * 2000-05-22 2004-05-10 トヨタ自動車株式会社 センサ素子及びセンサ装置
WO2003058167A1 (fr) * 2002-01-12 2003-07-17 Robert Bosch Gmbh Capteur de vitesse de rotation
DE10237410A1 (de) 2002-01-12 2003-08-28 Bosch Gmbh Robert Drehratensensor
US7313958B2 (en) * 2002-01-12 2008-01-01 Robert Bosch Gmbh Rotational rate sensor
JP2004170145A (ja) * 2002-11-18 2004-06-17 Denso Corp 容量式力学量センサ
DE10360962B4 (de) * 2003-12-23 2007-05-31 Litef Gmbh Verfahren zur Quadraturbias-Kompensation in einem Corioliskreisel sowie dafür geeigneter Corioliskreisel
US6964195B2 (en) * 2004-01-30 2005-11-15 Bei Technologies, Inc. Micromachined vibratory gyroscope and method with electronic coupling
FR2894661B1 (fr) * 2005-12-13 2008-01-18 Thales Sa Gyrometre vibrant equilibre par un dispositif electrostatique
US7703324B2 (en) * 2007-05-11 2010-04-27 Honeywell International Inc. MEMS tuning fork gyro sensitive to rate of rotation about two axes
DE102007030120B4 (de) 2007-06-29 2010-04-08 Litef Gmbh Drehratensensor
RU2347191C1 (ru) * 2007-11-08 2009-02-20 Федеральное государственное унитарное предприятие "Центральный научно-исследовательский институт "Электроприбор" Способ подстройки резонансной частоты подвеса подвижной массы микромеханического гироскопа по оси вторичных колебаний и микромеханический гироскоп
JP5228675B2 (ja) * 2008-07-29 2013-07-03 富士通株式会社 角速度センサおよび電子装置

Also Published As

Publication number Publication date
CN102812330B (zh) 2016-01-06
ZA201205119B (en) 2013-03-27
RU2012129948A (ru) 2014-03-10
EP2531813A2 (fr) 2012-12-12
JP2013519071A (ja) 2013-05-23
JP5615383B2 (ja) 2014-10-29
WO2011095317A2 (fr) 2011-08-11
BR112012018666A2 (pt) 2016-04-05
CA2787212C (fr) 2016-05-03
AU2011212653A1 (en) 2012-08-16
KR101518405B1 (ko) 2015-05-07
RU2554312C2 (ru) 2015-06-27
WO2011095317A3 (fr) 2011-10-27
CN102812330A (zh) 2012-12-05
KR20120105042A (ko) 2012-09-24
IL221060A0 (en) 2012-09-24
DE102010006584A1 (de) 2011-10-06
EP2531813B1 (fr) 2015-05-27
DE102010006584B4 (de) 2012-09-27
US20130055787A1 (en) 2013-03-07
AU2011212653B2 (en) 2014-01-09
US9052196B2 (en) 2015-06-09
IL221060A (en) 2017-06-29
CA2787212A1 (fr) 2011-08-11

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