IT1026738B - Resistore ad elevata resistenza chmica in un sottile strato di silicio monocristallino - Google Patents

Resistore ad elevata resistenza chmica in un sottile strato di silicio monocristallino

Info

Publication number
IT1026738B
IT1026738B IT30113/74A IT3011374A IT1026738B IT 1026738 B IT1026738 B IT 1026738B IT 30113/74 A IT30113/74 A IT 30113/74A IT 3011374 A IT3011374 A IT 3011374A IT 1026738 B IT1026738 B IT 1026738B
Authority
IT
Italy
Prior art keywords
resistor
thin layer
chemical resistance
monocrystalline silicon
high chemical
Prior art date
Application number
IT30113/74A
Other languages
English (en)
Italian (it)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Application granted granted Critical
Publication of IT1026738B publication Critical patent/IT1026738B/it

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00Subject matter not provided for in other groups of this subclass
IT30113/74A 1973-12-06 1974-12-03 Resistore ad elevata resistenza chmica in un sottile strato di silicio monocristallino IT1026738B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2360962A DE2360962A1 (de) 1973-12-06 1973-12-06 Hochohmiger widerstand in einer duennen einkristallinen siliziumschicht

Publications (1)

Publication Number Publication Date
IT1026738B true IT1026738B (it) 1978-10-20

Family

ID=5900134

Family Applications (1)

Application Number Title Priority Date Filing Date
IT30113/74A IT1026738B (it) 1973-12-06 1974-12-03 Resistore ad elevata resistenza chmica in un sottile strato di silicio monocristallino

Country Status (11)

Country Link
JP (1) JPS5091291A (de)
AT (1) AT342150B (de)
BE (1) BE823055A (de)
CA (1) CA1048660A (de)
CH (1) CH580328A5 (de)
DE (1) DE2360962A1 (de)
FR (1) FR2254095A1 (de)
GB (1) GB1474924A (de)
IT (1) IT1026738B (de)
NL (1) NL7415420A (de)
SE (1) SE396498B (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD150415A3 (de) * 1978-01-03 1981-09-02 Guenter Weise Spannungsabhaengiger widerstand
FR2430653A1 (fr) 1978-07-04 1980-02-01 Thomson Csf Resistance au silicium a tres faible coefficient de temperature

Also Published As

Publication number Publication date
FR2254095A1 (de) 1975-07-04
SE396498B (sv) 1977-09-19
DE2360962A1 (de) 1975-06-12
AT342150B (de) 1978-03-10
SE7415254L (de) 1975-06-09
GB1474924A (en) 1977-05-25
NL7415420A (nl) 1975-06-10
BE823055A (fr) 1975-04-01
CA1048660A (en) 1979-02-13
JPS5091291A (de) 1975-07-21
CH580328A5 (de) 1976-09-30
ATA912874A (de) 1977-07-15

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