IT1061510B - Transistore bipolare presentante un emettitore con una elevata bassa concentrazione di impurezze e metodo di fabbricazione dello stesso - Google Patents

Transistore bipolare presentante un emettitore con una elevata bassa concentrazione di impurezze e metodo di fabbricazione dello stesso

Info

Publication number
IT1061510B
IT1061510B IT23368/76A IT2336876A IT1061510B IT 1061510 B IT1061510 B IT 1061510B IT 23368/76 A IT23368/76 A IT 23368/76A IT 2336876 A IT2336876 A IT 2336876A IT 1061510 B IT1061510 B IT 1061510B
Authority
IT
Italy
Prior art keywords
emitter
impurities
manufacturing
bipolar transistor
low concentration
Prior art date
Application number
IT23368/76A
Other languages
English (en)
Original Assignee
Rca Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rca Corp filed Critical Rca Corp
Application granted granted Critical
Publication of IT1061510B publication Critical patent/IT1061510B/it

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D10/00Bipolar junction transistors [BJT]
    • H10D10/40Vertical BJTs
    • H10D10/421Vertical BJTs having both emitter-base and base-collector junctions ending at the same surface of the body
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/13Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
    • H10D62/133Emitter regions of BJTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/0112Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/02Manufacture or treatment characterised by using material-based technologies
    • H10D84/03Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/60Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
    • H10D84/641Combinations of only vertical BJTs
    • H10D84/642Combinations of non-inverted vertical BJTs of the same conductivity type having different characteristics, e.g. Darlington transistors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/14Diffusion of dopants within, into or out of semiconductor bodies or layers within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase
    • H10P32/1404Diffusion of dopants within, into or out of semiconductor bodies or layers within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase using predeposition followed by drive-in of impurities into the semiconductor surface, e.g. predeposition from a gaseous phase
    • H10P32/1406Diffusion of dopants within, into or out of semiconductor bodies or layers within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase using predeposition followed by drive-in of impurities into the semiconductor surface, e.g. predeposition from a gaseous phase by ion implantation
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/17Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material
    • H10P32/171Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material being group IV material
IT23368/76A 1975-06-30 1976-05-18 Transistore bipolare presentante un emettitore con una elevata bassa concentrazione di impurezze e metodo di fabbricazione dello stesso IT1061510B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US59195575A 1975-06-30 1975-06-30

Publications (1)

Publication Number Publication Date
IT1061510B true IT1061510B (it) 1983-04-30

Family

ID=24368653

Family Applications (1)

Application Number Title Priority Date Filing Date
IT23368/76A IT1061510B (it) 1975-06-30 1976-05-18 Transistore bipolare presentante un emettitore con una elevata bassa concentrazione di impurezze e metodo di fabbricazione dello stesso

Country Status (7)

Country Link
US (1) US4136353A (it)
JP (1) JPS526472A (it)
DE (1) DE2627922A1 (it)
FR (1) FR2316744A1 (it)
GB (1) GB1523012A (it)
IT (1) IT1061510B (it)
SE (1) SE7606293L (it)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5691478A (en) * 1979-12-26 1981-07-24 Hitachi Ltd Manufacture of punch-through type diode
DE3039330A1 (de) * 1980-10-17 1982-05-19 Bosch-Siemens Hausgeräte GmbH, 7000 Stuttgart Schaltbaugruppe fuer hausgeraete mit elektrischer und/oder elektronischer steuerung
US4750025A (en) * 1981-12-04 1988-06-07 American Telephone And Telegraph Company, At&T Bell Laboratories Depletion stop transistor
US4951115A (en) * 1989-03-06 1990-08-21 International Business Machines Corp. Complementary transistor structure and method for manufacture
EP0509363B1 (de) * 1991-04-16 2000-09-27 Siemens Aktiengesellschaft Freilauf-Transistorschaltung
DE19520182C2 (de) * 1995-06-01 2003-06-18 Infineon Technologies Ag Bipolartransistor vom pnp-Typ
RU2280915C1 (ru) * 2004-12-14 2006-07-27 Кабардино-Балкарский государственный университет им. Х.М. Бербекова Способ изготовления полупроводникового прибора

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1355806A (en) * 1970-12-09 1974-06-05 Mullard Ltd Methods of manufacturing a semiconductor device
US4049478A (en) * 1971-05-12 1977-09-20 Ibm Corporation Utilization of an arsenic diffused emitter in the fabrication of a high performance semiconductor device
JPS5145103B2 (it) * 1972-08-24 1976-12-02
JPS5147583B2 (it) * 1972-12-29 1976-12-15
US3943554A (en) * 1973-07-30 1976-03-09 Signetics Corporation Threshold switching integrated circuit and method for forming the same
JPS5616553B2 (it) * 1973-11-19 1981-04-16
US4039857A (en) * 1974-04-24 1977-08-02 Rca Corporation Dynamic biasing of isolation boat including diffused resistors

Also Published As

Publication number Publication date
FR2316744A1 (fr) 1977-01-28
GB1523012A (en) 1978-08-31
US4136353A (en) 1979-01-23
JPS526472A (en) 1977-01-18
SE7606293L (sv) 1976-12-31
DE2627922A1 (de) 1977-01-27

Similar Documents

Publication Publication Date Title
SE381535B (sv) Halvledarstruktur och forfarande for dess framstellning
FR1523688A (fr) Ensembles supraconducteurs et leur procédé de fabrication
FR1308466A (fr) Superconducteurs améliorés et procédé de fabrication de ceux-ci
IT1028325B (it) Transistore bipolare e metodo di fabbricazione dello stesso
FR2286138A1 (fr) Nouveaux acides oxathiino- et dithiino-aminoacetiques et leur preparation
FR2316744A1 (fr) Transistor bipolaire avec un emetteur ayant une partie a forte concentration d'impuretes et une partie a plus faible concentration d'impuretes
IT1054024B (it) Struttura a transistori comple mentari e metodo di fabricazione della stessa
FR1519071A (fr) Agencement d'électrodes et son procédé de fabrication
FR1507118A (fr) électrode et procédé de fabrication de celle-ci
FR1196583A (fr) Palier étanche, en particulier palier à aiguilles et son mode de fabrication
FR1509277A (fr) Procédé de fabrication du glycidol et du glycérol
FR1259059A (fr) Nouveaux panneaux translucides anti-infrarouges et leur fabrication
FR1304573A (fr) Nouveaux polyuréthanes et leur fabrication
FR1301035A (fr) Filaments étirés à structure cellulaire et leur procédé de préparation
SE408353B (sv) Forfarande vid tillverkning av en tyristor for framstellning av emitter- och hjelpemitterelektroderna
FR1489277A (fr) Transistor à commutation rapide et méthode de fabrication
BE596921A (fr) Procédé de fabrication de panne et panne réalisée selon ce procédé.
BE616248A (fr) Tube électronique et procédé de fabrication
JPS5375737A (en) Injection type bipolar memory cell
FR1253021A (fr) électrode d'érosion par étincelage et son procédé de fabrication
FR1481005A (fr) Nouveaux octapeptides et leur préparation
CA596066A (en) Transistor with welded collector and method of making same
IT1101183B (it) Perfezionamento al procedimento di produzione per transistori bipolari intagrati con elevata tensione di breakdown collettore-emettitore e prodotto risultante
FR1303438A (fr) Composition sucrante et son procédé de fabrication
BE606105A (fr) Nouveaux polyesters et leur procédé de fabrication