IT1112073B - Apparecchio di taglio a mezzo laser in particolare per la produzione di dispositivi a semiconduttore - Google Patents

Apparecchio di taglio a mezzo laser in particolare per la produzione di dispositivi a semiconduttore

Info

Publication number
IT1112073B
IT1112073B IT51179/77A IT5117977A IT1112073B IT 1112073 B IT1112073 B IT 1112073B IT 51179/77 A IT51179/77 A IT 51179/77A IT 5117977 A IT5117977 A IT 5117977A IT 1112073 B IT1112073 B IT 1112073B
Authority
IT
Italy
Prior art keywords
production
semiconductor devices
laser cutting
cutting apparatus
half laser
Prior art date
Application number
IT51179/77A
Other languages
English (en)
Inventor
Ernst Limmer
Helmut Hofl
Original Assignee
Texas Instruments Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Deutschland filed Critical Texas Instruments Deutschland
Application granted granted Critical
Publication of IT1112073B publication Critical patent/IT1112073B/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1423—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the flow carrying an electric current
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
IT51179/77A 1976-09-29 1977-09-28 Apparecchio di taglio a mezzo laser in particolare per la produzione di dispositivi a semiconduttore IT1112073B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762643981 DE2643981A1 (de) 1976-09-29 1976-09-29 Vorrichtung zum absaugen des beim ritzen von halbleiterscheiben mittels laserstrahlen entstehenden staubs

Publications (1)

Publication Number Publication Date
IT1112073B true IT1112073B (it) 1986-01-13

Family

ID=5989225

Family Applications (1)

Application Number Title Priority Date Filing Date
IT51179/77A IT1112073B (it) 1976-09-29 1977-09-28 Apparecchio di taglio a mezzo laser in particolare per la produzione di dispositivi a semiconduttore

Country Status (6)

Country Link
US (1) US4149062A (it)
JP (1) JPS5387092A (it)
BR (1) BR7706469A (it)
DE (1) DE2643981A1 (it)
GB (1) GB1571039A (it)
IT (1) IT1112073B (it)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1165636B (it) * 1979-03-05 1987-04-22 Fiat Auto Spa Metodo ed apparecchio per il controllo dei gas di copertura utilizzati nelle lavorazioni a mezzo di laser di potenza su pezzi metallici
DE3008176C2 (de) * 1979-03-07 1986-02-20 Crosfield Electronics Ltd., London Gravieren von Druckzylindern
SE430390B (sv) * 1982-07-05 1983-11-14 Knutsson G Ing Ab Anleggning for skerande bearbetning av material medelst en laserstrale
US4659901A (en) * 1984-07-10 1987-04-21 Westinghouse Electric Corp. Particulate collection system for laser welding apparatus
GB8600214D0 (en) * 1986-01-07 1986-02-12 Quantum Laser Uk Ltd Gas shroud
EP0304505B1 (de) * 1987-08-27 1991-04-24 Firma Carl Zeiss Vorrichtung zum Schweissen von Werkstücken mittels eines Laserstrahles
DE19541899B4 (de) * 1995-11-10 2005-01-13 Thyssenkrupp Drauz Gmbh Vorrichtung zum Spannen und Laserstrahlschweißen von Dünnblechen
US5906760A (en) * 1997-11-04 1999-05-25 Robb; David K. Exhaust system for a laser cutting device
US6064035A (en) * 1997-12-30 2000-05-16 Lsp Technologies, Inc. Process chamber for laser peening
AU2003235957A1 (en) * 2002-05-13 2003-11-11 Disco Corporation Finishing machine using laser beam
US7276673B2 (en) * 2003-09-26 2007-10-02 Tdk Corporation Solder bonding method and solder bonding device
EP1588864A1 (en) * 2004-04-22 2005-10-26 Kba-Giori S.A. Printing machine with laser perforating unit
CN100522442C (zh) * 2005-03-30 2009-08-05 Tdk株式会社 钎焊方法，钎焊设备，接合方法，及接合设备
US7863542B2 (en) * 2005-12-22 2011-01-04 Sony Corporation Laser processing apparatus and laser processing method as well as debris extraction mechanism and debris extraction method
WO2013029038A2 (en) 2011-08-25 2013-02-28 Preco, Inc. Method and apparatus for making a clean cut with a laser
JP5663776B1 (ja) * 2014-03-27 2015-02-04 福井県 吸引方法及び吸引装置並びにレーザ加工方法及びレーザ加工装置
KR102343226B1 (ko) * 2014-09-04 2021-12-23 삼성전자주식회사 스팟 히터 및 이를 이용한 웨이퍼 클리닝 장치
JP6647829B2 (ja) * 2015-10-20 2020-02-14 株式会社ディスコ レーザ加工装置
CN105964646A (zh) * 2016-06-29 2016-09-28 嘉兴光弘科技电子有限公司 一种回流焊机的除烟尘装置
US10307803B2 (en) * 2016-07-20 2019-06-04 The United States Of America As Represented By Secretary Of The Navy Transmission window cleanliness for directed energy devices
JP6829053B2 (ja) * 2016-11-09 2021-02-10 コマツ産機株式会社 マシンルーム
WO2021237095A1 (en) * 2020-05-22 2021-11-25 Bold Laser Automation, Inc. High velocity vacuum system for laser ablation

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3626141A (en) * 1970-04-30 1971-12-07 Quantronix Corp Laser scribing apparatus
US3866398A (en) * 1973-12-20 1975-02-18 Texas Instruments Inc In-situ gas-phase reaction for removal of laser-scribe debris

Also Published As

Publication number Publication date
DE2643981A1 (de) 1978-03-30
US4149062A (en) 1979-04-10
GB1571039A (en) 1980-07-09
JPS5387092A (en) 1978-08-01
BR7706469A (pt) 1978-07-04

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