IT1184929B - Dispositivo e procedimento per la misurazione e la regolazione di lunghezze - Google Patents

Dispositivo e procedimento per la misurazione e la regolazione di lunghezze

Info

Publication number
IT1184929B
IT1184929B IT67290/85A IT6729085A IT1184929B IT 1184929 B IT1184929 B IT 1184929B IT 67290/85 A IT67290/85 A IT 67290/85A IT 6729085 A IT6729085 A IT 6729085A IT 1184929 B IT1184929 B IT 1184929B
Authority
IT
Italy
Prior art keywords
lengths
procedure
adjustment
measurement
Prior art date
Application number
IT67290/85A
Other languages
English (en)
Other versions
IT8567290A0 (it
IT8567290A1 (it
Inventor
Gerd Schuchardt
Hans Joachim Freitag
Friedrich Tzschach
Rolf Thiemer
Lothar Voigt
Original Assignee
Jenoptik Jena Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Jena Gmbh filed Critical Jenoptik Jena Gmbh
Publication of IT8567290A0 publication Critical patent/IT8567290A0/it
Publication of IT8567290A1 publication Critical patent/IT8567290A1/it
Application granted granted Critical
Publication of IT1184929B publication Critical patent/IT1184929B/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428—Error prevention
    • G01D5/24433—Error prevention by mechanical means
    • G01D5/24438—Special design of the sensing element or scale
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/24476—Signal processing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Optical Transform (AREA)
IT67290/85A 1984-04-02 1985-03-26 Dispositivo e procedimento per la misurazione e la regolazione di lunghezze IT1184929B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD84261535A DD225497A1 (de) 1984-04-02 1984-04-02 Einrichtung und verfahren zum messen und einstellen von laengen

Publications (3)

Publication Number Publication Date
IT8567290A0 IT8567290A0 (it) 1985-03-26
IT8567290A1 IT8567290A1 (it) 1986-09-26
IT1184929B true IT1184929B (it) 1987-10-28

Family

ID=5555828

Family Applications (1)

Application Number Title Priority Date Filing Date
IT67290/85A IT1184929B (it) 1984-04-02 1985-03-26 Dispositivo e procedimento per la misurazione e la regolazione di lunghezze

Country Status (6)

Country Link
JP (1) JPS6144320A (it)
CH (1) CH669254A5 (it)
DD (1) DD225497A1 (it)
DE (1) DE3506537A1 (it)
GB (1) GB2156989B (it)
IT (1) IT1184929B (it)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4304964A (en) * 1978-04-28 1981-12-08 Texas Instruments Incorporated Variable frame length data converter for a speech synthesis circuit
DE3644444A1 (de) * 1986-12-24 1988-07-07 Pav Praezisions Apparatebau Ag Messkluppe
DE8717712U1 (de) * 1987-04-02 1989-08-31 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Längen- oder Winkelmeßeinrichtung
GB2204691A (en) * 1987-05-07 1988-11-16 Advanced Manufacturing Technol Position measurement
JP2648181B2 (ja) * 1988-08-31 1997-08-27 オ−クマ株式会社 リニアエンコーダ
DE19625016B4 (de) * 1996-06-22 2004-07-01 Robert Bosch Gmbh Verfahren zur genauen Positionsmessung
JP5057235B2 (ja) * 2008-04-04 2012-10-24 株式会社ニコン 較正方法、露光方法及びデバイス製造方法、並びに露光装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB760321A (en) * 1953-03-14 1956-10-31 Ferranti Ltd Improvements relating to measuring apparatus
DE1266001B (de) * 1963-12-04 1968-04-11 Contraves Ag Vorrichtung zur Erhoehung der Messgenauigkeit bei optisch-elektrischen Messeinrichtungen
US3197873A (en) * 1963-12-16 1965-08-03 Sheffield Corp Gaging device
GB1070150A (en) * 1964-09-30 1967-05-24 Spezialwaagenfabrik Rapido Veb Device for conversion of movement of an indicating element into electrical digital signals
US3597750A (en) * 1969-01-21 1971-08-03 Information Storage Systems Servo with agc for positioning a magnetic head
DE2952106C2 (de) * 1979-12-22 1982-11-04 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Lichtelektrische inkrementale Längen- oder Winkelmeßeinrichtung
GB2111199A (en) * 1981-12-02 1983-06-29 Gec Elliott Mech Handling Movement monitor

Also Published As

Publication number Publication date
IT8567290A0 (it) 1985-03-26
CH669254A5 (de) 1989-02-28
IT8567290A1 (it) 1986-09-26
GB8508212D0 (en) 1985-05-09
DE3506537A1 (de) 1985-10-10
GB2156989B (en) 1988-02-03
JPS6144320A (ja) 1986-03-04
DD225497A1 (de) 1985-07-31
GB2156989A (en) 1985-10-16

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