IT1232420B - Perfezionamenti ai sistemi di spettroscopia mediante elettroriflettan za - Google Patents
Perfezionamenti ai sistemi di spettroscopia mediante elettroriflettan zaInfo
- Publication number
- IT1232420B IT1232420B IT8967630A IT6763089A IT1232420B IT 1232420 B IT1232420 B IT 1232420B IT 8967630 A IT8967630 A IT 8967630A IT 6763089 A IT6763089 A IT 6763089A IT 1232420 B IT1232420 B IT 1232420B
- Authority
- IT
- Italy
- Prior art keywords
- electro
- reflecting
- spectroscopy systems
- spectroscopy
- systems
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
- G01N2021/1721—Electromodulation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT8967630A IT1232420B (it) | 1989-07-26 | 1989-07-26 | Perfezionamenti ai sistemi di spettroscopia mediante elettroriflettan za |
| EP90114222A EP0410404B1 (en) | 1989-07-26 | 1990-07-25 | Improvements to electroreflectance spectroscopy systems |
| DE90114222T DE69003760T2 (de) | 1989-07-26 | 1990-07-25 | Spektroskopiesysteme bei der Elektroreflexionsmessung. |
| DE199090114222T DE410404T1 (de) | 1989-07-26 | 1990-07-25 | Spektroskopiesysteme zur elektroreflexionsmessung. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT8967630A IT1232420B (it) | 1989-07-26 | 1989-07-26 | Perfezionamenti ai sistemi di spettroscopia mediante elettroriflettan za |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| IT8967630A0 IT8967630A0 (it) | 1989-07-26 |
| IT1232420B true IT1232420B (it) | 1992-02-17 |
Family
ID=11304051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT8967630A IT1232420B (it) | 1989-07-26 | 1989-07-26 | Perfezionamenti ai sistemi di spettroscopia mediante elettroriflettan za |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP0410404B1 (it) |
| DE (2) | DE69003760T2 (it) |
| IT (1) | IT1232420B (it) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106769880A (zh) * | 2016-12-14 | 2017-05-31 | 薛永富 | 一种多光路电势检测方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH538687A (de) * | 1971-11-23 | 1973-06-30 | Bbc Brown Boveri & Cie | Verfahren und Einrichtung zur Untersuchung der Störstellenkonzentration von Halbleitern |
-
1989
- 1989-07-26 IT IT8967630A patent/IT1232420B/it active
-
1990
- 1990-07-25 EP EP90114222A patent/EP0410404B1/en not_active Expired - Lifetime
- 1990-07-25 DE DE90114222T patent/DE69003760T2/de not_active Expired - Fee Related
- 1990-07-25 DE DE199090114222T patent/DE410404T1/de active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106769880A (zh) * | 2016-12-14 | 2017-05-31 | 薛永富 | 一种多光路电势检测方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE69003760T2 (de) | 1994-03-17 |
| EP0410404A2 (en) | 1991-01-30 |
| EP0410404A3 (en) | 1991-04-24 |
| DE410404T1 (de) | 1991-08-14 |
| IT8967630A0 (it) | 1989-07-26 |
| DE69003760D1 (de) | 1993-11-11 |
| EP0410404B1 (en) | 1993-10-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19950616 |