IT1232420B - Perfezionamenti ai sistemi di spettroscopia mediante elettroriflettan za - Google Patents

Perfezionamenti ai sistemi di spettroscopia mediante elettroriflettan za

Info

Publication number
IT1232420B
IT1232420B IT8967630A IT6763089A IT1232420B IT 1232420 B IT1232420 B IT 1232420B IT 8967630 A IT8967630 A IT 8967630A IT 6763089 A IT6763089 A IT 6763089A IT 1232420 B IT1232420 B IT 1232420B
Authority
IT
Italy
Prior art keywords
electro
reflecting
spectroscopy systems
spectroscopy
systems
Prior art date
Application number
IT8967630A
Other languages
English (en)
Other versions
IT8967630A0 (it
Inventor
Alibert Claude
Original Assignee
Cselt Centro Studi Lab Telecom
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cselt Centro Studi Lab Telecom filed Critical Cselt Centro Studi Lab Telecom
Priority to IT8967630A priority Critical patent/IT1232420B/it
Publication of IT8967630A0 publication Critical patent/IT8967630A0/it
Priority to EP90114222A priority patent/EP0410404B1/en
Priority to DE90114222T priority patent/DE69003760T2/de
Priority to DE199090114222T priority patent/DE410404T1/de
Application granted granted Critical
Publication of IT1232420B publication Critical patent/IT1232420B/it

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47Scattering, i.e. diffuse reflection
    • G01N21/4738Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • G01N2021/1721Electromodulation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55Specular reflectivity

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
IT8967630A 1989-07-26 1989-07-26 Perfezionamenti ai sistemi di spettroscopia mediante elettroriflettan za IT1232420B (it)

Priority Applications (4)

Application Number Priority Date Filing Date Title
IT8967630A IT1232420B (it) 1989-07-26 1989-07-26 Perfezionamenti ai sistemi di spettroscopia mediante elettroriflettan za
EP90114222A EP0410404B1 (en) 1989-07-26 1990-07-25 Improvements to electroreflectance spectroscopy systems
DE90114222T DE69003760T2 (de) 1989-07-26 1990-07-25 Spektroskopiesysteme bei der Elektroreflexionsmessung.
DE199090114222T DE410404T1 (de) 1989-07-26 1990-07-25 Spektroskopiesysteme zur elektroreflexionsmessung.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT8967630A IT1232420B (it) 1989-07-26 1989-07-26 Perfezionamenti ai sistemi di spettroscopia mediante elettroriflettan za

Publications (2)

Publication Number Publication Date
IT8967630A0 IT8967630A0 (it) 1989-07-26
IT1232420B true IT1232420B (it) 1992-02-17

Family

ID=11304051

Family Applications (1)

Application Number Title Priority Date Filing Date
IT8967630A IT1232420B (it) 1989-07-26 1989-07-26 Perfezionamenti ai sistemi di spettroscopia mediante elettroriflettan za

Country Status (3)

Country Link
EP (1) EP0410404B1 (it)
DE (2) DE69003760T2 (it)
IT (1) IT1232420B (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106769880A (zh) * 2016-12-14 2017-05-31 薛永富 一种多光路电势检测方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH538687A (de) * 1971-11-23 1973-06-30 Bbc Brown Boveri & Cie Verfahren und Einrichtung zur Untersuchung der Störstellenkonzentration von Halbleitern

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106769880A (zh) * 2016-12-14 2017-05-31 薛永富 一种多光路电势检测方法

Also Published As

Publication number Publication date
DE69003760T2 (de) 1994-03-17
EP0410404A2 (en) 1991-01-30
EP0410404A3 (en) 1991-04-24
DE410404T1 (de) 1991-08-14
IT8967630A0 (it) 1989-07-26
DE69003760D1 (de) 1993-11-11
EP0410404B1 (en) 1993-10-06

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Legal Events

Date Code Title Description
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19950616