IT1238711B - Metodo ed impianto interferometrico a frange codificate per rivelazione del fronte d'onda in ottica. - Google Patents

Metodo ed impianto interferometrico a frange codificate per rivelazione del fronte d'onda in ottica.

Info

Publication number
IT1238711B
IT1238711B IT9367A IT936790A IT1238711B IT 1238711 B IT1238711 B IT 1238711B IT 9367 A IT9367 A IT 9367A IT 936790 A IT936790 A IT 936790A IT 1238711 B IT1238711 B IT 1238711B
Authority
IT
Italy
Prior art keywords
fringes
optics
coded
detection
wave front
Prior art date
Application number
IT9367A
Other languages
English (en)
Other versions
IT9009367A0 (it
IT9009367A1 (it
Inventor
Antonio Lapucci
Original Assignee
Galileo Spa Off
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Galileo Spa Off filed Critical Galileo Spa Off
Priority to IT9367A priority Critical patent/IT1238711B/it
Publication of IT9009367A0 publication Critical patent/IT9009367A0/it
Priority to EP19910830141 priority patent/EP0452283A3/en
Priority to US07/684,690 priority patent/US5192982A/en
Priority to JP3079538A priority patent/JPH0599610A/ja
Publication of IT9009367A1 publication Critical patent/IT9009367A1/it
Application granted granted Critical
Publication of IT1238711B publication Critical patent/IT1238711B/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J2009/028—Types
    • G01J2009/0288—Machzehnder

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
IT9367A 1990-04-13 1990-04-13 Metodo ed impianto interferometrico a frange codificate per rivelazione del fronte d'onda in ottica. IT1238711B (it)

Priority Applications (4)

Application Number Priority Date Filing Date Title
IT9367A IT1238711B (it) 1990-04-13 1990-04-13 Metodo ed impianto interferometrico a frange codificate per rivelazione del fronte d'onda in ottica.
EP19910830141 EP0452283A3 (en) 1990-04-13 1991-04-10 Coded-fringe interferometric method and device for wavefront detection in optics
US07/684,690 US5192982A (en) 1990-04-13 1991-04-11 Coded-fringe interferometric method and device for wavefront detection in optics
JP3079538A JPH0599610A (ja) 1990-04-13 1991-04-12 ビームの波面を検出する方法およびこの方法を実施するための装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT9367A IT1238711B (it) 1990-04-13 1990-04-13 Metodo ed impianto interferometrico a frange codificate per rivelazione del fronte d'onda in ottica.

Publications (3)

Publication Number Publication Date
IT9009367A0 IT9009367A0 (it) 1990-04-13
IT9009367A1 IT9009367A1 (it) 1991-10-13
IT1238711B true IT1238711B (it) 1993-09-01

Family

ID=11129075

Family Applications (1)

Application Number Title Priority Date Filing Date
IT9367A IT1238711B (it) 1990-04-13 1990-04-13 Metodo ed impianto interferometrico a frange codificate per rivelazione del fronte d'onda in ottica.

Country Status (4)

Country Link
US (1) US5192982A (it)
EP (1) EP0452283A3 (it)
JP (1) JPH0599610A (it)
IT (1) IT1238711B (it)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5276745A (en) * 1992-10-15 1994-01-04 Eastman Kodak Company Integrated optic read/write head for optical data storage incorporating second harmonic generator, electro-optic tracking error actuator, and electro-optic modulator
JP3259373B2 (ja) * 1992-11-27 2002-02-25 株式会社日立製作所 露光方法及び露光装置
US5457533A (en) * 1994-06-10 1995-10-10 Wilcken; Stephen K. Point-diffraction interferometer utilizing separate reference and signal beam paths
US5617209A (en) * 1995-04-27 1997-04-01 View Engineering, Inc. Method and system for triangulation-based, 3-D imaging utilizing an angled scaning beam of radiant energy
DE19708448A1 (de) * 1997-03-01 1998-09-03 Michael Dr Schulz Vorrichtung zur vollständigen Aufnahme von Wellenfronten auf der Basis von Scherungs-Interferometern mit freier Scherungs-Distanz und Verfahren zur Extraktion der gesuchten Wellenfrontdifferenzen
US6556612B2 (en) * 1999-05-10 2003-04-29 Cymer, Inc. Line narrowed laser with spatial filter
US6717661B1 (en) * 2000-01-26 2004-04-06 Science & Technology Corporation @ University Of New Mexico Fourier moire wavefront sensor
ES2177466B1 (es) * 2001-04-23 2003-12-16 Univ Santiago Compostela Metodo y aparato de reconstruccion de frente de ondas mediante interferencia de un haz de luz con una replica difractada
NL1021457C2 (nl) * 2002-09-13 2004-03-16 Tno Werkwijze voor het meten van contourvariaties.
US7924434B2 (en) * 2005-08-02 2011-04-12 Kla-Tencor Technologies Corp. Systems configured to generate output corresponding to defects on a specimen
US8356900B2 (en) * 2006-01-20 2013-01-22 Clarity Medical Systems, Inc. Large diopter range real time sequential wavefront sensor
IL175277A0 (en) * 2006-04-27 2007-05-15 Rafael Advanced Defense Sys A method of compacting optical systems comprising multiple optical channels into confined spaces
CN103081424B (zh) * 2010-08-24 2016-08-03 Nec欧洲有限公司 通信网络和操作通信网络的方法
GB2566284A (en) * 2017-09-07 2019-03-13 Univ Aston Laser detection system

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3857636A (en) * 1973-10-03 1974-12-31 United Aircraft Corp Measurement of phase profile across a high power laser beam
US4637725A (en) * 1985-09-26 1987-01-20 Lockheed Missiles & Space Company, Inc. Self-referencing Mach-Zehnder interferometer
WO1988008121A1 (en) * 1987-04-09 1988-10-20 The Secretary Of State For Defence In Her Britanni A wavelength-independent interferometer for optical signal processing

Also Published As

Publication number Publication date
US5192982A (en) 1993-03-09
IT9009367A0 (it) 1990-04-13
EP0452283A2 (en) 1991-10-16
EP0452283A3 (en) 1992-03-18
IT9009367A1 (it) 1991-10-13
JPH0599610A (ja) 1993-04-23

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Legal Events

Date Code Title Description
0001 Granted
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19950427