IT1252811B - Generatore di ioni con camera di ionizzazione costruita o rivestita con materiale ad alto coefficiente di emissione secondaria - Google Patents

Generatore di ioni con camera di ionizzazione costruita o rivestita con materiale ad alto coefficiente di emissione secondaria

Info

Publication number
IT1252811B
IT1252811B ITFI910248A ITFI910248A IT1252811B IT 1252811 B IT1252811 B IT 1252811B IT FI910248 A ITFI910248 A IT FI910248A IT FI910248 A ITFI910248 A IT FI910248A IT 1252811 B IT1252811 B IT 1252811B
Authority
IT
Italy
Prior art keywords
ionization chamber
coated
secondary emission
emission coefficient
high secondary
Prior art date
Application number
ITFI910248A
Other languages
English (en)
Inventor
Gianfranco Cirri
Original Assignee
Proel Tecnologie Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Proel Tecnologie Spa filed Critical Proel Tecnologie Spa
Priority to ITFI910248A priority Critical patent/IT1252811B/it
Publication of ITFI910248A0 publication Critical patent/ITFI910248A0/it
Priority to JP4253034A priority patent/JPH05242820A/ja
Priority to EP92830557A priority patent/EP0537123A1/en
Priority to US07/958,513 priority patent/US5434469A/en
Publication of ITFI910248A1 publication Critical patent/ITFI910248A1/it
Application granted granted Critical
Publication of IT1252811B publication Critical patent/IT1252811B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03H—PRODUCING A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03H1/00—Using plasma to produce a reactive propulsive thrust
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/02—Tubes in which one or a few electrodes are secondary-electron emitting electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Particle Accelerators (AREA)

Abstract

In un dispositivo per la generazione di ioni, la camera di ionizzazione è caratterizzata da pareti rivestite da un materiale ad alto coefficiente di emissione secondaria, come ad esempio apposito vetro; ciò consente di migliorare, rispetto alle tecniche note, il rendimento energetico ed il rendimento di massa del dispositivo stesso.(Fig. 2)
ITFI910248A 1991-10-11 1991-10-11 Generatore di ioni con camera di ionizzazione costruita o rivestita con materiale ad alto coefficiente di emissione secondaria IT1252811B (it)

Priority Applications (4)

Application Number Priority Date Filing Date Title
ITFI910248A IT1252811B (it) 1991-10-11 1991-10-11 Generatore di ioni con camera di ionizzazione costruita o rivestita con materiale ad alto coefficiente di emissione secondaria
JP4253034A JPH05242820A (ja) 1991-10-11 1992-09-22 ２次放出の高い係数の材料から構成され或いはその材料によって被覆された電離室付イオン発生器
EP92830557A EP0537123A1 (en) 1991-10-11 1992-10-05 Ion generator with ionization chamber constructed from or coated with material with a high coefficient of secondary emission
US07/958,513 US5434469A (en) 1991-10-11 1992-10-08 Ion generator with ionization chamber constructed from or coated with material with a high coefficient of secondary emission

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITFI910248A IT1252811B (it) 1991-10-11 1991-10-11 Generatore di ioni con camera di ionizzazione costruita o rivestita con materiale ad alto coefficiente di emissione secondaria

Publications (3)

Publication Number Publication Date
ITFI910248A0 ITFI910248A0 (it) 1991-10-11
ITFI910248A1 ITFI910248A1 (it) 1993-04-11
IT1252811B true IT1252811B (it) 1995-06-28

Family

ID=11349817

Family Applications (1)

Application Number Title Priority Date Filing Date
ITFI910248A IT1252811B (it) 1991-10-11 1991-10-11 Generatore di ioni con camera di ionizzazione costruita o rivestita con materiale ad alto coefficiente di emissione secondaria

Country Status (4)

Country Link
US (1) US5434469A (it)
EP (1) EP0537123A1 (it)
JP (1) JPH05242820A (it)
IT (1) IT1252811B (it)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3268180B2 (ja) * 1994-11-18 2002-03-25 株式会社東芝 イオン発生装置、イオン照射装置、及び半導体装置の製造方法
US5969470A (en) * 1996-11-08 1999-10-19 Veeco Instruments, Inc. Charged particle source
DE19948229C1 (de) * 1999-10-07 2001-05-03 Daimler Chrysler Ag Hochfrequenz-Ionenquelle
DE10058326C1 (de) * 2000-11-24 2002-06-13 Astrium Gmbh Induktiv gekoppelte Hochfrequenz-Elektronenquelle mit reduziertem Leistungsbedarf durch elektrostatischen Einschluss von Elektronen
US7214949B2 (en) * 2004-11-12 2007-05-08 Thorrn Micro Technologies, Inc. Ion generation by the temporal control of gaseous dielectric breakdown
US7661468B2 (en) * 2005-01-24 2010-02-16 Ventiva, Inc. Electro-hydrodynamic gas flow cooling system
US20100177519A1 (en) * 2006-01-23 2010-07-15 Schlitz Daniel J Electro-hydrodynamic gas flow led cooling system
CN101894725B (zh) * 2010-07-09 2011-12-14 清华大学 离子源
US9048190B2 (en) * 2012-10-09 2015-06-02 Applied Materials, Inc. Methods and apparatus for processing substrates using an ion shield

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3634690A (en) * 1970-03-23 1972-01-11 Itt Tubular photocell with secondary emission from internal surface
US4240007A (en) * 1979-06-29 1980-12-16 International Business Machines Corporation Microchannel ion gun
US4298817A (en) * 1979-08-13 1981-11-03 Carette Jean Denis Ion-electron source with channel multiplier having a feedback region
GB2120232A (en) * 1982-05-17 1983-11-30 Galileo Electro Optics Corp Glass composition
JPS59151737A (ja) * 1983-02-17 1984-08-30 Semiconductor Res Found イオン源
JPS60262333A (ja) * 1984-06-07 1985-12-25 Toshiba Corp マルチパクタ−荷電粒子源
US4737688A (en) * 1986-07-22 1988-04-12 Applied Electron Corporation Wide area source of multiply ionized atomic or molecular species
US4859908A (en) * 1986-09-24 1989-08-22 Matsushita Electric Industrial Co., Ltd. Plasma processing apparatus for large area ion irradiation
IT1246682B (it) * 1991-03-04 1994-11-24 Proel Tecnologie Spa Dispositivo a catodo cavo non riscaldato per la generazione dinamica di plasma

Also Published As

Publication number Publication date
EP0537123A1 (en) 1993-04-14
JPH05242820A (ja) 1993-09-21
US5434469A (en) 1995-07-18
ITFI910248A1 (it) 1993-04-11
ITFI910248A0 (it) 1991-10-11

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Legal Events

Date Code Title Description
0001 Granted
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19951027