IT1397182B1 - Sensore di frequenza di rotazione - Google Patents

Sensore di frequenza di rotazione

Info

Publication number
IT1397182B1
IT1397182B1 ITMI2009A001979A ITMI20091979A IT1397182B1 IT 1397182 B1 IT1397182 B1 IT 1397182B1 IT MI2009A001979 A ITMI2009A001979 A IT MI2009A001979A IT MI20091979 A ITMI20091979 A IT MI20091979A IT 1397182 B1 IT1397182 B1 IT 1397182B1
Authority
IT
Italy
Prior art keywords
rotation frequency
frequency sensor
sensor
rotation
frequency
Prior art date
Application number
ITMI2009A001979A
Other languages
English (en)
Inventor
Burkhard Kuhlmann
Joerg Hauer
Johannes Classen
Torsten Ohms
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20091979A1 publication Critical patent/ITMI20091979A1/it
Application granted granted Critical
Publication of IT1397182B1 publication Critical patent/IT1397182B1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
ITMI2009A001979A 2008-11-17 2009-11-12 Sensore di frequenza di rotazione IT1397182B1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008043796.4A DE102008043796B4 (de) 2008-11-17 2008-11-17 Drehratensensor

Publications (2)

Publication Number Publication Date
ITMI20091979A1 ITMI20091979A1 (it) 2010-05-18
IT1397182B1 true IT1397182B1 (it) 2013-01-04

Family

ID=42104820

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2009A001979A IT1397182B1 (it) 2008-11-17 2009-11-12 Sensore di frequenza di rotazione

Country Status (3)

Country Link
US (1) US8561465B2 (it)
DE (1) DE102008043796B4 (it)
IT (1) IT1397182B1 (it)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009045420B4 (de) 2009-10-07 2024-01-18 Robert Bosch Gmbh Drehratensensor, Drehratensensoranordnung und Verfahren zum Betrieb eines Drehratensensors
US8616057B1 (en) * 2010-01-23 2013-12-31 Minyao Mao Angular rate sensor with suppressed linear acceleration response
DE102010061755B4 (de) * 2010-11-23 2025-01-30 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
DE102012207937A1 (de) * 2012-05-11 2013-11-14 Robert Bosch Gmbh Drehratensensor
DE102013215587A1 (de) 2013-08-07 2015-02-12 Robert Bosch Gmbh Verfahren und Vorrichtung zum Einstellen des Dynamikbereichs eines Drehratensensors
FI125696B (en) 2013-09-11 2016-01-15 Murata Manufacturing Co Gyroscope structure and gyroscope with improved quadrature compensation
DE102017216010A1 (de) * 2017-09-12 2019-03-14 Robert Bosch Gmbh Mikromechanische Drehraten-Sensoranordnung und entsprechendes Herstellungsverfahren
DE102017217653A1 (de) 2017-10-05 2019-04-11 Robert Bosch Gmbh Mikromechanisches Bauteil, Herstellungsverfahren für ein mikromechanisches Bauteil und Verfahren zum Anregen einer Bewegung eines verstellbaren Teils um eine Rotationsachse
TWI770605B (zh) * 2019-09-10 2022-07-11 昇佳電子股份有限公司 微機電陀螺儀

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4590801A (en) * 1983-09-02 1986-05-27 Sundstrand Data Control, Inc. Apparatus for measuring inertial specific force and angular rate of a moving body
SE9500729L (sv) * 1995-02-27 1996-08-28 Gert Andersson Anordning för mätning av vinkelhastighet i enkristallint material samt förfarande för framställning av sådan
DE19641284C1 (de) * 1996-10-07 1998-05-20 Inst Mikro Und Informationstec Drehratensensor mit entkoppelten orthogonalen Primär- und Sekundärschwingungen
DE19649715C2 (de) * 1996-11-30 2001-07-12 Telefunken Microelectron Anordnung zur Messung von Beschleunigungen
JP3311633B2 (ja) * 1997-04-04 2002-08-05 日本碍子株式会社 センサユニット
JPH11352143A (ja) * 1998-04-06 1999-12-24 Matsushita Electric Ind Co Ltd 加速度センサ
DE10108197A1 (de) * 2001-02-21 2002-09-12 Bosch Gmbh Robert Drehratensensor
KR100436367B1 (ko) 2001-12-14 2004-06-19 삼성전자주식회사 수직 진동 질량체를 갖는 멤스 자이로스코프
US6862795B2 (en) * 2002-06-17 2005-03-08 Vty Holding Oy Method of manufacturing of a monolithic silicon acceleration sensor
US6829937B2 (en) * 2002-06-17 2004-12-14 Vti Holding Oy Monolithic silicon acceleration sensor
JP2004271464A (ja) * 2003-03-12 2004-09-30 Denso Corp 半導体力学量センサ
US7243545B2 (en) * 2003-03-20 2007-07-17 Denso Corporation Physical quantity sensor having spring
US6837107B2 (en) * 2003-04-28 2005-01-04 Analog Devices, Inc. Micro-machined multi-sensor providing 1-axis of acceleration sensing and 2-axes of angular rate sensing
US7040922B2 (en) * 2003-06-05 2006-05-09 Analog Devices, Inc. Multi-surface mounting member and electronic device
FR2859528B1 (fr) * 2003-09-09 2006-01-06 Thales Sa Gyrometre micro-usine a double diapason et a detection dans le plan de la plaque usinee
US6892575B2 (en) 2003-10-20 2005-05-17 Invensense Inc. X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
US7458263B2 (en) 2003-10-20 2008-12-02 Invensense Inc. Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
US6939473B2 (en) 2003-10-20 2005-09-06 Invensense Inc. Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
JP4654668B2 (ja) 2004-03-12 2011-03-23 パナソニック電工株式会社 ジャイロセンサおよびそれを用いたセンサ装置
KR100652952B1 (ko) 2004-07-19 2006-12-06 삼성전자주식회사 커플링 스프링을 구비한 멤스 자이로스코프
JP2008514968A (ja) * 2004-09-27 2008-05-08 コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツング 回転速度センサ
JP4138736B2 (ja) * 2004-12-02 2008-08-27 富士通株式会社 マイクロ揺動素子
FI116543B (fi) * 2004-12-31 2005-12-15 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
US7316965B2 (en) * 2005-06-21 2008-01-08 Freescale Semiconductor, Inc. Substrate contact for a capped MEMS and method of making the substrate contact at the wafer level
US7461552B2 (en) * 2006-10-23 2008-12-09 Custom Sensors & Technologies, Inc. Dual axis rate sensor

Also Published As

Publication number Publication date
DE102008043796B4 (de) 2023-12-21
DE102008043796A1 (de) 2010-05-20
ITMI20091979A1 (it) 2010-05-18
US8561465B2 (en) 2013-10-22
US20100122576A1 (en) 2010-05-20

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