IT1401544B1 - Sensore della velocita' di rotazione - Google Patents

Sensore della velocita' di rotazione

Info

Publication number
IT1401544B1
IT1401544B1 ITMI2010A001982A ITMI20101982A IT1401544B1 IT 1401544 B1 IT1401544 B1 IT 1401544B1 IT MI2010A001982 A ITMI2010A001982 A IT MI2010A001982A IT MI20101982 A ITMI20101982 A IT MI20101982A IT 1401544 B1 IT1401544 B1 IT 1401544B1
Authority
IT
Italy
Prior art keywords
rotation speed
speed sensor
sensor
rotation
speed
Prior art date
Application number
ITMI2010A001982A
Other languages
English (en)
Inventor
Torsten Ohms
Daniel Christopher
Robert Sattler
Daniel Christoph Meisel
Daniel Christoph
Thorsten Balslink
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20101982A1 publication Critical patent/ITMI20101982A1/it
Application granted granted Critical
Publication of IT1401544B1 publication Critical patent/IT1401544B1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
ITMI2010A001982A 2009-11-06 2010-10-26 Sensore della velocita' di rotazione IT1401544B1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009046506.5A DE102009046506B4 (de) 2009-11-06 2009-11-06 Drehratensensor

Publications (2)

Publication Number Publication Date
ITMI20101982A1 ITMI20101982A1 (it) 2011-05-07
IT1401544B1 true IT1401544B1 (it) 2013-07-26

Family

ID=43738099

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2010A001982A IT1401544B1 (it) 2009-11-06 2010-10-26 Sensore della velocita' di rotazione

Country Status (3)

Country Link
US (1) US8443668B2 (it)
DE (1) DE102009046506B4 (it)
IT (1) IT1401544B1 (it)

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009001247A1 (de) * 2009-02-27 2010-09-09 Sensordynamics Ag Mikro-elektro-mechanischer Sensor
DE102009002701B4 (de) * 2009-04-28 2018-01-18 Hanking Electronics, Ltd. Mikromechanischer Sensor
CN102483328B (zh) 2009-09-09 2015-08-05 大陆-特韦斯贸易合伙股份公司及两合公司 具有线性和旋转地震元件的双轴、抗震旋转速率传感器
DE102009045431B4 (de) * 2009-10-07 2025-08-21 Robert Bosch Gmbh Mikromechanische Struktur und Verfahren zum Betrieb einer mikromechanischen Struktur
DE102010038461B4 (de) * 2010-07-27 2018-05-30 Robert Bosch Gmbh Drehratensensor und Verfahren zur Herstellung eines Masseelements
DE102010042123B3 (de) * 2010-10-07 2012-03-22 Siemens Aktiengesellschaft Anordnung mit einem drehbaren Röntgendetektor
DE102010061755B4 (de) * 2010-11-23 2025-01-30 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
DE102010062095B4 (de) * 2010-11-29 2025-02-06 Robert Bosch Gmbh Drehratensensor und Verahren zum Betrieb eines Drehratensensors
DE102011088331B4 (de) * 2011-12-13 2020-03-19 Robert Bosch Gmbh Mikromechanisches Sensorelement
DE102012200124A1 (de) 2012-01-05 2013-07-11 Robert Bosch Gmbh Mikromechanische Struktur und Drehratensensor
DE102012200125B4 (de) 2012-01-05 2026-03-05 Robert Bosch Gmbh Sensorstruktur und Drehratensensor
DE102012200132B4 (de) * 2012-01-05 2025-12-24 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
JP6070920B2 (ja) * 2012-04-04 2017-02-01 セイコーエプソン株式会社 ジャイロセンサーおよび電子機器
CN103363982B (zh) * 2012-04-04 2018-03-13 精工爱普生株式会社 陀螺传感器、电子设备以及移动体
JP6127377B2 (ja) * 2012-04-10 2017-05-17 セイコーエプソン株式会社 ジャイロセンサーおよび電子機器
DE102012207937A1 (de) * 2012-05-11 2013-11-14 Robert Bosch Gmbh Drehratensensor
DE102012210144A1 (de) * 2012-06-15 2013-12-19 Robert Bosch Gmbh Verfahren zum Betrieb und/oder zur Vermessung einer mikromechanischen Vorrichtung und mikromechanische Vorrichtung
JP6195051B2 (ja) * 2013-03-04 2017-09-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、及び移動体
DE102014202053A1 (de) * 2014-02-05 2015-08-06 Robert Bosch Gmbh Sensorvorrichtung und Verfahren zum Betreiben einer Sensorvorrichtung mit mindestens einer seismischen Masse
FI126557B (en) * 2014-05-07 2017-02-15 Murata Manufacturing Co Improved gyroscope structure and gyroscope
JP6481293B2 (ja) * 2014-09-05 2019-03-13 セイコーエプソン株式会社 物理量センサー素子、物理量センサー、電子機器および移動体
JP2016057073A (ja) * 2014-09-05 2016-04-21 セイコーエプソン株式会社 物理量センサー素子、物理量センサー、電子機器および移動体
JP6481294B2 (ja) 2014-09-05 2019-03-13 セイコーエプソン株式会社 物理量センサー素子、物理量センサー、電子機器および移動体
JP2016099269A (ja) * 2014-11-25 2016-05-30 セイコーエプソン株式会社 ジャイロセンサー、電子機器、および移動体
FI127202B (en) * 2015-04-16 2018-01-31 Murata Manufacturing Co Three axis gyroscope
US10634499B2 (en) * 2015-06-11 2020-04-28 Georgia Tech Research Corporation MEMS inertial measurement apparatus having slanted electrodes for quadrature tuning
US9689677B2 (en) * 2015-06-19 2017-06-27 Nxp Usa, Inc. MEMS device with common mode rejection structure
US10209070B2 (en) * 2016-06-03 2019-02-19 Nxp Usa, Inc. MEMS gyroscope device
US10126129B2 (en) * 2016-07-11 2018-11-13 Nxp Usa, Inc. Vibration and shock robust gyroscope
JP6245459B2 (ja) * 2016-10-12 2017-12-13 セイコーエプソン株式会社 ジャイロセンサーおよび電子機器
IT201600106928A1 (it) 2016-10-24 2018-04-24 St Microelectronics Srl Giroscopio triassiale mems a modulazione di frequenza
JP6819216B2 (ja) * 2016-10-26 2021-01-27 セイコーエプソン株式会社 ジャイロセンサー、ジャイロセンサーの製造方法、電子機器および移動体
TWI669267B (zh) 2017-04-04 2019-08-21 日商村田製作所股份有限公司 用於角速度的微機械感測器元件
JP6627911B2 (ja) * 2017-05-24 2020-01-08 株式会社村田製作所 圧電回転ｍｅｍｓ共振器
JP6627912B2 (ja) 2017-05-24 2020-01-08 株式会社村田製作所 圧電回転ｍｅｍｓ共振器
JP6696530B2 (ja) 2017-05-24 2020-05-20 株式会社村田製作所 圧電ジャイロスコープにおける連結懸架
JP6610706B2 (ja) 2017-05-24 2019-11-27 株式会社村田製作所 横駆動変換器を備える圧電ジャイロスコープ
JP6740965B2 (ja) * 2017-06-22 2020-08-19 株式会社デンソー 振動型角速度センサ
JP2019066224A (ja) 2017-09-29 2019-04-25 セイコーエプソン株式会社 物理量センサー、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器および移動体
JP7192437B2 (ja) * 2018-11-28 2022-12-20 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
DE102020203921A1 (de) 2020-03-26 2021-09-30 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauelement, aufweisend ein Substrat, eine seismische Masse und eine Aufhängung
US12504283B2 (en) 2022-05-17 2025-12-23 Murata Manufacturing Co., Ltd. MEMS gyroscope sensing in-plane rotations
CN117647236A (zh) * 2022-09-02 2024-03-05 昇佳电子股份有限公司 三轴陀螺仪
FR3140621A1 (fr) * 2022-10-05 2024-04-12 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif micro-électromécanique
DE102023204726A1 (de) 2023-05-22 2024-11-28 Robert Bosch Gesellschaft mit beschränkter Haftung Drehratensensor mit einem, eine Haupterstreckungsebene aufweisenden Substrat und mindestens einem Massenschwinger

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19530007C2 (de) 1995-08-16 1998-11-26 Bosch Gmbh Robert Drehratensensor
DE10108197A1 (de) 2001-02-21 2002-09-12 Bosch Gmbh Robert Drehratensensor
DE10108196A1 (de) 2001-02-21 2002-10-24 Bosch Gmbh Robert Drehratensensor
DE10237410A1 (de) 2002-01-12 2003-08-28 Bosch Gmbh Robert Drehratensensor
WO2003058166A1 (de) * 2002-01-12 2003-07-17 Robert Bosch Gmbh Drehratensensor
WO2005103620A1 (en) 2004-04-14 2005-11-03 Analog Devices, Inc. Inertial sensor with a linear array of sensor elements
EP1996899B1 (de) * 2006-03-10 2014-09-17 Continental Teves AG & Co. oHG Drehratensensor mit kopplungsbalken
DE102007030120B4 (de) 2007-06-29 2010-04-08 Litef Gmbh Drehratensensor

Also Published As

Publication number Publication date
DE102009046506A1 (de) 2011-05-12
US20110132087A1 (en) 2011-06-09
DE102009046506B4 (de) 2024-01-18
US8443668B2 (en) 2013-05-21
ITMI20101982A1 (it) 2011-05-07

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