IT201700103489A1 - Metodo di fabbricazione di una membrana filtrante sottile, dispositivo trasduttore acustico includente la membrana filtrante, metodo di assemblaggio del dispositivo trasduttore acustico e sistema elettronico - Google Patents

Metodo di fabbricazione di una membrana filtrante sottile, dispositivo trasduttore acustico includente la membrana filtrante, metodo di assemblaggio del dispositivo trasduttore acustico e sistema elettronico

Info

Publication number
IT201700103489A1
IT201700103489A1 IT102017000103489A IT201700103489A IT201700103489A1 IT 201700103489 A1 IT201700103489 A1 IT 201700103489A1 IT 102017000103489 A IT102017000103489 A IT 102017000103489A IT 201700103489 A IT201700103489 A IT 201700103489A IT 201700103489 A1 IT201700103489 A1 IT 201700103489A1
Authority
IT
Italy
Prior art keywords
acoustic transducer
filtering membrane
manufacture
electronic system
thin
Prior art date
Application number
IT102017000103489A
Other languages
English (en)
Inventor
Matteo Perletti
Federico Vercesi
Silvia Adorno
Giorgio Allegato
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to IT102017000103489A priority Critical patent/IT201700103489A1/it
Priority to US16/128,288 priority patent/US10555091B2/en
Priority to CN201821508057.2U priority patent/CN208836409U/zh
Priority to CN201811076753.5A priority patent/CN109511066B/zh
Priority to EP18194622.9A priority patent/EP3457709B1/en
Publication of IT201700103489A1 publication Critical patent/IT201700103489A1/it
Priority to US16/693,003 priority patent/US11317219B2/en

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems ; Auxiliary parts of microstructural devices or systems
    • B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
    • B81B7/0029—Protection against environmental influences not provided for in groups B81B7/0012 - B81B7/0025
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00309—Processes for packaging MEMS devices suitable for fluid transfer from the MEMS out of the package or vice versa, e.g. transfer of liquid, gas, sound
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00555—Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity
    • B81C1/00626—Processes for achieving a desired geometry not provided for in groups B81C1/00563 - B81C1/00619
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/08—Mouthpieces; Microphones; Attachments therefor
    • H04R1/083—Special constructions of mouthpieces
    • H04R1/086—Protective screens, e.g. all weather or wind screens
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
    • H04R1/22—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired frequency characteristic only 
    • H04R1/28—Transducer mountings or enclosures modified by provision of mechanical or acoustic impedances, e.g. resonator, damping means
    • H04R1/2807—Enclosures comprising vibrating or resonating arrangements
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2207/00—Microstructural systems or auxiliary parts thereof
    • B81B2207/01—Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS
    • B81B2207/012—Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS the micromechanical device and the control or processing electronics being separate parts in the same package
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0135—Controlling etch progression
    • B81C2201/014—Controlling etch progression by depositing an etch stop layer, e.g. silicon nitride, silicon oxide, metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0198—Manufacture or treatment of microstructural devices or systems in or on a substrate for making a masking layer
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Geometry (AREA)
  • Computer Hardware Design (AREA)
  • Otolaryngology (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Pressure Sensors (AREA)
IT102017000103489A 2017-09-15 2017-09-15 Metodo di fabbricazione di una membrana filtrante sottile, dispositivo trasduttore acustico includente la membrana filtrante, metodo di assemblaggio del dispositivo trasduttore acustico e sistema elettronico IT201700103489A1 (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
IT102017000103489A IT201700103489A1 (it) 2017-09-15 2017-09-15 Metodo di fabbricazione di una membrana filtrante sottile, dispositivo trasduttore acustico includente la membrana filtrante, metodo di assemblaggio del dispositivo trasduttore acustico e sistema elettronico
US16/128,288 US10555091B2 (en) 2017-09-15 2018-09-11 Method for manufacturing a thin filtering membrane and an acoustic transducer device including the filtering membrane
CN201821508057.2U CN208836409U (zh) 2017-09-15 2018-09-14 声学换能器装置和电子系统
CN201811076753.5A CN109511066B (zh) 2017-09-15 2018-09-14 用于制造薄过滤膜的方法以及包括过滤膜的声学换能器装置
EP18194622.9A EP3457709B1 (en) 2017-09-15 2018-09-14 Method for manufacturing a thin filtering membrane, acoustic transducer device including the filtering membrane, method for assembling the acoustic transducer device, and electronic system
US16/693,003 US11317219B2 (en) 2017-09-15 2019-11-22 Method for manufacturing a thin filtering membrane and an acoustic transducer device including the filtering membrane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102017000103489A IT201700103489A1 (it) 2017-09-15 2017-09-15 Metodo di fabbricazione di una membrana filtrante sottile, dispositivo trasduttore acustico includente la membrana filtrante, metodo di assemblaggio del dispositivo trasduttore acustico e sistema elettronico

Publications (1)

Publication Number Publication Date
IT201700103489A1 true IT201700103489A1 (it) 2019-03-15

Family

ID=61024865

Family Applications (1)

Application Number Title Priority Date Filing Date
IT102017000103489A IT201700103489A1 (it) 2017-09-15 2017-09-15 Metodo di fabbricazione di una membrana filtrante sottile, dispositivo trasduttore acustico includente la membrana filtrante, metodo di assemblaggio del dispositivo trasduttore acustico e sistema elettronico

Country Status (4)

Country Link
US (2) US10555091B2 (it)
EP (1) EP3457709B1 (it)
CN (2) CN109511066B (it)
IT (1) IT201700103489A1 (it)

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CN115004719B (zh) * 2020-01-07 2025-07-11 科利耳有限公司 声学端口盖以及包括声学端口盖的装置和保护外壳
EP3851848A1 (en) * 2020-01-20 2021-07-21 Infineon Technologies AG Micromechanical device with perforated membrane
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US12172887B2 (en) * 2020-07-12 2024-12-24 xMEMS Labs, Inc. Sound producing package structure including sound producing membranes actuated toward cavity center
CN215187378U (zh) * 2021-04-28 2021-12-14 瑞声声学科技(深圳)有限公司 振动传感器
CN215187377U (zh) * 2021-04-28 2021-12-14 瑞声声学科技(深圳)有限公司 振动传感器
EP4727157A3 (en) * 2021-05-11 2026-06-10 Infineon Technologies AG Sound transducer device comprising an environmental barrier
US11902727B2 (en) * 2022-02-11 2024-02-13 Apple Inc. Inductive acoustic filters for acoustic devices
US11882394B2 (en) 2022-02-11 2024-01-23 Apple Inc. Vented liquid-resistant microphone assembly
DE102023209592A1 (de) 2023-09-29 2025-04-03 Robert Bosch Gesellschaft mit beschränkter Haftung Herstellungsverfahren für ein mikromechanisches Sensorbauelement und entsprechendes mikromechanisches Sensorbauelement
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Also Published As

Publication number Publication date
CN208836409U (zh) 2019-05-07
US10555091B2 (en) 2020-02-04
CN109511066A (zh) 2019-03-22
EP3457709B1 (en) 2021-10-27
US20190090067A1 (en) 2019-03-21
US20200092659A1 (en) 2020-03-19
EP3457709A1 (en) 2019-03-20
CN109511066B (zh) 2021-11-05
US11317219B2 (en) 2022-04-26

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