IT8547788A1 - Contenitore per l'immagazzinamento ed il trasporto di dischetti (fette ) di silicio - Google Patents

Contenitore per l'immagazzinamento ed il trasporto di dischetti (fette ) di silicio

Info

Publication number
IT8547788A1
IT8547788A1 IT1985A47788A IT4778885A IT8547788A1 IT 8547788 A1 IT8547788 A1 IT 8547788A1 IT 1985A47788 A IT1985A47788 A IT 1985A47788A IT 4778885 A IT4778885 A IT 4778885A IT 8547788 A1 IT8547788 A1 IT 8547788A1
Authority
IT
Italy
Prior art keywords
box
cassette
container
receptacle
silicon wafers
Prior art date
Application number
IT1985A47788A
Other languages
English (en)
Other versions
IT8547788A0 (it
IT1181778B (it
Original Assignee
Soc Dynamit Nobel Silicon S P A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Publication of IT8547788A0 publication Critical patent/IT8547788A0/it
Application filed by Soc Dynamit Nobel Silicon S P A filed Critical Soc Dynamit Nobel Silicon S P A
Priority to IT47788/85A priority Critical patent/IT1181778B/it
Priority to AT86102203T priority patent/ATE95970T1/de
Priority to DE86102203T priority patent/DE3689154D1/de
Priority to EP86102203A priority patent/EP0194481B1/de
Priority to KR1019860001577A priority patent/KR950005130B1/ko
Priority to JP61048750A priority patent/JPH0741937B2/ja
Priority to US06/837,758 priority patent/US4718549A/en
Publication of IT8547788A1 publication Critical patent/IT8547788A1/it
Application granted granted Critical
Publication of IT1181778B publication Critical patent/IT1181778B/it

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/14—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/15—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1911—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by materials, roughness, coatings or the like
    • H10P72/1912—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by materials, roughness, coatings or the like characterised by shock absorbing elements, e.g. retainers or cushions
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S206/00—Special receptacle or package
    • Y10S206/832—Semiconductor wafer boat

Landscapes

  • Packaging Frangible Articles (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging For Recording Disks (AREA)
  • Closures For Containers (AREA)
  • Stackable Containers (AREA)
  • Packaging Of Machine Parts And Wound Products (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
IT47788/85A 1985-03-08 1985-05-07 Contenitore per l'immagazzinamento ed il trasporto di dischetti (fette) di silicio IT1181778B (it)

Priority Applications (7)

Application Number Priority Date Filing Date Title
IT47788/85A IT1181778B (it) 1985-05-07 1985-05-07 Contenitore per l'immagazzinamento ed il trasporto di dischetti (fette) di silicio
AT86102203T ATE95970T1 (de) 1985-05-07 1986-02-20 Behaelter zur aufbewahrung und befoerderung von siliciumscheiben.
DE86102203T DE3689154D1 (de) 1985-05-07 1986-02-20 Behälter zur Aufbewahrung und Beförderung von Siliciumscheiben.
EP86102203A EP0194481B1 (de) 1985-03-08 1986-02-20 Behälter zur Aufbewahrung und Beförderung von Siliciumscheiben
KR1019860001577A KR950005130B1 (ko) 1985-03-08 1986-03-06 실리콘 원판의 저장과 운반을 위한 용기
JP61048750A JPH0741937B2 (ja) 1985-03-08 1986-03-07 珪素プレートを貯蔵及び搬送するための容器及びカセット
US06/837,758 US4718549A (en) 1985-03-08 1986-03-10 Container for the storage and shipment of silicon disks or wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT47788/85A IT1181778B (it) 1985-05-07 1985-05-07 Contenitore per l'immagazzinamento ed il trasporto di dischetti (fette) di silicio

Publications (3)

Publication Number Publication Date
IT8547788A0 IT8547788A0 (it) 1985-03-08
IT8547788A1 true IT8547788A1 (it) 1986-11-07
IT1181778B IT1181778B (it) 1987-09-30

Family

ID=11262525

Family Applications (1)

Application Number Title Priority Date Filing Date
IT47788/85A IT1181778B (it) 1985-03-08 1985-05-07 Contenitore per l'immagazzinamento ed il trasporto di dischetti (fette) di silicio

Country Status (7)

Country Link
US (1) US4718549A (it)
EP (1) EP0194481B1 (it)
JP (1) JPH0741937B2 (it)
KR (1) KR950005130B1 (it)
AT (1) ATE95970T1 (it)
DE (1) DE3689154D1 (it)
IT (1) IT1181778B (it)

Families Citing this family (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU5983986A (en) * 1985-07-09 1987-01-15 Basf Aktiengesellschaft Container for discs
US4793488A (en) * 1987-07-07 1988-12-27 Empak, Inc. Package for semiconductor wafers
US4966284A (en) * 1987-07-07 1990-10-30 Empak, Inc. Substrate package
US5025926A (en) * 1987-07-07 1991-06-25 Empak, Inc. Package
US4880116A (en) * 1988-03-04 1989-11-14 Fluoroware, Inc. Robotic accessible wafer shipper assembly
EP0343762A3 (en) * 1988-05-24 1991-05-08 Empak Inc. Substrate package
JPH0278246A (ja) * 1988-09-14 1990-03-19 Kakizaki Seisakusho:Kk 薄板処理用バスケット
US5025924A (en) * 1988-11-16 1991-06-25 Toppan Printing Co., Ltd. Container
US5046615A (en) * 1989-04-03 1991-09-10 Fluoroware, Inc. Disk shipper
JPH02306645A (ja) * 1989-05-22 1990-12-20 Hitachi Electron Eng Co Ltd 検査装置のウエハロード方法および運搬ケース載置台構造
US5207324A (en) * 1991-03-08 1993-05-04 Fluoroware, Inc. Wafer cushion for shippers
US5248033A (en) * 1991-05-14 1993-09-28 Fluoroware, Inc. Hinged tilt box with inclined portion
US5228568A (en) * 1991-08-30 1993-07-20 Shin-Etsu Handotai Co., Ltd. Semiconductor wafer basket
US5255783A (en) * 1991-12-20 1993-10-26 Fluoroware, Inc. Evacuated wafer container
US5255797A (en) * 1992-02-26 1993-10-26 Fluoroware, Inc. Wafer carrier with wafer retaining cushions
US5555981A (en) * 1992-05-26 1996-09-17 Empak, Inc. Wafer suspension box
US5273159A (en) * 1992-05-26 1993-12-28 Empak, Inc. Wafer suspension box
US5472086A (en) * 1994-03-11 1995-12-05 Holliday; James E. Enclosed sealable purgible semiconductor wafer holder
US5476176A (en) * 1994-05-23 1995-12-19 Empak, Inc. Reinforced semiconductor wafer holder
US5816410A (en) * 1994-07-15 1998-10-06 Fluoroware, Inc. Wafer cushions for wafer shipper
US5586658A (en) * 1995-06-06 1996-12-24 Fluoroware, Inc. Wafer cushions for wafer shipper
JP2796502B2 (ja) * 1994-10-06 1998-09-10 信越ポリマー株式会社 ウェーハ収納容器のウェーハ抑え
USD368802S (en) 1994-10-13 1996-04-16 Gallagher Gary M 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment
US5452795A (en) * 1994-11-07 1995-09-26 Gallagher; Gary M. Actuated rotary retainer for silicone wafer box
USD376688S (en) 1994-12-20 1996-12-24 Empak, Inc. Semiconductor wafer cassette transport box
JPH08236605A (ja) * 1995-02-28 1996-09-13 Komatsu Electron Metals Co Ltd 半導体ウェハ収納ケース
USD383898S (en) * 1995-10-13 1997-09-23 Empak, Inc. Combination shipping and transport cassette
USD378873S (en) * 1995-10-13 1997-04-22 Empak, Inc. 300 mm microenvironment pod with door on side
USD387903S (en) * 1995-10-13 1997-12-23 Empak, Inc. Shipping container
US6070730A (en) * 1997-06-18 2000-06-06 Fluoroware, Inc. Disk container
US6216874B1 (en) 1998-07-10 2001-04-17 Fluoroware, Inc. Wafer carrier having a low tolerance build-up
US5992638A (en) * 1998-11-11 1999-11-30 Empak, Inc. Advanced wafer shipper
US6082540A (en) * 1999-01-06 2000-07-04 Fluoroware, Inc. Cushion system for wafer carriers
DE20106909U1 (de) * 2001-04-21 2002-08-29 ACR Automation in Cleanroom GmbH, 78078 Niedereschach Transportbox für optische Masken
DE10136343B4 (de) * 2001-07-26 2007-12-27 Grass Gmbh Befestigung für dünnwandige Platten
US6951284B2 (en) * 2001-11-14 2005-10-04 Entegris, Inc. Wafer carrier with wafer retaining system
JP3924714B2 (ja) * 2001-12-27 2007-06-06 東京エレクトロン株式会社 ウエハカセット
US6976586B2 (en) * 2002-05-10 2005-12-20 Asm America, Inc. Delicate product packaging system
US7466482B2 (en) * 2005-12-27 2008-12-16 Disk King Technology Co., Ltd. Display unit
KR101395467B1 (ko) * 2006-06-13 2014-05-14 엔테그리스, 아이엔씨. 재사용이 가능한 웨이퍼 용기용 탄성 쿠션
JP2008294274A (ja) * 2007-05-25 2008-12-04 Nec Electronics Corp ウェハ移送容器、その緩衝支持部材
US7971722B2 (en) * 2008-08-08 2011-07-05 Gudeng Precision Industral Co, Ltd Wafer container with restrainer
MY159162A (en) 2010-03-11 2016-12-30 Entegris Inc Thin wafer shipper
JP7544972B2 (ja) * 2021-05-17 2024-09-03 ヤマハ発動機株式会社 ウェハ供給装置及び部品移載装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2999611A (en) * 1960-05-19 1961-09-12 Thomas V Paulson Two-part plastic container
US4043451A (en) * 1976-03-18 1977-08-23 Fluoroware, Inc. Shipping container for silicone semiconductor wafers
US4129211A (en) * 1976-09-07 1978-12-12 Monsanto Company Wafer packaging system
US4171740A (en) * 1976-09-07 1979-10-23 Monsanto Company Wafer packaging system
US4061228A (en) * 1976-12-20 1977-12-06 Fluoroware, Inc. Shipping container for substrates
US4248346A (en) * 1979-01-29 1981-02-03 Fluoroware, Inc. Shipping container for semiconductor substrate wafers
US4471716A (en) * 1981-01-15 1984-09-18 Fluoroware, Inc. Wafer carrier
JPS58133931U (ja) * 1982-03-04 1983-09-09 小松電子金属株式会社 半導体ウエ−ハの包装容器
JPS5920628U (ja) * 1982-07-28 1984-02-08 アルゴ工業株式会社 ウエハ収納容器
JPS5931238U (ja) * 1982-08-24 1984-02-27 三菱マテリアル株式会社 半導体ウエハ−の収納容器
US4450960A (en) * 1982-08-30 1984-05-29 Empak Inc. Package
US4520925A (en) * 1983-08-09 1985-06-04 Empak Inc. Package
US4557382A (en) * 1983-08-17 1985-12-10 Empak Inc. Disk package
DE3413837A1 (de) * 1984-04-12 1985-10-17 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Verpackung fuer halbleiterscheiben

Also Published As

Publication number Publication date
US4718549A (en) 1988-01-12
EP0194481A2 (de) 1986-09-17
JPH0741937B2 (ja) 1995-05-10
JPS61287584A (ja) 1986-12-17
ATE95970T1 (de) 1993-10-15
IT8547788A0 (it) 1985-03-08
EP0194481B1 (de) 1993-10-13
DE3689154D1 (de) 1993-11-18
KR950005130B1 (ko) 1995-05-18
EP0194481A3 (en) 1989-07-19
IT1181778B (it) 1987-09-30
KR860007131A (ko) 1986-10-08

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Legal Events

Date Code Title Description
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19970329