IT974660B - Procedimento e dispositivo per rilevare difetti in un elemento semiconduttore - Google Patents

Procedimento e dispositivo per rilevare difetti in un elemento semiconduttore

Info

Publication number
IT974660B
IT974660B IT31014/72A IT3101472A IT974660B IT 974660 B IT974660 B IT 974660B IT 31014/72 A IT31014/72 A IT 31014/72A IT 3101472 A IT3101472 A IT 3101472A IT 974660 B IT974660 B IT 974660B
Authority
IT
Italy
Prior art keywords
procedure
semiconductor element
detecting defects
defects
detecting
Prior art date
Application number
IT31014/72A
Other languages
English (en)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of IT974660B publication Critical patent/IT974660B/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
IT31014/72A 1971-12-29 1972-10-27 Procedimento e dispositivo per rilevare difetti in un elemento semiconduttore IT974660B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7147913A FR2165812B1 (it) 1971-12-29 1971-12-29

Publications (1)

Publication Number Publication Date
IT974660B true IT974660B (it) 1974-07-10

Family

ID=9088557

Family Applications (1)

Application Number Title Priority Date Filing Date
IT31014/72A IT974660B (it) 1971-12-29 1972-10-27 Procedimento e dispositivo per rilevare difetti in un elemento semiconduttore

Country Status (6)

Country Link
US (1) UST930006I4 (it)
JP (1) JPS5138225B2 (it)
DE (1) DE2258879A1 (it)
FR (1) FR2165812B1 (it)
GB (1) GB1404863A (it)
IT (1) IT974660B (it)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4053833A (en) 1974-02-12 1977-10-11 Westinghouse Electric Corporation Contactless test method for integrated circuits
JPS587059B2 (ja) * 1974-09-05 1983-02-08 ソニー株式会社 ハクマク ノ トクセイケンサホウ
US4169244A (en) 1978-02-03 1979-09-25 Plows Graham S Electron probe testing, analysis and fault diagnosis in electronic circuits
US4242633A (en) 1979-04-20 1980-12-30 Tissot Pierre L Integrated circuit light emitting electronic malfunction checking system
DE3235100A1 (de) * 1982-09-22 1984-03-22 Siemens AG, 1000 Berlin und 8000 München Verfahren zur messung elektrischer potentiale an vergrabener festkoerpersubstanz
US4755748A (en) 1985-06-05 1988-07-05 Bell Communications Research, Inc. Method and apparatus for analyzing semiconductor devices using charge-sensitive electron-beam-injected-carrier microscopy

Also Published As

Publication number Publication date
JPS5138225B2 (it) 1976-10-20
UST930006I4 (en) 1975-01-07
GB1404863A (en) 1975-09-03
FR2165812A1 (it) 1973-08-10
DE2258879A1 (de) 1973-07-05
JPS4881480A (it) 1973-10-31
FR2165812B1 (it) 1974-06-07

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