JPS4881480A - - Google Patents

Info

Publication number
JPS4881480A
JPS4881480A JP47125405A JP12540572A JPS4881480A JP S4881480 A JPS4881480 A JP S4881480A JP 47125405 A JP47125405 A JP 47125405A JP 12540572 A JP12540572 A JP 12540572A JP S4881480 A JPS4881480 A JP S4881480A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47125405A
Other languages
Japanese (ja)
Other versions
JPS5138225B2 (it
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4881480A publication Critical patent/JPS4881480A/ja
Publication of JPS5138225B2 publication Critical patent/JPS5138225B2/ja
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302Contactless testing
    • G01R31/305Contactless testing using electron beams

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP47125405A 1971-12-29 1972-12-15 Expired JPS5138225B2 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7147913A FR2165812B1 (it) 1971-12-29 1971-12-29

Publications (2)

Publication Number Publication Date
JPS4881480A true JPS4881480A (it) 1973-10-31
JPS5138225B2 JPS5138225B2 (it) 1976-10-20

Family

ID=9088557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47125405A Expired JPS5138225B2 (it) 1971-12-29 1972-12-15

Country Status (6)

Country Link
US (1) UST930006I4 (it)
JP (1) JPS5138225B2 (it)
DE (1) DE2258879A1 (it)
FR (1) FR2165812B1 (it)
GB (1) GB1404863A (it)
IT (1) IT974660B (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5129083A (en) * 1974-09-05 1976-03-11 Sony Corp Hakumaku no tokuseikensaho

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4053833A (en) 1974-02-12 1977-10-11 Westinghouse Electric Corporation Contactless test method for integrated circuits
US4169244A (en) 1978-02-03 1979-09-25 Plows Graham S Electron probe testing, analysis and fault diagnosis in electronic circuits
US4242633A (en) 1979-04-20 1980-12-30 Tissot Pierre L Integrated circuit light emitting electronic malfunction checking system
DE3235100A1 (de) * 1982-09-22 1984-03-22 Siemens AG, 1000 Berlin und 8000 München Verfahren zur messung elektrischer potentiale an vergrabener festkoerpersubstanz
US4755748A (en) 1985-06-05 1988-07-05 Bell Communications Research, Inc. Method and apparatus for analyzing semiconductor devices using charge-sensitive electron-beam-injected-carrier microscopy

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5129083A (en) * 1974-09-05 1976-03-11 Sony Corp Hakumaku no tokuseikensaho

Also Published As

Publication number Publication date
IT974660B (it) 1974-07-10
UST930006I4 (en) 1975-01-07
JPS5138225B2 (it) 1976-10-20
FR2165812B1 (it) 1974-06-07
DE2258879A1 (de) 1973-07-05
FR2165812A1 (it) 1973-08-10
GB1404863A (en) 1975-09-03

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