ITMI20021098A0 - Struttura integrata atta a realizzare all'interno di una sacca dielettricamente isolata un componente mos - Google Patents

Struttura integrata atta a realizzare all'interno di una sacca dielettricamente isolata un componente mos

Info

Publication number
ITMI20021098A0
ITMI20021098A0 IT2002MI001098A ITMI20021098A ITMI20021098A0 IT MI20021098 A0 ITMI20021098 A0 IT MI20021098A0 IT 2002MI001098 A IT2002MI001098 A IT 2002MI001098A IT MI20021098 A ITMI20021098 A IT MI20021098A IT MI20021098 A0 ITMI20021098 A0 IT MI20021098A0
Authority
IT
Italy
Prior art keywords
dielectricly
creating
integrated structure
structure suitable
component inside
Prior art date
Application number
IT2002MI001098A
Other languages
English (en)
Inventor
Salvatore Leonardi
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to IT2002MI001098A priority Critical patent/ITMI20021098A1/it
Publication of ITMI20021098A0 publication Critical patent/ITMI20021098A0/it
Priority to US10/442,646 priority patent/US6900504B2/en
Publication of ITMI20021098A1 publication Critical patent/ITMI20021098A1/it

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6704Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
    • H10D30/6708Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device for preventing the kink effect or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/124Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
    • H10D62/126Top-view geometrical layouts of the regions or the junctions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/351Substrate regions of field-effect devices
    • H10D62/357Substrate regions of field-effect devices of FETs
    • H10D62/364Substrate regions of field-effect devices of FETs of IGFETs
    • H10D62/378Contact regions to the substrate regions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
    • H10P90/19Preparing inhomogeneous wafers
    • H10P90/1904Preparing vertically inhomogeneous wafers
    • H10P90/1906Preparing SOI wafers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01Manufacture or treatment
    • H10W10/011Manufacture or treatment of isolation regions comprising dielectric materials
    • H10W10/014Manufacture or treatment of isolation regions comprising dielectric materials using trench refilling with dielectric materials, e.g. shallow trench isolations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01Manufacture or treatment
    • H10W10/061Manufacture or treatment using SOI processes together with lateral isolation, e.g. combinations of SOI and shallow trench isolations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10Isolation regions comprising dielectric materials
    • H10W10/17Isolation regions comprising dielectric materials formed using trench refilling with dielectric materials, e.g. shallow trench isolations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10Isolation regions comprising dielectric materials
    • H10W10/181Semiconductor-on-insulator [SOI] isolation regions, e.g. buried oxide regions of SOI wafers
IT2002MI001098A 2002-05-22 2002-05-22 Struttura integrata atta a realizzare all'interno di una sacca dielettricamente isolata un componente mos ITMI20021098A1 (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
IT2002MI001098A ITMI20021098A1 (it) 2002-05-22 2002-05-22 Struttura integrata atta a realizzare all'interno di una sacca dielettricamente isolata un componente mos
US10/442,646 US6900504B2 (en) 2002-05-22 2003-05-21 Integrated structure effective to form a MOS component in a dielectrically insulated well

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT2002MI001098A ITMI20021098A1 (it) 2002-05-22 2002-05-22 Struttura integrata atta a realizzare all'interno di una sacca dielettricamente isolata un componente mos

Publications (2)

Publication Number Publication Date
ITMI20021098A0 true ITMI20021098A0 (it) 2002-05-22
ITMI20021098A1 ITMI20021098A1 (it) 2003-11-24

Family

ID=11449951

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2002MI001098A ITMI20021098A1 (it) 2002-05-22 2002-05-22 Struttura integrata atta a realizzare all'interno di una sacca dielettricamente isolata un componente mos

Country Status (2)

Country Link
US (1) US6900504B2 (it)
IT (1) ITMI20021098A1 (it)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1696485A1 (en) * 2005-02-24 2006-08-30 STMicroelectronics S.r.l. Process for manufacturing semiconductor devices in a SOI substrate with alignment marks
DE102006027504A1 (de) * 2006-06-14 2007-12-27 X-Fab Semiconductor Foundries Ag Randabschlussstruktur von MOS-Leistungstransistoren hoher Spannungen
EP1873822A1 (en) * 2006-06-27 2008-01-02 STMicroelectronics S.r.l. Front-rear contacts of electronics devices with induced defects to increase conductivity thereof
US10037986B2 (en) * 2015-03-19 2018-07-31 Nxp Usa, Inc. ESD protection structure and method of fabrication thereof
US9960251B2 (en) 2015-03-19 2018-05-01 Nxp Usa, Inc. ESD protection structure and method of fabrication thereof

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6268630B1 (en) * 1999-03-16 2001-07-31 Sandia Corporation Silicon-on-insulator field effect transistor with improved body ties for rad-hard applications
JP4231612B2 (ja) * 2000-04-26 2009-03-04 株式会社ルネサステクノロジ 半導体集積回路
US6455902B1 (en) * 2000-12-06 2002-09-24 International Business Machines Corporation BiCMOS ESD circuit with subcollector/trench-isolated body mosfet for mixed signal analog/digital RF applications

Also Published As

Publication number Publication date
ITMI20021098A1 (it) 2003-11-24
US20040021169A1 (en) 2004-02-05
US6900504B2 (en) 2005-05-31

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