ITMI20040135A1 - Dispositivo micromeccanico sensore di pressioni e procedimento - Google Patents

Dispositivo micromeccanico sensore di pressioni e procedimento

Info

Publication number
ITMI20040135A1
ITMI20040135A1 IT000135A ITMI20040135A ITMI20040135A1 IT MI20040135 A1 ITMI20040135 A1 IT MI20040135A1 IT 000135 A IT000135 A IT 000135A IT MI20040135 A ITMI20040135 A IT MI20040135A IT MI20040135 A1 ITMI20040135 A1 IT MI20040135A1
Authority
IT
Italy
Prior art keywords
device pressure
micromechanical device
procedure
sensor
procedure sensor
Prior art date
Application number
IT000135A
Other languages
English (en)
Inventor
Hubert Benzel
Andreas Duell
Andreas Junger
Joerg Muchow
Juergen Nitsche
Frank Schaefer
Christoph Schelling
Heins-Georg Vossenberg
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20040135A1 publication Critical patent/ITMI20040135A1/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0264—Pressure sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0315—Cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0111—Bulk micromachining
    • B81C2201/0115—Porous silicon

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
IT000135A 2003-05-26 2004-01-29 Dispositivo micromeccanico sensore di pressioni e procedimento ITMI20040135A1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10323559A DE10323559A1 (de) 2003-05-26 2003-05-26 Mikromechanische Vorrichtung, Drucksensor und Verfahren

Publications (1)

Publication Number Publication Date
ITMI20040135A1 true ITMI20040135A1 (it) 2004-04-29

Family

ID=33426759

Family Applications (1)

Application Number Title Priority Date Filing Date
IT000135A ITMI20040135A1 (it) 2003-05-26 2004-01-29 Dispositivo micromeccanico sensore di pressioni e procedimento

Country Status (4)

Country Link
US (1) US20050016288A1 (it)
DE (1) DE10323559A1 (it)
FR (1) FR2855510B1 (it)
IT (1) ITMI20040135A1 (it)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005009422B4 (de) * 2005-03-02 2014-05-28 Robert Bosch Gmbh Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren
DE102005032635A1 (de) 2005-07-13 2007-01-25 Robert Bosch Gmbh Mikromechanische Vorrichtung mit zwei Sensorstrukturen, Verfahren zur Herstellung einer mikromechanischen Vorrichtung
DE102005053861A1 (de) 2005-11-11 2007-05-16 Bosch Gmbh Robert Sensoranordnung und Verfahren zur Herstellung einer Sensoranordnung
DE102005055473A1 (de) 2005-11-22 2007-05-24 Robert Bosch Gmbh Mikromechanische Vorrichtung und Verfahren zur Herstellung einer mikromechanischen Vorrichtung
DE102007026445A1 (de) 2007-06-06 2008-12-11 Robert Bosch Gmbh Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements
EP2015046A1 (en) * 2007-06-06 2009-01-14 Infineon Technologies SensoNor AS Vacuum Sensor
DE102010002463A1 (de) * 2010-03-01 2011-09-01 Robert Bosch Gmbh Mikromechanisches Drucksensorelement und Verfahren zu dessen Herstellung
DE102010038810B4 (de) 2010-08-03 2020-01-02 Robert Bosch Gmbh Verfahren zum Verkappen eines mikromechanischen Bauelements
CN107209077B (zh) * 2015-02-12 2020-10-20 霍尼韦尔国际公司 具有改进的凹部或者空腔结构的微型机械装置
DE102016112762B4 (de) 2016-07-12 2019-07-11 Infineon Technologies Ag Schichtstruktur und Verfahren zum Herstellen einer Schichtstruktur
US10965040B2 (en) * 2018-05-23 2021-03-30 Innolux Corporation Antenna device
JP7460388B2 (ja) * 2020-02-19 2024-04-02 アズビル株式会社 圧力センサ
US12467802B2 (en) * 2022-10-18 2025-11-11 Te Connectivity Solutions Gmbh Membrane of a sensor with multiple deflectable sections for different ranges of a sensed force or pressure

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5578843A (en) * 1994-10-06 1996-11-26 Kavlico Corporation Semiconductor sensor with a fusion bonded flexible structure
JP3426498B2 (ja) * 1997-08-13 2003-07-14 株式会社日立ユニシアオートモティブ 圧力センサ
DE19932541B4 (de) * 1999-07-13 2011-07-28 Robert Bosch GmbH, 70469 Verfahren zur Herstellung einer Membran
US6722963B1 (en) * 1999-08-03 2004-04-20 Micron Technology, Inc. Apparatus for chemical-mechanical planarization of microelectronic substrates with a carrier and membrane
DE10047500B4 (de) * 2000-09-26 2009-11-26 Robert Bosch Gmbh Mikromechanische Membran und Verfahren zu ihrer Herstellung
DE10136164A1 (de) * 2001-07-25 2003-02-20 Bosch Gmbh Robert Mikromechanisches Bauelement
EP1306348B1 (de) * 2001-10-24 2007-05-16 Robert Bosch Gmbh Verfahren zur Herstellung einer Membransensoreinheit sowie Membransensoreinheit
KR100616508B1 (ko) * 2002-04-11 2006-08-29 삼성전기주식회사 Ｆｂａｒ 소자 및 그 제조방법

Also Published As

Publication number Publication date
FR2855510B1 (fr) 2006-03-17
DE10323559A1 (de) 2004-12-30
US20050016288A1 (en) 2005-01-27
FR2855510A1 (fr) 2004-12-03

Similar Documents

Publication Publication Date Title
DE602004015107D1 (de) Drucksensorvorrichtung und verfahren
EP1682859A4 (en) CAPACITIVE SENSOR
DE602005021253D1 (de) Kalibrierter drucksensor
EP1688725A4 (en) MULTI-RANGE SENSOR AND YOU USING THE MULTI-RANGE SENSOR
FR2874780B1 (fr) Capteur ultrasonore
ITBO20020098A0 (it) Sensore acustico
DE102005022087A8 (de) Druckerfassungsvorrichtung
AT505967A3 (de) Implantierbarer akustischer sensor
DE60323728D1 (de) Drucksensor des vibrationstyps
DK1794561T3 (da) Optoakustisk tryksensor
DE502004010607D1 (de) Auslösesignalgeber
ITMI20041331A1 (it) Sensore di pressione micromeccanico e procedimento per la sua fabbricazione
DE50309113D1 (de) Drucksensoranordnung zur Aufpralldetektion
DE50309063D1 (de) Kraftsensor
ITRM20030318A1 (it) Trasduttore ultracustico capacitivo microlavorato e
DE50210870D1 (de) Relativdruckmessgerät
FI20041709A0 (fi) Värähtelevä mikromekaaninen kulmanopeusanturi
ITMI20041901A1 (it) Sensore micromeccanico e procedimento per la fabbricazione di un sensore micromeccanico.
FI20030946A0 (fi) Kapasitiivinen kiihtyvyysanturijärjestely
DE10322017B8 (de) Sensoreinheit
DE50212957D1 (de) Drucksensor
ATA16882004A (de) Sensor
FR2874909B1 (fr) Element de capteur micromecanique
DE60312476D1 (de) Mikro-elektromechanische vorrichtung
DE602004009609D1 (de) Modifizierter doppelmembran-drucksensor