ITMI20131683A1 - Componente strutturale microelettromeccanico e procedimento per la produzione di un componente strutturale microelettromeccanico - Google Patents

Componente strutturale microelettromeccanico e procedimento per la produzione di un componente strutturale microelettromeccanico

Info

Publication number
ITMI20131683A1
ITMI20131683A1 IT001683A ITMI20131683A ITMI20131683A1 IT MI20131683 A1 ITMI20131683 A1 IT MI20131683A1 IT 001683 A IT001683 A IT 001683A IT MI20131683 A ITMI20131683 A IT MI20131683A IT MI20131683 A1 ITMI20131683 A1 IT MI20131683A1
Authority
IT
Italy
Prior art keywords
structural component
microelettromecanical
microelectrancanic
procedure
production
Prior art date
Application number
IT001683A
Other languages
English (en)
Inventor
Theresa Lutz
Christoph Schelling
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20131683A1 publication Critical patent/ITMI20131683A1/it

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0027Structures for transforming mechanical energy, e.g. potential energy of a spring into translation, sound into translation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00349Creating layers of material on a substrate
    • B81C1/0038Processes for creating layers of materials not provided for in groups B81C1/00357 - B81C1/00373
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00Electrostatic transducers
    • H04R19/01Electrostatic transducers characterised by the use of electrets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/02Sensors
    • B81B2201/0257Microphones or microspeakers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
IT001683A 2012-10-15 2013-10-11 Componente strutturale microelettromeccanico e procedimento per la produzione di un componente strutturale microelettromeccanico ITMI20131683A1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102012218725.1A DE102012218725A1 (de) 2012-10-15 2012-10-15 Mikroelektromechanisches Bauelement und Verfahren zur Herstellung eines mikroelektromechanischen Bauelementes

Publications (1)

Publication Number Publication Date
ITMI20131683A1 true ITMI20131683A1 (it) 2014-04-16

Family

ID=50383200

Family Applications (1)

Application Number Title Priority Date Filing Date
IT001683A ITMI20131683A1 (it) 2012-10-15 2013-10-11 Componente strutturale microelettromeccanico e procedimento per la produzione di un componente strutturale microelettromeccanico

Country Status (4)

Country Link
US (1) US20140103779A1 (it)
DE (1) DE102012218725A1 (it)
FR (1) FR2996837A1 (it)
IT (1) ITMI20131683A1 (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102023103428A1 (de) * 2023-02-13 2024-08-14 Technische Universität Darmstadt, Körperschaft des öffentlichen Rechts Elektromechanisches Wandlerelement

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4861126A (it) 1971-12-02 1973-08-27
JPH05207760A (ja) * 1992-01-27 1993-08-13 Ricoh Co Ltd 静電力アクチュエータ
US5914507A (en) * 1994-05-11 1999-06-22 Regents Of The University Of Minnesota PZT microdevice
US6424165B1 (en) * 2000-09-20 2002-07-23 Sandia Corporation Electrostatic apparatus for measurement of microfracture strength
JP5081833B2 (ja) * 2006-10-30 2012-11-28 三洋電機株式会社 静電動作装置
KR100882148B1 (ko) * 2007-06-22 2009-02-06 한국과학기술원 정전 구동기, 그 구동방법 및 이를 이용한 응용소자
JP5374984B2 (ja) * 2008-09-12 2013-12-25 豊田合成株式会社 誘電アクチュエータ
EP2400515B1 (en) 2009-02-20 2018-01-24 Asahi Glass Company, Limited Process for manufacturing electret, and electrostatic induction-type conversion element
FR2968135B1 (fr) * 2010-11-29 2012-12-28 Commissariat Energie Atomique Dispositif de conversion d'énergie mécanique en énergie électrique

Also Published As

Publication number Publication date
US20140103779A1 (en) 2014-04-17
FR2996837A1 (fr) 2014-04-18
DE102012218725A1 (de) 2014-04-17

Similar Documents

Publication Publication Date Title
IL235734B (en) Process for the preparation of treprostinil and derivatives thereof
HUE037048T2 (hu) Eljárások 4-cikloalkiloxibenzolszulfonamidok elõállítására
SI3715345T1 (sl) Priprava zaviralca lfa-1
FI20125358L (fi) Menetelmä ligniinin reaktiivisuuden lisäämiseksi
PL2819853T3 (pl) Sposób wytwarzania polimerów dienowych
HRP20181818T1 (hr) Postupak za proizvodnju supstituiranih 5-fluoro-1h-pirazolopiridina
IL227413A0 (en) Coating and its manufacturing process
EP2887898A4 (en) Orthopedic fastener method
BR112014026796A2 (pt) processo
IL237914A0 (en) Benzamides
ITMI20111202A1 (it) Procedimento per la produzione di un componente con attenuazione divibrazioni
HUE053026T2 (hu) Eljárás pékáru elõállítására
BR112014032060A2 (pt) método de fabricação de uma calha de alimentação e respectiva calha de alimentação
EP2880048A4 (en) METHOD
EP2824694A4 (en) PATTERN FORMATION METHOD
BR112014015220A8 (pt) produto de gesso anti-abaulamento e método de fabricação
ITMI20112060A1 (it) Procedimento per la produzione di un componente micromeccanico
BR112015000987A2 (pt) processo para a preparação de 5-fluoro-1h-pirazóis
DK2476534T3 (da) Fremgangsmåde til formning
HRP20181432T1 (hr) Postupak proizvodnje ambalaže i ambalaža
IL232036A0 (en) Novel process for the preparation of acylguanidines and acylthioureas
PL2872305T3 (pl) Sposób wytwarzania folii
PL2744504T3 (pl) Sposób wytwarzania wyciągów suchych
ITMI20131692A1 (it) Procedimento di produzione per un componente micromeccanico e componente micromeccanico
ITMI20131683A1 (it) Componente strutturale microelettromeccanico e procedimento per la produzione di un componente strutturale microelettromeccanico