ITMI20131683A1 - Componente strutturale microelettromeccanico e procedimento per la produzione di un componente strutturale microelettromeccanico - Google Patents
Componente strutturale microelettromeccanico e procedimento per la produzione di un componente strutturale microelettromeccanicoInfo
- Publication number
- ITMI20131683A1 ITMI20131683A1 IT001683A ITMI20131683A ITMI20131683A1 IT MI20131683 A1 ITMI20131683 A1 IT MI20131683A1 IT 001683 A IT001683 A IT 001683A IT MI20131683 A ITMI20131683 A IT MI20131683A IT MI20131683 A1 ITMI20131683 A1 IT MI20131683A1
- Authority
- IT
- Italy
- Prior art keywords
- structural component
- microelettromecanical
- microelectrancanic
- procedure
- production
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0027—Structures for transforming mechanical energy, e.g. potential energy of a spring into translation, sound into translation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00349—Creating layers of material on a substrate
- B81C1/0038—Processes for creating layers of materials not provided for in groups B81C1/00357 - B81C1/00373
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/01—Electrostatic transducers characterised by the use of electrets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0257—Microphones or microspeakers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Micromachines (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102012218725.1A DE102012218725A1 (de) | 2012-10-15 | 2012-10-15 | Mikroelektromechanisches Bauelement und Verfahren zur Herstellung eines mikroelektromechanischen Bauelementes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ITMI20131683A1 true ITMI20131683A1 (it) | 2014-04-16 |
Family
ID=50383200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT001683A ITMI20131683A1 (it) | 2012-10-15 | 2013-10-11 | Componente strutturale microelettromeccanico e procedimento per la produzione di un componente strutturale microelettromeccanico |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20140103779A1 (it) |
| DE (1) | DE102012218725A1 (it) |
| FR (1) | FR2996837A1 (it) |
| IT (1) | ITMI20131683A1 (it) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102023103428A1 (de) * | 2023-02-13 | 2024-08-14 | Technische Universität Darmstadt, Körperschaft des öffentlichen Rechts | Elektromechanisches Wandlerelement |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4861126A (it) | 1971-12-02 | 1973-08-27 | ||
| JPH05207760A (ja) * | 1992-01-27 | 1993-08-13 | Ricoh Co Ltd | 静電力アクチュエータ |
| US5914507A (en) * | 1994-05-11 | 1999-06-22 | Regents Of The University Of Minnesota | PZT microdevice |
| US6424165B1 (en) * | 2000-09-20 | 2002-07-23 | Sandia Corporation | Electrostatic apparatus for measurement of microfracture strength |
| JP5081833B2 (ja) * | 2006-10-30 | 2012-11-28 | 三洋電機株式会社 | 静電動作装置 |
| KR100882148B1 (ko) * | 2007-06-22 | 2009-02-06 | 한국과학기술원 | 정전 구동기, 그 구동방법 및 이를 이용한 응용소자 |
| JP5374984B2 (ja) * | 2008-09-12 | 2013-12-25 | 豊田合成株式会社 | 誘電アクチュエータ |
| EP2400515B1 (en) | 2009-02-20 | 2018-01-24 | Asahi Glass Company, Limited | Process for manufacturing electret, and electrostatic induction-type conversion element |
| FR2968135B1 (fr) * | 2010-11-29 | 2012-12-28 | Commissariat Energie Atomique | Dispositif de conversion d'énergie mécanique en énergie électrique |
-
2012
- 2012-10-15 DE DE102012218725.1A patent/DE102012218725A1/de not_active Ceased
-
2013
- 2013-10-11 IT IT001683A patent/ITMI20131683A1/it unknown
- 2013-10-14 FR FR1359955A patent/FR2996837A1/fr not_active Withdrawn
- 2013-10-15 US US14/053,752 patent/US20140103779A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| US20140103779A1 (en) | 2014-04-17 |
| FR2996837A1 (fr) | 2014-04-18 |
| DE102012218725A1 (de) | 2014-04-17 |
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