ITTO20060774A1 - Sensore microelettromeccanico avente molteplici valori di fondo scala e di sensibilita' - Google Patents

Sensore microelettromeccanico avente molteplici valori di fondo scala e di sensibilita'

Info

Publication number
ITTO20060774A1
ITTO20060774A1 IT000774A ITTO20060774A ITTO20060774A1 IT TO20060774 A1 ITTO20060774 A1 IT TO20060774A1 IT 000774 A IT000774 A IT 000774A IT TO20060774 A ITTO20060774 A IT TO20060774A IT TO20060774 A1 ITTO20060774 A1 IT TO20060774A1
Authority
IT
Italy
Prior art keywords
microelettromechanical
sensitivity
sensor
multiple scales
scales values
Prior art date
Application number
IT000774A
Other languages
English (en)
Inventor
Sarto Marco Del
Hubert Geitner
Angelo Antonio Merassi
Sarah Zerbini
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to IT000774A priority Critical patent/ITTO20060774A1/it
Priority to US11/978,056 priority patent/US7886601B2/en
Publication of ITTO20060774A1 publication Critical patent/ITTO20060774A1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/023—Housings for acceleration measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0891—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values with indication of predetermined acceleration values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/082—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for two degrees of freedom of movement of a single mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
IT000774A 2006-10-27 2006-10-27 Sensore microelettromeccanico avente molteplici valori di fondo scala e di sensibilita' ITTO20060774A1 (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
IT000774A ITTO20060774A1 (it) 2006-10-27 2006-10-27 Sensore microelettromeccanico avente molteplici valori di fondo scala e di sensibilita'
US11/978,056 US7886601B2 (en) 2006-10-27 2007-10-26 Microelectromechanical sensor having multiple full-scale and sensitivity values

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT000774A ITTO20060774A1 (it) 2006-10-27 2006-10-27 Sensore microelettromeccanico avente molteplici valori di fondo scala e di sensibilita'

Publications (1)

Publication Number Publication Date
ITTO20060774A1 true ITTO20060774A1 (it) 2008-04-28

Family

ID=39328548

Family Applications (1)

Application Number Title Priority Date Filing Date
IT000774A ITTO20060774A1 (it) 2006-10-27 2006-10-27 Sensore microelettromeccanico avente molteplici valori di fondo scala e di sensibilita'

Country Status (2)

Country Link
US (1) US7886601B2 (it)
IT (1) ITTO20060774A1 (it)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008040855B4 (de) * 2008-07-30 2022-05-25 Robert Bosch Gmbh Dreiachsiger Beschleunigungssensor
EP2336788B1 (en) * 2008-09-08 2014-07-09 Hitachi, Ltd. Inertial sensor
DE102009045696B4 (de) * 2009-10-14 2021-06-02 Robert Bosch Gmbh Verfahren zur kapazitiven Erfassung einer mechanischen Auslenkung
EP2325613A1 (en) * 2009-11-16 2011-05-25 Farsens, S.L. Microelectromechanical sensing device
TWI452297B (zh) * 2011-09-26 2014-09-11 Richwave Technology Corp 電容式加速度計
JP2013152111A (ja) * 2012-01-24 2013-08-08 Mitsubishi Electric Corp 加速度センサ
CN104316726B (zh) * 2012-03-20 2017-04-12 立积电子股份有限公司 电容式加速度计
US9003886B2 (en) * 2012-04-27 2015-04-14 Freescale Semiconductor, Inc. Microelectromechanical systems devices and methods for the fabrication thereof
JP6339669B2 (ja) 2013-07-08 2018-06-06 モーション・エンジン・インコーポレーテッド Ｍｅｍｓデバイスおよび製造する方法
US10273147B2 (en) 2013-07-08 2019-04-30 Motion Engine Inc. MEMS components and method of wafer-level manufacturing thereof
WO2015013828A1 (en) 2013-08-02 2015-02-05 Motion Engine Inc. Mems motion sensor and method of manufacturing
WO2015103688A1 (en) 2014-01-09 2015-07-16 Motion Engine Inc. Integrated mems system
US20170030788A1 (en) 2014-04-10 2017-02-02 Motion Engine Inc. Mems pressure sensor
WO2015184531A1 (en) 2014-06-02 2015-12-10 Motion Engine Inc. Multi-mass mems motion sensor
WO2016090467A1 (en) 2014-12-09 2016-06-16 Motion Engine Inc. 3d mems magnetometer and associated methods
CA3220839A1 (en) 2015-01-15 2016-07-21 Motion Engine Inc. 3d mems device with hermetic cavity
CN113985017A (zh) 2016-01-14 2022-01-28 罗斯韦尔生物技术股份有限公司 分子传感器及相关方法
JP7280590B2 (ja) 2016-01-28 2023-05-24 ロズウェル バイオテクノロジーズ，インコーポレイテッド 大スケールの分子電子工学センサアレイを使用する被分析物を測定するための方法および装置
EP3408219B1 (en) 2016-01-28 2022-08-17 Roswell Biotechnologies, Inc Massively parallel dna sequencing apparatus
KR20240170584A (ko) 2016-02-09 2024-12-03 로스웰 엠이 아이엔씨. 전자 비표지 dna 및 게놈 시퀀싱
US10597767B2 (en) 2016-02-22 2020-03-24 Roswell Biotechnologies, Inc. Nanoparticle fabrication
US9829456B1 (en) * 2016-07-26 2017-11-28 Roswell Biotechnologies, Inc. Method of making a multi-electrode structure usable in molecular sensing devices
KR102622275B1 (ko) 2017-01-10 2024-01-05 로스웰 바이오테크놀로지스 인코포레이티드 Dna 데이터 저장을 위한 방법들 및 시스템들
CA3052140A1 (en) 2017-01-19 2018-07-26 Roswell Biotechnologies, Inc. Solid state sequencing devices comprising two dimensional layer materials
US10508296B2 (en) 2017-04-25 2019-12-17 Roswell Biotechnologies, Inc. Enzymatic circuits for molecular sensors
EP3615685B1 (en) 2017-04-25 2025-02-19 Roswell Biotechnologies, Inc Enzymatic circuits for molecular sensors
EP4023764A3 (en) 2017-05-09 2022-09-21 Roswell Biotechnologies, Inc. Binding probe circuits for molecular sensors
CN111373049A (zh) 2017-08-30 2020-07-03 罗斯威尔生命技术公司 用于dna数据存储的进行性酶分子电子传感器
CN111373051A (zh) 2017-10-10 2020-07-03 罗斯威尔生命技术公司 用于无扩增dna数据存储的方法、装置和系统
CN113994013A (zh) 2019-04-12 2022-01-28 罗斯威尔生命技术公司 用于分子电子学传感器的多环芳族桥
US12146852B2 (en) 2019-09-06 2024-11-19 Roswell Biotechnologies, Inc. Methods of fabricating nanoscale structures usable in molecular sensors and other devices
US12266552B2 (en) 2020-03-03 2025-04-01 Inficon, Inc. System and method for monitoring semiconductor processes
US11316445B2 (en) * 2020-06-02 2022-04-26 Honeywell Federal Manufacturings Technologies, Llc Electrostatic energy harvester
IT202200003506A1 (it) * 2022-02-24 2023-08-24 St Microelectronics Srl Dispositivo micromeccanico per la misura migliorata di accelerazioni
JP2024025890A (ja) * 2022-08-15 2024-02-28 ローム株式会社 加速度センサ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6868726B2 (en) * 2000-01-20 2005-03-22 Analog Devices Imi, Inc. Position sensing with improved linearity
US6841992B2 (en) * 2003-02-18 2005-01-11 Honeywell International, Inc. MEMS enhanced capacitive pick-off and electrostatic rebalance electrode placement
US7004027B2 (en) * 2003-03-03 2006-02-28 Yamaha Corporation Electrostatic-capacity-type acceleration sensor and acceleration measuring device therewith

Also Published As

Publication number Publication date
US7886601B2 (en) 2011-02-15
US20080098815A1 (en) 2008-05-01

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