JP2000217821A - Manufacturing method of high frequency / ultrasonic probe - Google Patents
Manufacturing method of high frequency / ultrasonic probeInfo
- Publication number
- JP2000217821A JP2000217821A JP2431999A JP2431999A JP2000217821A JP 2000217821 A JP2000217821 A JP 2000217821A JP 2431999 A JP2431999 A JP 2431999A JP 2431999 A JP2431999 A JP 2431999A JP 2000217821 A JP2000217821 A JP 2000217821A
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic probe
- piezoelectric body
- manufacturing
- electrode
- curved surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Transducers For Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
Abstract
(57)【要約】
【課題】 圧電振動子が小型、肉薄であっても、工程歩
留まりの向上、製品特性の向上、安定化を図り得る高周
波・超音波プローブの製造方法を提供する。
【解決手段】 分極処理を施した比較的肉厚の板状の圧
電体１の一方の面を所要曲率の凸曲面４に形成し、か
つ、その凸曲面に電極５を形成した後、ケース６に圧電
体を一方の面が内側となるように装着し、圧電体の他方
の面を切削して所要曲率の凹曲面９に形成し、かつ、そ
の凹曲面に電極１０を形成する。
(57) [Problem] To provide a method of manufacturing a high frequency / ultrasonic probe capable of improving process yield, improving product characteristics, and stabilizing even if a piezoelectric vibrator is small and thin. SOLUTION: One surface of a relatively thick plate-shaped piezoelectric body 1 which has been subjected to a polarization treatment is formed on a convex curved surface 4 having a required curvature, and an electrode 5 is formed on the convex curved surface. The piezoelectric body is mounted so that one surface is on the inside, the other surface of the piezoelectric body is cut to form a concave curved surface 9 having a required curvature, and the electrode 10 is formed on the concave curved surface.
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、人体の診断等に用
いる高周波・超音波プローブの製造方法に関し、特に圧
電振動子が小型、肉薄の高周波・超音波プローブの製造
方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a high-frequency / ultrasonic probe used for diagnosis of a human body, and more particularly to a method for manufacturing a high-frequency / ultrasonic probe having a small and thin piezoelectric vibrator.
【０００２】[0002]
【従来の技術】従来、高周波・超音波プローブを製造す
るには、圧電振動子が球面タイプの場合、先ず、図１０
に示すように、セラミックス、高分子又は両者の混合物
からなる円板状の圧電体３１の両面に球面加工機（図示
せず）を用いて所要曲率の凸球面３２及び凹球面３３を
加工形成して最終的な圧電振動子の厚みとした後、図１
１に示すように、凸球面３２と凹球面３３にメタライジ
ングして電極３４，３５を形成する。この両電極３４，
３５の形成に際し、後述する同軸ケーブルの導線の接続
を凸球面３２側で行えるようにするため、凸球面３２の
一部に凹球面３３側の電極３５の接続端子部３５ａを圧
電体３１の外周部から回り込ませて形成する。次に、図
１２に示すように、両電極３４，３５を電源Ｅと接続し
て圧電体３１に分極処理を施して圧電振動子３６とした
後、図１３に示すように、ケース３７に圧電振動子３６
を凹球面３３が外側となるように装着する。そして、一
方の電極３４と他方の電極３５の接続端子部３５ａに同
軸ケーブル３８の導線を接続し、ケース３７内に反射パ
ルスエコーのダンピングを図るためのパッキング層３９
を形成すると共に、圧電振動子３６の凹球面３３の電極
３５を覆う音響整合層（図示せず）を形成して高周波・
超音波プローブを得ている。2. Description of the Related Art Conventionally, when manufacturing a high frequency / ultrasonic probe, when a piezoelectric vibrator is of a spherical type, first, FIG.
As shown in FIG. 3, a convex spherical surface 32 and a concave spherical surface 33 having a required curvature are formed on both surfaces of a disk-shaped piezoelectric body 31 made of ceramics, a polymer, or a mixture of both using a spherical processing machine (not shown). After the final thickness of the piezoelectric vibrator
As shown in FIG. 1, electrodes 34 and 35 are formed by metallizing a convex spherical surface 32 and a concave spherical surface 33. These two electrodes 34,
In forming the 35, a connection terminal portion 35 a of the electrode 35 on the concave spherical surface 33 side is provided on a part of the convex spherical surface 32 so as to allow connection of a conductor of a coaxial cable described later on the convex spherical surface 32 side. It is formed around the part. Next, as shown in FIG. 12, both electrodes 34 and 35 are connected to a power source E to perform a polarization process on the piezoelectric body 31 to form a piezoelectric vibrator 36. Then, as shown in FIG. Vibrator 36
Is mounted such that the concave spherical surface 33 faces outward. Then, the conductor of the coaxial cable 38 is connected to the connection terminal portion 35a of the one electrode 34 and the other electrode 35, and a packing layer 39 for damping the reflected pulse echo is provided in the case 37.
And an acoustic matching layer (not shown) that covers the electrode 35 of the concave spherical surface 33 of the piezoelectric vibrator 36 is formed.
I have an ultrasonic probe.
【０００３】[0003]
【発明が解決しようとする課題】しかし、従来の高周波
・超音波プローブの製造方法では、例えば超音波内視鏡
用超音波プローブの場合、それに用いる圧電振動子は、
最終製品の寸法的な制約を受けるため、非常に小型、肉
薄となり（例えば、２×３×０．１t ×SR１０mm、φ２
×０．１×SR１０mm等）、又、高周波プローブの場合、
それに用いる圧電振動子は、非常に肉薄となる（例え
ば、０．０４〜０．０５tmm ）ので、特に圧電振動子が
球面タイプの場合、電極形成、分極処理時の圧電体の取
り扱いが困難であると共に、圧電体に対する所要曲率の
凹、凸曲面の加工が極めて困難であり、かつ、ケースに
対する圧電振動子のセッティングずれによる特性の低下
を生ずる不具合がある。そこで、本発明は、圧電振動子
が小型、肉薄であっても、工程歩留まりの向上、製品特
性の向上、安定化を図り得る高周波・超音波プローブの
製造方法を提供することを目的とする。However, in the conventional method of manufacturing a high frequency / ultrasonic probe, for example, in the case of an ultrasonic probe for an ultrasonic endoscope, a piezoelectric vibrator used for the ultrasonic probe is
Due to the dimensional restrictions of the final product, it becomes very small and thin (for example, 2 × 3 × 0.1 t × SR 10 mm, φ2
× 0.1 × SR 10mm etc.) Also, in case of high frequency probe,
Since the piezoelectric vibrator used for the piezoelectric vibrator is very thin (for example, 0.04 to 0.05 t mm), particularly when the piezoelectric vibrator is a spherical type, it is difficult to handle the piezoelectric body during electrode formation and polarization processing. In addition, it is extremely difficult to process concave and convex curved surfaces having a required curvature with respect to the piezoelectric body, and there is a problem that the characteristics are deteriorated due to a setting deviation of the piezoelectric vibrator with respect to the case. Therefore, an object of the present invention is to provide a method of manufacturing a high-frequency / ultrasonic probe which can improve the process yield, improve the product characteristics, and stabilize even if the piezoelectric vibrator is small and thin.
【０００４】[0004]
【課題を解決するための手段】前記課題を解決するた
め、本発明の第１の高周波・超音波プローブの製造方法
は、分極処理を施した所要厚みの板状の圧電体の一方の
面を切削して所要曲率の凸曲面に形成し、かつ、その凸
曲面に電極を形成した後、ケースに圧電体を一方の面が
内側となるように装着し、圧電体の他方の面を切削して
所要曲率の凹曲面に形成し、かつ、その凹曲面に電極を
形成することを特徴とする。又、第２の高周波・超音波
プローブの製造方法は、分極処理を施した比較的肉厚の
板状の圧電体をケースに一方の面が内側となるように装
着し、圧電体の他方の面を切削して平面に形成し、か
つ、その平面に電極を形成することを特徴とする。In order to solve the above-mentioned problems, a first method for manufacturing a high-frequency / ultrasonic probe according to the present invention comprises: After cutting to form a convex curved surface with the required curvature, and forming an electrode on the convex curved surface, a piezoelectric body is attached to the case so that one side is inside, and the other side of the piezoelectric body is cut. A concave surface having a required curvature, and an electrode is formed on the concave surface. In the second method of manufacturing a high frequency / ultrasonic probe, a relatively thick plate-shaped piezoelectric body subjected to a polarization treatment is mounted on a case such that one surface thereof is on the inside, and the other of the piezoelectric body is provided. The method is characterized in that a surface is cut to form a flat surface, and an electrode is formed on the flat surface.
【０００５】[0005]
【発明の実施の形態】以下、本発明の実施の形態につい
て図面を参照して説明する。図１〜図６は本発明に係る
高周波・超音波プローブの製造方法の実施の形態の一例
を示す各工程の断面図である。この高周波・超音波プロ
ーブは、球面タイプ（非球面タイプ、放物面タイプを含
む、以下同じ）で、小型、肉薄の圧電振動子を有するも
のであり、これを製造するには、先ず、図１に示すよう
に、ＰＺＴ等のセラミックス、ＰＶＤＦ等の高分子又は
両者の混合物からなり、比較的肉厚な厚み（例えば０．
５〜１mm）を有する円形、方形等の板状の圧電体１の両
面に銀ペーストを塗布した後、約８００℃の温度で焼き
付けて電極２，３を形成し、しかる後に、両電極２，３
を電源Ｅと接続して圧電体１に分極処理を施した。電極
２，３の形成は、銀ペーストの焼き付けに限らず、銀の
スパッタリングによってもよい。次に、図２に示すよう
に、圧電体１の一方の面（図２においては下面）を球面
加工機等の加工機（図示せず）により切削（研削を含
む）して、所要曲率の球面又は非球面、放物面等の凸曲
面４に形成した後、図３に示すように、この凸曲面４に
後述するケース６（図４参照）の内径より適宜小外径の
電極５をスパッタリングによって形成した。Embodiments of the present invention will be described below with reference to the drawings. 1 to 6 are cross-sectional views of respective steps showing an example of an embodiment of a method for manufacturing a high-frequency / ultrasonic probe according to the present invention. This high-frequency / ultrasonic probe is of a spherical type (including an aspherical type and a parabolic type, the same applies hereinafter), and has a small and thin piezoelectric vibrator. As shown in FIG. 1, ceramics such as PZT, polymers such as PVDF, or a mixture of both are used, and have a relatively large thickness (for example, 0.1 mm).
5 to 1 mm), a silver paste is applied to both sides of a plate-shaped piezoelectric body 1 having a circular or square shape, and baked at a temperature of about 800 ° C. to form electrodes 2 and 3. 3
Was connected to a power source E to perform polarization processing on the piezoelectric body 1. The formation of the electrodes 2 and 3 is not limited to baking silver paste, but may be sputtering of silver. Next, as shown in FIG. 2, one surface (the lower surface in FIG. 2) of the piezoelectric body 1 is cut (including grinding) by a processing machine (not shown) such as a spherical processing machine to obtain the required curvature. After being formed on a convex curved surface 4 such as a spherical surface, an aspherical surface, or a paraboloid, as shown in FIG. 3, an electrode 5 having an outer diameter smaller than the inner diameter of a case 6 (see FIG. 4) described later is appropriately formed on the convex curved surface 4. It was formed by sputtering.
【０００６】次いで、図４に示すように、導電性の金属
からなる円筒状、角筒状等のケース６の一端開口部（図
４においては上端開口部）に形成した嵌合段部６ａに圧
電体１を一方の面である凸曲面４が内側となるように、
エポキシ樹脂等によって装着すると共に、電極５とケー
ス６に同軸ケーブル７の導線を導電性接着剤を用いて接
続し、かつ、反射パルスエコーのダンピングを図るた
め、ケース６内にパッキング層８を形成した。次に、図
５に示すように、圧電体１の平坦な他方の面を球面加工
機等の加工機（図示せず）により切削（研削を含む）し
て、凸曲面４と対応する所要曲率の凹曲面９に形成する
と共に、圧電体１を最終的な圧電振動子の厚みとした
後、図６に示すように、凹曲面９に銀のスパッタリング
により電極１０を形成し、かつ、電極１０を導電性接着
剤を用いてケース６と接続し、分極処理された圧電体１
の両面に電極５，１０を有する球面タイプの圧電振動子
１１とした。そして、図示は省略するが、ケース６の上
端にテフロン等からなる筒状の治具を嵌装し、その中に
エポキシ樹脂等を流し込んで硬化させた後、治具を取り
外し、硬化した樹脂を球面加工機等の加工機により切削
（研削を含む）して、凹曲面９に倣う凹曲面を有する所
要厚みの音響整合層に形成して、球面タイプで、小型、
肉薄の圧電振動子を有する高周波・超音波プローブを得
た。Next, as shown in FIG. 4, a fitting step 6a formed at one end opening (an upper end opening in FIG. 4) of a cylindrical or rectangular case 6 made of a conductive metal. The piezoelectric body 1 is arranged such that the convex curved surface 4 which is one surface is inside.
A packing layer 8 is formed in the case 6 in order to mount it with epoxy resin or the like, connect the conductor of the coaxial cable 7 to the electrode 5 and the case 6 using a conductive adhesive, and dampen reflected pulse echoes. did. Next, as shown in FIG. 5, the other flat surface of the piezoelectric body 1 is cut (including grinding) by a processing machine (not shown) such as a spherical processing machine to obtain a required curvature corresponding to the convex curved surface 4. After the piezoelectric body 1 is formed to have the final thickness of the piezoelectric vibrator, an electrode 10 is formed on the concave curved surface 9 by silver sputtering, and the electrode 10 is formed as shown in FIG. Is connected to the case 6 using a conductive adhesive, and the polarized piezoelectric body 1 is
The piezoelectric vibrator 11 of the spherical type having the electrodes 5 and 10 on both sides of the piezoelectric vibrator. Then, although not shown, a cylindrical jig made of Teflon or the like is fitted on the upper end of the case 6, and epoxy resin or the like is poured into the jig and cured, and then the jig is removed and the cured resin is removed. It is cut (including grinding) by a processing machine such as a spherical processing machine to form an acoustic matching layer of a required thickness having a concave curved surface following the concave curved surface 9, and is a spherical type, small,
A high frequency / ultrasonic probe having a thin piezoelectric vibrator was obtained.
【０００７】図７〜図９は本発明に係る高周波・超音波
プローブの製造方法の実施の形態の他の例を示す各工程
の断面図である。この高周波・超音波プローブは、平板
タイプで、小型、肉薄の圧電振動子を有するものであ
り、これを製造するには、先ず、図７に示すように、Ｐ
ＺＴ等のセラミックス、ＰＶＤＦ等の高分子又は両者の
混合物からなり、比較的肉厚な厚み（例えば０．５〜１
mm）を有する円形、方形等の板状の圧電体１２の両面に
銀ペーストを塗布した後、約８００℃の温度で焼き付け
たり、あるいは銀のスパッタリングによって電極１３，
１４を形成し、しかる後に、両電極１３，１４を電源Ｅ
と接続して圧電体１２に分極処理を施した。FIGS. 7 to 9 are cross-sectional views of respective steps showing another example of the embodiment of the method of manufacturing the high frequency / ultrasonic probe according to the present invention. This high-frequency / ultrasonic probe is of a flat plate type and has a small and thin piezoelectric vibrator. To manufacture this, first, as shown in FIG.
It is made of ceramics such as ZT, polymers such as PVDF, or a mixture of both, and has a relatively thick thickness (for example, 0.5 to 1).
mm), a silver paste is applied to both sides of a plate-like piezoelectric body 12 having a circular or square shape and then baked at a temperature of about 800 ° C.
14 and then both electrodes 13 and 14 are connected to power supply E
And the piezoelectric body 12 was polarized.
【０００８】次に、図８に示すように、プラスチック等
の絶縁物からなる円筒状又は角筒状等を呈し、かつ、そ
の一部に軸方向（図８においては上下方向）のほぼ全長
に及ぶ導線１６を埋設したケース１６の一端開口部（図
８においては上端開口部）に形成した嵌合段部１６ａに
圧電体１２を一方の面（図７における下面）が内側とな
るようにエポキシ樹脂等によって装着すると共に、電極
１３とケース１６の他端部（図８においては下端部）に
露出させた導線１５の端部に同軸ケーブル１７の導線を
導電性接着剤を用いて接続し、かつ、反射パルスエコー
のダンピングを図るため、ケース１６内にパッキング層
１８を形成した。次いで、図９に示すように、圧電体１
２の他方の面を平面研削盤等の加工機（図示せず）によ
り切削（研削を含む）して、一方の面と平行な平面１９
に形成すると共に、圧電体１２を最終的な圧電振動子の
厚みとした後、平面１９に銀のスパッタリングにより電
極２０を形成し、かつ、電極２０を導電性接着剤を用い
てケース１６の一端部に露出させた導線１５の端部と接
続し、分極処理された圧電体１２の両面に電極１３，２
０を有する平板タイプの圧電振動子２１とした。そし
て、図示は省略するが、ケース１６の上端にテフロン
（登録商標）等からなる筒状の治具を嵌装し、その中に
エポキシ樹脂等を流し込んで硬化させた後、治具を取り
外し、硬化した樹脂を平面研削盤等の加工機により切削
（研削を含む）して、平面１９と平行な平面を有する所
要厚みの音響整合層に形成して、平板タイプで、小型、
肉薄の圧電振動子２１を有する高周波・超音波プローブ
を得た。Next, as shown in FIG. 8, it has a cylindrical shape or a rectangular tube shape made of an insulating material such as plastic, and a part thereof extends over substantially the entire length in the axial direction (vertical direction in FIG. 8). The piezoelectric body 12 is epoxied so that one surface (the lower surface in FIG. 7) is inside the fitting step 16a formed in the one end opening (the upper end opening in FIG. 8) of the case 16 in which the extending conductive wire 16 is embedded. Attached with a resin or the like, the conductor of the coaxial cable 17 is connected to the electrode 13 and the end of the conductor 15 exposed at the other end (the lower end in FIG. 8) of the case 16 using a conductive adhesive. In addition, a packing layer 18 is formed in the case 16 in order to dump the reflected pulse echo. Next, as shown in FIG.
2 is cut (including grinding) by a processing machine (not shown) such as a surface grinder to obtain a flat surface 19 parallel to the one surface.
After the thickness of the piezoelectric body 12 is reduced to the final thickness of the piezoelectric vibrator, the electrode 20 is formed on the flat surface 19 by silver sputtering, and the electrode 20 is connected to one end of the case 16 using a conductive adhesive. The electrodes 13 and 2 are connected to both ends of the polarized piezoelectric body 12 by being connected to the ends of the conductive wires 15 exposed to the portions.
A flat type piezoelectric vibrator 21 having 0 was obtained. Then, although not shown, a cylindrical jig made of Teflon (registered trademark) or the like is fitted on the upper end of the case 16, and epoxy resin or the like is poured into the jig and cured, and then the jig is removed. The cured resin is cut (including grinding) with a processing machine such as a surface grinder to form an acoustic matching layer having a plane parallel to the plane 19 and having a required thickness.
A high frequency / ultrasonic probe having a thin piezoelectric vibrator 21 was obtained.
【０００９】[0009]
【発明の効果】以上説明したように、本発明の第１の高
周波・超音波プローブの製造方法によれば、圧電体が比
較的肉厚の状態で分極処理、凸曲面の形成及び凸曲面に
対する電極形成が行われた後、その圧電体をケースに装
着し、ケースを基準として、言い換えるとケースを圧電
体の保持治具として、凹曲面の形成及び凹曲面に対する
電極形成が行われるので、圧電振動子が小型、肉薄であ
っても、従来のように電極形成、分極処理時の圧電体の
取り扱い、あるいは圧電体に対する凹、凸曲面の加工が
困難になることがないと共に、ケースに対する圧電振動
子のセッテイングずれを生じることがなく、工程歩留ま
りを格段に向上でき、かつ、製品特性の大幅な向上、安
定化を図ることができる。As described above, according to the first method of manufacturing the high frequency / ultrasonic probe of the present invention, the polarization treatment, the formation of the convex curved surface, and the formation of the convex curved surface are performed with the piezoelectric body having a relatively large thickness. After the electrodes are formed, the piezoelectric body is attached to the case, and the concave surface is formed and the electrodes are formed on the concave surface using the case as a reference, in other words, using the case as a jig for holding the piezoelectric body. Even if the vibrator is small and thin, it does not make it difficult to form electrodes, handle the piezoelectric body during polarization processing, or process concave and convex curved surfaces on the piezoelectric body as well as the piezoelectric vibration of the case as in the past. It is possible to significantly improve the process yield without causing a setting error of the child, and to greatly improve and stabilize the product characteristics.
【００１０】又、第２の高周波・超音波プローブの製造
方法によれば、圧電体が比較的肉厚の状態で分極処理さ
れた後、ケースに装着され、ケースを基準として、言い
換えるとケースを圧電体を保持治具として、平面の切削
形成及び平面に対する電極形成が行われるので、圧電振
動子が小型，肉薄であっても、第１の方法とほぼ同様の
効果が得られる。According to the second method of manufacturing a high-frequency / ultrasonic probe, the piezoelectric body is polarized in a relatively thick state, and then mounted on a case. Since the cutting of the plane and the formation of the electrodes on the plane are performed using the piezoelectric body as a holding jig, substantially the same effects as in the first method can be obtained even if the piezoelectric vibrator is small and thin.
【図１】本発明に係る高周波・超音波プローブの製造方
法の実施の形態の一例を示す第１工程の断面図である。FIG. 1 is a sectional view of a first step showing an example of an embodiment of a method for manufacturing a high-frequency / ultrasonic probe according to the present invention.
【図２】本発明に係る高周波・超音波プローブの製造方
法の実施の形態の一例を示す第２工程の断面図である。FIG. 2 is a sectional view of a second step showing an example of the embodiment of the method for manufacturing a high-frequency / ultrasonic probe according to the present invention.
【図３】本発明に係る高周波・超音波プローブの製造方
法の実施の形態の一例を示す第３工程の断面図である。FIG. 3 is a sectional view of a third step showing an example of the embodiment of the method for manufacturing a high-frequency / ultrasonic probe according to the present invention.
【図４】本発明に係る高周波・超音波プローブの製造方
法の実施の形態の一例を示す第４工程の断面図である。FIG. 4 is a sectional view of a fourth step showing an example of the embodiment of the method for manufacturing a high-frequency / ultrasonic probe according to the present invention.
【図５】本発明に係る高周波・超音波プローブの製造方
法の実施の形態の一例を示す第５工程の断面図である。FIG. 5 is a sectional view of a fifth step showing an example of the embodiment of the method for manufacturing a high-frequency / ultrasonic probe according to the present invention.
【図６】本発明に係る高周波・超音波プローブの製造方
法の実施の形態の一例を示す第６工程の断面図である。FIG. 6 is a sectional view of a sixth step showing an example of the embodiment of the method for manufacturing a high-frequency / ultrasonic probe according to the present invention.
【図７】本発明に係る高周波・超音波プローブの製造方
法の実施の形態の他の例を示す第１工程の断面図であ
る。FIG. 7 is a sectional view of a first step showing another example of the embodiment of the method for manufacturing a high-frequency / ultrasonic probe according to the present invention.
【図８】本発明に係る高周波・超音波プローブの製造方
法の実施の形態の他の例を示す第２工程の断面図であ
る。FIG. 8 is a sectional view of a second step showing another example of the embodiment of the method for manufacturing a high-frequency / ultrasonic probe according to the present invention.
【図９】本発明に係る高周波・超音波プローブの製造方
法の実施の形態の他の例を示す第３工程の断面図であ
る。FIG. 9 is a sectional view of a third step showing another example of the embodiment of the method for manufacturing a high-frequency / ultrasonic probe according to the present invention.
【図１０】従来の高周波・超音波プローブの製造方法の
第１工程の断面図である。FIG. 10 is a sectional view of a first step in a conventional method for manufacturing a high-frequency / ultrasonic probe.
【図１１】従来の高周波・超音波プローブの製造方法の
第２工程の断面図である。FIG. 11 is a sectional view of a second step in the conventional method for manufacturing a high-frequency / ultrasonic probe.
【図１２】従来の高周波・超音波プローブの製造方法の
第３工程の断面図である。FIG. 12 is a sectional view of a third step in the conventional method for manufacturing a high-frequency / ultrasonic probe.
【図１３】従来の高周波・超音波プローブの製造方法の
第４工程の断面図である。FIG. 13 is a sectional view of a fourth step in the conventional method for manufacturing a high-frequency / ultrasonic probe.
１ 圧電体 ４ 凸曲面 ５ 電極 ６ ケース ６ａ 嵌合段部 ７ 同軸ケーブル ８ パッキング層 ９ 凹曲面 １０ 電極 １２ 圧電体 １３ 電極 １６ ケース １６ａ 嵌合段部 １９ 平面 ２０ 電極 Reference Signs List 1 piezoelectric body 4 convex curved surface 5 electrode 6 case 6a fitting step 7 coaxial cable 8 packing layer 9 concave curved surface 10 electrode 12 piezoelectric body 13 electrode 16 case 16a fitting step 19 flat 20 electrode
フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｈ０４Ｒ 31/00 ３３０ Ｈ０１Ｌ 41/22 Ｚ Ｆターム(参考） 4C301 EE12 EE17 GA03 GA20 GB07 GB36 GB37 5D019 AA25 AA26 BB02 BB12 BB26 BB28 FF04 GG01 GG06 HH03Continuation of the front page (51) Int.Cl. 7 Identification symbol FI Theme coat II (reference) H04R 31/00 330 H01L 41/22 Z F term (reference) 4C301 EE12 EE17 GA03 GA20 GB07 GB36 GB37 5D019 AA25 AA26 BB02 BB12 BB26 BB28 FF04 GG01 GG06 HH03
Claims (2)
電体の一方の面を切削して所要曲率の凸曲面に形成し、
かつ、その凸曲面に電極を形成した後、ケースに圧電体
を一方の面が内側となるように装着し、圧電体の他方の
面を切削して所要曲率の凹曲面に形成し、かつ、その凹
曲面に電極を形成することを特徴とする高周波・超音波
プローブの製造方法。1. A surface of a relatively thick plate-shaped piezoelectric body which has been subjected to a polarization treatment is cut to form a convex curved surface having a required curvature.
And, after forming an electrode on the convex curved surface, a piezoelectric body is mounted on the case so that one surface is on the inside, and the other surface of the piezoelectric body is cut to form a concave curved surface of a required curvature, and A method for manufacturing a high-frequency / ultrasonic probe, comprising forming an electrode on the concave curved surface.
電体をケースに一方の面が内側となるように装着し、圧
電体の他方の面を切削して平面に形成し、かつ、その平
面に電極を形成することを特徴とする高周波・超音波プ
ローブの製造方法。2. A relatively thick plate-shaped piezoelectric body subjected to a polarization treatment is mounted on a case such that one surface thereof is on the inside, and the other surface of the piezoelectric body is cut to form a flat surface. And a method for manufacturing a high-frequency / ultrasonic probe, wherein an electrode is formed on the plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2431999A JP2000217821A (en) | 1999-02-01 | 1999-02-01 | Manufacturing method of high frequency / ultrasonic probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2431999A JP2000217821A (en) | 1999-02-01 | 1999-02-01 | Manufacturing method of high frequency / ultrasonic probe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000217821A true JP2000217821A (en) | 2000-08-08 |
Family
ID=12134874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2431999A Pending JP2000217821A (en) | 1999-02-01 | 1999-02-01 | Manufacturing method of high frequency / ultrasonic probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000217821A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011077916A (en) * | 2009-09-30 | 2011-04-14 | Murata Mfg Co Ltd | Ultrasonic transducer |
| WO2021054591A1 (en) * | 2019-09-17 | 2021-03-25 | 조정기 | Light control sheet and manufacturing method therefor |
-
1999
- 1999-02-01 JP JP2431999A patent/JP2000217821A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011077916A (en) * | 2009-09-30 | 2011-04-14 | Murata Mfg Co Ltd | Ultrasonic transducer |
| WO2021054591A1 (en) * | 2019-09-17 | 2021-03-25 | 조정기 | Light control sheet and manufacturing method therefor |
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