JP2000296449A - Polishing tool - Google Patents

Abstract

(57) [PROBLEMS] To provide a polishing tool capable of following a change in curvature and smoothing a ripple while keeping a polishing pressure constant when polishing an aspherical surface having a large change in curvature. SOLUTION: A plurality of small tool plates 10 are connected by hinge portions 12 so that adjacent portions can be bent and deformed to each other, and a sheet-like abrasive material 11 is attached to each tool plate 10 to form a small polishing tool. The formed small polishing tools are detachably supported on the second shaft 5 via rubber members 7 fixed to the upper surface of the tool plate 10. The first shaft 2 attached to the polishing apparatus and the plurality of second shafts 5 are connected via a parallel leaf spring 4 that can move in the vertical direction. As a result, the polishing tool can selectively remove the peak without following the change in the curvature of the workpiece and following the ripple,
A constant polishing pressure can be obtained by the parallel leaf springs without being affected by the uneven shape, and high-precision processing can be performed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing tool for precisely finishing a smooth curved surface of an optical element such as a lens or a mirror, and more particularly, to processing an aspheric surface of an optical element using a small tool for a workpiece. And a polishing tool to be used.

[0002]

2. Description of the Related Art In the production of optical elements such as lenses and mirrors, there are mainly three types of machining processes: cutting, grinding and polishing. Polishing takes a long processing time among them, but since the smoothest surface can be obtained, it has been frequently used in the finishing step. The polishing is performed by relatively moving a polishing tool against a workpiece in the presence of a polishing liquid in which abrasive grains made of fine particles are turbid. The abrasive grains have a particle size of submicron to several tens of microns, and the material is appropriately selected according to the type of the workpiece. For example, cerium oxide, diamond, aluminum oxide, or the like is used. This is turbid in water or oil to form a polishing liquid. The material of the polishing tool is a pitch of polyurethane or petroleum product.

[0003] When polishing a spherical surface or a flat surface, a hard and large tool is used because the curvature of the workpiece does not change depending on the location. For example, polyurethane or pitch is attached to a metal such as cast iron, and usually has a size equal to or larger than the workpiece. On the other hand, when polishing an aspherical surface (a shape other than a spherical surface or a flat surface), the curvature of the surface of the workpiece changes depending on the location, and the tool must follow this change in curvature. Therefore, when the above-mentioned hard and large tool is used, a part of the tool is strongly pressed against the workpiece or floats depending on the location. By the way, since the removal amount strongly depends on the force pressing the tool against the workpiece, it is very important to press the tool against the workpiece with a uniform force. Therefore, in the polishing of the aspherical surface, an attempt has been made to use a small tool for the workpiece and a softer tool.

FIG. 12 shows a conventional polishing tool of this kind.
A tool structure for aspherical polishing shown in FIG.
tical Engineering, Vol.17 No.6 (November-Decemb
er, 1978) p. 613). In FIG. 12, a flexible membrane 102 is attached to a backing plate 101 connected to a polishing device (not shown) by a clamp member 1.
A fluid 104 such as a liquid or a gas is sealed inside the membrane 102. The backing plate 101 receives the force of pressing against the workpiece from the polishing apparatus and receives the action of the relative movement with respect to the workpiece.

FIGS. 13 (a) to 13 (c) show a mode in which the polishing tool is pressed against a workpiece and polished, and FIGS. 13 (a) and 13 (b) show the concave surface of the workpiece, respectively. (C) shows a state in which the workpiece is in contact with the uneven surface of the workpiece. As described above, the membrane 102 changes so as to follow the change in the curvature of the workpiece 105 whose curvature changes depending on the location. Since the removal amount strongly depends on the force pressing the tool against the workpiece, it is important to press the tool against the workpiece with a uniform force. In this polishing tool, however, the membrane 102 is pressed against the workpiece 105. The distribution of the pressing force against the workpiece (hereinafter, the distribution of the pressing force of the tool against the workpiece is simply referred to as the polishing pressure) depends on the pressure of the liquid or gas enclosed therein, so that the polishing tool and the workpiece are A uniform polishing pressure can be obtained in the entire area where the particles come into contact. Such a membrane 102 follows the concave surface and the convex surface of the workpiece 105 and comes into contact with a uniform polishing pressure.

In the case where a small polishing tool is used for a workpiece, shape correction polishing can be performed by changing the removal amount depending on the location. As a method of changing the removal amount, there is a method of changing a polishing pressure or a method of changing a time during which a polishing tool stays.

[0007]

However, the above-mentioned prior art has the following problems, and high-precision machining may not be performed.

1) If only the pressure of the fluid sealed in the membrane generates a force for pressing the membrane against the workpiece, a uniform surface pressure distribution can be obtained in the tool as described above. In the portion, the tension of the membrane also has a component in a direction perpendicular to the surface of the workpiece (normal direction), and this causes a polishing pressure error. Therefore, the removal amount varies depending on the position in the tool due to the influence of the membrane tension, and the polishing pressure is not precisely uniform, so that high-precision processing cannot be performed. Further, since the shape of the membrane changes depending on the shape of the workpiece, the direction of the tension also changes, causing a variation in the removal amount. This variation in the amount of removal hinders precise processing, and the tension always occurs because it opposes the pressure of the enclosed fluid.

2) The polishing tool is deformed by receiving a lateral force due to a frictional force with the workpiece during processing. In particular, if the membrane is soft, the amount of deformation is large, and the removal position moves in the direction of frictional force and shifts, so that high-precision processing cannot be performed. In particular, when performing shape correction polishing, the polishing removal position is shifted from a predetermined position, so that appropriate shape correction polishing cannot be performed. If the membrane is hardened to solve such a problem, the original meaning of the membrane is lost.

3) The membrane follows the concave or convex surface of the workpiece as shown in FIGS. 13 (a) to 13 (c). By the way, since the curvature of the aspheric surface changes depending on the location, it is necessary to follow a large change in curvature as shown in FIGS. 13 (a) and 13 (b). In particular, when performing aspherical surface machining, the tool must follow the shape of the workpiece without being affected by the change in curvature, and contact the workpiece with a uniform force. This is because the removal shape is proportional to the distribution of the contact force in contact with the workpiece, that is, the polishing pressure, so that a uniform removal pressure is required to obtain a uniform removal shape.

On the other hand, the uneven shape of the workpiece as shown in FIG. 13C is called a ripple, and it is known that the performance of the optical element is significantly reduced. Therefore, it is necessary to smooth such ripples in the polishing process as a finishing process of the optical element. However, in a conventional polishing tool, as shown in FIG. 13 (c), the membrane follows such irregularities and becomes uneven. As described above, since the removal amount is proportional to the polishing pressure, a uniform polishing pressure can be realized with the conventional tool, so that the uniform removal is performed regardless of the presence or absence of the ripple. That is, the ripples are not yet removed by the processing with the conventional tool, and the effect of smoothing is low.

Accordingly, the present invention has been made in view of the above-mentioned unsolved problems of the prior art,
It is an object of the present invention to provide a polishing tool that can make the polishing pressure constant during polishing of an aspherical shape having a large change in curvature, can follow the change in curvature, and can smooth the ripple. .

[0013]

In order to achieve the above object, a polishing tool according to the present invention has a plurality of small polishing tools which are removed by performing relative movement while pressing against a workpiece. The adjacent small polishing tools are rotatably connected to the processing surface in an out-of-plane direction, that is, in a bending direction.

In the polishing tool of the present invention, the small polishing tool is composed of small plate members to which a sheet-like abrasive is adhered, and each of the adjacent plate members is connected by a hinge so that the adjacent plate members can bend and deform mutually. Preferably, the small polishing tool is composed of a small plate member to which a sheet-like abrasive is attached, and is connected by a pin joint so that adjacent plate members can bend and deform mutually. .

In the polishing tool of the present invention, the sheet-like abrasive is preferably polyurethane or pitch.

In the polishing tool of the present invention, it is preferable that a reinforcing plate for reinforcing the plate member is adhered and fixed to the small plate member to which the sheet-like abrasive is attached.

Further, the polishing tool of the present invention is fixed to a first shaft, a plurality of second shafts, and the first and second shafts, and the first and second shafts are vertically fixed. It has a parallel leaf spring movably connected, and a plurality of small polishing tools each of which is swingably attached to the tip of the plurality of second shafts, and the adjacent small polishing tools are respectively provided on a processing surface. It is characterized in that it is rotatably connected to an out-of-plane direction, that is, a bending direction.

In the polishing tool of the present invention, it is preferable that tips of the plurality of second shafts are removably inserted into rubber members bonded and fixed to the plurality of small polishing tools, respectively.

In the polishing tool of the present invention, the small polishing tool is constituted by a small plate member to which a sheet-like abrasive is stuck, and a hinge portion or a pin joint is used so that adjacent plate members can bend and deform mutually. Preferably they are connected.

[0020] In the polishing tool of the present invention, it is preferable that a reinforcing plate for reinforcing the plate member is adhered and fixed to the small plate member to which the sheet-like abrasive is adhered. Preferably, a hole for fitting the rubber member is formed.

Further, the polishing tool of the present invention comprises a first shaft, a plurality of second shafts, and the first and second shafts.
Parallel leaf springs fixed to the shafts and connecting the first and second shafts movably in the vertical direction; and a plurality of small springs respectively slidably attached to the distal ends of the plurality of second shafts. A polishing tool, the plurality of small polishing tools, respectively, a small plate member and a sheet-like abrasive material attached to one surface of the plate member, and a reinforcing plate bonded to the other surface of the plate member, And the plate members are connected to each other so that adjacent portions can be bent and deformed to each other. A sharp projection is provided at a tip end of the second shaft, and the projection is provided on the reinforcing plate. Characterized by being engaged with the recessed portion.

[0022]

According to the polishing tool of the present invention, a plurality of small polishing tools are assembled, and the plurality of small polishing tools are rotatably connected in an out-of-plane direction to follow a large change in curvature of the workpiece. And can selectively remove the peak without following the ripple,
A tool with high ripple correction capability can be realized, and high-precision machining can be performed.

Further, a polishing tool can be constructed by connecting a plurality of small polishing tools by means of a rotatable hinge portion, a pin joint, or the like. The rigidity between the polishing tools can be reduced, and it is possible to cope with a workpiece having a large curvature change. Further, by adhering the reinforcing plate to the plurality of small polishing tools, the rigidity of each small polishing tool can be increased, and the ripple correcting ability can be easily increased.

Further, according to the polishing tool of the present invention, by using a parallel leaf spring having a low rigidity in the vertical direction and a high rigidity in the horizontal direction for the pressing mechanism, the weak rigidity characteristic in the vertical direction allows The polishing pressure can be kept constant without being affected by the unevenness of the workpiece, and the strong rigidity in the lateral direction allows the polishing position to be opposed even when a lateral force such as frictional force is applied. It is possible to perform high-precision polishing without deviation.

Further, according to the present invention, the structure of the polishing tool can be simplified, and the tool portion can be easily detached, so that the tool portion can be easily replaced.
Other pressurizing mechanisms and the like can be reused, which is advantageous in cost.

[0026]

Embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a schematic sectional view showing a polishing tool according to a first embodiment of the present invention. FIG. 2A is a top view of the polishing tool according to the first embodiment of the present invention. FIG. 2B is a top view of the tool plate of the polishing tool according to the first embodiment.

1 and 2, reference numeral 1 denotes a polishing tool according to the present invention, which is attached to a polishing device (not shown) via a first shaft 2. The polishing apparatus presses the polishing tool 1 in the direction of arrow A via the first shaft 2, presses the polishing tool 1 against the workpiece, moves the polishing tool 1 in the direction of arrow B, Move relative to the workpiece. Reference numeral 4 denotes a parallel leaf spring composed of two parallel leaf springs which are fixed to the lower portion of the first shaft 2 and are separated from each other by an adhesive 3, and 5 is symmetrical on both sides of the first shaft 2. And a second shaft connected to the parallel leaf spring 4 using an adhesive 6. Reference numeral 10 denotes a small-area tool plate to which an abrasive 11 is adhered on a lower surface, and a rubber member 7 to which the second shaft 5 is removably fitted is fixed to an upper surface thereof. Therefore,
Each of the small-sized tool plates 10 is mounted on the second shaft 5 via a rubber member 7, and is swingably supported by the second shaft 5 by deformation of the rubber member 7. The two tool plates 10, 10 are connected by a pair of hinge portions 12, 12 (see also FIG. 2B) whose adjacent portions can be rotated in the bending direction by being elastically deformed. I have. The abrasive 11 is adhered to the lower surface of each tool plate 10 and is for contacting the workpiece 15 and polishing the surface thereof. For example, polyurethane or pitch is used. Each shaft 2,6
As the adhesives 3 and 6 for bonding, for example, an epoxy adhesive, brazing, soldering, or the like can be used.

In the polishing tool 1 configured as described above, the first shaft 2 is moved by a polishing device (not shown).
A motion is exerted which is pressed in the direction of arrow A and swings in the direction of arrow B. The second shafts 5, 5 are connected to the first shaft 2 via the parallel leaf springs 4, and the second shafts 5, 5 are similarly pressed in the direction of arrow A and swing in the direction of arrow B. A moving exercise is provided.

Here, the characteristics due to the use of the parallel leaf springs will be described with reference to FIG. 3. Two members J and K as shown in FIG.
Considering a structure connected by parallel leaf springs S composed of two leaf springs, the leaf springs S1 and S2 are characterized by having a weak spring constant in the axial direction and a strong spring constant in the lateral direction. The rigidity between the members J and K connected by the springs S1 and S2 has a strong direction. That is, since the Z direction is the bending direction of the leaf spring, it is deformed by a weak force, and has a strong spring constant and a high rigidity in the X direction. Thus, the parallel leaf spring S
By using, a structure having strong rigidity in the horizontal direction but weak rigidity in the vertical direction is obtained.

By adopting such a structure for a pressing mechanism of a polishing apparatus, that is, as shown in FIG. 1, the first shaft 2 and the tool plate 10 are used by using a parallel leaf spring 4. By connecting the supporting second shaft 5, the polishing pressure of the polishing tool 1 is generated by displacing the parallel leaf spring 4 in the vertical direction (the direction of arrow A). Since the parallel leaf spring 4 has a high rigidity in the direction of the arrow B and a low rigidity in the direction of the arrow A, even if the tool plate 10 and the abrasive 11 fluctuate up and down according to the unevenness of the workpiece 15.
In the direction of arrow A, the rigidity, that is, the spring constant is small, so that the upward and downward movements are absorbed, and the force for pressing the tool plate 10 and the abrasive 11 does not greatly change. Polishing pressure can be obtained. Then, the horizontal direction (arrow B direction) is applied to a horizontal force such as a frictional force applied to the tool plate 10 and the abrasive 11.
Since the stiffness is high, it can withstand this, and the polishing position does not shift, and high-precision processing becomes possible.

As shown in FIGS. 2A and 2B, the two tool plates 10, 10 are small plate-like members connected by a pair of hinges 12, 12. The hinge portions 12, 12 can be bent and rotated about this hinge portion by elastic deformation.

By connecting the two tool plates 10 and 10 with the rotatable hinge 12 in this manner, both tool plates 1
As shown in FIG. 1, reference numerals 0 and 10 denote a hinge portion 1 for a concave or convex shape having a large curvature in the workpiece 15.
By rotating around 2, the shape can be followed. Accordingly, stable contact can be achieved even in the processing of an aspherical surface where the curvature varies greatly from place to place, and uniform polishing removal can be realized. As shown in FIG. 4, the tool plate 10,
Since 10 is hard, a tool surface that does not follow the ripple is obtained, and it comes into stronger contact with the ripple peak portion, and the ripple peak can be selectively removed by polishing.
High-precision shape correction processing becomes possible.

That is, FIG. 1 is a diagram drawn assuming the case of processing a workpiece 15 having a large gentle concave surface, and FIG. 4 is a diagram of processing a workpiece 15 having a ripple shape. It is. As illustrated in FIG. 4, the tool plate 10 and the abrasive 11 selectively contact the workpiece 15 at the peak portion of the ripple, so that the peak portion of the ripple can be selectively removed. That is, it is possible to correct the ripple shape.

Further, the hinge portion 1 for connecting the two tool plates 10 is provided.
As shown in FIG. 5 (a), the shape of the hinge 2 is such that the width of the hinge portion is extremely small, but the thickness thereof is
Or as shown in (b),
It is possible to use, for example, a structure in which the width of the hinge portion is extremely small and the thickness thereof is smaller than the thickness of the tool plate 7. The hinge structure shown in FIG. 1A has the advantage that the structure is simple and its manufacture is easy. In addition, the hinge structure shown in FIG. 3B has an advantage in that the spring constant is low and it can be easily bent and deformed. Further, as shown in FIGS. 5C and 5D, the hinge portion 12 is formed by cutting the upper surface of the tool plate 10 so as to be thin, so that the hinge portion 12 can rotate around the thin portion. In this case, since the lower surface of the tool plate 10 is flat and has no discontinuous portions, the abrasive 11 adhered to the lower surface has no discontinuous portions, and the removed shape is also a continuous smooth shape. It can be. Furthermore, since the abrasive 11 has a large contact area with the tool plate 10, there is an advantage that its adhesion is easy.

The second shaft 5 is removably inserted into and fitted to the rubber member 7 fixed to the upper surface of the tool plate 10. The second shaft 5 can be swung with respect to the second shaft 5 and can follow the inclination of the workpiece 15, and the second shaft 5 and the rubber member 7 can be attached and detached. The lower part of the tool plate 10 can be removed from the second shaft 5 and replaced. That is, the first and second
Since the pressure mechanisms such as the shafts 2 and 5 and the parallel leaf spring 4 can be reused, the cost of the tool can be reduced.

As described above, according to the polishing tool of the first embodiment of the present invention, since the rigidity in the horizontal direction is high, there is no displacement in the removal position, and the rigidity in the vertical direction is low. Since a uniform polishing pressure can be obtained following the unevenness of the workpiece, highly accurate polishing can be performed. In addition, by the action of the divided hard small tool plate, the peak of the ripple can be selectively removed and smoothed, so that high-precision polishing can be performed also in this respect. Furthermore, according to the present embodiment, since the hinge portion is provided on the tool plate, the structure is simple, the tool is reduced in size, and the manufacturing cost of the tool can be reduced. Also, when the tool life is over,
It is only necessary to remove the tool at the rubber member portion and replace only this portion with a new tool, and the remaining portion can be reused, so that the cost of the tool can be reduced.

Next, a second embodiment of the present invention will be described with reference to FIG.
This will be described with reference to FIG.

In the above-described first embodiment, the hinge portion 12 between the two tool plates 10 is elastically deformed so that the divided tool plates 10, 10 can be bent or rotated. Although this structure has an effect that the mechanism is simple and the tool cost can be reduced, since the deformation of the hinge portion 12 is elastic,
There is always a restoring force, and a large deformation causes the hinge portion 12 to be plastically deformed. Therefore, the rotation angle is limited. Therefore, when the surface shape of the workpiece has a very large change in curvature, the hinge 12
The problem is the limitation of the rotation angle of the lens. Therefore, in the second embodiment of the present invention, even such a workpiece can be favorably polished.

FIG. 6 is a perspective view of a tool plate according to the present embodiment. Other configurations are the same as those of the first embodiment, and a detailed description thereof will be omitted. Tool plate 10 of the present embodiment
Adjacent side end surfaces of a and 10b are formed in a convex shape and a concave shape, respectively, and are connected by a pin joint 12a that is connected by a pin 13 in such a state that these concave and convex shapes are brought into engagement with each other. By using such a pin joint 12a, it is possible to increase the rotation angle and to achieve a rotational motion without restoring force, as compared with the method of rotating the hinge portion 12 using the elastic deformation in the first embodiment. Can be realized. Tool plates 10a, 10b
Is moved in the direction of arrow B to remove the ripples in the same manner as in the first embodiment, and it is also possible to process a workpiece having a very large curvature change and a very large aspherical amount. In this case, the ripple can be selectively removed, and high-precision processing can be performed.

Next, a third embodiment of the present invention will be described with reference to FIG.
This will be described with reference to FIG.

In the first and second embodiments described above, the tools are arranged side by side in one direction and connected, and the ripple shape in the parallel direction is selectively removed by moving the tool in the parallel direction. In this embodiment, even a two-dimensional ripple shape can be selectively removed.

FIG. 7 is a top view of the polishing tool according to the third embodiment, and corresponds to FIG. 2A in the first embodiment. 4 small split tool plates 20a-20d
Are arranged as shown in the drawing, and the adjacent divided tool plates are connected by a pair of hinge portions 22, respectively, and a rubber member (not shown) fixed to the center of the upper surface of each of the divided tool plates 20a to 20d ), And a first shaft 23 attached to a polishing device (not shown), which is detachably attached through two parts extending in four directions from a central first shaft 23 portion. Are connected via a parallel leaf spring 24 composed of a leaf spring. An abrasive (not shown) is attached to the lower surface of each of the divided tool plates 20a to 20d, as in the first embodiment.

In the polishing tool configured as described above, the first shaft 23 is pressed toward the workpiece by a polishing device (not shown), and is two-dimensionally moved in the directions C and D in FIG. Exercise is given. here,
The two-dimensional movement is the C direction or D direction, or C direction.
A motion combining the direction and the D direction, for example, a circular motion or the like. Then, the second shaft 25a
Since 25d are connected to the first shaft 23 by the parallel leaf springs 24, the second shafts 25a to 25d are also pressed toward the workpiece and are moved two-dimensionally in the CD direction.

Each of the tool plates 20a to 20d can be bent and rotated about the hinge portion 22 by the elastic deformation of the hinge portion 22, and is connected to the first shaft 23 by the parallel leaf spring 24. Therefore, the same operation and effect as described in the first embodiment can be obtained, and in the present embodiment, further, the ripples in the two directions C and D in FIG. Selective removal becomes possible.

Next, a fourth embodiment of the present invention will be described with reference to FIG.
(A) and (b).

FIG. 8A is a top view of a tool plate according to the fourth embodiment of the present invention, and FIG. 8B is a top view of a polishing tool according to the fourth embodiment of the present invention. .

The tool plate in this embodiment is provided with six slits 31 extending radially so as to equally divide a substantially disk-shaped plate member into six, forming a narrow hinge portion 32, and forming six slits. The fan-shaped divided tool plates 30 (30a, 30b...) Are formed. Parallel leaf spring 3 consisting of two leaf springs
Reference numeral 4 denotes a first shaft 33 fixed to the center portion thereof with an adhesive or the like, and an end portion extending in six directions from the center portion fixed to the center of each of the divided tool plates 30 (30a, 30b...). The second shaft 35 (35a, 35b ...) attached via a rubber member (not shown) is fixed. The other configuration is the same as that of the first embodiment.

In the polishing tool configured as described above, the first shaft 33 is pressed toward the workpiece by a polishing device (not shown).
And motion in the G direction, the first shaft 3
The second shaft 35 (35a, 35b...), Which is connected to 3 via a parallel leaf spring 34, is also pressed toward the workpiece and moves in the E, F, and G directions.
Each of the tool plates 30 (30a, 30b...) Can be bent around the hinge portion 32 by elastic deformation of the hinge portion 32, and further connected to the first shaft 33 by a parallel leaf spring. Therefore, the same operation and effect as described in the first embodiment can be obtained, and in the present embodiment, further, ripples in three directions of E, F, and G directions in the figure are further reduced. Selective removal becomes possible.

Next, a fifth embodiment of the present invention will be described with reference to FIG.
(A) and (b).

FIG. 9A is a top view of a tool plate according to a fifth embodiment of the present invention, and FIG. 9B is a top view of a polishing tool according to the fifth embodiment of the present invention. .

The present embodiment has a structure in which a number of divided small tool plates 40 are arranged in rows and columns, and adjacent portions of the divided tool plates 40 are connected by a pair of hinge portions 42. The parallel leaf spring 44 constituting the pressurizing mechanism includes four adjacent divided tool plates 40 (for example, 40a to 40a).
d) is configured as a set to connect the first shaft 43 and the second shaft 45 (45a to 45d).
In the embodiment shown, four divided tool plates 40 are used.
Each of the parallel leaf springs 44 is incorporated. In the present embodiment configured as described above, the same effects as those described in the above-described embodiments can be obtained by the configurations of the first and second shafts 43 and 45 and the parallel leaf spring 44. Further, the function of the hinge portion 42 is also the same as that described in each of the above-described embodiments, and the ripple can be selectively removed. Furthermore, in the present embodiment, since a large number of tool plates 40 are arranged in parallel, a large area can be machined at a time, and machining time can be reduced. From this, the processing cost can be reduced.

Next, a sixth embodiment of the present invention will be described with reference to FIG.
0 will be described.

In this embodiment, a reinforcing plate 50 having a hole 51 formed in a portion corresponding to the rubber member 7 is adhered to the upper surface of the tool plate 10, and other structures are the same as those of the first embodiment. It is the same as the example, the same members are denoted by the same reference numerals, and the detailed description thereof will be omitted. That is, this embodiment has the following merits by providing the reinforcing plate 50 in addition to the operation and effect of the first embodiment described above.

Since the reinforcing plate 50 is bonded to the tool plate 10, the rigidity of the divided tool plate 10 can be increased.
Since the ripple correction capability is increased and the rigidity of the divided tool plate 10 can be increased regardless of the thickness of the tool plate 10, the tool plate 10 can be made as thin as possible. Therefore, the reaction force due to the bending deformation of the tool plate 10 can be significantly reduced, and a larger change in curvature can be handled. Further, since the rubber member 7 is inserted into the hole 51 provided in the reinforcing plate 50, the durability of the tool does not decrease even if the adhesive strength between the rubber member 7 and the tool plate 10 is low, The adhesive strength between the member 7 and the tool plate 10 may be reduced.

Further, a seventh embodiment of the present invention will be described with reference to FIG.

In this embodiment, the distal end portion 62 of the second shaft 5 is formed into a sharp shape, and the reinforcing plate 60 adhered to the upper surface of the tool plate 10 is provided with a concave portion 61 so that the sharpness of the second shaft 5 is reduced. A simple tip portion 62 is inserted into the concave portion 61 of the reinforcing plate 60 to form a so-called kansashi structure. The other structure is the same as that of the first embodiment described above, and the same members are denoted by the same reference numerals, and detailed description thereof will be omitted. That is, in this embodiment, in addition to the operation and effect of the above-described first embodiment, the tool plate 10 is held by a structure called kansashi, so that the tool plate 10 is attached to the second shaft via the rubber member. As compared with the case of attachment, swinging with respect to the second shaft 5 is facilitated, the surface shape of the workpiece 15 can be easily followed, and a large change in curvature can be handled. In addition, stable performance can be ensured by not using a rubber member whose physical properties are easily changed by the influence of the environment.

[0058]

As described above, according to the present invention,
By connecting a plurality of small polishing tools rotatably in the out-of-plane direction, it is possible to follow a large change in curvature of the workpiece, and to selectively remove the peak without following the ripple. This makes it possible to realize a tool with a high ripple correction capability, and enables high-precision machining.

Further, a polishing tool can be formed by connecting a plurality of small polishing tools by a hinge portion, a pin joint, or the like, so that the polishing tool can have a simple structure and a small size. The rigidity between them can be reduced, and it is possible to cope with a workpiece having a large curvature change. Further, by adhering the reinforcing plate to the plurality of small polishing tools, the rigidity of each small polishing tool can be increased, and the ripple correcting ability can be easily increased.

Further, according to the present invention, by using the parallel leaf spring for the pressing mechanism, the polishing pressure can be kept constant without being affected by the unevenness of the workpiece, and the frictional force and the like can be maintained. Even when a lateral force is applied, the polishing position does not shift in opposition to this, and highly accurate polishing can be performed.

Further, according to the present invention, the structure of the polishing tool can be simplified, the tool portion can be easily detachable, the tool portion can be easily replaced, and other pressurization can be performed. The mechanism and the like can be reused, which is advantageous in cost.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view showing a polishing tool according to a first embodiment of the present invention.

FIG. 2A is a top view of a polishing tool according to a first embodiment of the present invention, and FIG. 2B is a top view of a tool plate of the polishing tool according to the first embodiment. is there.

FIG. 3 is a schematic diagram for explaining characteristics of a parallel leaf spring used in the polishing tool of the present invention.

FIG. 4 is a schematic cross-sectional view showing a mode of processing a workpiece having a ripple shape by the polishing tool according to the first embodiment of the present invention.

FIGS. 5A and 5B are partial perspective views showing the structure of a hinge part in the polishing tool of the present invention, and FIG.
And (d) is a partial perspective view and a cross-sectional view showing still another hinge part structure.

FIG. 6 is a perspective view for explaining a connecting portion of a tool plate of a polishing tool according to a second embodiment of the present invention.

FIG. 7 is a top view of a polishing tool according to a third embodiment of the present invention.

FIG. 8A is a top view of a tool plate according to a fourth embodiment of the present invention, and FIG. 8B is a top view of a polishing tool according to a fourth embodiment of the present invention.

FIG. 9A is a top view of a tool plate according to a fifth embodiment of the present invention, and FIG. 9B is a top view of a polishing tool according to a fifth embodiment of the present invention.

FIG. 10 is a schematic sectional view showing a polishing tool according to a sixth embodiment of the present invention.

FIG. 11 is a schematic sectional view showing a polishing tool according to a seventh embodiment of the present invention.

FIG. 12 is a schematic view showing the structure of a conventional polishing tool for an aspherical surface.

13 (a) to 13 (c) are schematic views for explaining a polishing mode of a conventional polishing tool.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Polishing tool 2 1st shaft 3 Adhesive 4 Parallel leaf spring 5 2nd shaft 6 Adhesive 7 Rubber member 10 Tool plate 11 Abrasive 12 Hinge 10a, 10b Tool plate 12a Pin joint 13 Pin 15 Workpiece 20a -20d Tool plate 22 Hinge part 23 First shaft 24 Parallel leaf spring 25a-25d Second shaft 30a-30f Tool plate 31 Slit 32 Hinge part 33 First shaft 34 Parallel leaf spring 35a-35f Second shaft 40a To 40d Tool plate 42 Hinge part 43 First shaft 44 Parallel leaf spring 45a to 45d Second shaft 50 Reinforcement plate 51 Hole 60 Reinforcement plate 61 Depression 62 Sharp tip

Claims (13)

[Claims] 1. A polishing tool for removing a workpiece by making a relative movement while pressing against a workpiece, comprising a plurality of small polishing tools, each adjacent small polishing tool being in an out-of-plane direction with respect to a processing surface, A polishing tool, which is rotatably connected in a bending direction. 2. The small polishing tool is constituted by a small plate member to which a sheet-like abrasive is stuck, and the adjacent plate members are connected by a hinge so that they can bend and deform mutually. The polishing tool according to claim 1. 3. The small polishing tool is constituted by a small plate member to which a sheet-like abrasive is stuck, and is connected by a pin joint so that adjacent plate members can bend and deform mutually. The polishing tool according to claim 1. 4. The polishing tool according to claim 2, wherein the sheet-like abrasive is polyurethane or pitch. 5. The small plate member to which a sheet-like abrasive is stuck, and a reinforcing plate for reinforcing the plate member is adhered and fixed to the small plate member. Polishing tool. 6. A first shaft, a plurality of second shafts, and a parallel plate fixed to the first and second shafts and connecting the first and second shafts movably in a vertical direction. A spring, and a plurality of small polishing tools, each of which is swingably mounted on the tip of the plurality of second shafts, and each of the adjacent small polishing tools is in an out-of-plane direction, that is, bent with respect to a processing surface. A polishing tool, which is rotatably connected in a direction. 7. A tip of the second shaft is detachably inserted into a rubber member fixed to each of the plurality of small polishing tools.
Polishing tool as described. 8. The small polishing tool is constituted by a small plate member to which a sheet-like abrasive is stuck, and the adjacent plate members are connected by a hinge so that they can bend and deform mutually. The polishing tool according to claim 6. 9. The small polishing tool is constituted by a small plate member to which a sheet-like abrasive is stuck, and is connected by a pin joint so that adjacent plate members can bend and deform mutually. The polishing tool according to claim 6. 10. The polishing tool according to claim 6, wherein the sheet-like abrasive is polyurethane or pitch. 11. A small plate member to which a sheet-like abrasive is stuck, and a reinforcing plate for reinforcing the plate member is adhered and fixed to the small plate member.
Polishing tool according to item. 12. A small polishing tool is composed of a small plate member on which a sheet-like abrasive is stuck and a reinforcing plate bonded so as to reinforce the plate member, and adjacent plate members are mutually bent and deformed. The polishing tool according to claim 7, wherein the polishing tool is connected by a hinge portion or a pin joint so as to be able to be formed, and a hole for fitting a rubber member is formed in the reinforcing plate. 13. A first shaft, a plurality of second shafts, and a parallel plate fixed to the first and second shafts and connecting the first and second shafts movably in a vertical direction. A spring, and a plurality of small polishing tools, each of which is swingably attached to a tip of the plurality of second shafts, wherein the plurality of small polishing tools are respectively a small plate member and a small plate member. It has a sheet-like abrasive material stuck on one surface and a reinforcing plate bonded to the other surface of the plate member, and the plate members are connected to each other so that adjacent portions can be mutually bent and deformed, A sharpening tool, wherein a sharp projecting portion is provided at a tip portion of the second shaft, and the projecting portion is engaged with a concave portion provided on the reinforcing plate.