JP2000314763A - Simulator for semiconductor test device, and recording medium storing simulation program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a simulator for a semiconductor test device to allow maintenance for a soft ware used in a semiconductor testing system even when no actual equipment exists. SOLUTION: A simulator main body 1 simulates movement of a tester device for testing a semiconductor. An input processing part 10 receives a command input by an operator to be output to a command analyzing processing part 11. The analyzing processing part 11 analyzes the input command to determine whether it is a control command or a test condition setting command, and a test condition assigned by the command is stored when it is the test condition setting command. The command analizing processing part 11 outputs the control command to the simulator main body 1 through a communication processing part 13, and outputs also the test condition when the control command is a test start instruction. The processing part 11 controls further an output processing part 12 to display the image same to an image displayed on an operation device, in response to the input command and a response fed back from the simulator main body 1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a simulator for a semiconductor test apparatus for simulating the operation of a semiconductor test apparatus for testing a semiconductor, and more particularly to an operator for performing various operations on a tester apparatus for testing a semiconductor. And a technique for simulating the operation of the operating device.

[0002]

2. Description of the Related Art FIG. 4 is a block diagram showing a general configuration of a semiconductor test system for testing a semiconductor such as an IC (integrated circuit). As shown in the figure, this type of semiconductor test system includes tester devices 20-1 to 20-8 and an operating device 21-1.
21 to 21-8 and a host computer 22. Although only eight tester devices and eight operation devices are shown in the figure, the number of these devices can be arbitrarily changed depending on the configuration of the semiconductor test system.

[0003] Of these, each tester apparatus is for testing a large number of semiconductors (not shown), which are devices to be measured, and a test program (not shown) required for testing the device to be measured from the host computer 22. Hereinafter, this will be referred to as a “device program” and executed. The operating device corresponds to each tester device, and is a device for performing various operations required for a test, such as setting test conditions for the corresponding tester device in accordance with an instruction from an operator. Only the operation related to the test of the device under test is performed. on the other hand,
The host computer 22 is a computer that operates and manages all of the tester devices 20-1 to 20-8, and performs device program creation, storage of test results generated by each tester device, analysis of test results, and the like. .

In order to perform a test using the above-described semiconductor test system, a device program is created in advance on the host computer 22 and this device program is transmitted from the host computer 22 to each of the tester devices 20-1 to 20-8.
And load them on these tester devices. After this,
The operator operates the operating devices 21-1 to 21-8 to cause the device programs to run on the respective tester devices 20-1 to 20-8. When the running of the device programs is completed, the result is transmitted to the tester. The data is transferred from the devices 20-1 to 20-8 to the host computer 22. Then, the host computer 22 stores the test results from the tester devices on a hard disk or the like, and then appropriately analyzes the test results.

[0005]

By the way, since many semiconductor test systems are generally expensive, the user is required
We often use one system. Therefore, in order to maintain such a semiconductor test system for a long period of time, it is necessary to actually maintain and manage the semiconductor test system not only at the user site but also at the manufacturer side. This can be caused by a request from the user to change the specifications or functional enhancement of the semiconductor test system, or when a defect is found in the system control software of the semiconductor test system used by the user. Is a problem.

For example, in order to correct such a defect in software, it is necessary to verify that the defect has been repaired or not and that the modification does not affect other parts. However, software cannot be debugged at the user's site, and if there is no actual machine on the manufacturer side, software maintenance work becomes very difficult. Even if the manufacturer has an actual machine, it is necessary to secure personnel for maintenance of the machine and parts for repair in the event of a failure for many years. For this reason, there is a problem that the cost required for maintenance is enormous although the system is not so frequently required after the system development. Moreover, it can be said that these problems become more difficult to operate as the semiconductor test system ages.

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and an object of the present invention is to provide a simulator for a semiconductor test apparatus which enables maintenance of software used in a semiconductor test system without an actual machine. In particular,
It is an object of the present invention to provide a simulator for a semiconductor test device capable of simulating the operation of an operation device portion.

[0008]

In order to solve the above-mentioned problems, the invention according to claim 1 comprises a simulating means for simulating the operation of a tester device for testing a semiconductor in accordance with a given control command and test conditions. Input means for receiving a command given by an operator as an input command, and analyzing the input command to determine whether the input command is the control command,
Alternatively, an analysis unit for determining whether the test condition is a designated test condition setting command, and the control command and the test condition are transmitted to the simulation unit at predetermined timings, and a response to the control command is transmitted to the simulation unit. Control means for receiving from the simulation means, and output processing means for generating output information to be output on an operation device for operating the tester device in accordance with the input command and the response from the simulation means. It is characterized by doing. According to a second aspect of the present invention, in the first aspect of the present invention, the analysis means detects a test start instruction to the tester device as the control instruction, and the control means specifies the test start instruction by the test condition setting instruction. Storage means for storing the test conditions being executed, and simulating the test conditions stored in the storage means together with the test start instruction on condition that the test start instruction is detected by the analysis means. It is characterized in that it is sent to the means.

According to a third aspect of the present invention, in the first or second aspect, the input means is provided on a predetermined input device for inputting the input command and on the input device. Holding means for holding a correspondence between an operation element and a command assigned to the operation element in advance, and detecting that any one of the operation elements has been pressed, and detecting the correspondence on the holding means; And a means for acquiring an instruction corresponding to the operation element from the holding means on the basis of the above, and transmitting the acquired instruction to the analysis means. According to a fourth aspect of the present invention, there is provided an input process for receiving a command given by an operator as an input command, analyzing the input command, and analyzing the input command according to a given control command and test condition. The control command to the tester device to perform, or,
An analysis process of determining whether the test condition is a designated test condition setting command; a transmission process of transmitting the control command and the test condition at predetermined timings; and the control command transmitted by the transmission process And simulating the operation of the tester device according to the test condition, outputting a response to the control command, receiving a response to the control command, receiving the response to the control command, and receiving the response to the input command and the control command. In response to the response, the computer is caused to execute an output process for generating output information to be output on an operation device for operating the tester device.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. Here, first, an operating device used in an actual semiconductor test system is shown in FIG.
An overview is given with reference to FIG. A general operation device has a function of selecting and displaying a device program number for testing a device under test, a function of setting and displaying test conditions prior to executing a device program, and a function of testing. It has the function of displaying the result, "PASS" (non-defective) / "FAIL" (defective) of the device to be measured, the function of displaying the number thereof, the function of instructing execution of test start / test interruption, and the like.

Here, in FIGS. 5 and 6, the outline of the operation panel provided in the operation device is divided into two for convenience of illustration. The buttons, lamps, indicators, and the like shown in these figures correspond to most of the items displayed on the display device installed in the operating device simulator of the present embodiment described later. For this reason, the description of the individual components on the operation panel is kept to a minimum here, and the details thereof will be described later with reference to FIG.

First, in FIG. 5, 17 “１７” are command buttons for the operating device, and when the operator presses any one of the command buttons, various kinds of command buttons corresponding to the command button are displayed. An instruction can be given to the operation device. Each of the 52 “□” is a lamp, which is turned on when the lamp is in a state corresponding to each lamp, and is turned off otherwise.
“▲” and “▼” are number selection buttons for selecting a number (“1” to “9”) assigned to a device program to be used. , The latter is for countdown.

The DUT (Device Und) is disposed adjacent to and on the left side of these number selection buttons.
er Test: a 7-segment LED (light emitting diode) provided to display the number of the device under test. Further, among the above-mentioned command buttons, the “SEL” command button is a button for completing the selection of the number of the DUT. In the operating device simulator 2 of the present embodiment described later, each DUT is
Can be directly specified, and there is no special one-to-one correspondence with the number selection button, the "SEL" command button, and the LED shown in FIG.

On the other hand, in FIG. 6, six square “□” are lamps as in FIG. In addition, all four “O” are oscilloscope connection terminals, 43
Each of the vertically elongated “□” is a display capable of displaying numbers, and is, for example, the above-described 7-segment LED.
Note that the four lamps provided in the “ALARM” item and “CLO
All of the four terminals provided for the "CK" item are used for displaying an error in the hardware of the tester device itself or for calibration. Since these are not directly related to the operation of the operating device, the operating device simulator 2 of the present embodiment is not provided with a function corresponding thereto. Therefore, the description of those details is also omitted here.

FIG. 1 is a block diagram showing a configuration of the simulator for a semiconductor test apparatus according to the present embodiment. As shown in the figure, this simulator for semiconductor test equipment
A simulator body 1 for simulating the operation of each tester device shown in FIG. 4, and an operating device simulator 2 for simulating the operation of each operating device shown in FIG.
Are roughly divided into The simulator main body 1 and the operating device simulator 2 are realized by software except for a portion serving as an input / output interface with an operator. Therefore, the simulator for a semiconductor test apparatus can be realized by a general computer such as a workstation, and in some cases, the semiconductor device simulator itself may be mounted on a host computer. Note that the computer mentioned here also includes hardware such as an operating system and peripheral devices.

These computers are connected to a recording medium in which a simulation program for realizing the simulator main unit 1 and the operating device simulator 2 is stored in advance, and a drive unit for allowing these computers to access the recording medium. Alternatively, it is built-in. Recording media include floppy disk, mask ROM
(Read only memory), flash memory, CD-R
OM (compact disk ROM), magneto-optical disk,
Any computer-readable recording medium such as a memory card and a hard disk may be used.

For example, in addition to the above, a network,
A transmission medium or transmission wave that dynamically holds a program for a short time, such as a communication line for transmitting a simulation program via a communication line such as a telephone line, is also included. In that case, a program that holds a program for a certain period of time, such as a volatile memory installed inside a computer, is also included. Also, the simulation program may realize only a part of the functions described in detail below,
For example, only the function of the operating device simulator 2 may be realized. Furthermore, those which can be realized by combining the function with a program already recorded on a computer (difference file, difference program)
And so on.

The simulation program stored on the recording medium is pre-installed on the computer as a program file from the recording medium, and is read into the main memory of the computer when the simulation is actually required. The processor on the computer executes the simulation program. Thus, the simulation program controls the operation of each unit installed inside the computer in accordance with the procedure described in detail below to perform the simulation operation.

In the configuration shown in FIG. 1, the simulator body 1 substitutes for the tester device by simulating the tester device shown in FIG. 4 by software. The executed control software and device program operate on the simulator main body 1 without changing the code. This makes it appear to the control software and device program as if an actual tester device exists. However, since the device under test is not actually mounted on the simulator body 1 and the device under test is not tested, the test results that should be obtained by the test of the device under test include the simulator body PASS / FA preset to 1
The result of the IL determination is output to the operating device simulator 2. In addition, as the simulator body 1, Japanese Patent Application No. 10-368238 (title of the invention: emulation system, filing date: Heisei 1) previously filed by the applicant of the present invention is used.
(December 24, 2000) can be used.

Next, in the operating device simulator 2,
The input processing unit 10 fetches a command input by the operator for the operation device and sends the command to the command analysis processing unit 11. For this purpose, the input processing unit 10 includes input devices used in a general computer such as a keyboard and a mouse, and driver software for the input devices. When a function key (operator) on the keyboard is depressed by the operator, the input processing unit 10 converts the function key into a command assigned to the function key in advance and passes the command to the instruction analysis processing unit 11. ing. Next, the instruction analysis processing unit 11 analyzes an operator's instruction or command given via the input processing unit 10, and performs overall control of each unit provided in the operating device simulator 2 according to the analysis result. The details of the function of the instruction analysis processing unit 11 will be clarified in an operation description described later.

Next, the output processing unit 13 receives the instruction input by the operator from the instruction analysis processing unit 11, displays the instruction as it is, and responds to the operation result such as a test result returned from the simulator body 1 to the operating device simulator 2. Is received via the communication processing unit 13 and displayed. To this end, the output processing unit 13 includes output devices used in a general computer such as a display device and a printer, and driver software for the output devices. In the following, description will be made assuming a display device as an output device constituting the output processing unit 13. Next, the communication processing unit 13 is responsible for transmitting and receiving data between the simulator body 1 and the operating device simulator 2, and is a transmission processing for transmitting various commands and data from the instruction analysis processing unit 11 to the simulator body 1. And a response process for receiving a response such as a test result transmitted from the simulator body 1 and transferring the response to the instruction analysis processing unit 12.

FIG. 2 shows an example of a screen display displayed on the display device of the output processing unit 12. The simulator for a semiconductor test apparatus according to the present embodiment provides an operator with a man-machine interface very similar to a conventional operation apparatus. In the present embodiment, the types of instructions (commands) that can be given to the operation device simulator 2 by the operation of the operator are the same as those of the related art, and there are also a number of commands corresponding to instructions that do not exist in the conventional operation device. Are prepared.

On the other hand, since the operating device simulator 2 of the present embodiment uses a keyboard or the like provided in a computer as an input device, an actual operating device (FIG. 5)
6) cannot be assigned to keys on the keyboard such as function keys. For this reason, the operating device simulator 2 assigns keys on the keyboard to only some of the buttons, and creates commands corresponding to the other buttons as alternatives to button operation. In addition, in this embodiment, since the operation device is realized by a display device provided in a computer, it may be difficult to describe the screen image as exactly the same as the actual operation device. Therefore, in the simulator for a semiconductor test apparatus according to the present embodiment,
The display layout and the like are appropriately changed to conform to the specifications of the display device.

In FIG. 2, the symbol "x" means that some letters or numbers are displayed there. The first line in FIG. 2 is a title display of the simulator for semiconductor test equipment. Next, in the “STATION” item on the second line, a unique station number assigned to the selected station among the stations installed in each tester device is displayed. The station referred to here is composed of a test head for directly mounting and evaluating a device under test, and a manipulator for enabling the test head to be connected to a handler or a prober. Next, in the third line, “PID (Program IDentifie
The item “r)” displays a unique program number (program identifier) assigned to the selected device program among the device programs used for the test.

Next, in the "STATUS" item on the fourth line, a test execution state in the tester device is displayed. The “MULTI” item is a field that is highlighted in the parallel measurement mode in which two or more devices under test are tested in one test. It should be noted that high brightness display may be performed instead of the reverse display, and this is the same for each field described later. The “TEST” item is a field that is highlighted when a test is being performed by the tester device. The “READY” item is a field that is highlighted when another device under test is being tested and the selected device under test is in a test execution waiting state.

The "PAUSE" item is a field which is highlighted when the "PAUSE statement" described in the device program is executed and the tester device is temporarily stopped. The “AUTOPM” item is a field that is highlighted when the result of the self-diagnosis program executed by the tester device is defective. Further, the "ERR" item corresponds to the "ERROR" lamp shown in FIG. 6, and is a field that is highlighted when a fatal system error occurs in the tester device.

Next, in the "RESULT" item on the fifth line, a test result obtained by the test using the tester device is displayed. Of these, “PASS” is a field that is highlighted when the selected device under test is a non-defective device.
"DC" is a field that is highlighted when a defect is found in the device under test in the DC test. "FAIL-FUN"
“C” is a field that is highlighted when a defect is found in the device under test in the function test for the device under test. Here, the DC test is a test of DC operation characteristics at input / output signal terminals / power supply terminals of the device under test.

A function test is a test for confirming whether or not a device under test operates according to a predetermined function specification. The function test is performed by sequentially applying a test pattern to an input terminal of the device under test and an output terminal. Is checked to see if the pattern that appears in the pattern is as expected. Note that the correspondence between the “RESULT” items shown in FIGS. 2 and 5 is shown in FIG. 2, where “PASS”, “FAIL-DC”, and “FAIL-FU”
The fields indicated by “N” are “PAS” shown in FIG.
It corresponds to "S", "DC", and "FUN" lamps, respectively.
Incidentally, in FIG. 5, these lamps are provided for each device to be measured, but in FIG. 2, only the selected device to be measured is displayed on the screen.

Next, the "POSITION" item on the sixth line indicates which statement described in the device program is being executed on the tester device. this house,
The “SEQ” field corresponds to the “SEQUENCE” item in FIG. 6 and is a unique number assigned to each test sequence in the device program. The “LINE” field is a line number on the device program, “TEST”. The field is an item number assigned to each test item, and the combination of these items uniquely identifies the position of the statement on the device program.

Next, the "COUNTER" item on the seventh line is a portion where the accumulated value of the test results is displayed. Of these, "PA
The “SS” field displays the total number of devices under test judged “good”, the “FAIL” item displays the total number of devices under test judged “bad”, and the “TOTAL” item has already been tested. The “PATTERN” item is a field that displays the total number of test patterns that have already been tested.

Next, the “BIN” item on the eighth to ninth lines indicates the test result obtained by testing the device under test by 16 bits.
This is a field for indicating, for each device under test, which of the categories the test results belong to when classified into categories (16 grades), and a display field of "1" to "16" for each device under test. Is displayed in reverse video. Now, for example, when the category is divided into two categories, the “PAS
The test result can be classified into at least 16 types in the tester device used in the present embodiment, in which case the test result is classified into at least 16 types. The highest quality is indicated, "16" indicates the lowest quality, and "2" to "15" indicate stepwise quality between them.

In this case, only two devices to be measured, "DUT1" and "DUT2", are shown.
In FIG. 5, "BIN" items exist for "DUT3" and "DUT4", but these are not shown in FIG. 2 for convenience of explanation. This is shown in FIG.
The same applies to the "T3" and "DUT4" lamps and the "DUT3" and "DUT4" indicators of the "XBIN" item shown in FIG.
Also, “XB” provided in the tenth to eleventh rows of FIG.
The “IN” item is the same as the “BIN” item, and
When there is a category other than the type, a field corresponding to the category is displayed for each device to be measured.

Next, the items [F1] to [F5] on the twelfth line all mean function keys provided on the keyboard. For example, a function key labeled "F1" is pressed. As a result, the toggle operation is performed, and the “FLAG1” item on the thirteenth line changes from reverse display to non-reverse display, or from non-reverse display to reverse display. This realizes a function equivalent to pressing the "FLG1" command button shown in FIG. 5. Here, the items "FLAG1" to "FLAG3" shown in FIG. These correspond to the indicated "FLG1" to "FLG3" command buttons, respectively. In FIG. 2, those corresponding to the "FLG4" command button shown in FIG. 5 are not shown for convenience of explanation.

Each of these flag items corresponds to a flag for changing the flow when a statement in the device program is executed. Each time a function key is pressed, the state of the flag corresponding to each key is changed. Is inverted. More specifically, the device program executed on the tester device changes the internal processing by performing conditional branching with reference to the states of these flags. Next, the “TEST” item corresponds to a command button for instructing the tester device to start a test. Then, "R
The "ESET" item corresponds to a button for instructing the tester device to interrupt the test being executed.

On the other hand, it is shown on the twelfth line in FIG.
Each item of “DUT1” to “FSTOP” corresponds to each command button shown in the related art. For example, the "DUT1" item corresponds to pressing the "DUT1" command button in the conventional technology, and each of these items is highlighted by inputting the command with the same name assigned to each item. Is done. Of these, “DUT1” and “DUT2” are “DUT1” and “DUT1” as devices to be measured.
This field is highlighted when “DUT2” is selected. The "COUNT" item corresponds to a command button for the operator to instruct the count of good / bad devices to be measured. Also, the "CONTIN" item
It corresponds to the "CONTINU" command button shown in FIG. 5, and is used to repeatedly execute a specific statement on the device program by using it together with the "MANUAL" field described below.

In addition, the "MANUAL" item corresponds to a command button for enabling step execution of the device program, the "REPEAT" item corresponds to a command button for repeatedly executing the entire device program, and "LOG""
The item corresponds to a command button for acquiring a test result from the tester device. The "FSTOP" item corresponds to the "FAILSTOP" command button shown in FIG. 5, and is abbreviated as "FSTOP" in FIG. 2 for convenience on the screen display. This item corresponds to a button for temporarily stopping execution of a device program in the tester device when “FAIL” is detected as a test result.
Finally, the “COMMAND” item on the 14th line is a command input field when the operator gives various commands to the operating device simulator 2.

Next, the operation of the simulator for a semiconductor test apparatus having the above configuration will be described with reference to the flowchart shown in FIG. Here, it is assumed that a device program that may be executed by a tester device realized by the simulator main body 1 is loaded in advance from the host computer 22 to the simulator main body 1. First, when the simulator body 1 and the operating device simulator 2 are started on the computer, the instruction analysis processing unit 11 instructs the output processing unit 12 as initialization processing to display the screen image shown in FIG. 2 on the display device. . At the time of this initialization, since all the items such as the “STATION” item are not set, “x” is displayed in each item as shown in FIG.
Fields that may be highlighted are also displayed in a non-inverted state. In addition, all four types of flags (only three types are shown in FIG. 2) are turned off.

Next, the operator operates the keyboard in the input processing unit 10 to specify "STATION" in the command input field of FIG. Command is input (step S1), this command is sent to the instruction analysis processing unit 11 as an instruction for the operating device. The instruction analysis processing unit 11 analyzes the input command (step S
2) Then, it is determined whether or not the instruction is for the simulator body 1 (step S3).

Here, the instruction analysis processing unit 11 has a built-in table in which whether each command is for the simulator body 1 is described in advance, and the instruction analysis processing unit 11 uses the input command as a key. The above determination can be made by searching the table. In this case, the input command relates to the setting of the test condition (the determination result in the step is “NO”).
Therefore, the instruction analysis processing unit 11 internally stores the station number specified by the "STATION" command (step S8), and issues an update instruction to the output processing unit 12.
The display “x” at the present time of the “STATION” item is updated to, for example, “3” (step S9). Note that the instruction analysis processing unit 11 returns the field that is highlighted on the display screen to the non-inverted display corresponding to the command when the execution of the command ends, but this processing is common to each command. Therefore, no further explanation will be given hereafter.

Next, it is assumed that the operator inputs a "PID" command accompanied by a device program number (here, "9") in the same procedure as in the case of the "STATION" command. Since this command is also a command related to the setting of test conditions, steps S1 to S3 similar to the above are performed.
Through the processing of steps S8 and S9, the instruction analysis processing unit 11 stores “9” as the device program number internally and changes the display content of the “PID” item shown in FIG. 2 from “xx” to “09”. Update. Next, it is assumed that the operator inputs a “DUT” command accompanied by the number “2” of the device under test from the command input field in order to select the second device under test as a test target. Then, also in this case, since the input command is related to the setting of the test condition, the instruction analysis processing unit 12 stores “2” as the DUT number and “DUT2” in the twelfth line in FIG. Field is highlighted.

Thereafter, the operator presses the function key "F4" on the keyboard in order to start the test with the tester device corresponding to the operating device to be simulated by the operating device simulator 2. Then, the input processing unit 10 sets this to “TES” corresponding to the key.
The command is converted into a “T” command (see “F4” in FIG. 2) and transmitted to the instruction analysis processing unit 11. In this case, the “TEST” command is a command to be transmitted to the simulator body 1 (the determination result in step S3) Is “YES”), the instruction analysis processing unit 11 reversely displays the “TEST” field (the fourth line in FIG. 2) on the display device, and sets the test conditions set so far (ie, A "TEST" command is transmitted to the simulator body 1 via the communication processing unit 13 together with the station number, the device program number, and the number of the device under test (step S4).

When these commands and test conditions are received, the simulator body 1 executes the device program “2” (that is, the DUT 2) on the station “3” set as the test conditions. 9 "(step S5). After that, since the execution of the device program is completed on the simulator body 1, the simulator body 1 indicates that the test has been completed, and the number of PASS / FAIL of the device under test which is the execution result of the device program / Communicates the total number of devices / total number of test patterns tested, the test sequence number / line number / test item number (in this case, the last executed statement) indicating the statement position on the device program, and the category of the test result The command is transmitted to the instruction analysis processing unit 11 via the processing unit 13 (step S6). The communication between the simulator body 1 and the operating device simulator 2 is always performed by the communication processing unit 1.
3, it is not necessary to describe the fact that the communication is via the communication processing unit 13 in the following description.

Then, the instruction analysis processing unit 11 receiving the above data switches the “TEST” item of FIG. 2 from the reverse display to the non-reverse display by instructing the output processing unit 12 one by one, and the operator completes the test. And RESUL
“PASS” / “FA” corresponding to the test result
“IL-DC” or “FAIL-FUN” is highlighted, and the instruction analysis processing unit 11 sets “SE” in the “POSITION” item.
The place where the content of each item of "Q", "LINE", and "TEST" is "xxxx" is updated according to the test sequence number / line number / test item number notified from the simulator body 1. Further, the instruction analysis processing unit 11 outputs “COUNTE
"P", "FAIL", "TOTAL",
Each item of “PATTERN” is updated with the number of PASS / FAIL / total number of devices under test / total number of test patterns notified from the simulator body 1.

Further, the instruction analysis processing unit 11 performs the “BIN” item or the “XBIN” according to the notified category of the test result.
The items related to the DUT 2 are displayed according to the category. That is, if the notified category is within the range of “1” to “16”, the corresponding category number among the “BIN” items related to the DUT 2 on the ninth line in FIG. 2 is highlighted. Alternatively, if a category outside the above range is notified, the instruction analysis processing unit 11
Updates the contents of the "XBIN" item relating to DUT2 on the eleventh line in FIG. 2 with the notified number (step S
7). As described above, all the operations of the simulator for the semiconductor test apparatus related to one test are completed.

In addition, it is assumed that the operator presses, for example, the function key "F2" among the function keys "F1" to "F3" on the keyboard while simulating the operation of the tester device by the simulator body 1.
Then, the input processing unit 10 determines that the key is pressed by “FLAG2”
And sends it to the instruction analysis processing unit 11. Since this inversion command is a command to be transmitted to the simulator body 1, the command analysis processing unit 11 sends the command to the simulator body 1. As a result, the simulator body 1 reverses the state of “FLAG2” held therein from on to off or from off to on, and thereafter executes the device program according to the changed “FLAG2” state. go.

After the test conditions set for the DUT 2 are set for the DUT 1 in the same manner, an instruction to start the test is given to the operating device simulator 2 so that the device to be measured in the parallel measurement mode in the tester device can be used. Can be simulated. In this case, the operator sets “DUT1” instead of “DUT2” to set the test conditions for DUT1.
A command may be given to the operating device simulator 2. Otherwise, the operation is the same as in the case of DUT2, and the operator uses the “PID” command to perform DU
Test conditions may be set such that a device program different from T2 is executed for DUT1. As described above, the instruction analysis processing unit 11 recognizes that the parallel measurement mode has been set, and the D
The numbers of UT1 and DUT2 are stored internally, and an instruction is given to the output processing unit 12 to highlight the "MULTI" field in the "STATUS" item of FIG.

Thereafter, when the operator presses the function key "F4" and instructs the operation device simulator 2 to start the test, the simulator main body 1 performs the parallel measurement operation using the tester device in the same manner as described above. Is simulated. Then, for example, it is assumed that the execution of the device program related to DUT2 among the DUT1 and DUT2 is completed first. In such a case, the instruction analysis processing unit 11 displays the test result of the DUT 2 sent from the simulator body 1 on the display device in the same manner as described above. The instruction analysis processing unit 11 is in a test execution waiting state for the DUT 2, and
Recognizing that the execution of the device program related to No. 1 has not been completed, the "TEST" field in the "STATUS" item in FIG.
Highlight the "Y" field. After that, when the simulator body 1 completes the execution of the device program related to the DUT1, the instruction analysis processing unit 11 displays the test result and the like related to the DUT1 notified from the simulator body 1 on the display, and also displays “ST” in FIG.
Switch the "READY" field of the "ATUS" item to non-inverted display.

In addition, when the operator debugs a device program, for example, "PAUS
Insert an "E" statement. As a result, when the simulator body 1 executes the statement, the operation device simulator 2 is notified of the suspension.
Therefore, the instruction analysis processing unit 11 highlights the “PAUSE” field in FIG. 2 to notify the operator of the temporary stop state. The operator who sees this issues a "MANUAL" command to start debugging. Then, the instruction analysis processing unit 11 reversely displays the “MANUAL” field in FIG. 2 and sends the command to the simulator body 1. Thus, the simulator body 1 controls the device program to be executed in statement units.

Thereafter, when the operator presses the function key F4 to instruct the start of the test, the instruction analysis processing unit 11 cancels the reverse display of the "PAUSE" field in FIG. Then, the simulator body 1 executes only one statement of the device program and notifies the operating device simulation 2 of the suspension, so that the instruction analysis processing section 11 reversely displays the "PAUSE" field as described above. . In the process of repeating such a series of operations, it is assumed that the operator has issued a “CONTIN” command with a repetition range and the number of repetitions on the device program.

Then, the instruction analysis processing section 11 reversely displays the “CONTIN” field in FIG. 2 and sends the command to the simulator body 1 together with the repetition range and the number of repetitions. As a result, the simulator main body 1 executes the statements in the specified range the specified number of times, then stops the execution of the device program, and returns the temporary stop to the operating device simulator 2. Then, the instruction analysis processing unit 11 reversely displays the “PAUSE” field in the same manner as described above to notify the operator of the temporary stop. If the operator wants to know the test results up to this point, enter the “LOG” command.

As a result, the instruction analysis processing unit 11
The "LOG" field is highlighted, and the command is transmitted to the simulator body 1. As a result,
Since the simulator body 1 returns the test result to the operating device simulator 2 in the same manner as in the case where the device program has been completed normally, the instruction analysis processing unit 11 displays the display according to the same procedure as when the device program has been completed normally. Update the display on the screen. If the operator wants to know the total number of non-defective / defective products up to the present, the operator inputs a “COUNT” command. Then, the instruction analysis processing unit 11 highlights the “COUNT” field in FIG.
Send to As a result, the simulator body 1 returns the number of PASS / FAIL / total number of devices to be measured / total number of test patterns to the operating device simulator 2, so that the instruction analysis processing unit 11 responds to these fields on the screen of the display device. To update. Thus, the operator can proceed with debugging while inputting the various commands described above.

In addition, when the operator wants to repeatedly execute the entire device program, a "REPEAT" command is input. Then, the instruction analysis processing unit 11 reversely displays the “REPEAT” field in FIG. 2 and sends the command to the simulator body 1. Thereafter, when the operator presses the function key "F4" to instruct the start of the test execution and the instruction analysis processing unit 11 notifies the simulator main unit 1, the simulator main unit 1 repeatedly executes the same device program. Thereafter, the operator can press the function key "F5" to stop the execution repeatedly.

Thus, the instruction analysis processing section 11 reversely displays the “RESET” field in FIG. 2 and sends the command to the simulator body 1. Then, the simulator body 1 temporarily suspends the execution of the repeatedly executed device program, and returns the fact to the operation device simulator 2. Thus, the instruction analysis processing unit 11 inverts the “PAUSE” field in FIG. 2 similarly to the above to notify the operator that the execution of the device program has been interrupted. After this, the operator can select "MANUA
The debugging may be performed by inputting an "L" command or the like.

The operator may issue an "FSTOP" command during the repeated execution of the device program to give an instruction to temporarily stop the device program when the test result becomes "FAIL". Thereby, the instruction analysis processing unit 11 reversely displays the “FSTOP” field in FIG. 2 and transmits the command to the simulator body 1. Then, the simulator body 1 monitors the test results one by one while repeatedly executing the device program. When the test result becomes “FAIL”, the simulator main body 1 suspends the execution of the device program and returns the fact to the operation device simulator 2. Therefore, the instruction analysis processing unit 11
Highlight the "PAUSE" field in the, to inform the operator of the suspension of the device program. As a result, the operator can execute the necessary debugging work by inputting the various debugging commands described above.

In addition, when the simulator body 1 finds a fatal error that prevents the execution of the device program from continuing, a response indicating this is returned to the operating device simulator 2. Therefore, in such a case, the instruction analysis processing unit 11 highlights the “ERR” field in FIG. 2 and notifies the operator of this. The simulator body 1 runs the self-diagnosis program on a regular basis, and when an abnormality is found as a result, notifies the operating device simulator 2 of the fact. by this,
The instruction analysis processing unit 11 highlights the “AUTOPM” field in FIG. 2 to notify the operator of the abnormality found in the self-diagnosis program.

As described above, in the present embodiment, the operation of the operating device is simulated on the computer in accordance with the control software and the device program operating on the simulator body 1, and the operation of the operating device is performed in response to the operation of the operator. Simulated one by one on the same computer. This not only simulates the operation of the tester itself, but also enables the setting of test conditions and the display of test results when testing the device under test in the same way as when using the operating device. It becomes possible.
Further, it is possible to provide an operator with an interface and operability very similar to those using an actual operation device. Further, since it is not necessary to maintain and manage the aging real machine, it is possible to continuously carry out the maintenance and management of the control software and the like without the real machine.

[0057]

As described above, according to the present invention, an input command given by an operator is received and analyzed, and it is determined whether the input command is a control command for the tester device or a test condition setting command. Then, the control command and the test condition are respectively transmitted to the simulation means at a predetermined timing, and the simulation means receives a response output by simulating the operation of the tester device in accordance with the transmitted control command and the test condition, and It generates output information to be output on the operation device according to the input command and the response. This makes it possible to realize the operation of the tester device and the operating device constituting the semiconductor test system by software processing using a general computer. Therefore, it is not necessary to maintain and maintain the aging semiconductor test system, and the maintenance of the software operating on the semiconductor test system becomes easy, and the software can be maintained continuously.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a configuration of a simulator for a semiconductor test apparatus according to an embodiment of the present invention.

FIG. 2 is an explanatory diagram showing an example of a screen display displayed on a display device provided in an output processing unit 12 in the embodiment.

FIG. 3 is an operating device simulator 2 according to the embodiment.
6 is a flowchart showing the operation of the first embodiment.

FIG. 4 is a block diagram illustrating a general configuration of a semiconductor test system.

FIG. 5 is a first front view showing an overview of an operation panel provided in an operation device in a conventional semiconductor test system.

FIG. 6 is a second front view showing an overview of the operation panel.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Simulator main body 2 Operating device simulator 10 Input processing unit 11 Instruction analysis processing unit 12 Output processing unit 13 Communication processing unit 20-1 to 20-8 Tester device 21-1 to 21-8 Operating device 22 Host computer

Claims (4)

[Claims] 1. A simulating means for simulating an operation of a tester device for testing a semiconductor in accordance with a given control command and a test condition; an input means for receiving a command given by an operator as an input command; and analyzing the input command. Analyzing means for determining whether the input command is the control command or a test condition setting command in which the test condition is specified; and controlling the control command and the test condition at predetermined timing. Control means for sending to the simulating means and receiving a response to the control command from the simulating means; and outputting to an operating device for operating the tester device in response to the input command and the response from the simulating means. An output processing means for generating output information to be performed. 2. The analysis unit detects a test start instruction to the tester device as the control command, and the control unit includes a storage unit that stores the test condition specified by the test condition setting command. And transmitting the test condition stored in the storage unit to the simulation unit together with the test start instruction on condition that the test start instruction is detected by the analysis unit. Simulator for semiconductor test equipment. 3. The input means includes: a predetermined input device for inputting the input command; and a correspondence between an operator provided on the input device and a command assigned to the operator in advance. Holding means for holding a relationship, detecting that any one of the operators is pressed, and acquiring a command corresponding to the operator from the holding means based on the correspondence on the holding means; 3. A simulator for a semiconductor test apparatus according to claim 1, further comprising: means for transmitting the acquired instruction to said analysis means. 4. An input process for receiving a command given by an operator as an input command, and a tester device for analyzing the input command and executing the semiconductor test in accordance with the given control command and test conditions. An analysis process of determining whether the control command is the test condition setting command specified by the test condition; a transmission process of transmitting the control command and the test condition at predetermined timings respectively; Simulating the operation of the tester device according to the control command and the test condition transmitted by the transmission process,
A simulation process of outputting a response to the control command; a reception process of receiving the response to the control command; and an operation device for operating the tester device according to the response to the input command and the control command. A recording medium on which a simulation program is recorded, which causes a computer to execute an output process for generating output information to be output.